KR100498847B1 - 유기el소자의제조방법,유기el소자및유기el표시장치 - Google Patents
유기el소자의제조방법,유기el소자및유기el표시장치 Download PDFInfo
- Publication number
- KR100498847B1 KR100498847B1 KR10-1998-0705629A KR19980705629A KR100498847B1 KR 100498847 B1 KR100498847 B1 KR 100498847B1 KR 19980705629 A KR19980705629 A KR 19980705629A KR 100498847 B1 KR100498847 B1 KR 100498847B1
- Authority
- KR
- South Korea
- Prior art keywords
- organic
- light emitting
- emitting layer
- manufacturing
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8426—Peripheral sealing arrangements, e.g. adhesives, sealants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/873—Encapsulations
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2323/00—Functional layers of liquid crystal optical display excluding electroactive liquid crystal layer characterised by chemical composition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/86—Arrangements for improving contrast, e.g. preventing reflection of ambient light
- H10K50/865—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. light-blocking layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/17—Passive-matrix OLED displays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/17—Passive-matrix OLED displays
- H10K59/173—Passive-matrix OLED displays comprising banks or shadow masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
- H10K59/353—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels characterised by the geometrical arrangement of the RGB subpixels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/871—Self-supporting sealing arrangements
- H10K59/8722—Peripheral sealing arrangements, e.g. adhesives, sealants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/8791—Arrangements for improving contrast, e.g. preventing reflection of ambient light
- H10K59/8792—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. black layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/917—Electroluminescent
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24851—Intermediate layer is discontinuous or differential
- Y10T428/24868—Translucent outer layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31855—Of addition polymer from unsaturated monomers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Luminescent Compositions (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8-313828 | 1996-11-25 | ||
| JP31382896A JP3899566B2 (ja) | 1996-11-25 | 1996-11-25 | 有機el表示装置の製造方法 |
Related Child Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-2004-7011648A Division KR100498852B1 (ko) | 1996-11-25 | 1997-11-25 | 유기 el 소자의 제조 방법 |
| KR10-2004-7011649A Division KR100495744B1 (ko) | 1996-11-25 | 1997-11-25 | 유기 el 소자의 제조 방법 및 유기 el 소자 |
| KR10-2004-7011651A Division KR100493131B1 (ko) | 1996-11-25 | 1997-11-25 | 유기 el 소자 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR19990081916A KR19990081916A (ko) | 1999-11-15 |
| KR100498847B1 true KR100498847B1 (ko) | 2005-10-04 |
Family
ID=18046006
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-1998-0705629A Expired - Lifetime KR100498847B1 (ko) | 1996-11-25 | 1997-11-25 | 유기el소자의제조방법,유기el소자및유기el표시장치 |
| KR10-2004-7011651A Expired - Lifetime KR100493131B1 (ko) | 1996-11-25 | 1997-11-25 | 유기 el 소자 |
| KR10-2004-7011649A Expired - Lifetime KR100495744B1 (ko) | 1996-11-25 | 1997-11-25 | 유기 el 소자의 제조 방법 및 유기 el 소자 |
| KR10-2004-7011648A Expired - Lifetime KR100498852B1 (ko) | 1996-11-25 | 1997-11-25 | 유기 el 소자의 제조 방법 |
Family Applications After (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-2004-7011651A Expired - Lifetime KR100493131B1 (ko) | 1996-11-25 | 1997-11-25 | 유기 el 소자 |
| KR10-2004-7011649A Expired - Lifetime KR100495744B1 (ko) | 1996-11-25 | 1997-11-25 | 유기 el 소자의 제조 방법 및 유기 el 소자 |
| KR10-2004-7011648A Expired - Lifetime KR100498852B1 (ko) | 1996-11-25 | 1997-11-25 | 유기 el 소자의 제조 방법 |
Country Status (8)
| Country | Link |
|---|---|
| US (7) | US6863961B2 (enExample) |
| EP (4) | EP1376716B1 (enExample) |
| JP (1) | JP3899566B2 (enExample) |
| KR (4) | KR100498847B1 (enExample) |
| CN (5) | CN1905157A (enExample) |
| DE (2) | DE69736494T2 (enExample) |
| TW (1) | TW553579U (enExample) |
| WO (1) | WO1998024271A1 (enExample) |
Families Citing this family (493)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3725169B2 (ja) * | 1996-05-15 | 2005-12-07 | セイコーエプソン株式会社 | 塗布膜を有する薄膜デバイスの製造方法 |
| JP3899566B2 (ja) * | 1996-11-25 | 2007-03-28 | セイコーエプソン株式会社 | 有機el表示装置の製造方法 |
| TW578130B (en) | 1997-02-17 | 2004-03-01 | Seiko Epson Corp | Display unit |
| US6462722B1 (en) | 1997-02-17 | 2002-10-08 | Seiko Epson Corporation | Current-driven light-emitting display apparatus and method of producing the same |
| JP3520396B2 (ja) | 1997-07-02 | 2004-04-19 | セイコーエプソン株式会社 | アクティブマトリクス基板と表示装置 |
| JP3541625B2 (ja) * | 1997-07-02 | 2004-07-14 | セイコーエプソン株式会社 | 表示装置及びアクティブマトリクス基板 |
| US6843937B1 (en) * | 1997-07-16 | 2005-01-18 | Seiko Epson Corporation | Composition for an organic EL element and method of manufacturing the organic EL element |
| GB9715907D0 (en) | 1997-07-29 | 1997-10-01 | Cambridge Consultants | Electroluminescent device production process |
| WO1999010862A1 (en) * | 1997-08-21 | 1999-03-04 | Seiko Epson Corporation | Active matrix display |
| JP3830238B2 (ja) | 1997-08-29 | 2006-10-04 | セイコーエプソン株式会社 | アクティブマトリクス型装置 |
| GB9718516D0 (en) | 1997-09-01 | 1997-11-05 | Cambridge Display Tech Ltd | Methods of Increasing the Efficiency of Organic Electroluminescent Devices |
| JP3633229B2 (ja) * | 1997-09-01 | 2005-03-30 | セイコーエプソン株式会社 | 発光素子の製造方法および多色表示装置の製造方法 |
| EP0982974B1 (en) * | 1997-09-02 | 2006-05-03 | Seiko Epson Corporation | Organic el element manufacturing process |
| CH692682A5 (de) * | 1997-10-06 | 2002-09-13 | Enz Electronic Ag | Anzeigeeinrichtung. |
| CA2306384A1 (en) | 1997-10-14 | 1999-04-22 | Patterning Technologies Limited | Method of forming an electronic device |
| GB2376565B (en) * | 1997-10-14 | 2003-02-05 | Patterning Technologies Ltd | Method of forming an electronic device |
| JP3206646B2 (ja) * | 1998-01-22 | 2001-09-10 | 日本電気株式会社 | 多色発光有機elパネルおよびその製造方法 |
| GB9803763D0 (en) * | 1998-02-23 | 1998-04-15 | Cambridge Display Tech Ltd | Display devices |
| DE69939514D1 (de) | 1998-03-17 | 2008-10-23 | Seiko Epson Corp | Verfahren zur herstellung einer strukturierten dünnschichtvorrichtung |
| JP3646510B2 (ja) * | 1998-03-18 | 2005-05-11 | セイコーエプソン株式会社 | 薄膜形成方法、表示装置およびカラーフィルタ |
| US7090890B1 (en) | 1998-04-13 | 2006-08-15 | The Trustees Of Princeton University | Modification of polymer optoelectronic properties after film formation by impurity addition or removal |
| GB9813326D0 (en) | 1998-06-19 | 1998-08-19 | Cambridge Display Tech Ltd | Backlit displays |
| JP3692844B2 (ja) | 1998-07-24 | 2005-09-07 | セイコーエプソン株式会社 | 電界発光素子、及び電子機器 |
| US6437769B1 (en) | 1998-07-24 | 2002-08-20 | Seiko Epson Corporation | Display apparatus |
| JP4258860B2 (ja) | 1998-09-04 | 2009-04-30 | セイコーエプソン株式会社 | 光伝達手段を備えた装置 |
| DE69922922T2 (de) | 1998-09-17 | 2005-05-19 | Seiko Epson Corp. | Verfahren zur herstellung einer elektrolumineszensvorrichtung |
| JP2000227771A (ja) | 1998-12-01 | 2000-08-15 | Sanyo Electric Co Ltd | カラーel表示装置 |
| JP2000227770A (ja) | 1998-12-01 | 2000-08-15 | Sanyo Electric Co Ltd | カラーel表示装置 |
| JP2000228284A (ja) * | 1998-12-01 | 2000-08-15 | Sanyo Electric Co Ltd | カラーel表示装置 |
| EP1074054A2 (en) | 1998-12-17 | 2001-02-07 | Seiko Epson Corporation | Light-emitting device |
| US6066357A (en) * | 1998-12-21 | 2000-05-23 | Eastman Kodak Company | Methods of making a full-color organic light-emitting display |
| JP3900724B2 (ja) * | 1999-01-11 | 2007-04-04 | セイコーエプソン株式会社 | 有機el素子の製造方法および有機el表示装置 |
| GB2347015A (en) * | 1999-02-19 | 2000-08-23 | Cambridge Display Tech Ltd | Organic electroluminescent displays |
| US6366025B1 (en) | 1999-02-26 | 2002-04-02 | Sanyo Electric Co., Ltd. | Electroluminescence display apparatus |
| US7821065B2 (en) | 1999-03-02 | 2010-10-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a thin film transistor comprising a semiconductor thin film and method of manufacturing the same |
| JP2000277260A (ja) | 1999-03-23 | 2000-10-06 | Seiko Epson Corp | 発光装置 |
| CN1310930A (zh) | 1999-03-29 | 2001-08-29 | 精工爱普生株式会社 | 组合物及膜的制造方法以及功能元件及其制造方法 |
| US6512504B1 (en) * | 1999-04-27 | 2003-01-28 | Semiconductor Energy Laborayory Co., Ltd. | Electronic device and electronic apparatus |
| JP2000323276A (ja) * | 1999-05-14 | 2000-11-24 | Seiko Epson Corp | 有機el素子の製造方法、有機el素子およびインク組成物 |
| GB2351840A (en) | 1999-06-02 | 2001-01-10 | Seiko Epson Corp | Multicolour light emitting devices. |
| TWI232595B (en) * | 1999-06-04 | 2005-05-11 | Semiconductor Energy Lab | Electroluminescence display device and electronic device |
| US7288420B1 (en) | 1999-06-04 | 2007-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing an electro-optical device |
| US8853696B1 (en) * | 1999-06-04 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and electronic device |
| US6878297B1 (en) | 1999-06-09 | 2005-04-12 | Cambridge Display Technology, Limited | Method of producing organic light-emissive devices |
| DE60041532D1 (de) | 1999-06-10 | 2009-03-26 | Seiko Epson Corp | Licht emittierende vorrichtung |
| TW512543B (en) * | 1999-06-28 | 2002-12-01 | Semiconductor Energy Lab | Method of manufacturing an electro-optical device |
| TW556357B (en) * | 1999-06-28 | 2003-10-01 | Semiconductor Energy Lab | Method of manufacturing an electro-optical device |
| TW504941B (en) * | 1999-07-23 | 2002-10-01 | Semiconductor Energy Lab | Method of fabricating an EL display device, and apparatus for forming a thin film |
| US7014521B1 (en) | 1999-08-05 | 2006-03-21 | Canon Kabushiki Kaisha | Display panel having a color filter and a protective layer of heat melted material and method of manufacturing the display panel |
| JP4226159B2 (ja) | 1999-08-06 | 2009-02-18 | シャープ株式会社 | 有機ledディスプレイの製造方法 |
| KR20020066321A (ko) * | 1999-09-03 | 2002-08-14 | 듀폰 디스플레이즈, 인크. | 유기 전자 장치의 캡슐 밀봉 |
| JP2001092413A (ja) * | 1999-09-24 | 2001-04-06 | Semiconductor Energy Lab Co Ltd | El表示装置および電子装置 |
| TW468283B (en) | 1999-10-12 | 2001-12-11 | Semiconductor Energy Lab | EL display device and a method of manufacturing the same |
| TW480722B (en) * | 1999-10-12 | 2002-03-21 | Semiconductor Energy Lab | Manufacturing method of electro-optical device |
| JP4854840B2 (ja) * | 1999-10-12 | 2012-01-18 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| TW471011B (en) | 1999-10-13 | 2002-01-01 | Semiconductor Energy Lab | Thin film forming apparatus |
| JP2001196162A (ja) | 1999-10-25 | 2001-07-19 | Seiko Epson Corp | 発光装置 |
| US6587086B1 (en) | 1999-10-26 | 2003-07-01 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device |
| JP4590663B2 (ja) | 1999-10-29 | 2010-12-01 | セイコーエプソン株式会社 | カラーフィルタの製造方法 |
| KR100720066B1 (ko) * | 1999-11-09 | 2007-05-18 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광장치 제작방법 |
| JP2003530660A (ja) | 1999-11-29 | 2003-10-14 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 有機エレクトロルミネッセント装置及びその製造方法 |
| CN1187846C (zh) * | 1999-11-29 | 2005-02-02 | 皇家菲利浦电子有限公司 | 有机电致发光器件及其制造方法 |
| JP4477726B2 (ja) * | 1999-12-09 | 2010-06-09 | シャープ株式会社 | 有機led素子の製造方法 |
| US6899961B2 (en) * | 1999-12-15 | 2005-05-31 | Samsung Sdi Co., Ltd. | Organic electroluminescence device |
| EP1122793A2 (en) * | 2000-02-01 | 2001-08-08 | Canon Kabushiki Kaisha | Production of organic luminescence device |
| TW495808B (en) | 2000-02-04 | 2002-07-21 | Semiconductor Energy Lab | Thin film formation apparatus and method of manufacturing self-light-emitting device using thin film formation apparatus |
| US6869635B2 (en) * | 2000-02-25 | 2005-03-22 | Seiko Epson Corporation | Organic electroluminescence device and manufacturing method therefor |
| TW495809B (en) | 2000-02-28 | 2002-07-21 | Semiconductor Energy Lab | Thin film forming device, thin film forming method, and self-light emitting device |
| JP2001244066A (ja) | 2000-03-01 | 2001-09-07 | Seiko Epson Corp | 発光装置 |
| TW495812B (en) | 2000-03-06 | 2002-07-21 | Semiconductor Energy Lab | Thin film forming device, method of forming a thin film, and self-light-emitting device |
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