TW336327B - Semiconductor device and the manufacturing method - Google Patents

Semiconductor device and the manufacturing method

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Publication number
TW336327B
TW336327B TW085116281A TW85116281A TW336327B TW 336327 B TW336327 B TW 336327B TW 085116281 A TW085116281 A TW 085116281A TW 85116281 A TW85116281 A TW 85116281A TW 336327 B TW336327 B TW 336327B
Authority
TW
Taiwan
Prior art keywords
film
removal
semiconductor device
silicon film
thermal
Prior art date
Application number
TW085116281A
Other languages
Chinese (zh)
Inventor
Shunpei Yamazaki
Satoshi Teramoto
Jun Oyama
Yasushi Ogata
Masahiko Hayakawa
Mitsuaki Osame
Hisashi Ohtani
Original Assignee
Seiconductor Energy Lab Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP33515296A external-priority patent/JP3729955B2/en
Application filed by Seiconductor Energy Lab Kk filed Critical Seiconductor Energy Lab Kk
Application granted granted Critical
Publication of TW336327B publication Critical patent/TW336327B/en

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Abstract

A semiconductor device manufacturing method, having: metal element being introduced onto non-crystal silicon film for upgrading of crystallized silicon, through the first heating process for crystallization of the non-crystal silicon film for crystallized silicon film, and the second heating process in oxidized air, for removal or reduction of said metal element in said crystallized silicon film, and removal of the thermal oxidized film formed in said work, and removal of the thermal oxidized film by further thermal oxidization from the surface of the thermal oxidized film.
TW085116281A 1996-02-20 1996-12-30 Semiconductor device and the manufacturing method TW336327B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP5833496 1996-02-20
JP8875996 1996-03-17
JP33515296A JP3729955B2 (en) 1996-01-19 1996-11-29 Method for manufacturing semiconductor device

Publications (1)

Publication Number Publication Date
TW336327B true TW336327B (en) 1998-07-11

Family

ID=58263126

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085116281A TW336327B (en) 1996-02-20 1996-12-30 Semiconductor device and the manufacturing method

Country Status (1)

Country Link
TW (1) TW336327B (en)

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GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees