FR2735225B1 - Capteur de position optoelectronique et systeme de compensation pour un tel capteur - Google Patents

Capteur de position optoelectronique et systeme de compensation pour un tel capteur

Info

Publication number
FR2735225B1
FR2735225B1 FR9506902A FR9506902A FR2735225B1 FR 2735225 B1 FR2735225 B1 FR 2735225B1 FR 9506902 A FR9506902 A FR 9506902A FR 9506902 A FR9506902 A FR 9506902A FR 2735225 B1 FR2735225 B1 FR 2735225B1
Authority
FR
France
Prior art keywords
sensor
compensation system
optoelectronic position
position sensor
optoelectronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9506902A
Other languages
English (en)
Other versions
FR2735225A1 (fr
Inventor
Marc Osajda
Arnaud Delpoux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Freescale Semiconducteurs France SAS
Original Assignee
Motorola Semiconducteurs SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Semiconducteurs SA filed Critical Motorola Semiconducteurs SA
Priority to FR9506902A priority Critical patent/FR2735225B1/fr
Priority to US08/656,997 priority patent/US5773820A/en
Priority to EP96108833A priority patent/EP0749003A1/fr
Priority to JP8173022A priority patent/JPH09105645A/ja
Publication of FR2735225A1 publication Critical patent/FR2735225A1/fr
Application granted granted Critical
Publication of FR2735225B1 publication Critical patent/FR2735225B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G01D18/001—Calibrating encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34784—Absolute encoders with analogue or digital scales with only analogue scales or both analogue and incremental scales
FR9506902A 1995-06-12 1995-06-12 Capteur de position optoelectronique et systeme de compensation pour un tel capteur Expired - Fee Related FR2735225B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR9506902A FR2735225B1 (fr) 1995-06-12 1995-06-12 Capteur de position optoelectronique et systeme de compensation pour un tel capteur
US08/656,997 US5773820A (en) 1995-06-12 1996-05-29 Rotary position sensor with reference and grey scales
EP96108833A EP0749003A1 (fr) 1995-06-12 1996-06-03 Capteurs opto-électronique et système de compensation
JP8173022A JPH09105645A (ja) 1995-06-12 1996-06-11 光電子センサおよびその補償システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9506902A FR2735225B1 (fr) 1995-06-12 1995-06-12 Capteur de position optoelectronique et systeme de compensation pour un tel capteur

Publications (2)

Publication Number Publication Date
FR2735225A1 FR2735225A1 (fr) 1996-12-13
FR2735225B1 true FR2735225B1 (fr) 1997-09-05

Family

ID=9479851

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9506902A Expired - Fee Related FR2735225B1 (fr) 1995-06-12 1995-06-12 Capteur de position optoelectronique et systeme de compensation pour un tel capteur

Country Status (4)

Country Link
US (1) US5773820A (fr)
EP (1) EP0749003A1 (fr)
JP (1) JPH09105645A (fr)
FR (1) FR2735225B1 (fr)

Families Citing this family (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5540108A (en) * 1994-02-25 1996-07-30 Advanced Mechanical Technology, Inc. Multi-axis wheel transducer with angular position detector
US5828060A (en) * 1997-03-31 1998-10-27 Honeywell Inc. Apparatus for determining the position of a rotating shaft
US5903000A (en) * 1997-03-31 1999-05-11 Honeywell Inc. Method for determining the position of a rotating shaft
US6538555B2 (en) * 1998-03-13 2003-03-25 Mannesmann Vdo Ag Throttle valve having potentiometer with supporting plate
JPH11351912A (ja) * 1998-06-05 1999-12-24 Yaskawa Electric Corp 光学式エンコーダ
US6177997B1 (en) * 1998-08-19 2001-01-23 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Shaft position optical sensor
US6194709B1 (en) * 1998-10-26 2001-02-27 Eaton Corporation Rotary position sensor/transducer employing rotor having color filtering
DE19951340C2 (de) * 1999-10-25 2002-07-18 Freudenberg Carl Kg Dichtungsanordnung
US6622589B1 (en) 1999-11-19 2003-09-23 Aptek Williams, Inc. Manual control apparatus
US6580352B1 (en) 1999-11-19 2003-06-17 Aptek William, Inc. Manual control apparatus and method
US6594225B1 (en) * 2000-03-01 2003-07-15 Funai Electric Co., Ltd. Disk rotation monitoring mechanism with parallel sensor unit
DE10056605A1 (de) 2000-11-15 2002-05-23 Kostal Leopold Gmbh & Co Kg Verfahren zur Signalauswertung einer optoelektronischen Weg-oder Winkelmeßeinrichtung sowie Verwendung eines solchen Verfahrens
DE10056604A1 (de) * 2000-11-15 2002-05-23 Kostal Leopold Gmbh & Co Kg Verfahren zur Signalauswertung einer optoelektronischen Weg-oder Winkelmeßeinrichtung sowie Verwendung eines solchen Verfahrens
US7354792B2 (en) * 2001-05-25 2008-04-08 President And Fellows Of Harvard College Manufacture of silicon-based devices having disordered sulfur-doped surface layers
US7057256B2 (en) * 2001-05-25 2006-06-06 President & Fellows Of Harvard College Silicon-based visible and near-infrared optoelectric devices
US7390689B2 (en) * 2001-05-25 2008-06-24 President And Fellows Of Harvard College Systems and methods for light absorption and field emission using microstructured silicon
US7442629B2 (en) * 2004-09-24 2008-10-28 President & Fellows Of Harvard College Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate
JP4601439B2 (ja) * 2005-02-01 2010-12-22 株式会社日立ハイテクノロジーズ プラズマ処理装置
US20060187573A1 (en) * 2005-02-24 2006-08-24 Electro-Sensors, Inc. Sensor equipment guard
US8107812B2 (en) * 2005-09-23 2012-01-31 Honeywell International Inc. Dynamic range measurement and calculation of optical keyless entry sensor
WO2007125536A1 (fr) * 2006-04-27 2007-11-08 Vetrivel Prabhu M Lecteur de cadran électronique
JP2008064547A (ja) * 2006-09-06 2008-03-21 Sharp Corp 光学式エンコーダ
EP2240955B1 (fr) * 2008-01-31 2013-08-14 President and Fellows of Harvard College Fabrication de surfaces plates sur des matériaux dopés par rayonnement laser pulsé
US20090219403A1 (en) * 2008-02-29 2009-09-03 Sionyx, Inc. Compact passive low-light imaging apparatus
US8058615B2 (en) * 2008-02-29 2011-11-15 Sionyx, Inc. Wide spectral range hybrid image detector
WO2009111327A2 (fr) * 2008-02-29 2009-09-11 Sionyx, Inc. Capteur de lumière intégré verticalement et matrices
US8212327B2 (en) * 2008-03-06 2012-07-03 Sionyx, Inc. High fill-factor laser-treated semiconductor device on bulk material with single side contact scheme
US7910391B2 (en) 2008-04-17 2011-03-22 Sionyx, Inc. Getter formed by laser-treatment and methods of making same
US20100013036A1 (en) * 2008-07-16 2010-01-21 Carey James E Thin Sacrificial Masking Films for Protecting Semiconductors From Pulsed Laser Process
WO2010019161A1 (fr) * 2008-08-15 2010-02-18 Sionyx, Inc. Détecteur de lumière semi-conducteur à large bande
WO2010028177A1 (fr) * 2008-09-03 2010-03-11 Sionyx, Inc. Photodétecteurs haute sensibilité, réseaux d'imagerie et dispositifs photovoltaïques à rendement élevé fabriqués à l'aide d'une implantation d'ions et d'une irradiation laser femtoseconde
US7968834B2 (en) 2008-09-22 2011-06-28 Sionyx, Inc. Response-enhanced monolithic-hybrid pixel
US20100090347A1 (en) * 2008-10-09 2010-04-15 Saylor Stephen D Apparatus and method for contact formation in semiconductor devices
US7608813B1 (en) 2008-11-18 2009-10-27 Mitutoyo Corporation Scale track configuration for absolute optical encoder including a detector electronics with plurality of track detector portions
US20100147383A1 (en) * 2008-12-17 2010-06-17 Carey James E Method and apparatus for laser-processing a semiconductor photovoltaic apparatus
US7745901B1 (en) * 2009-01-29 2010-06-29 Sionyx, Inc. Highly-depleted laser doped semiconductor volume
US20100210930A1 (en) * 2009-02-13 2010-08-19 Saylor Stephen D Physiological Blood Gas Detection Apparatus and Method
US7928355B2 (en) * 2009-02-25 2011-04-19 Sionyx, Inc. Current subtraction pixel
US20100224229A1 (en) * 2009-03-09 2010-09-09 Pralle Martin U Multi-junction semiconductor photovoltaic apparatus and methods
US8207051B2 (en) * 2009-04-28 2012-06-26 Sionyx, Inc. Semiconductor surface modification
US8094323B2 (en) 2009-06-26 2012-01-10 Mitutoyo Corporation Displacement encoder including phosphor illumination source
US9673243B2 (en) 2009-09-17 2017-06-06 Sionyx, Llc Photosensitive imaging devices and associated methods
EP2478560A4 (fr) * 2009-09-17 2014-06-18 Sionyx Inc Dispositifs d'imagerie photosensibles et procédés associés
US9911781B2 (en) 2009-09-17 2018-03-06 Sionyx, Llc Photosensitive imaging devices and associated methods
US8692198B2 (en) 2010-04-21 2014-04-08 Sionyx, Inc. Photosensitive imaging devices and associated methods
US8309906B2 (en) 2010-06-10 2012-11-13 Mitutoyo Corporation Absolute optical encoder with long range intensity modulation on scale
US20120146172A1 (en) 2010-06-18 2012-06-14 Sionyx, Inc. High Speed Photosensitive Devices and Associated Methods
US9091569B2 (en) 2011-04-19 2015-07-28 Caterpillar Inc. Opacity-based rotary position sensor and method
US20120280127A1 (en) * 2011-05-06 2012-11-08 GM Global Technology Operations LLC Two color spread spectrum optical encoder
US9496308B2 (en) 2011-06-09 2016-11-15 Sionyx, Llc Process module for increasing the response of backside illuminated photosensitive imagers and associated methods
US20130016203A1 (en) 2011-07-13 2013-01-17 Saylor Stephen D Biometric imaging devices and associated methods
US9029757B2 (en) 2011-12-23 2015-05-12 Mitutoyo Corporation Illumination portion for an adaptable resolution optical encoder
US9018578B2 (en) 2011-12-23 2015-04-28 Mitutoyo Corporation Adaptable resolution optical encoder having structured illumination and spatial filtering
US8941052B2 (en) 2011-12-23 2015-01-27 Mitutoyo Corporation Illumination portion for an adaptable resolution optical encoder
US9080899B2 (en) 2011-12-23 2015-07-14 Mitutoyo Corporation Optical displacement encoder having plural scale grating portions with spatial phase offset of scale pitch
US9064764B2 (en) 2012-03-22 2015-06-23 Sionyx, Inc. Pixel isolation elements, devices, and associated methods
JP2014119446A (ja) 2012-12-17 2014-06-30 Mitsutoyo Corp 光学エンコーダ用の照明部
EP2743650B1 (fr) 2012-12-17 2017-05-31 Mitutoyo Corporation Partie d'éclairage pour un codeur optique à résolution adaptable
KR20150130303A (ko) 2013-02-15 2015-11-23 사이오닉스, 아이엔씨. 안티 블루밍 특성 및 관련 방법을 가지는 높은 동적 범위의 cmos 이미지 센서
WO2014151093A1 (fr) 2013-03-15 2014-09-25 Sionyx, Inc. Imagerie tridimensionnelle utilisant des dispositifs imageurs empilés et procédés associés
JP5821109B2 (ja) * 2013-06-17 2015-11-24 株式会社安川電機 エンコーダ付きモータ
WO2014209421A1 (fr) 2013-06-29 2014-12-31 Sionyx, Inc. Régions texturées formées de tranchées peu profondes et procédés associés.
DE102015209716B4 (de) 2014-05-29 2023-04-20 Mitutoyo Corporation Optischer Codierer mit anpassbarer Auflösung
US9267819B2 (en) 2014-06-12 2016-02-23 Mitutoyo Corporation Absolute position encoder scale having plates alternating with varying recesses
US9435663B2 (en) 2014-08-22 2016-09-06 Mitutoyo Corporation Absolute position encoder scale having layers in a stacked configuration
US9612136B1 (en) 2015-09-30 2017-04-04 Mitutoyo Corporation Absolute position encoder including a redundant spatial phase signal
US9958294B2 (en) 2016-06-30 2018-05-01 Mitutoyo Corporation Absolute position encoder including scale with varying spatial characteristic and utilizing Fourier transform or other signal processing
US9772202B1 (en) 2016-07-01 2017-09-26 Mitutoyo Corporation Absolute position encoder combining signals of two widely separated wavelengths
US10422666B2 (en) 2016-12-23 2019-09-24 Mitutoyo Corporation Electronic position encoder and method for reducing short range errors
US10295648B2 (en) 2017-06-29 2019-05-21 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration including a normal of readhead plane at a non-zero pitch angle relative to measuring axis for providing displacement signals
US10648838B2 (en) 2017-06-29 2020-05-12 Mitutoyo Corporation Contamination and defect resistant rotary optical encoder configuration including a rotary scale with yawed scale grating bars and structured illumination generating arrangement with a beam deflector configuration
US10295378B2 (en) 2017-06-29 2019-05-21 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration outputting structured illumination to a scale plane for providing displacement signals
US10302466B2 (en) 2017-06-29 2019-05-28 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration including first and second illumination source diffraction gratings arranged in first and second parallel planes for providing displacement signals
US10168189B1 (en) 2017-06-29 2019-01-01 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration for providing displacement signal having a plurality of spatial phase detectors arranged in a spatial phase sequence along a direction transverse to the measuring axis
US10724877B2 (en) 2017-10-23 2020-07-28 Mitutoyo Corporation Compact pseudorandom scale and read head for an inductive type absolute position encoder
DE102018251727A1 (de) 2017-12-29 2019-07-04 Mitutoyo Corporation Verschmutzungs- und defektbeständige optische Drehpositionsgeberkonfiguration zum Bereitstellen von Verschiebungssignalen
CN207963923U (zh) * 2018-01-17 2018-10-12 歌尔科技有限公司 一种产品性能测试系统
FR3126491B1 (fr) * 2021-09-01 2023-07-21 Codechamp Dispositif de reglage d’un cœur optique a photodetecteurs et procede de reglage

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4109389A (en) * 1976-03-08 1978-08-29 Cetec Corporation Shaft angle transducer
JPS5971598A (ja) * 1982-10-18 1984-04-23 フアナツク株式会社 光学式アブソリユ−トエンコ−ダ
JPS59117915U (ja) * 1983-01-29 1984-08-09 トヨタ自動車株式会社 自動車のステアリングセンサ
JPS608714A (ja) * 1983-06-29 1985-01-17 Tamagawa Seiki Kk 絶対位置検出形光学式シヤフトエンコ−ダ
FR2566896B1 (fr) * 1984-07-02 1988-11-18 Aerospatiale Procede et dispositif pour la determination de la position d'un organe mobile au moyen d'elements a proprietes optiques variables
GB9207271D0 (en) * 1992-04-02 1992-05-13 Sumitomo Rubber Ind Method of detecting a deflated tyre on a vehicle
US5376783A (en) * 1992-09-16 1994-12-27 Ophir Optronics Ltd. Power meter with background subtraction

Also Published As

Publication number Publication date
FR2735225A1 (fr) 1996-12-13
JPH09105645A (ja) 1997-04-22
US5773820A (en) 1998-06-30
EP0749003A1 (fr) 1996-12-18

Similar Documents

Publication Publication Date Title
FR2735225B1 (fr) Capteur de position optoelectronique et systeme de compensation pour un tel capteur
DK0762143T3 (da) Chromatisk optisk afstandsføler
GB2256477B (en) An optical sensor
GB2254415B (en) An optical sensor
AU3754593A (en) Location scale and optical reading sensor for reading said location scale
GB9500943D0 (en) Optical position sensing system
GB9102903D0 (en) An optical sensor
DE69525535T2 (de) Adaptiver optischer Sensor
GB2303964B (en) Photoelectric sensor having a light guide built-in
EP0861519A4 (fr) Detection de vitesse d'un volant-moteur pour moteur de systeme d'alimentation de secours
GB9520791D0 (en) Image sensor
DE59401139D1 (de) Optoelektronische Sensoreinrichtung
DE69311653T2 (de) Optisches Sensorsystem
DE59401138D1 (de) Optoelektronische Sensoreinrichtung
GB9026661D0 (en) Optical image sensing system
US5687635A (en) Opto-electronic level sensor
EP0505581A4 (en) Covering material for optical-fiber sensor for detecting leakage oil
FR2700661B1 (fr) Dispositif de détection de corps étrangers pour une moissonneuse.
PT609759E (pt) Aparelho de fixacao de um sinal
GB2342502B (en) Photoelectric sensor having a light guide built-in
FR2694083B1 (fr) Boîtier de protection et de référence pour capteur de mesure.
GB2283567B (en) Optical sensor device
FR2723783B1 (fr) Systeme a capteurs integres pour proceder a des mesures souterraines.
GB9214758D0 (en) An optical sensor
GB9517816D0 (en) Optical position sensor

Legal Events

Date Code Title Description
ST Notification of lapse