JP4601439B2 - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
- Publication number
- JP4601439B2 JP4601439B2 JP2005025333A JP2005025333A JP4601439B2 JP 4601439 B2 JP4601439 B2 JP 4601439B2 JP 2005025333 A JP2005025333 A JP 2005025333A JP 2005025333 A JP2005025333 A JP 2005025333A JP 4601439 B2 JP4601439 B2 JP 4601439B2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- processing
- distribution
- monitor
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
- H01J2237/3341—Reactive etching
Description
(Max(Ri)−Min(Ri))/(Max(Ri)+Min(Ri))*100 (%),i=1,2・・
で表される量である。Riはウエハ上でのある測定個所i点における処理速度を示している。
直径300mmのウエハを処理できるプラズマ処理装置を用いて得た様々な条件における全処理結果266件のうち、中心部と外周部の2点データの均一性が±5%以下であったものは74件であった。この中で、ウエハ面内での処理均一性が±5%以下であったものは38件であった。一方、中心、中間部、外周部の3点データの均一性が±5%以下であったものは47件であった。
2 ウエハ載置用ステージ
3 ウエハ
4 フォーカスリング
5 ヨーク
6 コイル
7 アンテナ
8 ガス分散板
9 シャワープレート
10 ガス導入手段
11 第一の高周波電源
12 第一の整合器
13 第二の高周波電源
14 第二の整合器
15 フィルタユニット
16 第三の高周波電源
17 第三の整合器
18 温調装置
19 アンテナ外周絶縁リング
20 蓋部
21 第一の直流電源
22 第二の直流電源
30 モニタ部
31 光ファイバ
32 検出部
33 制御部
34 側面モニタ部
35 金属パイプ
36 石英窓
Claims (2)
- 減圧可能な処理容器と、
処理容器内に試料を載置するステージと、
処理容器のステージに対向する面側にステージと平行に配置した略円形のアンテナ電極と、
処理室内に処理ガスを導入するガス導入手段と、
処理容器内に磁場を形成し、形成した磁場とアンテナ電極から放射される電磁波との相互作用により処理容器内にプラズマを生成する外部コイルと、
前記アンテナ電極の半径方向の少なくとも異なる3点におけるプラズマの発光強度をモニタする発光モニタと、
外部コイルに供給する励磁電流を調整する制御部を備え、
前記発光モニタは、生成されたプラズマの中央部、側縁部及びこれらの中間部の少なくとも異なる3方向に指向性を有するように処理容器外に配置し、前記制御部は、発光モニタのモニタ結果をもとに外部コイルに供給する励磁電流を調整して、プラズマの発光強度を均一に制御することを特徴とするプラズマ処理装置。 - 請求項1記載のプラズマ処理装置において、
前記発光モニタは、各方向におけるプラズマ発光のモニタ値をもとに、前記アンテナ電極の半径方向の少なくとも異なる3点におけるプラズマの発光強度を演算することを特徴とするプラズマ処理装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005025333A JP4601439B2 (ja) | 2005-02-01 | 2005-02-01 | プラズマ処理装置 |
US11/065,078 US20060169410A1 (en) | 2005-02-01 | 2005-02-25 | Plasma processing apparatus capable of controlling plasma emission intensity |
US12/105,018 US7658815B2 (en) | 2005-02-01 | 2008-04-17 | Plasma processing apparatus capable of controlling plasma emission intensity |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005025333A JP4601439B2 (ja) | 2005-02-01 | 2005-02-01 | プラズマ処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006216605A JP2006216605A (ja) | 2006-08-17 |
JP4601439B2 true JP4601439B2 (ja) | 2010-12-22 |
Family
ID=36755259
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005025333A Expired - Fee Related JP4601439B2 (ja) | 2005-02-01 | 2005-02-01 | プラズマ処理装置 |
Country Status (2)
Country | Link |
---|---|
US (2) | US20060169410A1 (ja) |
JP (1) | JP4601439B2 (ja) |
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Also Published As
Publication number | Publication date |
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US20060169410A1 (en) | 2006-08-03 |
JP2006216605A (ja) | 2006-08-17 |
US20080210376A1 (en) | 2008-09-04 |
US7658815B2 (en) | 2010-02-09 |
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