JPH09312260A5 - - Google Patents

Info

Publication number
JPH09312260A5
JPH09312260A5 JP1996335152A JP33515296A JPH09312260A5 JP H09312260 A5 JPH09312260 A5 JP H09312260A5 JP 1996335152 A JP1996335152 A JP 1996335152A JP 33515296 A JP33515296 A JP 33515296A JP H09312260 A5 JPH09312260 A5 JP H09312260A5
Authority
JP
Japan
Prior art keywords
film
semiconductor device
oxide film
crystalline silicon
silicon film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996335152A
Other languages
English (en)
Japanese (ja)
Other versions
JP3729955B2 (ja
JPH09312260A (ja
Filing date
Publication date
Priority claimed from JP33515296A external-priority patent/JP3729955B2/ja
Priority to JP33515296A priority Critical patent/JP3729955B2/ja
Application filed filed Critical
Priority to TW085116281A priority patent/TW336327B/zh
Priority to US08/785,489 priority patent/US6077731A/en
Priority to CNB971095159A priority patent/CN1160758C/zh
Priority to CN2004100489599A priority patent/CN1630024B/zh
Priority to KR1019970001415A priority patent/KR100419550B1/ko
Publication of JPH09312260A publication Critical patent/JPH09312260A/ja
Priority to US09/536,801 priority patent/US6504174B1/en
Priority to US09/536,792 priority patent/US6528358B1/en
Priority to US10/288,516 priority patent/US7456056B2/en
Publication of JPH09312260A5 publication Critical patent/JPH09312260A5/ja
Publication of JP3729955B2 publication Critical patent/JP3729955B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP33515296A 1996-01-19 1996-11-29 半導体装置の作製方法 Expired - Fee Related JP3729955B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP33515296A JP3729955B2 (ja) 1996-01-19 1996-11-29 半導体装置の作製方法
TW085116281A TW336327B (en) 1996-02-20 1996-12-30 Semiconductor device and the manufacturing method
US08/785,489 US6077731A (en) 1996-01-19 1997-01-17 Semiconductor device and method for fabricating the same
CNB971095159A CN1160758C (zh) 1996-01-19 1997-01-19 半导体器件及其制造方法
CN2004100489599A CN1630024B (zh) 1996-01-19 1997-01-19 半导体器件及其制造方法
KR1019970001415A KR100419550B1 (ko) 1996-01-19 1997-01-20 반도체장치및그제작방법
US09/536,801 US6504174B1 (en) 1996-01-19 2000-03-28 Semiconductor device and method for fabricating the same
US09/536,792 US6528358B1 (en) 1996-01-19 2000-03-28 Semiconductor device and method for fabricating the same
US10/288,516 US7456056B2 (en) 1996-01-19 2002-11-06 Semiconductor device and method for fabricating the same

Applications Claiming Priority (15)

Application Number Priority Date Filing Date Title
JP2621096 1996-01-19
JP2603796 1996-01-20
JP3287596 1996-01-26
JP3287496 1996-01-26
JP8-32874 1996-01-26
JP8-32875 1996-01-26
JP3298196 1996-01-27
JP5833496 1996-02-20
JP8875996 1996-03-17
JP8-58334 1996-03-17
JP8-88759 1996-03-17
JP8-32981 1996-03-17
JP8-26037 1996-03-17
JP8-26210 1996-03-17
JP33515296A JP3729955B2 (ja) 1996-01-19 1996-11-29 半導体装置の作製方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2003404712A Division JP4286644B2 (ja) 1996-01-19 2003-12-03 半導体装置の作製方法
JP2003404713A Division JP4286645B2 (ja) 1996-01-19 2003-12-03 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JPH09312260A JPH09312260A (ja) 1997-12-02
JPH09312260A5 true JPH09312260A5 (enExample) 2004-11-18
JP3729955B2 JP3729955B2 (ja) 2005-12-21

Family

ID=27572023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33515296A Expired - Fee Related JP3729955B2 (ja) 1996-01-19 1996-11-29 半導体装置の作製方法

Country Status (4)

Country Link
US (4) US6077731A (enExample)
JP (1) JP3729955B2 (enExample)
KR (1) KR100419550B1 (enExample)
CN (2) CN1160758C (enExample)

Families Citing this family (144)

* Cited by examiner, † Cited by third party
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