TWI715002B - 用於電漿控制的具有間隙的兩件式電極組件 - Google Patents
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Abstract
本案提供一種用於分配電漿產物的設備,設備包括第一及第二電極,每一電極包括平坦表面。第一電極形成從第一平坦表面到第二平坦表面的第一孔隙,而第二電極形成從第三平坦表面到第四平坦表面的第二孔隙。電極係透過一或更多個可調整的耦接器而耦接,使得第三平坦表面與第二平坦表面相鄰設置成具有間隙,而間隙具有間隙距離。可調整的耦接器中之每一者都具有調整範圍。針對調整範圍內的至少一個位置,第一及第二孔隙經佈置使得第一孔隙中之任一者並未與第二孔隙中之任一者對準,而並未形成延伸通過第一及第二電極兩者的開放直線路徑,且間隙距離係在0.005英寸與0.050英寸之間。
Description
本揭示係關於電漿處理系統。
在電漿處理中,電漿從源氣體產生物質,例如,自由基、經激發的分子物質、分子碎片、獨立原子、及/或自由電子。具有或者不具有源氣體的未轉換部分以及具有或者不具有混入的另外的氣體的這種物質的混合物在本文中係指稱為「電漿產物」。電漿處理讓電漿產物與工件接觸,工件可以是例如半導體晶圓。為了產生及/或維持電漿,一或更多個射頻(RF)及/或微波產生器通常向包含源氣體的區域提供電磁功率。可以在所處理的一或更多個晶圓的位置處及/或在第一「上游」位置處從源氣體產生電漿,隨後電漿產物移動到第二「下游」位置以接觸晶圓。在電漿產物最終接觸晶圓之前,一些系統在不同位置處產生一種、兩種、或更多種電漿。源氣體、電漿產物、及/或與電漿產物混合的其他氣體通常包含高能量、帶電、及/或腐蝕性物質,及/或高能量電子,使得電漿裝備有時會因為與這些材料接觸而劣化。此舉可能讓電漿系統部件的材料及/或塗層對於系統的壽命及維護要求變得更關鍵。晶圓處理亦可能受到影響,並因此受到電漿產品的某些成分的相對存在或不存在的控制。
在一或更多個實施例中,一種用於分配電漿產品的設備包括第一電極及第二電極。第一電極包括第一平坦表面與第二平坦表面,第一平坦表面與第二平坦表面係藉由第一電極厚度分開,第一電極厚度係在0.125英寸與1.000英寸之間。第一電極形成從第一平坦表面延伸通過到第二平坦表面的複數個第一孔隙。第二電極包括第三平坦表面與第四平坦表面,第三平坦表面與第四平坦表面係藉由第二電極厚度分開,第二電極厚度係在0.125英寸與1.000英寸之間。第二電極形成從第三平坦表面延伸通過到第四平坦表面的複數個第二孔隙。第二電極透過一或更多個可調整的耦接器與第一電極耦接,使得第三平坦表面與第二平坦表面相鄰設置成具有間隙,間隙的特徵係在於具有間隙距離。一或更多個可調整的耦接器中之每一者都具有調整範圍。針對一或更多個可調整的耦接器中之每一者的調整範圍內的至少第一位置,第一及第二孔隙係佈置於第一及第二電極內,使得第一孔隙中之任一者並未與第二孔隙中之任一者對準,而並未形成延伸通過第一及第二電極兩者的開放直線路徑,且間隙距離係在0.005英寸與0.050英寸之間。
在一或更多個實施例中,一種用於分配電漿產品的設備包括第一電極及第二電極。第一電極包括第一平坦表面與第二平坦表面,第一平坦表面與第二平坦表面係藉由第一電極厚度分開,第一電極厚度係在0.125英寸與1.000英寸之間。第一電極形成從第一平坦表面延伸通過到第二平坦表面的複數個第一孔隙。第二電極包括第三平坦表面與第四平坦表面,第三平坦表面與第四平坦表面係藉由第二電極厚度分開,第二電極厚度係在0.125英寸與1.000英寸之間。第二電極係與第一電極固定耦接,使得第三平坦表面與第二平坦表面相鄰設置成具有0.005英寸至0.050英寸的間隙距離。第一及第二孔隙係佈置於第一及第二電極內,使得第一孔隙中之任一者並未與第二孔隙中之任一者對準,而並未形成延伸通過第一及第二電極兩者的開放直線路徑。
在一或更多個實施例中,電漿源包括經配置以用於在其中引入一或更多種源氣體的電漿產生區域、用於向一或更多種源氣體提供電磁功率以激發電漿產生區域內的電漿的RF功率供應器、及用於在一側界定電漿產生區域的兩件式電極組件。兩件式電極組件包括定義第一平坦表面與第二平坦表面的第一電極。第一平坦表面與第二平坦表面係藉由第一電極厚度分開,第一電極厚度係在0.100英寸與1.000英寸之間,而第一電極形成從第一平坦表面延伸通過到第二平坦表面的複數個第一孔隙。兩件式電極組件亦包括定義第三平坦表面與第四平坦表面的第二電極。第三平坦表面與第四平坦表面係藉由第二電極厚度分開,第二電極厚度係在0.100英寸與1.000英寸之間,而第二電極形成從第三平坦表面延伸通過到第四平坦表面的複數個第二孔隙。第一電極與第二電極相對於彼此固定或定位,以在第一電極與第二電極之間提供間隙,該間隙在第二平坦表面與第三平坦表面之間形成0.005英寸至0.050英寸的間隙距離,而第一孔隙中之一者內的任一點相對於第二孔隙中之任一者內的任一點的橫向間隔係大於間隙距離的三倍。電漿源進一步包括第二區域,該第二區域在至少一側上藉由第二電極的第四平坦表面界定,其中間隙與橫向分隔協作以基本上減少自由電子及離子化物質從電漿產生區域傳輸到第二區域。
在一或更多個實施例中,一種用於提供電漿產物的方法包括以下步驟:藉由向電漿產生腔室內的源氣體提供電磁功率以產生電漿來將源氣體的至少一部分轉換成電漿產物,以及讓電漿產物的至少一部分通過兩件式電極組件。兩件式電極組件包括第一電極與第二電極。第一電極定義通過其中的複數個第一孔隙,第一電極的第一側面向電漿,使得電漿產物的一部分通過複數個第一孔隙,而到達第一平坦電極的第二平坦側。第二電極定義通過其中的複數個第二孔隙,第二電極的第三平坦側係設置成面向第一電極的第二側。第二電極係與第一電極耦接,使得第三平坦表面與第二平坦表面相鄰設置成具有間隙距離。第一及第二孔隙係佈置於第一及第二電極內,使得第一孔隙中之任一者並未與第二孔隙中之任一者對準,而並未形成延伸通過第一及第二電極兩者的開放直線路徑。間隙距離足以允許電漿產物的中性物質作為電漿產物的第一部分通過間隙,並且夠小以讓電漿產物的離子化物質與第一或第二電極相互作用,而不會通過兩件式電極組件。
在一或更多個實施例中,一種用於最佳化電漿設備的方法包括以下步驟:提供電漿產生腔室、下游腔室、及其間的兩件式電極組件,兩件式電極組件可經操作以修改電漿產生腔室與下游腔室之間的流體連通。兩件式電極組件包括第一電極、第二電極、及一或更多個致動器。第一電極定義通過其中的複數個第一孔隙,第一電極的第一表面面向電漿產生腔室,而第一電極的第二平坦表面背向電漿產生腔室。第二電極定義通過其中的複數個第二孔隙,第二電極的第三平坦表面係設置成面向第一電極的第二平坦表面,而第二電極的第四表面面向下游腔室。一或更多個致動器係與第一及第二電極耦接,並回應於電輸入而可經操作以相對於第二電極的位置調整第一電極的位置。一或更多個致動器可經操作以相對於第二電極提供第一電極的至少一個位置,使得第三平坦表面係設置成與第二平坦表面相鄰,其間的第一間隙距離係在0.005英寸與0.050英寸之間,且第一及第二孔隙係佈置於第一及第二電極內,使得第一孔隙中之任一者並未與第二孔隙中之任一者對準,而並未形成延伸通過第一及第二電極兩者的開放直線路徑。該方法進一步包括以下步驟:相對於第二電極的位置在第一位置處建立第一電極的位置;操作電漿產生腔室,以讓藉此產生的電漿產物的至少一部分流經兩件式電極組件,並進入下游腔室,以處理工件;評估工件上的處理結果;以及回應於處理結果來操作電輸入,以相對於第二電極的位置將第一電極的位置修改到第二位置處。
在一或更多個實施例中,一種用於最佳化電漿設備的方法包括以下步驟:提供電漿產生腔室、下游腔室、及其間的兩件式電極組件,兩件式電極組件可經操作以修改電漿產生腔室與下游腔室之間的流體連通。兩件式電極組件包括第一電極、第二電極、及致動器。第一電極定義通過其中的複數個第一孔隙,第一電極的第一表面面向電漿產生腔室,而第一電極的第二平坦表面背向電漿產生腔室。第二電極定義通過其中的複數個第二孔隙,第二電極的第三平坦表面係設置成面向第一電極的第二平坦表面,而第二電極的第四表面面向下游腔室。致動器與第一及第二電極耦接,並且可經操作以調整第二與第三平坦表面之間的間隙距離,致動器的特徵係在於針對電輸入的已知距離回應。該方法進一步包括以下步驟:操作電輸入,以將第一電極的一部分與第二電極的一部分進行接觸;建立將第一電極的一部分與第二電極的一部分進行接觸的電輸入,以作為電輸入的零值;以及相對於零值進一步操作電輸入,以根據已知距離回應將間隙距離維持在期望值,以修改電漿產生腔室與下游腔室之間的流體連通。
在一或更多個實施例中,一種用於操作電漿設備的方法包括以下步驟:提供電漿產生腔室、下游腔室、及其間的兩件式電極組件,兩件式電極組件可經操作以修改電漿產生腔室與下游腔室之間的流體連通。兩件式電極組件包括第一電極、第二電極、及與第一及第二電極耦接的一或更多個致動器。一或更多個致動器可經操作以相對於第二電極調整第一電極的位置。一或更多個致動器中之每一者的特徵係在於調整範圍。針對一或更多個致動器的調整範圍內的至少一個位置,第一及第二孔隙係佈置於第一及第二電極內,使得第一孔隙中之任一者並未與第二孔隙中之任一者對準,而並未形成延伸通過第一及第二電極兩者的開放直線路徑,且間隙距離係在0.0005英寸與0.050英寸之間。該方法進一步包括以下步驟:操作一或更多個致動器,以相對於第二電極將第一電極設置於第一位置處;操作電漿產生腔室,以讓藉此產生的電漿產物的至少第一部分流經兩件式電極組件,並進入下游腔室;操作一或更多個致動器,以相對於第二電極將第一電極設置於第二位置處;以及操作電漿產生腔室,以讓藉此產生的電漿產物的至少第二部分流經兩件式電極組件,並進入下游腔室。第一位置與第二位置之間的不同導致兩件式電極組件相對於第一部分修改第二部分中的離子化物質與中性物質的比例。
第1圖以頂視平面圖示意性圖示根據實施例的可以包括沉積、蝕刻、烘焙、及/或固化腔室的電漿處理系統100的主要元件。系統100係圖示為單一晶圓的半導體晶圓電漿處理系統,但是該領域具有通常知識者應理解,本文的技術及原理適用於任何類型的電漿產生系統(例如,不一定需要處理晶圓或半導體的系統)。
在第1圖中,一對前開式晶圓盒(FOUP)102供應基板,該等基板係由機器臂104接收,並在放置到位於串聯區段109a-c中的處理腔室108a-f中之一者之前,放置到低壓托持區域106中。第二機器臂110可以用於將基板從托持區域106運輸到處理腔室108a-f並返回。可以配備每一處理腔室108a-f,以執行一或更多種處理操作,包括乾式蝕刻處理、循環層沉積(CLD)、原子層沉積(ALD)、化學氣相沉積(CVD)、物理氣相沉積(PVD)、蝕刻、預清潔、烘焙、固化、脫氣、定向、及其他處理。
處理腔室108a-f可以包括用於沉積、退火、固化、及/或蝕刻基板上的材料的一或更多個系統部件。在一個配置中,兩對處理腔室(例如,108c-d與108e-f)可以用於在基板上沉積材料,而第三對處理腔室(例如,108a-b)可以用於蝕刻所沉積的材料及/或基板。在另一配置中,所有三對腔室(例如,108a-f)可經配置以蝕刻所沉積的材料及/或基板。可以在與不同實施例中所示的製造系統分離的腔室中執行所述的任何一或更多個處理。應理解,系統100可以考慮用於介電膜的沉積、蝕刻、退火、及固化腔室的附加配置。某些製造商可能偏好具有在各種配置中激發及/或使用電漿的靈活性的系統,以便每一系統可以適應所對應的各種處理需求。本文所揭示的技術可以適用於激發及/或使用在單一或多個位置處形成的電漿的電漿處理系統。
儘管本揭示的一些部分係識別利用所揭示的設備及方法的蝕刻處理,但應理解,設備及方法同樣適用於所描述的腔室中可能發生的沉積及清潔處理。因此,該技術不應視為受限於僅能用於蝕刻處理或腔室。此外,儘管描述示例性腔室以提供本技術的基礎,但應理解,本技術實際上可以應用於可允許所述單一腔室操作的任何半導體處理腔室。此外,應注意,本文所使用的術語「腔室」應理解為透過與電漿產物接觸來處理晶圓或其他工件的空腔,或者理解為形成這種空腔及/或提供這種電漿產物的結構及設備。
第2圖圖示示意性圖示示例性電漿處理系統200的一部分的橫截面圖。電漿處理系統200係為第1圖的電漿處理單元100的實例。在蝕刻期間,處理氣體可以通過氣體入口組件205而流入第一電漿產生腔室215。遠端電漿系統(RPS)201可以可選擇地包括在系統中,並且可以處理隨後行進通過氣體入口組件205的第一氣體。入口組件205可以包括二或更多個不同的氣體供應通道,其中若包括第二通道(未圖示),則第二通道可以繞過RPS 201。在第2圖的定向中,氣體及/或電漿產物流動的整體方向係為向下,此方向在此處可以指稱為「下游」,而在第2圖的定向中,相對的方向向上可以指稱為「上游」。本文可以使用此定向慣例,但是該領域具有通常知識者將理解,本文描述的許多原理並不限於第2圖所示的定向的系統。
圖示冷卻板203、面板217、離子消除器223、噴淋頭225、及具有工件255設置其上的工件支撐件或台座265,且每一者可以根據實施例而被包括。台座265可形成一或更多個熱交換通道,熱交換流體流經一或更多個熱交換通道以控制基板的溫度,以在處理操作期間加熱及/或冷卻工件。台座265的晶圓支撐盤可以由鋁、鋁合金、陶瓷、或其組合而形成,亦可以使用嵌入式電阻加熱器元件來電阻加熱,以實現相對高的溫度(例如,從約100℃到約1100℃或更高)。
面板217、離子消除器223、及噴淋頭225中之每一者形成用於讓源氣體及/或電漿產物通過的孔隙,以將源氣體及/或電漿產物均勻遞送到下游工件處理區域233;這種孔隙應理解為存在,但為了清楚說明,並未圖示於第2圖。此外,儘管為了清楚說明,第2圖圖示面板217、離子消除器223、及噴淋頭225中之每一者,但是這些部件可以由多個零件形成,如下所述。面板217可以是金字塔形、圓錐形、或具有窄的頂部部分擴展到寬的底部部分的其他類似結構。如圖所示,可附加地,面板217可以是平的。
系統200的一部分直接位於工件255上方,並且至少向上延伸通過噴淋頭225、離子消除器223、及面板217,其在本文中係指稱為系統200的工作區域251。當工件255為圓形(例如,半導體晶圓)時,工作區域251亦是圓形。部件(例如,面板217、離子消除器223、及噴淋頭225)的通常目標係為在工作區域內盡可能均勻分配氣體及電漿產物。然而,如下所述,本文的某些實施例可以提供一或更多個附加程度的處理控制(例如,可以歪斜或校正在工作區域251上的處理,或者在工作區域251內引入處理效果的徑向或其他空間模式)。
示例性配置可以包括讓氣體入口組件205通向氣體供應區域258,氣體供應區域258藉由面板217而與第一電漿產生腔室215隔開,以便源氣體(或電漿產物(若使用RPS 201))流經面板217中的孔隙而進入第一電漿產生腔室215。可以選擇結構及操作特徵,以防止來自第一電漿產生腔室215的電漿大量回流到供應區域258、氣體入口組件205、及流體供應系統210中。面板217或腔室的導電頂部部分以及噴淋頭225係與位於其間的絕緣環220一起圖示,以允許功率供應器相對於噴淋頭225及/或離子消除器223而將交流(AC)電位施加到面板217。提供AC電位的功率供應器在本文係指稱為RF功率供應器,但是所供應的功率可能在射頻(RF)頻譜或微波頻譜中。AC電位能夠在第一電漿產生腔室215中形成電容耦接電漿(CCP)。附加地,附加特徵(例如,擋板(未圖示))可以位於第一電漿產生腔室215中,或者另外與氣體入口組件205耦接,以影響源氣體及/或電漿產物通過氣體入口組件205進入第一電漿產生腔室215的流動。
應注意,部件(例如,冷卻板203、面板217、離子消除器223、噴淋頭225、及/或其他擴散器或螢幕)的特徵可以作為電極,因為任何這樣的部件可以單獨連接到電位。暴露於電漿及/或電漿產物的任何此等部件的表面可以塗佈陶瓷層(例如,氧化釔、氧化鋁)或者塗佈合適的鈍化層(例如,陽極氧化層,或化學產生的氧化鋁層),以用於化學抗性。
處理系統200可以進一步包括與面板217、離子消除器223、噴淋頭225、及/或台座265中之任一或所有者電耦接的功率供應器240,以在第一電漿產生腔室215及/或處理區域233中產生電漿。取決於所執行的處理,功率供應器240可經配置以向合適的電極遞送可調整量的功率。這種配置可以允許可調諧電漿用於執行中的處理。與通常包括開啟或關閉功能的遠端電漿單元不同,可調諧電漿可經配置以向第一電漿產生腔室215及/或處理區域233遞送特定量的功率。此舉又可以允許開發特定的電漿特性,使得源氣體可以轉換成特定的電漿產物,以增強處理目標(例如,蝕刻輪廓、選擇性、均勻性、及類似者)。
在使用中,電漿216可以在第一電漿產生腔室215中激發,及/或電漿230可以在工件處理區域233中激發(例如,以從含氟源氣體或其他源氣體產生電漿產物,以用於蝕刻)。舉例而言,典型地,當供應源氣體時,在射頻(RF)範圍中的AC電壓可以藉由功率供應器240產生,並施加於處理腔室的導電頂部部分(例如,面板217)與噴淋頭225及/或離子消除器223之間,以激發第一電漿產生腔室215中的電漿216。類似地,在源氣體(及/或來自第一電漿產生腔室215的電漿產物)流動的情況下,可以在噴淋頭225與台座265之間施加AC電壓,以激發處理區域233中的電漿230。功率供應器240可以在13.56MHz的RF頻率下操作,但亦可以單獨在其他頻率下操作或者在與13.56 MHz頻率組合的其他頻率下操作。
某些電漿處理應用及/或工件(例如,晶圓)有利地允許電漿產物內的帶電物質(例如,離子及自由電子)與工件自由接觸,而其他應用或工件有利地減少或隔離來自工件的帶電物質。舉例而言,氣體混合物的離子濃度的調整可以顯著改變其蝕刻選擇性,例如,SiNx:SiOx蝕刻率、Si:SiOx蝕刻率等。在執行沉積的可替代實施例中,亦可以平移介電材料的共形流動式沉積的平衡。舉例而言,為了減少或隔離帶電物質,電漿可以在處理腔室上游的區域中產生電漿產物。產生電漿的區域容納電漿,而帶電物質受到激勵以中性化及/或彼此結合(但中性物質(例如,不帶電荷的分子碎片)釋放原子),並受到激發(但中性基被允許通過處理腔室)。
容納電漿並從電漿處理系統的特定區域排除帶電物質的一種方式係為使用形成孔隙的電極,中性物質及中性基可以通過孔隙,但孔隙抑制離子及/或自由電子通過,並藉由孔隙減少產生電漿的電場。舉例而言,第3圖示意性圖示形成多個孔隙259的面板217-1的一部分(例如,第2圖的面板217的實例)。現在使用面板217-1作為實例來論述使用孔隙寬度來選擇性容納或允許離子物質及/或自由電子通過的一般概念。然而,應理解,所教示的原理可以涉及電漿處理系統的其他零件,其中電漿在一個位置產生,並透過電極傳送到另一位置,或者其中在預期使用的位置產生電漿,而孔隙係用於限制離子物質及自由電子向非預期位置的回流。
如圖所示,每一孔隙259在點A-A之間的面板217-1的大約中間形成狹窄的通道。點A-A之間的孔隙259的寬度可以讓面板217-1上方(例如,在第2圖的第一電漿產生腔室215中)所產生及/或所維持的電漿的電磁功率在孔隙259內強烈衰減,而離子物質及自由電子透過碰撞及其他壁效應而受力,以彼此重新組合及/或中性化。限制離子物質及自由電子通過的孔隙259的寬度係與電漿的Debye長度有關,並且可以依據各種因素(例如,產生電漿的電磁功率的波長、形成電漿的氣體物質、及電漿的壓力)來計算。亦應注意,在所有實施例中,可能不需要完全分離離子帶電物質。舉例而言,在某些情況下,一些離子物質意欲到達處理區域,以執行蝕刻及/或沉積處理。在這些情況下,電極(例如,面板217-1)的孔隙259的尺寸可以設計成僅減少但並未消除處理區域中的離子物質。其他因素亦可以影響孔隙259的最佳寬度(例如,面板217-1及/或其上塗層的材料性質)。因此,通常根據經驗來決定給定類型的電漿系統的孔隙259的寬度。作為控制離子物質通過面板的流動的附加手段,亦可以將可調整的電偏壓施加到面板217-1。
應理解,孔隙259係形成於面板217-1中,並跨越面板的整個工作區域(例如,第2圖的工作區域251),而相較於孔隙259的間隔,面板217-1(或本文中具有讓電漿產物通過的多個孔隙的任何其他電極)與工件255之間的距離夠大,以讓電漿產物在到達工件255時均勻混合。
藉由使用具有狹窄通道的孔隙259,處理腔室可經配置以抑制電漿、自由電子、及/或離子物質與處理中的工件接觸。此舉可以有利地保護基板上圖案化的各種複雜結構及膜,若直接與電漿接觸,則各種複雜結構及膜可能翹曲、移位、或以其他方式損傷。可附加地,當允許電漿接觸或接近工件時,可能增加氧化物物質蝕刻的速率。因此,若材料的暴露區域為氧化物,則可以藉由遠端於基板維持電漿來進一步保護此材料。
利用小孔隙來容納電漿並消除帶電物質流動的原理可以應用於電漿產生區域與處理區域之間或者在處理區域與上游區域中所產生的電漿之間的任何電極(例如,面板217、離子消除器223、及/或噴淋頭225)。然而,使用此原理可能導致某些成本及限制。孔隙259通常藉由鑽孔來形成,以控制狹窄通道寬度,而通常需要許多這樣的孔隙來提供足夠的電漿產物產量,以維持足夠高的處理反應速率(例如,蝕刻或沉積速率)來取得滿意的工件產量。孔隙259的尺寸亦必須非常一致,因為若電極的某些空間區域具有比其他空間區域更窄或更寬的孔隙259,則可能出現處理偏差。為了滿足這些需要,單獨鑽孔可能造成每個電極投入數千美元的勞動力及/或裝備時間。
利用保護塗層(例如,氧化釔或氧化鋁)均勻塗佈狹窄孔隙259來保護形成孔隙的電極也是非常困難。因為大多數塗層技術具有方向性,所以孔隙259的高深寬比(特定在最狹窄的區域中)傾向於導致不均勻的塗層厚度,並限制可以施加的塗層厚度。亦即,塗層材料傾向於黏附在所遭遇的第一個物體上。在氧化鋁零件上施加氧化釔或氧化鋁的典型塗層技術包括電漿噴塗及原子層沉積。電漿噴塗係為中等精確以及中等昂貴,而原子層沉積係為非常精確並且非常昂貴;這兩種技術至少具有一些方向性。因此,利用任一技術,塗層傾向於很容易堆積在平板上,而在基本上平行於沿著沉積期間的塗層材料行進的方向的通道內則慢得多。即使在孔隙259內,原子層沉積亦提供了針對厚度的良好控制,但是足以在孔隙259內塗佈的電漿噴塗可以在孔隙的外邊緣處堆積,而導致孔隙之間的尺寸變化。
此外,當允許電漿產物通過的電極區域藉由在其間形成非常小的孔隙而受到限制時,電漿產物的流動必然減少,從而減慢所期望的處理(例如,沉積及蝕刻)。此外,一旦形成所需尺寸及數量的孔隙259,則無法容易改變;若需要不同的孔隙尺寸來支援不同處理或處理參數的所期望改變,則必須移除整個電極並利用不同電極替換。在電漿處理裝備中通常不期望打開處理腔室,因為電極表面通常僅在使用期間暴露於嚴格控制的條件及/或物質;將腔室打開到大氣中通常會破壞腔室表面條件,而導致需要在允許生產處理恢復之前重新調整表面的條件及測試腔室效能。
本文的某些實施例藉由利用具有通過其中的孔隙的複數個電極來提供電漿容納及離子消除,其中孔隙可以具有幾乎任何尺寸,但是相對於彼此的對準或未對準受到控制,且其中電極係維持為彼此非常接近。在這些實施例中,電極之間的間隙可以產生與上述孔隙259的狹窄通道相同的作用。儘管此方式導致新的限制(例如,對於電極平坦性及間隙距離控制的需求),但是減輕或消除上述大多數或所有限制。舉例而言,因為電極孔隙可以更少以及更大,所以可以減少電極的鑽孔成本;因為電極孔隙深寬比降低以及,可以減少電極的塗佈困難,並且可以增加電漿產物的可使用區域。此外,透過使用如下所述的適當機制,可以調整電極間隙距離及/或孔隙對準,以提供處理效果。此舉的一個結果係為間隙距離及/或孔隙對準可以偶爾原位實質改變,以便在不移除及更換電極或使用多件式處理裝備的情況下可以執行不同的處理。
第4圖以橫截面圖示意性圖示包括單獨電極326-1及326-2的兩件式電極組件325-1的一部分。在實施例中,現在結合第4圖描述的原理可以應用於分離電漿系統的一部分(例如,將電漿產生區域與處理腔室及/或其他電極分離)的任何電極或電極組。舉例而言,兩件式組件325-1可以代替第2圖的離子消除器223及/或噴淋頭225。該領域具有通常知識者應立即理解許多替代方式、變化、及/或等同物,所有這些都視為落於本揭示的範圍內。電極326-1及326-2可以彼此固定耦接,或者可以相對於彼此移動,如下面進一步論述。電極326-1及326-2通常保持在共同電位處(例如,透過可選擇的RF接地條帶319連接)。
電極326-1及326-2中之每一者分別在第4圖所示的平面中形成許多孔隙329-1、329-2,但在其他平面中是連續的,使得第4圖所示的片段僅為每一電極326-1及326-2的一部分。每一孔隙329-1具有直徑D1,而每一孔隙329-2具有直徑D2。第4圖圖示D1及D2大致相等,但這並非必需,且並未要求D1或D2在任一電極的所有孔隙上都相同。在某些實施例中,跨越每一電極的標準類似的直徑有利地提供佈局的容易性及鑽孔效率。電極326-1定義藉由電極厚度T1分開的第一平坦表面301與第二平坦表面302;電極326-2定義藉由電極厚度T2分開的第三平坦表面303與第四平坦表面304。第4圖圖示T1及T2大致相等,如在某些實施例中所發現,但這並非必需。在實施中,通常依據電極326-1及326-2的橫向尺寸,並依據電極材料來選擇T1及T2,使得電極在預期處理腔室上係為機械穩定(但有利地是確保機械穩定性並沒有那麼重要),以用於減少重量及材料成本。舉例而言,在某些實施例中,T1及T2係為約四分之一英寸(例如,4至8mm),以用於處理12英寸(300mm)標準晶圓的電漿處理系統,但在其他尺寸或具有其他限制的其他實施例中,T1及T2的範圍可以從0.100英寸到約1.00英寸(例如,2到25mm)。在某些實施例中,選擇D1及D2以便孔隙329-1、329-2的深寬比T/D係為約2:1或更小,以促進孔隙內的塗層的均勻施加。然而,其他實施例使用深寬比大於2:1的孔隙,更特定在使用例如倒角的技術來讓孔隙的內壁更容易施加塗層時(參見第5圖)。
孔隙329-1及329-2經佈置或者為至少可調整成以便從組件325上方到組件325下方的任何視線都不會通過任一對的孔隙329-1及329-2。因此,當電漿或氣體存在於組件325上方時,單獨物質(例如,離子、分子碎片、單獨原子、或自由電子)僅能藉由首先通過孔隙329-1,隨後通過電極326-1與326-2之間,隨後通過孔隙329-2來通過組件325。如圖所示,電極326-1及326-2係藉由表面302與303之間的距離G的間隙分開。可以選擇G,以容納電漿,並消除從組件325上方流到下方的帶電物質的流動。
將實現這些目標的間隙距離G的值係為電漿源氣體類型、電漿壓力、施加到電漿的功率密度、及孔隙對孔隙配準的函數。針對帶電物質容納,間隙距離G應該為大約或小於支援中空陰極放電的最小孔隙尺寸。因此,容納電漿的間隙距離G的典型值通常在0.002英寸至0.150英寸(例如,約0.05mm至3.81mm)的量級。較高的壓力及功率密度將促進電漿「洩漏」的可能性(例如,帶電物質通過二個電極組件的通道),而其他變量係為相同。舉例而言,針對10及20Torr下的某些源氣體與功率密度,間隙距離G的有用上限可以分別是約0.045英寸及0.035英寸,但是針對更高或更低的壓力或者由於其他變量,G可以進一步變化。由於所涉及的所有變量,將容納帶電物質的間隙距離G的上端可以是0.002英寸、0.005英寸、0.010英寸、0.015英寸、0.020英寸、0.025英寸、0.030英寸、0.035英寸、0.036英寸、0.040英寸、0.045英寸、0.048英寸、0.050英寸、0.055英寸、0.060英寸、0.065英寸、0.070英寸、0.075英寸、0.080英寸、0.085英寸、0.090英寸、0.095英寸、0.100英寸、0.105英寸、0.110英寸、0.115英寸、0.120英寸、0.125英寸、0.130英寸、0.135英寸、0.140英寸、0.145英寸、或0.150英寸中之任一者,或者所列出的值的中間值。可以依據電極的已知或估計的平坦性變化以及用於間隙距離校準目的之內置偏置來設定G的下限,例如下面所描述。針對某些實施例,G的下限係為0.005至0.010英寸。
在某些實施例中,電極326-1及326-2以及孔隙329-1及329-2係相對於彼此固定。在其他實施例中,電極326-1及326-2中之至少一者相對於另一者係為可調整的,以便針對具有任何適用調整範圍的至少一個位置(如下所述),任一孔隙329-1與最接近的孔隙329-2之間的橫向距離係為G的至少兩倍或至少三倍。藉由增加帶電物質與電極326-1及326-2中之至少一者的表面相互作用的概率,這些橫向距離有利地最小化離子化物質或自由電子從組件325上方移動通過彼此接近的孔隙329-1及329-2,再到組件325下方的傾向。然而,小間隙距離G(例如,小於約0.005或0.010英寸)及/或大橫向距離(例如,大於G的三倍)的組合亦可以減少中性自由基及原子物質的通過。考慮到所有這些影響,容納帶電物質但允許中性物質通過的G的某些有用值係為:
間隙距離G係在0.005至0.035英寸之間,而孔隙之間的橫向距離至少為間隙距離G的兩倍;特別適用於(但不限於)在20Torr或約20Torr的壓力下操作的電漿;以及
間隙距離G係在0.010至0.045英寸之間,而孔隙之間的橫向距離至少為間隙距離G的兩倍;特別適用於(但不限於)在10Torr或約10Torr的壓力下操作的電漿。
此外,如下面進一步描述,電極326-1及326-2之間的間隙距離G可以刻意從容納電漿的間隙距離變化到允許電漿洩漏的較大距離,以修整處理特性。間隙距離G可以控制是否存在洩漏以及洩漏量,從而提供用於控制通過雙電極組件的中性及帶電物質之間的比率的機制。
第5圖以橫截面圖示意性圖示包括單獨電極326-3及326-4的另一兩件式組件325-2的一部分。如圖所示,組件325-2與組件325-1的差異在於通過電極326-3及326-4的孔隙329-3、329-4的直徑分別與通過電極326-1及326-2的孔隙329-1、329-2的直徑(第4圖)不同,以及在於形成倒角邊緣328的孔隙329-4。當直徑D4基本上小於電極326-4的厚度時,倒角邊緣328有助於改善孔隙329-4內的塗層均勻性,從而產生高深寬比。
在某些實施例中,電極326相對於彼此及/或其他電漿腔室部件固定耦接。相較於具有用於離子及自由電子控制的非常小的孔隙的電極的系統,這些實施例的製造成本更低且更耐用。降低的成本係由於降低的鑽孔成本與降低的塗層成本,而與原子層沉積相反,藉由使用電漿噴塗施加較厚的塗層可以改善耐久性。因為提供所期望的(中性)電漿產物的更自由通道,同時阻擋對於某些處理較不期望的成分(例如,離子及自由電子),電極326亦可以支援更高的電漿處理速率。
第6A圖以橫截面圖示意性圖示包括二個電極326-5及326-6與可調整的耦接器的兩件式電極組件325-3。第6A圖以其間具有中斷的兩個部分圖示,以允許更詳細地圖示任一側上的特徵。第6A圖內標識為6B的部分係在第6B圖中放大。
在第6A圖中,可調整的耦接器係為高度致動器330,其可以透過電輸入操作來調整電極326-5與326-6之間的間隙G。本文所使用的「致動器」係指稱可調整的耦接器,其可以回應於電輸入而相對於另一者移動或重新定位一個物體,而其他可調整的耦接器可以手動或利用手動工具調整。支撐部分335針對組件325-3提供機械參照及支撐;下電極326-6係與支撐部分335固定耦接。舉例而言,支撐部分335係為電漿處理系統的底座或殼體。上電極326-5係與高度致動器330及懸吊機制340耦接。懸吊機制340係藉由第6A圖中的螺旋彈簧來表示,但是亦可能具有其他懸吊機制(例如,板片彈簧或氣動系統)。在所示實施例中,懸吊機制340將上電極326-5的至少大部分重量轉移到支撐部分335,以減少對於高度致動器330的機械要求,並且可能改善高度致動器330所提供的高度控制的精確度。然而,懸吊機制340係為可選擇,並且在某些實施例中並未包括在內。
高度致動器330可經操作以調整電極326-5的表面302與326-6的表面303之間的間隙G。在實施例中,高度致動器330係為步進馬達,但是亦可以使用其他高度致動器(例如,其他類型的馬達、電磁圈、壓電致動器、及類似者)。步進馬達係為有利的高度致動器,因為可以電子控制並且可以回應於這種控制而提供精細的高度控制。在第6A圖所示的實施例中,高度致動器330係與環345(亦參見第7圖及第8圖)耦接,環345經由桿350連接到上電極326-5。
其他構件及/或機制亦可以用於將致動器與電極耦接。類似地,兩件式電極組件的上電極可以固定(例如,固定到底座或殼體),而下電極係為可調整的。該領域具有通常知識者應立即理解許多替代方式、變化、及/或等同物,所有這些都視為落於本揭示的範圍內。
第6B圖以放大視圖示意性圖示第6A圖中標記為6B的部分。如第6A圖所示,桿350係與上電極326-5連接,此舉使得高度致動器330能夠調整間隙G。下電極326-6包括相對於表面303形成輕微突起的可選擇區域360。此舉允許區域360作為機械止動件,以在電極326-5與326-6之間建立零位置或高度參照,而不會讓表面302與303彼此直接接觸。在建立高度參照的一種方式中,可以操作高度致動器330,直到表面302與區域360接觸,並且當表面302與區域360接觸時,高度致動器330的位置可以指定成用於高度致動器330的零位置或參照高度。舉例而言,控制器可以將電輸入提供到作為高度致動器330的步進馬達,直到表面302與區域360接觸,在電極接觸的情況下可以釋放電輸入,以及可以在接觸位置處重新建立電輸入,並且可以藉由已知步數退回步進馬達來進行高度調整。可替代地,使電極接觸的電輸入值可以儲存為零值,並且可以藉由相對於所儲存值改變電輸入來進行高度調整。此後,由於步進馬達對於給定步數的距離回應係為已知,所以可以操作高度致動器330,以相對於參照高度將間隙G增加已知量。以此方式使用區域360來在第一及第二電極326-5、326-6之間建立接觸,來允許校準間隙G,同時避免表面302與303的面對面接觸。反之,此舉最小化表面302與303之間的接觸而導致的意外損傷的機會,或者至少讓接觸點移動遠離電極326-5與326-6的中心,其中任何損傷都可能影響工件(例如,晶圓)處理。相對於相鄰表面的區域360的高度(例如,第6B圖的表面303)有利地大於表面302與303的預期平坦性變化,但小於在區域360接觸相對表面時開始允許離子化物質通過表面302與303之間形成的間隙的高度。在某些實施例中,相對於相鄰表面的區域360的高度係為0.005英寸或更少,表面302與303(組合)的估計平坦性變化係為約0.004英寸,而估計的間隙距離高於離子化物質可能開始洩漏通過的約0.010英寸的間隙。儘管區域360係圖示為相對於表面303的突起,但應理解,區域360可以實現為相對於表面302的突起,或者相對於二個表面302及303的突起。第6B圖亦圖示圍繞桿350的波紋管355;波紋管355將桿350與周圍的機械特徵從相鄰區域隔離開,以排除由移動與致動器330、懸吊機制340、及類似者相關聯的零件所產生的任何顆粒或碎片。
第7圖以橫截面圖示意性圖示具有二個致動器的兩件式電極組件,二個致動器係用於相對於另一電極調整一個電極的垂直位置。除了二個高度致動器330-1及330-2在圍繞環345的圓周的不同位置處調整與下電極326-6連接的環345的高度之外,第7圖所示的組件係與第6A圖及第6B圖所示的組件相同。在此實施例中,高度致動器330-1及330-2與環345及/或支撐部分335之間的耦接點係為非剛性,以便藉此形成的機械系統不會過度限制,亦即,一或二個耦接點可以形成相對於支撐部分335的環345的所需角度,以在高度致動器330-1處位於一個高度,並在高度致動器330-2處位於另一高度。藉由在環345周圍的兩個點處提供高度調整,可以將間隙G調整成一側比另一側更大,而形成傾斜。電極326-5與326-6之間的方位角傾斜軸線(例如,從間隙G最大的一個周邊點到間隙G最小的另一周邊點的方向)將與環345與電極326-5及326-6的耦接點對準。可以將機械止動件(例如,類似第6B圖的突起360的突起)提供成與每一高度致動器330-1、330-2相鄰,以便致動器330-1、330-2的參照高度可以彼此獨立設定。
該領域具有通常知識者應理解,第7圖所示的方式的進一步延伸(包括具有圍繞環345間隔開的耦接點的三個致動器)可以藉由協調所有三個高度致動器的高度來設定藉此形成的間隙的方位角傾斜軸線朝向任何方向。此外,控制電極橫向位置的致動器亦是可能的。第8圖以平面視圖示意性圖示具有六個致動器的組件,以用於相對於支撐部分335調整環345的橫向及垂直位置。舉例而言,如第6A圖及第7圖所示,支撐部分335係為電漿處理系統的底座或殼體。第2圖至第7圖在圖式中圖示為垂直的垂直方向係在第8圖中為從頁面朝內及朝外,而方向311及312係為水平方向。
環345可以用於定位兩件式電極組件的一個電極,其中兩件式電極組件的另一電極係與支撐部分335固定耦接。環345的下側係與二個電極中之一者耦接,並在第8圖的平面圖中被環345與其他結構隱藏。三個高度致動器330-3、330-4、及330-5係與環345耦接,以便可以調整二個電極之間的間隙G,並且可以沿著任何期望的方位角傾斜角度形成間隙。高度致動器330-3、330-4、及330-5與環345及/或支撐部分335之間的耦接點係為非剛性,以便藉此形成的機械系統不會過度限制。儘管第8圖圖示高度致動器330-3、330-4、及330-5與環345係圍繞環345大致等距間隔開,但應理解,不需要相等的間隔。如上所述,各種實施例可以僅包括高度致動器330-3、330-4、及330-5中之一者、二者、或全部三者,而高度致動器330-3、330-4、及330-5都可以視為亦可以手動或使用手動工具來操作的可調整的耦接器的實例。
第一水平致動器330-6與第二水平致動器330-7可經操作以相對於支撐部分335將高度致動器330-3與環345定位於不同的水平方向上。第三水平致動器330-8可經操作以相對於支撐部分335將環345旋轉定位。水平致動器330-6、330-7、及330-8與環345及/或支撐部分335之間的耦接點亦為非剛性,以便藉此形成的機械系統不會過度限制(例如,高度致動器330-6、330-7、及330-8的組合動作不會讓環345扭曲或變形)。各種實施例可以僅包括水平致動器330-6、330-7、及330-8中之一者、二者、或全部三者,而水平致動器330-6、330-7、及330-8都可以視為亦可以手動或使用手動工具來操作的可調整的耦接器的實例。如第8圖所示,高度致動器330-3、330-4、及330-5、水平致動器330-6、330-7、及330-8、環345、支撐部分335、及/或藉此定位的電極中之任一者或所有者可以藉由透過可選擇的RF接地條帶319來連接而保持在共同電位處。此外,機械止動件可以用於針對水平致動器330-6、330-7、及330-8中之每一者設定參照值(例如,利用與區域360可以用於設定高度致動器330的參照值相同的方式;參見第6B圖)。
因此,如圖所示,水平致動器330-6、330-7、及330-8能夠在水平致動器330-6、330-7、及330-8中之每一者的調整範圍內沿著水平方向311及312與相對於環345的中心軸線314的旋轉方向313中之任一者共同定位環345以及與環345耦接的電極。
在電漿處理系統中控制電極的橫向及垂直間隔的能力係提供以前在這種系統中無法取得的優點。首先,考慮高度致動器330-1、330-2、及/或330-3的效果。當總間隙距離足夠小時,給定可能存在一小部分的自由電子及/或離子透過碰撞從一個孔隙通過間隙到達另一孔隙的方式,認為間隙距離的約三倍的橫向間隔足以確保自由電子與離子的中和。當間隙間隔較大時,自由電子及/或離子將自由移動。足以允許自由電子及/或離子自由通過的精確距離係與所應用電漿的有效Debye長度有關,但是出於實際目的,此距離係藉由處理特徵來確定。一個高度致動器330足以全局調整間隙距離G;二個高度致動器330讓間隙距離能夠沿著一個方位角方向傾斜(由致動器與可移動電極的附接點之間的線段定義);以及三個高度致動器330讓傾斜能夠沿著任何方位角方向進入到間隙距離中。此舉可以用於將處理從中性物質化學的控制偏移到離子化學,且反之亦然,並且可以提供從系統的一側到另一側的處理控制偏差。
接下來,考慮水平致動器330-6、330-7、及330-8的效果。在某些實施例中,水平致動器330-6、330-7、及330-8中之一或更多者的調整範圍足以讓電極326的孔隙329相對於彼此移動,而足以修改兩件式電極裝置允許或抑制某些電漿產物的產量的能力。換言之,在水平致動器330-6、330-7、及/或330-8的調整範圍內,某些位置可以對應於並未對準的孔隙329,以便電極326中之一者的任一孔隙329並未與另一電極326中的任一孔隙329對準,而並未形成延伸通過二個電極的開放直線路徑。以此方式調整,自由電子與離子物質傾向於接觸,並藉由電極326中之一者或另一者中和。除了並未形成開放直線路徑之外,這些位置可以滿足電極326中之一者的孔隙329橫向定位於距離另一電極326中之孔隙329的局部間隙距離的至少三倍的位置處的條件。換言之,與一個電極中的每一孔隙329相鄰的間隙係藉由電極材料界定(並非藉由孔隙界定),而在任何方向上橫向測量為距離另一電極326的任何孔隙329的間隙距離的至少三倍。
當二個電極提供為具有類似的孔隙佈局時,一個電極相對於另一者的平移可以讓一個電極上的孔隙329進入或離開水平接近或對準另一電極上的孔隙329,其中所有者都同時進行。讓所有孔隙同時對準(例如,參見第9C圖及第10B圖)允許在處理系統的整個工作區域(例如,第2圖的電漿處理系統200的工作區域251)上選擇性允許或抑制自由電子及/或離子。一個電極相對於另一者的旋轉可以引起非常不同的效果。當一個電極相對於另一者旋轉時,徑向對稱佈局可以導致遠離旋轉中心的孔隙逐漸對準孔隙被對準的區域(例如,參見第12圖),並隨著旋轉增加而移動以更靠近中心。此舉可以用於藉由建立與工作區域內的徑向位置有關的處理效果來修改處理。具有不同(例如,非徑向)對稱的佈局可以產生孔隙區域的重疊或非重疊的其他圖案。所有這些圖案可以用於藉由在兩件式電極組件上相對於非離子化電漿物質的產量調節自由電子及/或離子的產量來提供處理控制程度。相較於先前的電極組件可實現的,這種產量調節的可能變化係視為更多樣化;下面詳細論述一些這樣的變化以及如何實現。
第9A圖以平面視圖示意性圖示可以形成於兩件式電極組件的電極中的孔隙329-5的佈局401。如圖所示,孔隙329-5並非以任何特定比例繪製,但是相對於彼此在尺寸及佈局上是均勻的。佈局401係為矩形佈置;應理解,佈局401可以在電極的整個工作區域中連續(例如,參見第2圖的工作區域251)。第9B圖示意性圖示佈局402,並包括佈局401中的孔隙329-5,以及第二電極的孔隙329-6(亦為矩形佈置,並散佈孔隙329-5)。如圖所示,孔隙329-6亦並未以任何特定比例繪製,但是相對於彼此及相對於孔隙329-5在尺寸及佈局上是均勻的。孔隙329-5可以形成於二個電極的上部內,而孔隙329-6係形成於二個電極的下部內,反之亦然。與上面論述的面板217-1(第2圖)類似,應理解,佈局402中的孔隙329-6可以在電極的整個工作區域上連續。亦與面板217-1類似,相較於孔隙329-5與329-6的間隔,形成孔隙329-5及329-6的電極與待處理的工件之間的距離足夠大,以用於電漿產物在到達基板時均勻混合。
第9C圖示意性圖示佈局402',其包括如佈局401及402中相對於彼此以相同佈置佈局的孔隙329-5,以及如佈局402相對於彼此以相同佈置佈局的孔隙329-6。然而,在佈局402'中,所有孔隙329-6相對於孔隙329-5偏移,若將形成孔隙329-6的一個電極相對於形成孔隙329-5的另一電極橫向偏移(例如,第8圖中使用水平致動器330-6及330-7)將產生此情況。在第9C圖中,可以看出每一孔隙329-5與對應的孔隙329-6所重疊的量與每一其他孔隙329-5與對應的孔隙329-6所重疊的量相同。此舉說明當二個電極具有相同佈置的孔隙時,將一個電極相對於另一電極橫向偏移可以用於讓孔隙同時在電極的整個工作區域上對準。因為每對重疊的孔隙329-5、329-6係與孔隙329-5及/或329-6中之任一者具有相同的間隔,所以電漿產物(例如,自由電子或離子)可以在孔隙本身相同間隔的位置處通過。因此,離子化的電漿產物在到達待處理的工件時可以均勻混合。讓一個電極相對於另一者移動並使用電極之間的間隙來防止離子化的電漿產物移動通過除了孔隙重疊處之外的能力係建立選擇性針對離子化的電漿產物進行柵極化的能力,而不會改變電漿產生條件,並且不會利用較大的孔隙替換小直徑孔隙來改變電極。
用於二個電極上的孔隙的其他佈局策略是可能的,並且某些設計權衡亦是可能的。舉例而言,佈局402中的孔隙329-5及329-6中之每一者相對稀疏係意指形成孔隙的每一電極大部分都是實心,而僅移除約14%的表面區域以形成孔隙。此舉可以允許精細控制孔隙重疊(例如,孔隙重疊所需的電極運動相對大,以及隨著進一步的運動而相對小地增加重疊區域),但是可能由於低孔隙區域而降低非離子化物質的總產量。相同的佈局(但是使用更大的孔隙)將增加非離子化物質的總產量,但是可能減少孔隙重疊的控制(例如,孔隙重疊所需的電極運動相對小,以及隨著進一步的運動而相對快速地增加重疊區域)。
第10A圖示意性圖示可以形成於上電極與下電極中之每一者中的六邊形佈置的孔隙329-5、329-6的佈局403。在佈局403中,孔隙329-6係在第10A圖的定向上位於與孔隙329-5水平相鄰,但不一定是這種情況;孔隙329-6可以形成為具有相對於孔隙329-5的垂直偏置、水平偏置、或二者。此外,在第10A圖所示的佈置中,相較於一個電極在圖式的定向上的垂直移動,該電極在圖式的定向上的水平移動將導致孔隙329-5與329-6之間的重疊的較小移動。
第10B圖示意性圖示第10A圖中所示的六邊形佈置中的孔隙329-5、329-6的佈局403',但是經過偏移,使得每對孔隙329-5、329-6之間出現小的重疊。可以看出,在第10B圖的定向中,若孔隙329-5係在水平方向上進一步偏移,則孔隙對329-5、329-6之間的重疊將快速增加或減少,但若孔隙329-5係垂直方向上偏移,則孔隙對329-5、329-6之間的重疊將緩慢增加或減少。這表明,對於一些佈局而言,重疊區域對於移動的靈敏度可以特定於移動方向,其可以用於提供相對粗略及精細的處理調整。換言之,在第10B圖的定向中,水平移動將提供粗略調整(亦即,相對於運動的重疊區域的相對大的改變),而在建立重疊之後,垂直移動將提供精細調整。
第11圖示意性圖示徑向佈置的孔隙329-7、329-8的佈局404。應理解,在徑向佈局中可能需要小心,以便孔隙區域與電極區域的比率在不同半徑處保持均勻,並使得相鄰孔隙329之間的距離允許在相對電極上放置孔隙,而不會在電極的初始位置中形成不期望的重疊。取決於佈局內的位置來形成不同尺寸的孔隙329可能是有利的,並應注意,孔隙329-8係圖示為小於孔隙329-7。
電極的旋轉可以針對孔隙對準具有各種影響,其可能取決於初始孔隙佈局、尺寸、間隔、及相對於旋轉軸線的定位。舉例而言,第12圖示意性圖示佈局405,其中一組孔隙329-6相對於另一組孔隙329-5旋轉5度。5度旋轉的選擇僅用於說明目的;通常,用於產生孔隙的重疊或不重疊的旋轉將更小,原因在下面更全面地說明。在佈局405中圖示軸線314,並選擇成讓孔隙329-5與329-6在第12圖的定向上的水平及垂直方向上環繞軸線314對稱佈置。由於這種對稱性,類似放置的孔隙329-5與329-6中之一者係與另一者位於軸線314的大致相同半徑處。可以看出,孔隙329-5與329-6之間的重疊係從軸線314附近的大重疊到佈局405邊緣處的小重疊均勻地變化半徑。在孔隙329-5及329-6距離軸線314最遠的佈局405的轉角處,重疊完全消失。應理解,較大的孔隙329-5與329-6可以減輕所示的佈局405上的重疊量的改變(亦即,相同位置處的較大孔隙可以更多重疊,甚至朝向佈局405的邊緣重疊)。然而,亦應理解,若佈局405表示僅形成於電極的一部分中的孔隙超出所示孔隙,則孔隙329-5的列及行將開始與不同列及行中的孔隙329-6重疊。這可以隨著軸線314的半徑增加而產生徑向效應(例如,moiré圖案)(例如,孔隙重疊的區域,隨後孔隙並未重疊的區域,隨後孔隙再次重疊的區域等)。
在另一實例中,第13圖示意性圖示佈局406,其中一組孔隙329-6再次相對於另一組孔隙329-5旋轉5度。在佈局406中圖示軸線314,而這次選擇成讓孔隙329-6在第12圖的定向上的水平及垂直方向上環繞軸線314對稱佈置;然而,一列孔隙329-5係與軸線314對準,但軸線314係落在相鄰行的孔隙329-5之間。由於此佈置,孔隙329-6的列及行相對於孔隙329-5的列及行以並非徑向相關的方式從並未對準移動成對準,如在佈局405中。在佈局406的任一側上由虛線420界定的區域中,在孔隙329-5與329-6之間存在一些重疊。可以看出,若透過孔隙329-5與329-6的大陣列延伸,則存在孔隙329-5與329-6的不同列及/或行將要重疊的區域。在某些實施例中,此效果可以用於產生相應的不對稱處理效應。然而,這些都是不尋常的情況。更重要的是,可以看出,這些效果傾向於形成取決於孔隙329的尺寸、間隔、及佈置的有用的旋轉值的上限。
兩件式電極組件可以用於實現提供電漿產物或是操作或最佳化電漿設備的幾種新方法,現在論述其中的一些實例。第14圖係為參照以下的方法描述中的這些部件說明電漿處理系統450的主要部件的示意圖;在方法描述中亦可以參照本文其他圖式中所示的附加部件。系統450包括殼體445,系統450的其他部件直接或間接耦接到殼體445。換言之,殼體445可以作為用於系統450的其他部件的支撐部分(例如,第6A圖及第7圖的支撐部分335)。系統450包括可經操作以產生電漿230的電漿產生區域215。電漿產生區域215可以是具有與殼體445基本相同的寬度的腔室(例如,類似於第2圖的第一電漿產生區域215),或者可以是較小的腔室或遠端電漿系統(例如,類似於第2圖的遠端電漿系統201)。電漿產生區域215係與下游腔室333流體連通,下游腔室333可以是處理腔室(例如,容納用於支撐工件255的台座265),或者可以是中間腔室,其中處理腔室係位於更下游處。此處所示的具有電極326-7及326-8的兩件式電極組件325能夠修改電漿產生區域215與下游腔室333之間的流體連通。舉例而言,當電極326-7與326-8彼此靠近定位時(例如,其間的間隙G在0.005英寸至0.050英寸的範圍內,且電極326-7與326-8內的孔隙並未重疊),電極326-7與326-8將讓電漿230(若存在)保持在電漿產生區域215內,並防止大多數自由電子及/或離子通過下游腔室333。然而,若致動器或可調整的耦接器(並未圖示於第14圖中,參見第6A圖、第7圖、第8圖)將電極326-7及326-8中之任一者相對於彼此移動來打開間隙G,或者導致電極326-7及326-8的孔隙對準或幾乎對準(例如,間隙G距離對準的量的三倍以內),隨後可以允許電漿、自由電子、及/或離子物質從電漿產生區域215傳遞到下游腔室333。因此,若將從電漿產生區域215傳遞到下游腔室333的電漿產物在第一時間處稱為第一部分,且在電極326-7及326-8的相對位置改變之後的第二時間處稱為第二部分,則第一位置與第二位置之間的差異導致兩件式電極組件325相對於第一部分修改在第二部分中的離子化物質與中性物質的比例。
第15圖係為用於提供電漿產物的方法500的流程圖。在第一步驟502中,藉由向電漿產生腔室內的源氣體提供電磁功率來產生電漿,將源氣體的至少一部分轉換成電漿產物。步驟505的實例包括操作第2圖的遠端電漿系統201,以透過氣體入口組件205供應電漿產物;在第一電漿產生腔室215內產生電漿216;或者操作第14圖的電漿系統450,以在電漿產生腔室215內產生電漿230。第二步驟504讓電漿產物的至少一部分通過兩件式電極組件。兩件式電極組件應理解為包括如本文所揭示而佈置的電極326。換言之,電極中之第一者定義通過其中的複數個第一孔隙,第一電極的第一側面向電漿,使得電漿產物的一部分通過複數個第一孔隙到達第一平坦電極的第二平坦側。第一電極的實例包括第4圖的電極326-1;第5圖的326-3;第6A圖、第6B圖、及第7圖的326-5;及第14圖的326-7。電極中之第二者定義通過其中的複數個第二孔隙,第二電極的第三平坦側係設置成面向第一電極的第二側。第二電極係與第一電極耦接,使得第三平坦表面與第二平坦表面相鄰設置成具有間隙距離G。第一及第二孔隙係佈置於第一及第二電極內,使得第一孔隙中之任一者並未與第二孔隙中之任一者對準,而並未形成延伸通過第一及第二電極兩者的開放直線路徑。間隙距離G足以允許電漿產物的中性物質作為電漿產物的第一部分通過間隙,並且夠小以讓電漿產物的離子化物質與第一或第二電極相互作用,而不會通過兩件式電極組件。第二電極的實例包括第4圖的電極326-2;第5圖的326-4;第6A圖、第6B圖、及第7圖的326-6;及第14圖的326-8。間隙距離G的實例足以允許電漿產物的中性物質作為電漿產物的第一部分通過間隙,並且夠小以讓電漿產物的離子化物質與第一或第二電極相互作用,而不會通過兩件式電極組件,而間隙距離G係為0.005英寸至0.050英寸。
第16圖係為用於最佳化電漿設備的方法510的流程圖。第一步驟512提供電漿產生腔室、下游腔室、及電漿產生腔室與下游腔室之間的兩件式電極組件。兩件式電極組件可經操作以修改電漿產生腔室與下游腔室之間的流體連通。如第14圖所示,步驟512的實例係提供電漿產生腔室215與下游腔室333,而兩者之間具有兩件式電極組件325。第一電極定義通過其中的複數個第一孔隙。第一電極的第一表面面向電漿產生腔室,而第一電極的第二平坦表面背向電漿產生腔室。第二電極定義通過其中的複數個第二孔隙。第二電極的第三平坦表面面向第一電極的第二平坦表面,而第二電極的第四表面面向下游腔室。第一及第二電極的實例包括第4圖的電極326-1及326-2;第5圖的326-3及326-4;第6A圖、第6B圖、及第7圖的326-5及326-6;及第14圖的326-7及326-8。一或更多個致動器係與第一及第二電極耦接。一或更多個致動器回應於電輸入而可經操作以相對於第二電極的位置調整第一電極的位置。致動器的實例係為第6A圖、第7圖、及第8圖的致動器330或330-1至330-8中之任一者。一或更多個致動器可經操作以相對於第二電極提供第一電極的至少一個位置,使得第三平坦表面係設置成與第二平坦表面相鄰,其間的第一間隙距離係在0.005英寸與0.050英寸之間,且第一及第二孔隙係佈置於第一及第二電極內,使得第一孔隙中之任一者並未與第二孔隙中之任一者對準,而並未形成延伸通過第一及第二電極兩者的開放直線路徑。方法510的第二步驟514係相對於第二電極的位置在第一位置處建立第一電極的位置。步驟514的實例係建立第4圖的電極326-1及326-2;第5圖的326-3及326-4;第6A圖、第6B圖、及第7圖的326-5及326-6;及第14圖的326-7及326-8的相對位置。舉例而言,步驟514可以操作第6A圖、第7圖、及第8圖的致動器330或330-1至330-8中之任一者,以建立相對位置。方法510的第三步驟516操作電漿產生腔室,以讓藉此產生的電漿產物的至少一部分流經兩件式電極組件,並進入下游腔室,以處理工件。步驟516的實例係為操作第14圖的電漿系統450,以在電漿產生腔室215內產生電漿230,而讓藉此產生的電漿產物的至少一部分流入下游腔室333,並處理工件255。
方法510的第四步驟518係評估工件上的處理結果。步驟518的實例包括使用任何已知方法評估工件上的處理結果,例如但不限於視覺檢查、形成於其中的層或幾何形狀的光學或機械量測、基於掃描電子顯微鏡(SEM)或基於原子力顯微鏡(AFM)的量測、及/或電子量測(例如,形成於工件中或工件上的電路元件或實際電路的電阻率或其他特性)。步驟518亦可以包括進一步的處理步驟,以將工件放置於量測條件下(例如,剝離光阻或以其他方式準備工件以供特定儀器量測)。步驟518亦可以包括評估工件上的多個位置處的處理結果。進一步的步驟520操作電輸入,以回應於處理結果,而相對於第二電極的位置將第一電極的位置修改到第二位置。步驟520的實例包括操作第6A圖、第7圖、及第8圖中的致動器330或330-1至330-8中之任一者的電輸入,以重新放置第一或第二電極。可選擇地,可以重複步驟518及520,直到找到最佳處理點(亦即,第一及第二電極的最佳相對定位)。
因此,方法510提供處理控制機構,而得到本文論述的兩件式電極組件可以改變工件處的處理條件的事實的優點。舉例而言,步驟518可以展示應該在整個工件上改變的處理結果。在此情況下,步驟520可以重新定位第一及/或第二電極,而藉由增加或減少間隙距離G,或者藉由移動第一與第二電極來讓第一與第二電極上的孔隙之間的對準在電極的整個工作區域上受到影響,以允許更大或更小比例的自由電子及/或離子物質(例如,如第9C圖及第10B圖所示)。在特定情況下,步驟518可以展示一種以上的類型的處理結果(例如,蝕刻不同材料(例如,二氧化矽、氮化矽、多晶矽、一或更多種金屬、光阻、或類似者)及/或特定幾何形狀(例如,層的塊狀蝕刻)的影響以及清除轉角、溝道、或類似者中發現的殘餘物的能力)。在此特定情況下,可以重複步驟520,並且可以首先重新定位第一及/或第二電極,以最佳化一種類型的處理(例如,塊狀材料上的蝕刻步驟),隨後再最佳化不同類型的處理(例如,光阻條帶或用於清除殘餘物的蝕刻步驟)。
在另一實例中,步驟518可以展示應該改變以提供或消除工件上的偏置的處理結果。在此情況下,步驟520可以重新定位第一及/或第二電極,以改變第一與第二電極的平行度(亦即,在工作區域上提供具有傾斜或梯度的間隙G,如上面結合高度致動器330-3、330-4、及330-5所論述的)。在又一實例中,步驟518可以展示應該改變以提供或消除工件上的徑向效應的處理結果。在此情況下,步驟520可以重新定位第一及/或第二電極,以藉由增加或減少孔隙的重疊來增加或減少徑向效應,如上面結合第12圖所論述的。這些改變可以單獨進行,或者與電漿條件的其他改變(例如,輸入氣體流量、壓力、RF功率、及類似者)一起進行。此外,步驟518及520可以可選擇地重複,如第16圖中利用虛線箭頭圖示。
第17圖係為用於最佳化電漿設備的方法530的流程圖。第一步驟532提供電漿產生腔室、下游腔室、及電漿產生腔室與下游腔室之間的兩件式電極組件。兩件式電極組件可經操作以修改電漿產生腔室與下游腔室之間的流體連通。如第14圖所示,步驟532的實例係提供電漿產生腔室215與下游腔室333,而兩者之間具有兩件式電極組件325。第一電極定義通過其中的複數個第一孔隙。第一電極的第一表面面向電漿產生腔室,而第一電極的第二平坦表面背向電漿產生腔室。第二電極定義通過其中的複數個第二孔隙。第二電極的第三平坦表面面向第一電極的第二平坦表面,而第二電極的第四表面面向下游腔室。第一及第二孔隙係佈置於第一及第二電極內,使得第一孔隙中之任一者並未與第二孔隙中之任一者對準,而並未形成延伸通過第一及第二電極兩者的開放直線路徑。第一及第二電極的實例包括第4圖的電極326-1及326-2;第5圖的326-3及326-4;第6A圖、第6B圖、及第7圖的326-5及326-6;及第14圖的326-7及326-8。致動器係與第一及第二電極耦接。回應於電輸入,致動器可經操作以調整第二與第三平坦表面之間的間隙距離。致動器的實例係為第6A圖、第7圖、及第8圖的致動器330或330-1至330-3中之任一者。第二步驟534操作電輸入,以讓第一電極的一部分與第二電極的一部分接觸。步驟534的實例係操作第6A圖的致動器330,以讓第6A圖及第6B圖的電極326-5及326-6彼此接觸。可選擇地,第一電極與第二電極之間的接觸係出現於電極中之一者的突起與另一電極的表面之間;這種突起的實例係為第6B圖的區域360。亦為可選擇地,當第一與第二電極的一部分彼此接觸時,遠離接觸點的間隙距離小於足以允許離子化物質通過第一孔隙、間隙、及第二孔隙的間隙距離(例如,0.005英寸或更小)。第三步驟536建立對應於第一與第二電極的一部分之間的接觸的致動器的電輸入,以作為電輸入的零值。步驟536的實例係將電輸入提供到作為高度致動器330的步進馬達,直到表面302與區域360接觸,從而在電極接觸時釋放電輸入,以及在接觸位置處重新建立電輸入。步驟536的另一實例係使用電輸入來讓電極接觸,以及將接觸點處的電輸入的值儲存為零值。進一步的步驟538相對於零值而操作電輸入,以根據已知的距離回應將間隙距離維持在期望值處,以修改電漿產生腔室與下游腔室之間的流體連通。步驟538的實例係根據步進馬達的已知距離回應,而操作作為高度致動器330的步進馬達的電輸入,以將間隙距離G維持在所期望值處。
第18圖係為用於最佳化電漿設備的方法550的流程圖。第一步驟552提供電漿產生腔室、下游腔室、及電漿產生腔室與下游腔室之間的兩件式電極組件。兩件式電極組件可經操作以修改電漿產生腔室與下游腔室之間的流體連通。如第14圖所示,步驟552的實例係提供電漿產生腔室215與下游腔室333,而兩者之間具有兩件式電極組件325。第一電極定義通過其中的複數個第一孔隙。第一電極的第一表面面向電漿產生腔室,而第一電極的第二平坦表面背向電漿產生腔室。第二電極定義通過其中的複數個第二孔隙。第二電極的第三平坦表面面向第一電極的第二平坦表面,而第二電極的第四表面面向下游腔室。第二與第三表面係藉由間隙距離分開。第一及第二電極的實例包括第4圖的電極326-1及326-2;第5圖的326-3及326-4;第6A圖、第6B圖、及第7圖的326-5及326-6;及第14圖的326-7及326-8。一或更多個致動器係與第一及第二電極耦接。致動器可經操作以相對於第二電極的位置調整第一電極的位置。致動器的實例係為第6A圖、第7圖、及第8圖的致動器330或330-1至330-8中之任一者。致動器中之每一者的特徵係在於調整範圍。針對一或更多個致動器的調整範圍內的至少一個位置,第一及第二孔隙係佈置於第一及第二電極內,使得第一孔隙中之任一者並未與第二孔隙中之任一者對準,而並未形成延伸通過第一及第二電極兩者的開放直線路徑,且間隙距離係在0.0005英寸與0.050英寸之間。
方法550的第二步驟554操作一或更多個致動器,以相對於第二電極在第一位置處設置第一電極。步驟554的實例係操作第6A圖、第7圖、及第8圖的致動器330或330-1至330-8中之任一者,以建立第4圖的電極326-1及326-2;第5圖的326-3及326-4;第6A圖、第6B圖、及第7圖的326-5及326-6;及第14圖的326-7及326-8的相對位置。步驟554係為可選擇的,意指在方法550開始時,一或更多個致動器可以操作或者可以不操作(亦即,第一與第二電極可能已經位於所期望的第一位置)。可選擇地,亦可以在步驟554之前或之後將工件轉移到下游腔室中,但此舉並非必需。
方法510的第三步驟556操作電漿產生腔室,以讓藉此產生的電漿產物的至少第一部分流經兩件式電極組件,並進入下游腔室。步驟556的實例係操作第14圖的電漿系統450,以在電漿產生腔室215內產生電漿230,而讓藉此產生的電漿產物的至少第一部分流入下游腔室333。如上所述,由於電極之間的間隙距離夠小,及/或孔隙並未對準,某些電漿產物可能不會流入下游腔室,而讓電漿中所產生的自由電子及離子保持流經兩件式電極組件。此外,在步驟556中,可以處理或可以不處理工件。舉例而言,步驟556可以是腔室清潔或條件調整操作。第四步驟558操作一或更多個致動器,以相對於第二電極在第二位置處設置第一電極。步驟558的實例係操作第6A圖、第7圖、及第8圖的致動器330或330-1至330-8中之任一者,以建立第4圖的電極326-1及326-2;第5圖的326-3及326-4;第6A圖、第6B圖、及第7圖的326-5及326-6;及第14圖的326-7及326-8的相對位置,而移動第一電極與第二電極中之一或二者。舉例而言,步驟558可以增加或減少間隙距離G,並且可以在兩件式電極組件的整個工作區域上這樣做,或者可以在組件的各個位置處針對間隙距離賦予傾斜或梯度。作為修改間隙距離的替代或附加,步驟558可以平移及/或旋轉第一與第二電極中之一或二者,以修改其中的孔隙的接近或對準。步驟558可以與步驟552同時出現(亦即,在致動器移動電極時,可以停止產生電漿,或者可以繼續產生電漿)。此外,可選擇地,可以在步驟558之前或之後將工件轉移到下游腔室中,但此舉並非必需。
進一步的步驟560操作電漿產生腔室,以讓藉此產生的電漿產物的至少第二部分流經兩件式電極組件,並進入下游腔室。步驟560的實例係操作第14圖的電漿系統450,以在電漿產生腔室215內產生電漿230,而讓藉此產生的電漿產物的至少第一部分流入下游腔室333。再次,如上所述,由於電極之間的間隙距離夠小,及/或孔隙並未對準,某些電漿產物可能不會流入下游腔室,而讓電漿中所產生的自由電子及離子保持流經兩件式電極組件。再次,在步驟560中,亦可以處理或可以不處理工件。舉例而言,步驟560可以是腔室清潔或條件調整操作。
因為包括重新定位兩件式電極組件的一個或二個電極的能力,並且這樣的重新定位可以用於修改電漿產生腔室與下游腔室之間的流體連通,所以方法550能夠利用先前認為在電漿系統中無法使用的方式在下游腔室中進行處理。舉例而言,二個電極之間的間隙距離及/或孔隙對準的改變可以讓電漿處理的設計者或工程師能夠選擇性允許或限制電漿、自由電子、及/或離子物質流經電極組件,而不需要針對另一者實體改變一個電極(例如,面板、噴淋頭、離子消除器、電漿阻擋螢幕、或類似者)。
本文的實施例可以重新佈置,並且可以形成各種形狀。舉例而言,第2圖至第5圖、第6A圖、第7圖、第8圖、及第14圖所示的許多部件(例如,氣體入口組件205、電漿產生腔室215、面板217、離子消除器223、噴淋頭225、及工件支撐件或台座265)與其他者可以基本上環繞中心軸線徑向對稱,以用於處理作為工件255的圓形半導體晶圓。然而,這些特徵可以是與作為其他工件的電漿源一致的任何形狀。用於引入及分配氣體及/或電漿產物(例如,擴散器、面板、及類似者)的特徵的精確數量及位置亦可以不同。此外,多個位置可以用於產生電漿,而本文中的電漿處理系統的其他部件可以經配置以在通過這樣的系統朝向下游腔室或處理腔室時,添加或混合氣體與其他氣體及/或電漿產物。亦如第2圖至第5圖、第6A圖、第7圖、第8圖、及第14圖所建議,許多系統部件將在電漿處理單元的中心區域內形成穿孔平坦形狀,以在與平坦工件255的尺寸大致相同的工作區域291上提供均勻處理條件,而針對結構目的,系統部件亦可以在電漿處理系統的邊緣處形成不同形狀(例如,凸緣、厚度改變、固體無穿孔表面、及類似者)。在實施例中,工作區域的範圍可以變化,以適應不同的工件尺寸(特定但不限於作為工件255的晶圓的直徑)。當工件255係為晶圓時,工作區域291通常(但不一定總是)包圍中心區域,該中心區域延伸於每一這樣的系統部件的半徑的至少一半。
在以上描述中給定具體細節,以提供對於實施例的透徹理解。然而,應理解,可以在沒有這些具體細節的情況下實施這些實施例。舉例而言,可以圖示沒有不必要細節的已知處理、結構、及技術,以避免模糊實施例。儘管以上結合具體設備及方法而描述本揭示的原理,但應清楚理解,此描述僅藉由示例的方式進行,並非作為對於本揭示範圍的限制。
應理解,所示的佈置僅為示例性;其他實施例在配置上可以具有很大不同,並包括如何引入源氣體,如何佈置電極及絕緣體,如何在產生之後操控電漿及/或電漿產物,以及如何在絕緣體中形成凹槽。預期本文揭示的技術及設備係適用於這些及其他佈置,其中導電材料在使用期間堆積,而因此建立洩漏及/或放電路徑。
如本文及隨附專利申請範圍中所使用,除非上下文另有明確說明,否則單數形式「一」、「一個」、及「該」包括複數指稱。因此,舉例而言,指稱「處理」包括複數個這樣的處理,而指稱「電極」包括指稱該領域具有通常知識者已知的一或更多個電極及其等同物等等。此外,在本說明書及以下專利申請範圍中使用詞語「包含」、「所包含」、「包括」、及「所包括」時,意欲在指定所述特徵、整體、部件、或步驟的存在,但是不排除一或更多個其他特徵、整體、部件、步驟、動作、或群組的存在或附加。
100‧‧‧系統
102‧‧‧前開式晶圓盒(FOUP)
104‧‧‧機器臂
106‧‧‧托持區域
108a‧‧‧處理腔室
108b‧‧‧處理腔室
108c‧‧‧處理腔室
108d‧‧‧處理腔室
108e‧‧‧處理腔室
108f‧‧‧處理腔室
109a‧‧‧串聯區段
109b‧‧‧串聯區段
109c‧‧‧串聯區段
110‧‧‧第二機器臂
200‧‧‧電漿處理系統
201‧‧‧遠端電漿系統(RPS)
203‧‧‧冷卻板
205‧‧‧入口組件
210‧‧‧流體供應系統
215‧‧‧第一電漿產生腔室
216‧‧‧電漿
217‧‧‧面板
217-1‧‧‧面板
220‧‧‧絕緣環
223‧‧‧離子消除器
225‧‧‧噴淋頭
230‧‧‧電漿
233‧‧‧處理區域
240‧‧‧功率供應器
251‧‧‧工作區域
255‧‧‧工件
258‧‧‧供應區域
259‧‧‧孔隙
265‧‧‧台座
301‧‧‧第一平坦表面
302‧‧‧第二平坦表面
303‧‧‧第三平坦表面
304‧‧‧第四平坦表面
311‧‧‧水平方向
312‧‧‧水平方向
313‧‧‧旋轉方向
314‧‧‧中心軸線
319‧‧‧接地條帶
325‧‧‧兩件式電極組件
325-1‧‧‧兩件式電極組件
325-2‧‧‧兩件式電極組件
325-3‧‧‧兩件式電極組件
326-1‧‧‧電極
326-2‧‧‧電極
326-3‧‧‧電極
326-4‧‧‧電極
326-5‧‧‧電極
326-6‧‧‧電極
326-7‧‧‧電極
326-8‧‧‧電極
328‧‧‧倒角邊緣
329-1‧‧‧孔隙
329-2‧‧‧孔隙
329-3‧‧‧孔隙
329-4‧‧‧孔隙
329-5‧‧‧孔隙
329-6‧‧‧孔隙
329-7‧‧‧孔隙
329-8‧‧‧孔隙
330‧‧‧高度致動器
330-1‧‧‧高度致動器
330-2‧‧‧高度致動器
330-3‧‧‧高度致動器
330-4‧‧‧高度致動器
330-5‧‧‧高度致動器
330-6‧‧‧水平致動器
330-7‧‧‧水平致動器
330-8‧‧‧水平致動器
333‧‧‧下游腔室
335‧‧‧支撐部分
340‧‧‧懸吊機制
345‧‧‧環
350‧‧‧桿
355‧‧‧波紋管
360‧‧‧突起
401‧‧‧佈局
402‧‧‧佈局
402‧‧‧'佈局
403‧‧‧佈局
403'‧‧‧佈局
404‧‧‧佈局
405‧‧‧佈局
406‧‧‧佈局
420‧‧‧虛線
445‧‧‧殼體
450‧‧‧系統
500‧‧‧方法
502‧‧‧步驟
504‧‧‧步驟
510‧‧‧方法
512‧‧‧步驟
514‧‧‧步驟
516‧‧‧步驟
518‧‧‧步驟
520‧‧‧步驟
530‧‧‧方法
532‧‧‧步驟
534‧‧‧步驟
536‧‧‧步驟
538‧‧‧步驟
550‧‧‧方法
552‧‧‧步驟
554‧‧‧步驟
556‧‧‧步驟
558‧‧‧步驟
560‧‧‧步驟
藉由參照以下的圖式簡單說明與實施方式的結合,可以理解本揭示,其中在幾個圖式中使用相同的元件符號來指稱類似的部件。為了清楚說明之目的,圖式中的某些元件可能並未按比例繪製。可以藉由使用數字後面的括號內的第二數字(例如,電極326(1)、326(2)等)來指稱項目的特定實例,而沒有後面的數字係指稱任何這樣的項目(例如,電極326)。在圖示項目的多個實例的情況下,為了清楚說明,僅標記一些實例。
第1圖以平面視圖示意性圖示根據一或更多個實施例的電漿處理系統的主要元件。
第2圖以橫截面圖示意性圖示根據一或更多個實施例的電漿處理系統的一部分。
第3圖示意性圖示根據一或更多個實施例的形成多個孔隙的面板的一部分。
第4圖以橫截面圖示意性圖示根據一或更多個實施例的兩件式電極組件的一部分。
第5圖以橫截面圖示意性圖示根據一或更多個實施例的另一兩件式電極組件的一部分。
第6A圖以橫截面圖示意性圖示根據一或更多個實施例的包括二個電極及可調整的耦接器的兩件式電極組件。
第6B圖以放大視圖示意性圖示根據一或更多個實施例的第6A圖所標示的部分。
第7圖以橫截面圖示意性圖示根據一或更多個實施例的具有二個致動器的兩件式電極組件,二個致動器係用於相對於另一電極調整一個電極的垂直位置。
第8圖以平面視圖示意性圖示根據一或更多個實施例的具有六個致動器的組件,六個致動器係用於相對於底下的支撐部分調整環的位置。
第9A圖以平面視圖示意性圖示根據一或更多個實施例的可以形成於兩件式電極組件的電極中的孔隙的佈局。
第9B圖以平面視圖示意性圖示根據一或更多個實施例的包括第9A圖所示的孔隙與第二電極的孔隙(亦為矩形佈置)的佈局。
第9C圖以平面視圖示意性圖示根據一或更多個實施例的包括第9A圖及第9B圖所示的孔隙的佈局,其中一組孔隙偏移。
第10A圖以平面視圖示意性圖示根據一或更多個實施例的可以形成於上電極與下電極中之每一者中的六邊形佈置的孔隙的佈局。
第10B圖以平面視圖示意性圖示根據一或更多個實施例的第10A圖所示的孔隙的佈局,其中一組孔隙偏移,使得在每對孔隙之間出現小的重疊。
第11圖以平面視圖示意性圖示根據一或更多個實施例的徑向佈置的孔隙的佈局。
第12圖以平面視圖示意性圖示根據一或更多個實施例的相對於另一組孔隙旋轉一組孔隙的佈局。
第13圖以平面視圖示意性圖示根據一或更多個實施例的相對於另一組孔隙旋轉一組孔隙的另一佈局。
第14圖係為圖示根據一或更多個實施例的電漿處理系統的主要部件的示意圖。
第15圖係為根據一或更多個實施例的用於提供電漿產物的方法的流程圖。
第16圖係為根據一或更多個實施例的用於提供電漿產物的方法的流程圖。
第17圖係為根據一或更多個實施例的用於提供電漿產物的方法的流程圖。
第18圖係為根據一或更多個實施例的用於提供電漿產物的方法的流程圖。
在隨附圖式中,類似的部件及/或特徵可以具有相同的元件符號。此外,相同類型的各種部件可以藉由在元件符號後利用數字來區分,以區分類似部件。若在說明書中僅使用最前面的元件符號,則該描述係適用於具有相同最前面的元件符號的任何一個類似部件,而與數字無關。此外,圖式中的幾個係包括作為示意圖。應理解,圖式僅用於說明目的,除非特別聲明具有標度,否則不應視為比例。此外,作為示意圖,圖式係提供為幫助理解,並且可能不包括相較於實際表示的所有態樣或資訊,並且可能包括用於說明目的之多餘或誇大材料。
附加實施例及特徵係在下面的描述中部分闡述,並且部分對於該領域具有通常知識者來說在閱讀說明書後將變得顯而易見,或者可以藉由本發明的實踐而學習。可以藉由說明書中描述的手段、組合、及方法來實現及取得本發明的特徵及優點。
國內寄存資訊 (請依寄存機構、日期、號碼順序註記)
無
國外寄存資訊 (請依寄存國家、機構、日期、號碼順序註記)
無
325-3‧‧‧兩件式電極組件
326-5‧‧‧電極
326-6‧‧‧電極
330‧‧‧高度致動器
335‧‧‧支撐部分
340‧‧‧懸吊機制
345‧‧‧環
350‧‧‧桿
Claims (20)
- 一種用於分配電漿產物的設備,包含:一第一電極,包含藉由一第一電極厚度分開的一第一平坦表面與一第二平坦表面,該第一電極厚度係在0.125英寸與1.000英寸之間,其中該第一電極形成從該第一平坦表面直線延伸通過到該第二平坦表面的複數個第一孔隙;以及一第二電極,包含藉由一第二電極厚度分開的一第三平坦表面與一第四平坦表面,該第二電極厚度係在0.125英寸與1.000英寸之間,其中該第二電極形成從該第三平坦表面直線延伸通過到該第四平坦表面的複數個第二孔隙;其中:該第二電極透過一或更多個可調整的耦接器與該第一電極耦接,而使得該第三平坦表面與該第二平坦表面相鄰設置成具有一間隙,該間隙的特徵係在於具有一間隙距離;該一或更多個可調整的耦接器中之每一者都具有一調整範圍;以及針對該一或更多個可調整的耦接器中之每一者的該調整範圍內的至少一第一位置:該等第一及第二孔隙係佈置於該第一及第二電極 內,使得該等第一孔隙中之任一者並未與該等第二孔隙中之任一者對準,而並未形成延伸通過該第一及第二電極兩者的一開放直線路徑;以及該間隙距離係在0.005英寸與0.050英寸之間。
- 如請求項1所述之設備,其中該一或更多個可調整的耦接器可以使用一手動工具調整,但並未與致動器可操作地耦接。
- 如請求項1所述之設備,其中該一或更多個可調整的耦接器係為回應於電輸入而啟動的致動器。
- 如請求項1所述之設備,其中該第一及第二電極以及該一或更多個可調整的耦接器係與一或更多個RF接地條帶連接,以便該第一及第二電極以及該一或更多個可調整的耦接器係保持在一共同電位處。
- 如請求項1所述之設備,其中該一或更多個可調整的耦接器中之至少一者可經操作以相對於該第三平坦表面調整該第二平坦表面的平移及旋轉中之一或更多者,而基本上不改變該間隙距離,以便在該一或更多個可調整的耦接器中之該至少一者的該調整範圍內的一第二位置處,該等第一孔隙中之一或更多者至少在該等第二孔隙中之一或更多者的一橫向距離內,該橫向距離係小於該間隙距離的三倍。
- 如請求項5所述之設備,其中在該第二位置處,該等第一孔隙中之一或更多者與該等第二孔隙中之該一或更多者對準,以形成延伸通過該第一及第二電極兩者的一開放直線路徑。
- 如請求項1所述之設備,其中該一或更多個可調整的耦接器中之一第一者可經操作以調整該間隙距離。
- 如請求項7所述之設備,其中該一或更多個可調整的耦接器中之該第一者係為一單一可調整的耦接器,該單一可調整的耦接器可經操作以調整該間隙距離,而基本上並未改變該第二及第三平坦表面相對於彼此的平行度。
- 如請求項8所述之設備,進一步包含:一殼體;以及一懸吊機制;且其中:該第一及第二電極中之一者係與該殼體固定耦接,而該第一及第二電極中之另一者係與該懸吊機制耦接;該懸吊機制將該第一及第二電極中之另一者的一重量的至少一部分轉移到該殼體;以及該一或更多個可調整的耦接器中之該第一者與該懸 吊機制配合以調整該間隙距離,同時基本上並未改變該第二及第三平坦表面相對於彼此的平行度。
- 如請求項9所述之設備,其中:該一或更多個可調整的耦接器中之該第一者包含一步進馬達;以及該懸吊機制包含與一或更多個彈簧耦接的一支架。
- 如請求項7所述之設備,其中該一或更多個可調整的耦接器中之一第二者可經操作以調整該第二及第三平坦表面相對於彼此的平行度。
- 如請求項11所述之設備,其中:該一或更多個可調整的耦接器中之該第一者調整環繞該第二電極的一周邊的一第一附接點處的該間隙距離,以及該一或更多個可調整的耦接器中之第二及第三可調整的耦接器調整環繞該第二電極的該周邊的第二及第三附接點處的該間隙距離,以便該第一、第二、及第三可調整的耦接器可以相對於該第一電極以任何方位角度將一傾斜施加至該第二電極。
- 一種電漿處理設備,包含:一電漿產生器;一處理腔室,可經操作以接收及定位一工件,以進行處理;以及 如請求項1所述之設備,設置於該電漿產生器與該處理腔室之間,並加以密封,而使得藉由該電漿產生器產生的電漿產物必須通過該等第一孔隙、該間隙、及該等第二孔隙,以進入該處理腔室。
- 一種用於分配電漿產物的設備,包含:一第一電極,包含藉由一第一電極厚度分開的一第一平坦表面與一第二平坦表面,該第一電極厚度係在0.100英寸與1.000英寸之間,其中該第一電極形成從該第一平坦表面直線延伸通過到該第二平坦表面的複數個第一孔隙;以及一第二電極,包含藉由一第二電極厚度分開的一第三平坦表面與一第四平坦表面,該第二電極厚度係在0.100英寸與1.000英寸之間,其中該第二電極形成從該第三平坦表面直線延伸通過到該第四平坦表面的複數個第二孔隙;其中:該第二電極係與該第一電極固定耦接,使得該第三平坦表面與該第二平坦表面相鄰設置成具有0.005英寸至0.050英寸的一間隙距離;以及該等第一及第二孔隙係佈置於該第一及第二電極內,使得該等第一孔隙中之任一者並未與該等第二孔隙中之任一者對準,而並未形成延伸通過該第一及第二電 極兩者的一開放直線路徑。
- 如請求項14所述之設備,其中從該等第一孔隙中之一者內的任一點到該等第二孔隙中之任一者內的任一點的一橫向距離係大於該間隙距離的三倍。
- 如請求項14所述之設備,其中該等第一及第二孔隙中之每一者係為圓柱形,並具有相同的直徑。
- 如請求項14所述之設備,其中該等第一孔隙中之至少100個以一矩形佈置跨越該第一電極來佈置,而該等第二孔隙中之至少100個以一矩形佈置跨越該第二電極來佈置。
- 如請求項14所述之設備,其中該第一及第二電極係與一或更多個RF接地條帶連接,以便該第一及第二電極係保持在一共同電位處。
- 一種電漿源,包含:一電漿產生區域,經配置以用於在其中引入一或更多種源氣體;一RF功率供應器,用於向該一或更多種源氣體提供電磁功率,以激發該電漿產生區域內的一電漿;一兩件式電極組件,在一側界定該電漿產生區域,該兩件式電極組件包含:一第一電極,定義一第一平坦表面與一第二平坦表 面,其中:該第一平坦表面與該第二平坦表面係藉由一第一電極厚度分開,該第一電極厚度係在0.100英寸與1.000英寸之間,以及該第一電極形成從該第一平坦表面直線延伸通過到該第二平坦表面的複數個第一孔隙;以及一第二電極,定義一第三平坦表面與一第四平坦表面,其中:該第三平坦表面與該第四平坦表面係藉由一第二電極厚度分開,該第二電極厚度係在0.100英寸與1.000英寸之間,該第二電極形成從該第三平坦表面直線延伸通過到該第四平坦表面的複數個第二孔隙,該第二電極在該電漿產生區域的該側上與該第一電極耦接,使得該第三平坦表面設置成與該第二平坦表面相鄰;以及該第一電極與該第二電極相對於彼此固定或定位,以提供:該第一電極與該第二電極之間的一間隙,該間隙在該第二平坦表面與該第三平坦表面之間形成0.005英寸至0.050英寸的一間隙距離,以及相對於該等第二孔隙中之任一者內的任一點, 該等第一孔隙中之一者內的任一點的一橫向分隔係大於該間隙距離的三倍;以及該電漿源進一步包含一第二區域,該第二區域在至少一側上藉由該第二電極的該第四平坦表面界定,其中該間隙與該橫向分隔協作以基本上減少自由電子及離子化物質從該電漿產生區域傳輸到該第二區域。
- 如請求項19所述之電漿源,其中該第一及第二電極可以透過一或更多個可調整的耦接器相對於彼此定位,該一或更多個可調整的耦接器可經操作以調整下列中之至少一者:一間隙距離;以及該等第一及第二孔隙相對於彼此的橫向對準。
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WO2019204230A1 (en) | 2019-10-24 |
TW201944854A (zh) | 2019-11-16 |
US20200328065A1 (en) | 2020-10-15 |
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