JP5470357B2 - 半導体装置及び電子機器 - Google Patents

半導体装置及び電子機器 Download PDF

Info

Publication number
JP5470357B2
JP5470357B2 JP2011259248A JP2011259248A JP5470357B2 JP 5470357 B2 JP5470357 B2 JP 5470357B2 JP 2011259248 A JP2011259248 A JP 2011259248A JP 2011259248 A JP2011259248 A JP 2011259248A JP 5470357 B2 JP5470357 B2 JP 5470357B2
Authority
JP
Japan
Prior art keywords
electrode
film
liquid crystal
transistor
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011259248A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012053486A (ja
Inventor
肇 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP2011259248A priority Critical patent/JP5470357B2/ja
Publication of JP2012053486A publication Critical patent/JP2012053486A/ja
Application granted granted Critical
Publication of JP5470357B2 publication Critical patent/JP5470357B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/134309—Electrodes characterised by their geometrical arrangement
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133345—Insulating layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/134309—Electrodes characterised by their geometrical arrangement
    • G02F1/134363—Electrodes characterised by their geometrical arrangement for applying an electric field parallel to the substrate, i.e. in-plane switching [IPS]
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136213—Storage capacitors associated with the pixel electrode
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6757—Thin-film transistors [TFT] characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/421—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer
    • H10D86/423—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441—Interconnections, e.g. scanning lines
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/481—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs integrated with passive devices, e.g. auxiliary capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/134309—Electrodes characterised by their geometrical arrangement
    • G02F1/134372—Electrodes characterised by their geometrical arrangement for fringe field switching [FFS] where the common electrode is not patterned
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Geometry (AREA)
  • Power Engineering (AREA)
  • Liquid Crystal (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Thin Film Transistor (AREA)
  • Electroluminescent Light Sources (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Optical Filters (AREA)
JP2011259248A 2006-04-06 2011-11-28 半導体装置及び電子機器 Active JP5470357B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011259248A JP5470357B2 (ja) 2006-04-06 2011-11-28 半導体装置及び電子機器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006105618 2006-04-06
JP2006105618 2006-04-06
JP2011259248A JP5470357B2 (ja) 2006-04-06 2011-11-28 半導体装置及び電子機器

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007099070A Division JP5148912B2 (ja) 2006-04-06 2007-04-05 液晶表示装置及び半導体装置、並びに電子機器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012229031A Division JP5288665B2 (ja) 2006-04-06 2012-10-16 液晶表示装置

Publications (2)

Publication Number Publication Date
JP2012053486A JP2012053486A (ja) 2012-03-15
JP5470357B2 true JP5470357B2 (ja) 2014-04-16

Family

ID=38053458

Family Applications (17)

Application Number Title Priority Date Filing Date
JP2011259248A Active JP5470357B2 (ja) 2006-04-06 2011-11-28 半導体装置及び電子機器
JP2012229031A Active JP5288665B2 (ja) 2006-04-06 2012-10-16 液晶表示装置
JP2013115012A Active JP5323279B1 (ja) 2006-04-06 2013-05-31 半導体装置
JP2013147426A Withdrawn JP2014002392A (ja) 2006-04-06 2013-07-16 表示装置
JP2013173642A Active JP5376740B2 (ja) 2006-04-06 2013-08-23 液晶表示装置
JP2013209813A Active JP5619247B2 (ja) 2006-04-06 2013-10-07 表示装置、表示モジュール、及び電子機器
JP2013209812A Withdrawn JP2014044428A (ja) 2006-04-06 2013-10-07 表示装置、モジュール、及び電子機器
JP2014037951A Active JP5755349B2 (ja) 2006-04-06 2014-02-28 半導体装置
JP2015048206A Expired - Fee Related JP6012798B2 (ja) 2006-04-06 2015-03-11 液晶表示装置
JP2015106417A Withdrawn JP2015148828A (ja) 2006-04-06 2015-05-26 表示装置
JP2016181287A Withdrawn JP2017037316A (ja) 2006-04-06 2016-09-16 表示装置
JP2018079678A Active JP6821622B2 (ja) 2006-04-06 2018-04-18 表示装置
JP2019154467A Active JP6783363B2 (ja) 2006-04-06 2019-08-27 表示装置
JP2020176613A Withdrawn JP2021043449A (ja) 2006-04-06 2020-10-21 半導体装置
JP2021066964A Active JP6953646B2 (ja) 2006-04-06 2021-04-12 表示装置
JP2022100547A Active JP7326546B2 (ja) 2006-04-06 2022-06-22 表示装置
JP2023126413A Withdrawn JP2023162201A (ja) 2006-04-06 2023-08-02 液晶表示装置

Family Applications After (16)

Application Number Title Priority Date Filing Date
JP2012229031A Active JP5288665B2 (ja) 2006-04-06 2012-10-16 液晶表示装置
JP2013115012A Active JP5323279B1 (ja) 2006-04-06 2013-05-31 半導体装置
JP2013147426A Withdrawn JP2014002392A (ja) 2006-04-06 2013-07-16 表示装置
JP2013173642A Active JP5376740B2 (ja) 2006-04-06 2013-08-23 液晶表示装置
JP2013209813A Active JP5619247B2 (ja) 2006-04-06 2013-10-07 表示装置、表示モジュール、及び電子機器
JP2013209812A Withdrawn JP2014044428A (ja) 2006-04-06 2013-10-07 表示装置、モジュール、及び電子機器
JP2014037951A Active JP5755349B2 (ja) 2006-04-06 2014-02-28 半導体装置
JP2015048206A Expired - Fee Related JP6012798B2 (ja) 2006-04-06 2015-03-11 液晶表示装置
JP2015106417A Withdrawn JP2015148828A (ja) 2006-04-06 2015-05-26 表示装置
JP2016181287A Withdrawn JP2017037316A (ja) 2006-04-06 2016-09-16 表示装置
JP2018079678A Active JP6821622B2 (ja) 2006-04-06 2018-04-18 表示装置
JP2019154467A Active JP6783363B2 (ja) 2006-04-06 2019-08-27 表示装置
JP2020176613A Withdrawn JP2021043449A (ja) 2006-04-06 2020-10-21 半導体装置
JP2021066964A Active JP6953646B2 (ja) 2006-04-06 2021-04-12 表示装置
JP2022100547A Active JP7326546B2 (ja) 2006-04-06 2022-06-22 表示装置
JP2023126413A Withdrawn JP2023162201A (ja) 2006-04-06 2023-08-02 液晶表示装置

Country Status (4)

Country Link
US (8) US9213206B2 (enExample)
EP (2) EP1843194A1 (enExample)
JP (17) JP5470357B2 (enExample)
CN (4) CN110262140A (enExample)

Families Citing this family (130)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1843194A1 (en) 2006-04-06 2007-10-10 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device, semiconductor device, and electronic appliance
TWI444731B (zh) 2006-05-16 2014-07-11 Semiconductor Energy Lab 液晶顯示裝置和半導體裝置
US7847904B2 (en) * 2006-06-02 2010-12-07 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and electronic appliance
JP5216204B2 (ja) * 2006-10-31 2013-06-19 株式会社半導体エネルギー研究所 液晶表示装置及びその作製方法
JP5045997B2 (ja) 2007-01-10 2012-10-10 Ｎｌｔテクノロジー株式会社 半透過型液晶表示装置
US8105458B2 (en) * 2007-03-23 2012-01-31 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing liquid crystal display device
US8591694B2 (en) * 2007-03-23 2013-11-26 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing liquid crystal display device
KR101283282B1 (ko) 2007-07-25 2013-07-11 엘지이노텍 주식회사 발광 소자 패키지 및 그 제조방법
JP5235363B2 (ja) 2007-09-04 2013-07-10 株式会社ジャパンディスプレイイースト 液晶表示装置
US8264439B2 (en) * 2007-11-01 2012-09-11 Wintek Corporation Liquid crystal display panel and liquid crystal display device using the same
CN101878502B (zh) * 2007-11-29 2013-04-10 株式会社半导体能源研究所 液晶显示器件和电子器件
KR101446249B1 (ko) 2007-12-03 2014-10-01 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체장치 제조방법
KR20090080292A (ko) * 2008-01-21 2009-07-24 삼성전자주식회사 전원 공급 모듈 및 이를 갖는 백라이트 어셈블리
JP5246782B2 (ja) 2008-03-06 2013-07-24 株式会社ジャパンディスプレイウェスト 液晶装置および電子機器
US8194211B2 (en) * 2008-03-18 2012-06-05 Nlt Technologies, Ltd. Transflective liquid crystal display unit
US7876399B2 (en) * 2008-08-19 2011-01-25 Rogers Corporation Liquid crystal display with split electrode
JP5491833B2 (ja) * 2008-12-05 2014-05-14 株式会社半導体エネルギー研究所 半導体装置
EP2515337B1 (en) * 2008-12-24 2016-02-24 Semiconductor Energy Laboratory Co., Ltd. Driver circuit and semiconductor device
TWI549198B (zh) 2008-12-26 2016-09-11 半導體能源研究所股份有限公司 半導體裝置及其製造方法
TWI392918B (zh) * 2009-03-27 2013-04-11 Tpo Displays Corp 影像顯示系統及電子裝置
KR101752640B1 (ko) 2009-03-27 2017-06-30 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체장치
EP2437111A1 (en) * 2009-05-29 2012-04-04 Sharp Kabushiki Kaisha Liquid crystal panel, method for manufacturing same, and liquid crystal display device
KR101782176B1 (ko) 2009-07-18 2017-09-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제조 방법
US20110043726A1 (en) * 2009-08-18 2011-02-24 World Properties, Inc. Display with split electrode between two substrates
US9551910B2 (en) * 2009-10-02 2017-01-24 Unified Innovative Technology, Llc Active matrix substrate and display device
WO2011048923A1 (en) * 2009-10-21 2011-04-28 Semiconductor Energy Laboratory Co., Ltd. E-book reader
CN105702688B (zh) 2009-10-21 2020-09-08 株式会社半导体能源研究所 液晶显示器件及包括该液晶显示器件的电子设备
JP2011114302A (ja) * 2009-11-30 2011-06-09 Sony Corp 半導体素子の製造方法及び半導体素子、並びに固体撮像素子及び固体撮像装置
KR101800038B1 (ko) 2009-12-04 2017-11-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
US8759917B2 (en) 2010-01-04 2014-06-24 Samsung Electronics Co., Ltd. Thin-film transistor having etch stop multi-layer and method of manufacturing the same
KR101805378B1 (ko) * 2010-01-24 2017-12-06 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치와 이의 제조 방법
KR101820776B1 (ko) 2010-02-19 2018-01-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR20120120458A (ko) 2010-02-26 2012-11-01 가부시키가이샤 한도오따이 에네루기 켄큐쇼 액정 표시 장치
JP4941572B2 (ja) * 2010-03-31 2012-05-30 カシオ計算機株式会社 半導体装置及び発光装置並びに電子機器
US8854583B2 (en) 2010-04-12 2014-10-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and liquid crystal display device
US9230994B2 (en) 2010-09-15 2016-01-05 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device
JP2012078692A (ja) * 2010-10-05 2012-04-19 Hitachi Displays Ltd 表示装置
JP5351118B2 (ja) * 2010-10-05 2013-11-27 株式会社ジャパンディスプレイ 液晶表示装置
CN102453867A (zh) * 2010-10-27 2012-05-16 鸿富锦精密工业（深圳）有限公司 镀膜件及其制备方法
KR101835525B1 (ko) * 2011-02-17 2018-04-20 삼성디스플레이 주식회사 표시 장치 및 그 제조 방법
JP5836846B2 (ja) 2011-03-11 2015-12-24 株式会社半導体エネルギー研究所 液晶表示装置の作製方法
CN102244036B (zh) * 2011-07-08 2013-11-06 信利半导体有限公司 一种广视角液晶显示器的电极绝缘层的制作方法
CN102629039B (zh) * 2011-12-16 2015-01-07 京东方科技集团股份有限公司 阵列基板及液晶显示器
KR102099262B1 (ko) 2012-07-11 2020-04-09 가부시키가이샤 한도오따이 에네루기 켄큐쇼 액정 표시 장치, 및 액정 표시 장치의 구동 방법
CN108054175A (zh) 2012-08-03 2018-05-18 株式会社半导体能源研究所 半导体装置
JP2014199899A (ja) 2012-08-10 2014-10-23 株式会社半導体エネルギー研究所 半導体装置
US8937307B2 (en) * 2012-08-10 2015-01-20 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
DE102013216824B4 (de) 2012-08-28 2024-10-17 Semiconductor Energy Laboratory Co., Ltd. Halbleitervorrichtung
TWI611511B (zh) 2012-08-31 2018-01-11 半導體能源研究所股份有限公司 半導體裝置
US9035932B2 (en) 2012-08-31 2015-05-19 Apple Inc. Thermally compensated pixels for liquid crystal displays (LCDS)
US9018624B2 (en) 2012-09-13 2015-04-28 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic appliance
KR102400509B1 (ko) 2012-09-13 2022-05-20 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치
US8981372B2 (en) 2012-09-13 2015-03-17 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic appliance
US8927985B2 (en) 2012-09-20 2015-01-06 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US20140117511A1 (en) * 2012-10-30 2014-05-01 Infineon Technologies Ag Passivation Layer and Method of Making a Passivation Layer
KR101969954B1 (ko) * 2012-12-17 2019-04-18 삼성디스플레이 주식회사 액정 표시 장치
US9905585B2 (en) 2012-12-25 2018-02-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising capacitor
KR102798241B1 (ko) 2012-12-25 2025-04-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
TWI607510B (zh) 2012-12-28 2017-12-01 半導體能源研究所股份有限公司 半導體裝置及半導體裝置的製造方法
KR102639256B1 (ko) 2012-12-28 2024-02-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 및 반도체 장치의 제작 방법
US8981374B2 (en) 2013-01-30 2015-03-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US9269315B2 (en) 2013-03-08 2016-02-23 Semiconductor Energy Laboratory Co., Ltd. Driving method of semiconductor device
US9915848B2 (en) 2013-04-19 2018-03-13 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic device
US9231002B2 (en) 2013-05-03 2016-01-05 Semiconductor Energy Laboratory Co., Ltd. Display device and electronic device
US9704894B2 (en) 2013-05-10 2017-07-11 Semiconductor Energy Laboratory Co., Ltd. Display device including pixel electrode including oxide
TWI639235B (zh) 2013-05-16 2018-10-21 半導體能源研究所股份有限公司 半導體裝置
JP6475424B2 (ja) 2013-06-05 2019-02-27 株式会社半導体エネルギー研究所 半導体装置
TWI649606B (zh) 2013-06-05 2019-02-01 日商半導體能源研究所股份有限公司 顯示裝置及電子裝置
CN103346160B (zh) * 2013-07-10 2016-04-06 京东方科技集团股份有限公司 阵列基板及其制作方法、显示装置
US9818763B2 (en) 2013-07-12 2017-11-14 Semiconductor Energy Laboratory Co., Ltd. Display device and method for manufacturing display device
KR102244553B1 (ko) 2013-08-23 2021-04-23 가부시키가이샤 한도오따이 에네루기 켄큐쇼 용량 소자 및 반도체 장치
TWI708981B (zh) 2013-08-28 2020-11-01 日商半導體能源研究所股份有限公司 顯示裝置
US10008513B2 (en) 2013-09-05 2018-06-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP2014074917A (ja) * 2013-11-20 2014-04-24 Semiconductor Energy Lab Co Ltd 発光装置
US20150155313A1 (en) 2013-11-29 2015-06-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP2015118193A (ja) 2013-12-18 2015-06-25 株式会社ジャパンディスプレイ 液晶表示装置
CN103943629B (zh) * 2013-12-23 2016-09-14 厦门天马微电子有限公司 Tft阵列基板、显示面板和显示装置
WO2015132694A1 (en) 2014-03-07 2015-09-11 Semiconductor Energy Laboratory Co., Ltd. Touch sensor, touch panel, and manufacturing method of touch panel
KR102212245B1 (ko) * 2014-06-17 2021-02-04 엘지디스플레이 주식회사 곡면 액정표시장치
CN107155373B (zh) * 2014-06-18 2019-01-15 艾克斯瑟乐普林特有限公司 微组装led显示器
JP6375165B2 (ja) 2014-07-23 2018-08-15 株式会社ジャパンディスプレイ 表示装置
KR101640803B1 (ko) 2014-09-26 2016-07-20 엘지디스플레이 주식회사 유기발광다이오드 표시장치 및 그 제조방법
KR20160037060A (ko) * 2014-09-26 2016-04-05 서울바이오시스 주식회사 발광소자 및 그 제조 방법
WO2016063169A1 (en) 2014-10-23 2016-04-28 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element
US10680017B2 (en) 2014-11-07 2020-06-09 Semiconductor Energy Laboratory Co., Ltd. Light-emitting element including EL layer, electrode which has high reflectance and a high work function, display device, electronic device, and lighting device
CN104538356B (zh) * 2015-01-07 2017-10-03 京东方科技集团股份有限公司 一种阵列基板及其制作方法、显示装置
KR20160086488A (ko) * 2015-01-09 2016-07-20 삼성디스플레이 주식회사 액정 렌즈 유닛 및 3d 표시 장치
CN104538396B (zh) * 2015-01-16 2017-06-30 京东方科技集团股份有限公司 半导体层、半导体器件、阵列基板和显示装置的制备方法
JP6758844B2 (ja) 2015-02-13 2020-09-23 株式会社半導体エネルギー研究所 表示装置
JP6662665B2 (ja) 2015-03-19 2020-03-11 株式会社半導体エネルギー研究所 液晶表示装置及び該液晶表示装置を用いた電子機器
US9842938B2 (en) 2015-03-24 2017-12-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and display device including semiconductor device
CN104698525A (zh) * 2015-03-31 2015-06-10 合肥京东方光电科技有限公司 一种偏光片、其制作方法、液晶显示面板及显示装置
CN104808401B (zh) * 2015-04-15 2018-01-26 深圳市华星光电技术有限公司 一种液晶显示面板
US10002970B2 (en) 2015-04-30 2018-06-19 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, manufacturing method of the same, or display device including the same
US10139663B2 (en) * 2015-05-29 2018-11-27 Semiconductor Energy Laboratory Co., Ltd. Input/output device and electronic device
JP2017003976A (ja) 2015-06-15 2017-01-05 株式会社半導体エネルギー研究所 表示装置
US20170052404A1 (en) * 2015-08-18 2017-02-23 Samsung Electronics Co., Ltd. Display panel and display apparatus using the same
CN106483725B (zh) * 2015-08-28 2020-01-03 群创光电股份有限公司 液晶显示面板
CN105068339B (zh) * 2015-09-01 2018-06-01 深圳市华星光电技术有限公司 Hva型液晶显示面板
CN105116621A (zh) * 2015-09-01 2015-12-02 深圳市华星光电技术有限公司 液晶面板的制造方法
KR102381215B1 (ko) * 2015-09-08 2022-03-30 엘지디스플레이 주식회사 액정 표시 장치 및 그 제조방법
WO2017098376A1 (en) * 2015-12-11 2017-06-15 Semiconductor Energy Laboratory Co., Ltd. Display device and separation method
US10114263B2 (en) 2015-12-18 2018-10-30 Semiconductor Energy Laboratory Co., Ltd. Display device
CN105448823A (zh) * 2015-12-28 2016-03-30 昆山龙腾光电有限公司 氧化物薄膜晶体管阵列基板及制作方法与液晶显示面板
JP6692645B2 (ja) * 2016-01-15 2020-05-13 株式会社ジャパンディスプレイ 半導体装置
CN105529337B (zh) * 2016-01-28 2018-12-11 深圳市华星光电技术有限公司 柔性阵列基板结构及其制造方法
US10008483B2 (en) 2016-04-05 2018-06-26 X-Celeprint Limited Micro-transfer printed LED and color filter structure
CN205645818U (zh) * 2016-05-18 2016-10-12 武汉华星光电技术有限公司 一种oled显示面板
JP6563367B2 (ja) * 2016-06-15 2019-08-21 株式会社Ｊｏｌｅｄ アクティブマトリクス基板、アクティブマトリクス基板の製造方法および表示装置
JP6987188B2 (ja) * 2016-09-05 2021-12-22 株式会社ジャパンディスプレイ 半導体装置
JP6736430B2 (ja) * 2016-09-05 2020-08-05 株式会社ジャパンディスプレイ 半導体装置
TWI625847B (zh) * 2016-09-09 2018-06-01 友達光電股份有限公司 畫素結構及其製作方法
EP3535783A4 (en) * 2016-11-02 2020-07-01 Boe Technology Group Co. Ltd. MATRIX SUBSTRATE, DISPLAY PANEL, AND DISPLAY APPARATUS INCLUDING SAME, AND MANUFACTURING METHOD THEREOF
JP6779109B2 (ja) 2016-11-21 2020-11-04 三菱電機株式会社 薄膜トランジスタ基板及びその製造方法、並びに、表示装置
US10269834B2 (en) * 2017-01-10 2019-04-23 A.U. Vista, Inc. TFT array for use in a high-resolution display panel and method for making same
WO2018150620A1 (ja) 2017-02-16 2018-08-23 三菱電機株式会社 薄膜トランジスタ、薄膜トランジスタ基板、液晶表示装置、及び、薄膜トランジスタ基板の製造方法
JP2018146697A (ja) * 2017-03-03 2018-09-20 株式会社ジャパンディスプレイ 表示装置
JP6941503B2 (ja) * 2017-08-24 2021-09-29 スタンレー電気株式会社 車両用前照灯システム
JP2019074684A (ja) 2017-10-18 2019-05-16 シャープ株式会社 表示パネル用基板の製造方法
CN107884980B (zh) * 2017-10-31 2021-01-19 合肥智杰精密设备有限公司 一种用于液晶显示屏的透明导电基板
US11587981B2 (en) * 2018-05-11 2023-02-21 Semiconductor Energy Laboratory Co., Ltd. Display device including a semi-transmissive layer
JP7205394B2 (ja) 2018-07-06 2023-01-17 株式会社デンソー クラッチ装置
JP2020126200A (ja) * 2019-02-06 2020-08-20 株式会社ジャパンディスプレイ 表示装置
US10935790B2 (en) * 2019-02-07 2021-03-02 Facebook Technologies, Llc Active flexible liquid crystal optical devices
US10777153B1 (en) * 2019-05-16 2020-09-15 Himax Display, Inc. Method for calculating pixel voltage for liquid crystal on silicon display device
CN110989259B (zh) 2019-12-12 2023-01-10 京东方科技集团股份有限公司 阵列基板及其制备方法、显示装置
CN112130382B (zh) * 2020-09-30 2022-01-07 厦门天马微电子有限公司 一种显示面板及显示装置
US20230395579A1 (en) * 2020-10-19 2023-12-07 Vuereal Inc. Flip chip microdevice structure
KR20240149930A (ko) * 2022-02-17 2024-10-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
US20240361101A1 (en) * 2023-04-25 2024-10-31 Lead & Steel LLC Sight system

Family Cites Families (265)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2110825B (en) * 1981-11-06 1986-04-30 Outokumpu Oy Apparatus for detecting metal objects
JPS58139173A (ja) 1982-02-15 1983-08-18 株式会社東芝 マトリクス形液晶表示装置
JPS60198861A (ja) 1984-03-23 1985-10-08 Fujitsu Ltd 薄膜トランジスタ
JPH0736030B2 (ja) 1984-10-15 1995-04-19 松下電器産業株式会社 入力レベル表示装置
JPS61102628A (ja) * 1984-10-25 1986-05-21 Sony Corp 液晶表示装置
JPH0244256B2 (ja) 1987-01-28 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho Ingazn2o5deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho
JPH0244260B2 (ja) 1987-02-24 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho Ingazn5o8deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho
JPS63210023A (ja) 1987-02-24 1988-08-31 Natl Inst For Res In Inorg Mater ＩｎＧａＺｎ↓４Ｏ↓７で示される六方晶系の層状構造を有する化合物およびその製造法
JPH0244258B2 (ja) 1987-02-24 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho Ingazn3o6deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho
JPH0244262B2 (ja) 1987-02-27 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho Ingazn6o9deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho
JPH0244263B2 (ja) 1987-04-22 1990-10-03 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho Ingazn7o10deshimesarerurotsuhoshokeinosojokozoojusurukagobutsuoyobisonoseizoho
JP2622183B2 (ja) 1990-04-05 1997-06-18 シャープ株式会社 アクティブマトリクス表示装置
JPH05251705A (ja) 1992-03-04 1993-09-28 Fuji Xerox Co Ltd 薄膜トランジスタ
JP3587537B2 (ja) * 1992-12-09 2004-11-10 株式会社半導体エネルギー研究所 半導体装置
JPH0736030A (ja) 1993-07-23 1995-02-07 Sharp Corp 反射型液晶表示装置
JPH07104312A (ja) 1993-09-30 1995-04-21 Sanyo Electric Co Ltd 液晶表示装置の製造方法
JPH07325323A (ja) * 1994-06-02 1995-12-12 Matsushita Electric Ind Co Ltd 液晶表示装置
TW289097B (enExample) * 1994-08-24 1996-10-21 Hitachi Ltd
JP3464287B2 (ja) 1994-09-05 2003-11-05 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP3479375B2 (ja) 1995-03-27 2003-12-15 科学技術振興事業団 亜酸化銅等の金属酸化物半導体による薄膜トランジスタとｐｎ接合を形成した金属酸化物半導体装置およびそれらの製造方法
JP3644647B2 (ja) 1995-04-25 2005-05-11 Ｈｏｙａ株式会社 導電性酸化物およびそれを用いた電極
EP0820644B1 (en) 1995-08-03 2005-08-24 Koninklijke Philips Electronics N.V. Semiconductor device provided with transparent switching element
TW505801B (en) * 1995-10-12 2002-10-11 Hitachi Ltd In-plane field type liquid crystal display device comprising a structure prevented from charging with electricity
JPH09146108A (ja) 1995-11-17 1997-06-06 Semiconductor Energy Lab Co Ltd 液晶表示装置およびその駆動方法
JP3625598B2 (ja) * 1995-12-30 2005-03-02 三星電子株式会社 液晶表示装置の製造方法
JPH09292504A (ja) 1996-02-27 1997-11-11 Sharp Corp 反射板及びその作製方法及びその反射板を用いた反射型液晶表示装置
KR100374737B1 (ko) 1996-06-28 2003-07-16 세이코 엡슨 가부시키가이샤 트랜지스터형성방법,그트랜지스터를포함하는회로,액티브매트릭스기판의제조방법,표시장치의제조방법,및프로젝터및전자기기
US6429120B1 (en) 2000-01-18 2002-08-06 Micron Technology, Inc. Methods and apparatus for making integrated-circuit wiring from copper, silver, gold, and other metals
US7195960B2 (en) 1996-06-28 2007-03-27 Seiko Epson Corporation Thin film transistor, manufacturing method thereof, and circuit and liquid crystal display device using the thin film transistor
JP3708637B2 (ja) * 1996-07-15 2005-10-19 株式会社半導体エネルギー研究所 液晶表示装置
JP2701832B2 (ja) 1996-07-31 1998-01-21 株式会社日立製作所 液晶表示装置
JP3567183B2 (ja) 1996-08-19 2004-09-22 大林精工株式会社 液晶表示装置
US6532053B2 (en) 1996-12-18 2003-03-11 Hitachi, Ltd. Transverse electric field system liquid crystal display device suitable for improving aperture ratio
US20010011981A1 (en) * 1996-12-27 2001-08-09 Tsunenori Yamamoto Active matrix addressed liquid crystal display device
JPH10186405A (ja) 1996-12-27 1998-07-14 Hitachi Ltd アクティブマトリクス型液晶表示装置
US6335770B1 (en) * 1997-07-22 2002-01-01 Lg. Philips Lcd Co., Ltd. In-plane switching mode LCD with specific arrangement of common bus line, data electrode, and common electrode
KR100497691B1 (ko) * 1997-08-21 2005-07-01 가부시키가이샤 히타치세이사쿠쇼 개구율 향상에 적합한 횡전계 방식 액정 표시 장치
TW387997B (en) 1997-12-29 2000-04-21 Hyundai Electronics Ind Liquid crystal display and fabrication method
JP4170454B2 (ja) 1998-07-24 2008-10-22 Ｈｏｙａ株式会社 透明導電性酸化物薄膜を有する物品及びその製造方法
KR100299381B1 (ko) * 1998-08-24 2002-06-20 박종섭 고개구율 및 고투과율을 갖는 액정표시장치 및 그 제조방법
JP2000081637A (ja) 1998-09-03 2000-03-21 Nec Corp 液晶表示装置
KR100306546B1 (ko) * 1998-09-28 2001-11-02 마찌다 가쯔히꼬 액정 표시 장치의 제조 방법
JP2004157552A (ja) 1998-09-28 2004-06-03 Sharp Corp 液晶表示装置の製造方法
JP2000150861A (ja) 1998-11-16 2000-05-30 Tdk Corp 酸化物薄膜
JP3276930B2 (ja) 1998-11-17 2002-04-22 科学技術振興事業団 トランジスタ及び半導体装置
EP1182494B1 (en) * 1999-03-25 2005-10-26 Citizen Watch Co. Ltd. Liquid crystal panel
JP2000284326A (ja) 1999-03-30 2000-10-13 Hitachi Ltd 液晶表示装置とその製造方法
TWI255957B (en) 1999-03-26 2006-06-01 Hitachi Ltd Liquid crystal display device and method of manufacturing the same
JP4174951B2 (ja) 1999-04-07 2008-11-05 株式会社日立製作所 液晶表示装置
US6630977B1 (en) * 1999-05-20 2003-10-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device with capacitor formed around contact hole
US6449026B1 (en) 1999-06-25 2002-09-10 Hyundai Display Technology Inc. Fringe field switching liquid crystal display and method for manufacturing the same
KR100494682B1 (ko) 1999-06-30 2005-06-13 비오이 하이디스 테크놀로지 주식회사 액정표시소자 및 그 제조방법
TW478014B (en) 1999-08-31 2002-03-01 Semiconductor Energy Lab Semiconductor device and method of manufacturing thereof
TW460731B (en) 1999-09-03 2001-10-21 Ind Tech Res Inst Electrode structure and production method of wide viewing angle LCD
JP4724339B2 (ja) * 1999-09-07 2011-07-13 株式会社日立製作所 液晶表示装置
TW495626B (en) * 1999-09-13 2002-07-21 Ind Tech Res Inst Electrode structure for a wide viewing angle liquid crystal display
JP4755748B2 (ja) 1999-09-24 2011-08-24 東芝モバイルディスプレイ株式会社 平面表示装置
KR100433596B1 (ko) * 1999-10-21 2004-05-31 마쯔시다덴기산교 가부시키가이샤 액정표시장치
WO2001033292A1 (fr) * 1999-10-29 2001-05-10 Hitachi, Ltd. Dispositif d'affichage a cristaux liquides
JP4727029B2 (ja) 1999-11-29 2011-07-20 株式会社半導体エネルギー研究所 Ｅｌ表示装置、電気器具及びｅｌ表示装置用の半導体素子基板
JP2001166321A (ja) 1999-12-10 2001-06-22 Hitachi Ltd 液晶表示装置
JP2001175198A (ja) 1999-12-14 2001-06-29 Semiconductor Energy Lab Co Ltd 半導体装置およびその作製方法
JP2001174818A (ja) 1999-12-15 2001-06-29 Hitachi Ltd 液晶表示装置
JP3420201B2 (ja) * 1999-12-22 2003-06-23 日本電気株式会社 液晶表示装置
JP4016558B2 (ja) 1999-12-24 2007-12-05 セイコーエプソン株式会社 アクティブマトリクス基板とその製造方法及び電気光学装置並びに電子機器
JP2001201754A (ja) 2000-01-19 2001-07-27 Matsushita Electric Ind Co Ltd 液晶表示装置
JP2001209069A (ja) 2000-01-24 2001-08-03 Hitachi Ltd 液晶表示装置
JP4387065B2 (ja) * 2000-01-26 2009-12-16 株式会社半導体エネルギー研究所 液晶表示装置および液晶表示装置の作製方法
US6646692B2 (en) 2000-01-26 2003-11-11 Semiconductor Energy Laboratory Co., Ltd. Liquid-crystal display device and method of fabricating the same
TW494447B (en) 2000-02-01 2002-07-11 Semiconductor Energy Lab Semiconductor device and manufacturing method thereof
JP4712198B2 (ja) * 2000-02-01 2011-06-29 株式会社半導体エネルギー研究所 表示装置の作製方法
US7023021B2 (en) 2000-02-22 2006-04-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same
JP4683688B2 (ja) * 2000-03-16 2011-05-18 株式会社半導体エネルギー研究所 液晶表示装置の作製方法
JP4393662B2 (ja) 2000-03-17 2010-01-06 株式会社半導体エネルギー研究所 液晶表示装置の作製方法
US6507383B1 (en) * 2000-03-21 2003-01-14 Hitachi, Ltd. In-plane switching liquid crystal display apparatus with reduced capacitance between pixel electrodes and common electrodes
TW521237B (en) * 2000-04-18 2003-02-21 Semiconductor Energy Lab Light emitting device
JP3785900B2 (ja) * 2000-04-28 2006-06-14 株式会社日立製作所 液晶表示装置とその製造方法
US7492417B2 (en) 2000-05-11 2009-02-17 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing liquid crystal display device
JP2001324725A (ja) 2000-05-12 2001-11-22 Hitachi Ltd 液晶表示装置およびその製造方法
JP4472116B2 (ja) * 2000-05-19 2010-06-02 Ｎｅｃ液晶テクノロジー株式会社 アクティブマトリクス型液晶表示装置
KR100736114B1 (ko) * 2000-05-23 2007-07-06 엘지.필립스 엘시디 주식회사 횡전계 방식의 액정표시장치 및 그 제조방법
TW538246B (en) * 2000-06-05 2003-06-21 Semiconductor Energy Lab Display panel, display panel inspection method, and display panel manufacturing method
JP4089858B2 (ja) 2000-09-01 2008-05-28 国立大学法人東北大学 半導体デバイス
KR20020038482A (ko) 2000-11-15 2002-05-23 모리시타 요이찌 박막 트랜지스터 어레이, 그 제조방법 및 그것을 이용한표시패널
JP2003050405A (ja) * 2000-11-15 2003-02-21 Matsushita Electric Ind Co Ltd 薄膜トランジスタアレイ、その製造方法およびそれを用いた表示パネル
JP4667587B2 (ja) 2000-12-01 2011-04-13 株式会社日立製作所 液晶表示装置
JP2002182228A (ja) 2000-12-13 2002-06-26 Seiko Epson Corp 液晶表示装置および電子機器
JP3949897B2 (ja) * 2001-01-29 2007-07-25 株式会社日立製作所 液晶表示装置
JP3750055B2 (ja) * 2001-02-28 2006-03-01 株式会社日立製作所 液晶表示装置
JP5165169B2 (ja) 2001-03-07 2013-03-21 株式会社ジャパンディスプレイイースト 液晶表示装置
JP3997731B2 (ja) 2001-03-19 2007-10-24 富士ゼロックス株式会社 基材上に結晶性半導体薄膜を形成する方法
JP4757393B2 (ja) * 2001-03-23 2011-08-24 Ｎｅｃ液晶テクノロジー株式会社 液晶表示装置及びその製造方法
JP2002289859A (ja) 2001-03-23 2002-10-04 Minolta Co Ltd 薄膜トランジスタ
JP4306142B2 (ja) 2001-04-24 2009-07-29 株式会社日立製作所 画像表示装置及びその製造方法
KR20020083249A (ko) * 2001-04-26 2002-11-02 삼성전자 주식회사 배선의 접촉 구조 및 그의 제조 방법과 이를 포함하는박막 트랜지스터 기판 및 그 제조 방법
KR100743101B1 (ko) * 2001-05-07 2007-07-27 엘지.필립스 엘시디 주식회사 액정표시장치 및 그 제조방법과 이를 이용한 화소리페어방법
JP4556354B2 (ja) 2001-07-09 2010-10-06 セイコーエプソン株式会社 駆動回路、装置、及び電子機器
JP2003068757A (ja) 2001-08-30 2003-03-07 Sony Corp アクティブマトリクス基板及びその製造方法
JP3925839B2 (ja) 2001-09-10 2007-06-06 シャープ株式会社 半導体記憶装置およびその試験方法
JP4090716B2 (ja) 2001-09-10 2008-05-28 雅司 川崎 薄膜トランジスタおよびマトリクス表示装置
JP2003172946A (ja) 2001-09-28 2003-06-20 Fujitsu Display Technologies Corp 液晶表示装置用基板及びそれを用いた液晶表示装置
JP3899886B2 (ja) 2001-10-10 2007-03-28 株式会社日立製作所 画像表示装置
US7365713B2 (en) 2001-10-24 2008-04-29 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and driving method thereof
JP2003202834A (ja) 2001-10-24 2003-07-18 Semiconductor Energy Lab Co Ltd 半導体装置およびその駆動方法
WO2003040441A1 (fr) 2001-11-05 2003-05-15 Japan Science And Technology Agency Film mince monocristallin homologue a super-reseau naturel, procede de preparation et dispositif dans lequel est utilise ledit film mince monocristallin
JP4164562B2 (ja) 2002-09-11 2008-10-15 独立行政法人科学技術振興機構 ホモロガス薄膜を活性層として用いる透明薄膜電界効果型トランジスタ
JP4019697B2 (ja) 2001-11-15 2007-12-12 株式会社日立製作所 液晶表示装置
US7483001B2 (en) 2001-11-21 2009-01-27 Seiko Epson Corporation Active matrix substrate, electro-optical device, and electronic device
JP3939140B2 (ja) * 2001-12-03 2007-07-04 株式会社日立製作所 液晶表示装置
JP2003177417A (ja) * 2001-12-12 2003-06-27 Hitachi Ltd 液晶表示装置
JP2003202589A (ja) 2001-12-28 2003-07-18 Fujitsu Display Technologies Corp 液晶表示装置及びその製造方法
JP3881248B2 (ja) 2002-01-17 2007-02-14 株式会社日立製作所 液晶表示装置および画像表示装置
JP3586674B2 (ja) * 2002-01-30 2004-11-10 Ｎｅｃ液晶テクノロジー株式会社 液晶表示装置
JP4083486B2 (ja) 2002-02-21 2008-04-30 独立行政法人科学技術振興機構 ＬｎＣｕＯ（Ｓ，Ｓｅ，Ｔｅ）単結晶薄膜の製造方法
CN1445821A (zh) 2002-03-15 2003-10-01 三洋电机株式会社 ZnO膜和ZnO半导体层的形成方法、半导体元件及其制造方法
JP4091322B2 (ja) * 2002-03-19 2008-05-28 東芝松下ディスプレイテクノロジー株式会社 表示装置
JP3933591B2 (ja) 2002-03-26 2007-06-20 淳二 城戸 有機エレクトロルミネッセント素子
US6933528B2 (en) * 2002-04-04 2005-08-23 Nec Lcd Technologies, Ltd. In-plane switching mode active matrix type liquid crystal display device and method of fabricating the same
JP4404835B2 (ja) 2002-04-04 2010-01-27 Ｎｅｃ液晶テクノロジー株式会社 横電界方式のアクティブマトリクス型液晶表示装置及びその製造方法
JP4252255B2 (ja) 2002-04-19 2009-04-08 株式会社日立製作所 液晶表示装置
US20030207050A1 (en) 2002-04-29 2003-11-06 Grant Hay Polymeric substrate for display and light emitting devices
JP4084080B2 (ja) 2002-05-10 2008-04-30 株式会社日立製作所 薄膜トランジスタ基板の製造方法
JP2003330422A (ja) 2002-05-17 2003-11-19 Hitachi Ltd 画像表示装置
US7339187B2 (en) 2002-05-21 2008-03-04 State Of Oregon Acting By And Through The Oregon State Board Of Higher Education On Behalf Of Oregon State University Transistor structures
JP4117148B2 (ja) * 2002-05-24 2008-07-16 日本電気株式会社 半透過型液晶表示装置
JP4085170B2 (ja) * 2002-06-06 2008-05-14 株式会社 日立ディスプレイズ 液晶表示装置
JP2004022625A (ja) 2002-06-13 2004-01-22 Murata Mfg Co Ltd 半導体デバイス及び該半導体デバイスの製造方法
US7105868B2 (en) 2002-06-24 2006-09-12 Cermet, Inc. High-electron mobility transistor with zinc oxide
KR100852806B1 (ko) * 2002-08-01 2008-08-18 비오이 하이디스 테크놀로지 주식회사 액정 표시 장치의 제조 방법
CN1251012C (zh) * 2002-08-30 2006-04-12 Nec液晶技术株式会社 液晶显示装置的制造方法
KR20040021758A (ko) 2002-09-04 2004-03-11 엘지.필립스 엘시디 주식회사 다결정 실리콘 박막트랜지스터 제조방법
TW574540B (en) * 2002-09-13 2004-02-01 Toppoly Optoelectronics Corp Pixel structure of TFT LCD
JP2004119599A (ja) 2002-09-25 2004-04-15 Seiko Epson Corp 薄膜半導体装置の製造方法、薄膜半導体装置、電気光学装置、および電子機器
US7067843B2 (en) 2002-10-11 2006-06-27 E. I. Du Pont De Nemours And Company Transparent oxide semiconductor thin film transistors
KR100905409B1 (ko) 2002-12-26 2009-07-02 엘지디스플레이 주식회사 액정표시장치 및 그 제조방법
JP2004252071A (ja) 2003-02-19 2004-09-09 Sharp Corp 液晶表示装置及びその製造方法
JP4166105B2 (ja) 2003-03-06 2008-10-15 シャープ株式会社 半導体装置およびその製造方法
JP4182779B2 (ja) 2003-03-07 2008-11-19 カシオ計算機株式会社 表示装置およびその製造方法
US20040174483A1 (en) * 2003-03-07 2004-09-09 Yayoi Nakamura Liquid crystal display device having auxiliary capacitive electrode
JP2004273732A (ja) 2003-03-07 2004-09-30 Sharp Corp アクティブマトリクス基板およびその製造方法
KR100930916B1 (ko) * 2003-03-20 2009-12-10 엘지디스플레이 주식회사 횡전계형 액정표시장치 및 그 제조방법
JP4467901B2 (ja) 2003-03-28 2010-05-26 シャープ株式会社 薄膜トランジスタ装置の製造方法
TW594310B (en) * 2003-05-12 2004-06-21 Hannstar Display Corp Transflective LCD with single cell gap and the fabrication method thereof
KR100984345B1 (ko) * 2003-05-30 2010-09-30 삼성전자주식회사 박막 트랜지스터 표시판 및 이를 포함하는 액정 표시 장치
JP4108633B2 (ja) 2003-06-20 2008-06-25 シャープ株式会社 薄膜トランジスタおよびその製造方法ならびに電子デバイス
KR100741890B1 (ko) 2003-06-26 2007-07-23 엘지.필립스 엘시디 주식회사 횡전계 방식의 액정표시장치 및 그의 제조방법
JP4631255B2 (ja) 2003-07-16 2011-02-16 セイコーエプソン株式会社 アクティブマトリクス基板、表示装置、及び電子機器
TWI309327B (en) 2003-07-22 2009-05-01 Chi Mei Optoelectronics Corp Thin film transistor liquid crystal display panel, array substrate of the same, and method of manufacturing the same
US7262463B2 (en) 2003-07-25 2007-08-28 Hewlett-Packard Development Company, L.P. Transistor including a deposited channel region having a doped portion
CN100388102C (zh) * 2003-07-31 2008-05-14 奇美电子股份有限公司 薄膜晶体管液晶显示面板、其阵列基板及其制作方法
JP4241238B2 (ja) * 2003-08-29 2009-03-18 株式会社 日立ディスプレイズ 液晶表示装置
JP4483235B2 (ja) 2003-09-01 2010-06-16 カシオ計算機株式会社 トランジスタアレイ基板の製造方法及びトランジスタアレイ基板
JP2005084231A (ja) 2003-09-05 2005-03-31 Toshiba Matsushita Display Technology Co Ltd 液晶表示装置及びその製造方法
JP2005107489A (ja) 2003-09-12 2005-04-21 Seiko Epson Corp 電気光学装置及びその製造方法
JP4082683B2 (ja) 2003-09-29 2008-04-30 株式会社 日立ディスプレイズ 半透過型液晶表示装置
JP4381782B2 (ja) * 2003-11-18 2009-12-09 株式会社 日立ディスプレイズ 液晶表示装置
KR100611151B1 (ko) * 2003-11-27 2006-08-09 삼성에스디아이 주식회사 박막트랜지스터 및 그의 제조방법
KR20050058058A (ko) * 2003-12-11 2005-06-16 엘지.필립스 엘시디 주식회사 박막트랜지스터 어레이 기판 및 그 제조 방법
CN100376932C (zh) * 2003-12-12 2008-03-26 鸿富锦精密工业（深圳）有限公司 液晶显示装置
KR101031669B1 (ko) * 2003-12-30 2011-04-29 엘지디스플레이 주식회사 강유전성 액정배향막을 구비한 반투과형 평면구동모드액정표시소자
JP4276965B2 (ja) * 2004-02-04 2009-06-10 シャープ株式会社 表示装置
CN1998087B (zh) 2004-03-12 2014-12-31 独立行政法人科学技术振兴机构 非晶形氧化物和薄膜晶体管
US7297977B2 (en) 2004-03-12 2007-11-20 Hewlett-Packard Development Company, L.P. Semiconductor device
US7145174B2 (en) 2004-03-12 2006-12-05 Hewlett-Packard Development Company, Lp. Semiconductor device
US7282782B2 (en) 2004-03-12 2007-10-16 Hewlett-Packard Development Company, L.P. Combined binary oxide semiconductor device
JP4211644B2 (ja) 2004-03-15 2009-01-21 セイコーエプソン株式会社 電気光学装置の製造方法
JP3933667B2 (ja) 2004-04-29 2007-06-20 三星エスディアイ株式会社 発光表示パネル及び発光表示装置
JP2005354036A (ja) * 2004-05-14 2005-12-22 Toppan Printing Co Ltd 半導体装置の形成方法
JP2006013433A (ja) 2004-05-24 2006-01-12 Toppan Printing Co Ltd 薄膜トランジスタ
JP4223992B2 (ja) * 2004-05-25 2009-02-12 株式会社 日立ディスプレイズ 液晶表示装置
US7211825B2 (en) 2004-06-14 2007-05-01 Yi-Chi Shih Indium oxide-based thin film transistors and circuits
CN2715193Y (zh) 2004-06-19 2005-08-03 鸿富锦精密工业（深圳）有限公司 平面内切换型液晶显示装置
KR100628272B1 (ko) 2004-06-30 2006-09-27 엘지.필립스 엘시디 주식회사 Ｃｏｔ형 액정표시소자의 제조방법
JP2006032552A (ja) * 2004-07-14 2006-02-02 Toshiba Corp 窒化物含有半導体装置
JP2006039451A (ja) 2004-07-30 2006-02-09 Seiko Epson Corp 電気光学装置用基板とその製造方法、電気光学装置、及び電子機器
US7648861B2 (en) * 2004-08-03 2010-01-19 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating a semiconductor device including separately forming a second semiconductor film containing an impurity element over the first semiconductor region
KR20060018312A (ko) * 2004-08-24 2006-03-02 삼성전자주식회사 표시기판 및 이를 갖는 표시장치
JP2006065327A (ja) 2004-08-24 2006-03-09 Samsung Electronics Co Ltd 表示基板、これの製造方法及びこれを有する液晶表示装置
JP2006100760A (ja) 2004-09-02 2006-04-13 Casio Comput Co Ltd 薄膜トランジスタおよびその製造方法
KR101074395B1 (ko) * 2004-09-13 2011-10-17 엘지디스플레이 주식회사 횡전계형 액정 표시 장치
US7285501B2 (en) 2004-09-17 2007-10-23 Hewlett-Packard Development Company, L.P. Method of forming a solution processed device
KR101071257B1 (ko) 2004-09-17 2011-10-10 삼성전자주식회사 다중 도메인 박막 트랜지스터 표시판 및 이를 포함하는액정 표시 장치
US20060061701A1 (en) * 2004-09-22 2006-03-23 Shih-Chang Chang Pixel of a liquid crystal panel, method of fabricating the same and driving method thereof
US8148895B2 (en) 2004-10-01 2012-04-03 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method of the same
US7382421B2 (en) 2004-10-12 2008-06-03 Hewlett-Packard Development Company, L.P. Thin film transistor with a passivation layer
JP4550551B2 (ja) * 2004-10-29 2010-09-22 株式会社 日立ディスプレイズ 液晶表示装置
JP2006126551A (ja) * 2004-10-29 2006-05-18 Hitachi Displays Ltd 液晶表示装置
US7298084B2 (en) 2004-11-02 2007-11-20 3M Innovative Properties Company Methods and displays utilizing integrated zinc oxide row and column drivers in conjunction with organic light emitting diodes
US7829444B2 (en) 2004-11-10 2010-11-09 Canon Kabushiki Kaisha Field effect transistor manufacturing method
US7791072B2 (en) 2004-11-10 2010-09-07 Canon Kabushiki Kaisha Display
KR20070085879A (ko) 2004-11-10 2007-08-27 캐논 가부시끼가이샤 발광 장치
US7863611B2 (en) 2004-11-10 2011-01-04 Canon Kabushiki Kaisha Integrated circuits utilizing amorphous oxides
US7868326B2 (en) 2004-11-10 2011-01-11 Canon Kabushiki Kaisha Field effect transistor
US7453065B2 (en) 2004-11-10 2008-11-18 Canon Kabushiki Kaisha Sensor and image pickup device
CA2585190A1 (en) 2004-11-10 2006-05-18 Canon Kabushiki Kaisha Amorphous oxide and field effect transistor
JP2006145602A (ja) * 2004-11-16 2006-06-08 Nec Lcd Technologies Ltd 液晶表示パネル及び液晶表示装置
KR101109978B1 (ko) * 2004-12-13 2012-02-29 엘지디스플레이 주식회사 고개구율 액정표시소자
JP2006184325A (ja) 2004-12-24 2006-07-13 Sony Corp 液晶表示装置
TWI261719B (en) * 2005-01-21 2006-09-11 Au Optronics Corp Transflective liquid crystal display device and pixel electrode thereof
US7579224B2 (en) 2005-01-21 2009-08-25 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a thin film semiconductor device
TWI569441B (zh) 2005-01-28 2017-02-01 半導體能源研究所股份有限公司 半導體裝置，電子裝置，和半導體裝置的製造方法
TWI472037B (zh) 2005-01-28 2015-02-01 半導體能源研究所股份有限公司 半導體裝置，電子裝置，和半導體裝置的製造方法
US7858451B2 (en) 2005-02-03 2010-12-28 Semiconductor Energy Laboratory Co., Ltd. Electronic device, semiconductor device and manufacturing method thereof
US7948171B2 (en) 2005-02-18 2011-05-24 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
US20060197092A1 (en) 2005-03-03 2006-09-07 Randy Hoffman System and method for forming conductive material on a substrate
US8681077B2 (en) 2005-03-18 2014-03-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, and display device, driving method and electronic apparatus thereof
US7544967B2 (en) 2005-03-28 2009-06-09 Massachusetts Institute Of Technology Low voltage flexible organic/transparent transistor for selective gas sensing, photodetecting and CMOS device applications
JP4111203B2 (ja) * 2005-03-28 2008-07-02 エプソンイメージングデバイス株式会社 液晶装置及び電子機器
US7423713B2 (en) * 2005-03-28 2008-09-09 Epson Imaging Devices Corporation Liquid crystal device and electronic equipment
US7645478B2 (en) 2005-03-31 2010-01-12 3M Innovative Properties Company Methods of making displays
US8300031B2 (en) 2005-04-20 2012-10-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising transistor having gate and drain connected through a current-voltage conversion element
JP2007004126A (ja) * 2005-05-25 2007-01-11 Sanyo Epson Imaging Devices Corp 液晶装置及び電子機器
JP2006344849A (ja) 2005-06-10 2006-12-21 Casio Comput Co Ltd 薄膜トランジスタ
US7691666B2 (en) 2005-06-16 2010-04-06 Eastman Kodak Company Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby
US7402506B2 (en) 2005-06-16 2008-07-22 Eastman Kodak Company Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby
US7507618B2 (en) 2005-06-27 2009-03-24 3M Innovative Properties Company Method for making electronic devices using metal oxide nanoparticles
US20070002199A1 (en) * 2005-06-30 2007-01-04 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and method for manufacturing the same
KR100711890B1 (ko) 2005-07-28 2007-04-25 삼성에스디아이 주식회사 유기 발광표시장치 및 그의 제조방법
JP2007059128A (ja) 2005-08-23 2007-03-08 Canon Inc 有機ｅｌ表示装置およびその製造方法
JP4850457B2 (ja) 2005-09-06 2012-01-11 キヤノン株式会社 薄膜トランジスタ及び薄膜ダイオード
JP4280736B2 (ja) 2005-09-06 2009-06-17 キヤノン株式会社 半導体素子
JP2007073705A (ja) 2005-09-06 2007-03-22 Canon Inc 酸化物半導体チャネル薄膜トランジスタおよびその製造方法
JP5116225B2 (ja) 2005-09-06 2013-01-09 キヤノン株式会社 酸化物半導体デバイスの製造方法
JP4623464B2 (ja) 2005-09-26 2011-02-02 株式会社 日立ディスプレイズ 液晶表示装置
EP1998373A3 (en) 2005-09-29 2012-10-31 Semiconductor Energy Laboratory Co, Ltd. Semiconductor device having oxide semiconductor layer and manufacturing method thereof
JP5037808B2 (ja) 2005-10-20 2012-10-03 キヤノン株式会社 アモルファス酸化物を用いた電界効果型トランジスタ、及び該トランジスタを用いた表示装置
WO2007058329A1 (en) 2005-11-15 2007-05-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
EP2479605B1 (en) * 2005-12-05 2015-07-15 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device
EP1793266B1 (en) * 2005-12-05 2017-03-08 Semiconductor Energy Laboratory Co., Ltd. Transflective Liquid Crystal Display with a Horizontal Electric Field Configuration
KR100930363B1 (ko) * 2005-12-28 2009-12-08 엘지디스플레이 주식회사 횡전계 방식 액정표시장치용 어레이 기판 제조방법
TWI292281B (en) 2005-12-29 2008-01-01 Ind Tech Res Inst Pixel structure of active organic light emitting diode and method of fabricating the same
KR101180718B1 (ko) * 2005-12-29 2012-09-07 엘지디스플레이 주식회사 횡전계형 액정표시장치용 어레이 기판 및 그 제조 방법
US7867636B2 (en) 2006-01-11 2011-01-11 Murata Manufacturing Co., Ltd. Transparent conductive film and method for manufacturing the same
JP4977478B2 (ja) 2006-01-21 2012-07-18 三星電子株式会社 ＺｎＯフィルム及びこれを用いたＴＦＴの製造方法
US7576394B2 (en) 2006-02-02 2009-08-18 Kochi Industrial Promotion Center Thin film transistor including low resistance conductive thin films and manufacturing method thereof
US7977169B2 (en) 2006-02-15 2011-07-12 Kochi Industrial Promotion Center Semiconductor device including active layer made of zinc oxide with controlled orientations and manufacturing method thereof
US20070215945A1 (en) 2006-03-20 2007-09-20 Canon Kabushiki Kaisha Light control device and display
EP1843194A1 (en) 2006-04-06 2007-10-10 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device, semiconductor device, and electronic appliance
KR20070101595A (ko) 2006-04-11 2007-10-17 삼성전자주식회사 ＺｎＯ ＴＦＴ
US20070252928A1 (en) 2006-04-28 2007-11-01 Toppan Printing Co., Ltd. Structure, transmission type liquid crystal display, reflection type display and manufacturing method thereof
TWI444731B (zh) * 2006-05-16 2014-07-11 Semiconductor Energy Lab 液晶顯示裝置和半導體裝置
US7847904B2 (en) * 2006-06-02 2010-12-07 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and electronic appliance
JP5028033B2 (ja) 2006-06-13 2012-09-19 キヤノン株式会社 酸化物半導体膜のドライエッチング方法
JP4609797B2 (ja) 2006-08-09 2011-01-12 Ｎｅｃ液晶テクノロジー株式会社 薄膜デバイス及びその製造方法
JP4999400B2 (ja) 2006-08-09 2012-08-15 キヤノン株式会社 酸化物半導体膜のドライエッチング方法
JP4332545B2 (ja) 2006-09-15 2009-09-16 キヤノン株式会社 電界効果型トランジスタ及びその製造方法
JP4274219B2 (ja) 2006-09-27 2009-06-03 セイコーエプソン株式会社 電子デバイス、有機エレクトロルミネッセンス装置、有機薄膜半導体装置
JP5164357B2 (ja) 2006-09-27 2013-03-21 キヤノン株式会社 半導体装置及び半導体装置の製造方法
US7622371B2 (en) 2006-10-10 2009-11-24 Hewlett-Packard Development Company, L.P. Fused nanocrystal thin film semiconductor and method
US7772021B2 (en) 2006-11-29 2010-08-10 Samsung Electronics Co., Ltd. Flat panel displays comprising a thin-film transistor having a semiconductive oxide in its channel and methods of fabricating the same for use in flat panel displays
JP2008140684A (ja) 2006-12-04 2008-06-19 Toppan Printing Co Ltd カラーｅｌディスプレイおよびその製造方法
JP5130711B2 (ja) * 2006-12-26 2013-01-30 セイコーエプソン株式会社 電気光学装置及びその製造方法
KR101303578B1 (ko) 2007-01-05 2013-09-09 삼성전자주식회사 박막 식각 방법
US8207063B2 (en) 2007-01-26 2012-06-26 Eastman Kodak Company Process for atomic layer deposition
KR100851215B1 (ko) 2007-03-14 2008-08-07 삼성에스디아이 주식회사 박막 트랜지스터 및 이를 이용한 유기 전계 발광표시장치
US7795613B2 (en) 2007-04-17 2010-09-14 Toppan Printing Co., Ltd. Structure with transistor
KR101325053B1 (ko) 2007-04-18 2013-11-05 삼성디스플레이 주식회사 박막 트랜지스터 기판 및 이의 제조 방법
KR20080094300A (ko) 2007-04-19 2008-10-23 삼성전자주식회사 박막 트랜지스터 및 그 제조 방법과 박막 트랜지스터를포함하는 평판 디스플레이
KR101334181B1 (ko) 2007-04-20 2013-11-28 삼성전자주식회사 선택적으로 결정화된 채널층을 갖는 박막 트랜지스터 및 그제조 방법
CN101663762B (zh) 2007-04-25 2011-09-21 佳能株式会社 氧氮化物半导体
KR101345376B1 (ko) 2007-05-29 2013-12-24 삼성전자주식회사 ＺｎＯ 계 박막 트랜지스터 및 그 제조방법
KR101375831B1 (ko) 2007-12-03 2014-04-02 삼성전자주식회사 산화물 반도체 박막 트랜지스터를 이용한 디스플레이 장치
JP5215158B2 (ja) 2007-12-17 2013-06-19 富士フイルム株式会社 無機結晶性配向膜及びその製造方法、半導体デバイス
JP4623179B2 (ja) 2008-09-18 2011-02-02 ソニー株式会社 薄膜トランジスタおよびその製造方法
JP5451280B2 (ja) 2008-10-09 2014-03-26 キヤノン株式会社 ウルツ鉱型結晶成長用基板およびその製造方法ならびに半導体装置

Also Published As

Publication number Publication date
CN110262140A (zh) 2019-09-20
JP2023162201A (ja) 2023-11-08
EP1843194A1 (en) 2007-10-10
JP5619247B2 (ja) 2014-11-05
JP2012053486A (ja) 2012-03-15
JP2014143425A (ja) 2014-08-07
JP7326546B2 (ja) 2023-08-15
US11442317B2 (en) 2022-09-13
US20210048717A1 (en) 2021-02-18
EP2924498A1 (en) 2015-09-30
CN104950536A (zh) 2015-09-30
JP6821622B2 (ja) 2021-01-27
JP2014056246A (ja) 2014-03-27
JP2022137096A (ja) 2022-09-21
US20070236640A1 (en) 2007-10-11
JP2018128691A (ja) 2018-08-16
JP2017037316A (ja) 2017-02-16
US9213206B2 (en) 2015-12-15
JP5755349B2 (ja) 2015-07-29
JP5288665B2 (ja) 2013-09-11
US11073729B2 (en) 2021-07-27
JP2013254222A (ja) 2013-12-19
US20190004380A1 (en) 2019-01-03
JP2013225138A (ja) 2013-10-31
US20230258986A1 (en) 2023-08-17
JP2021121849A (ja) 2021-08-26
JP2014002392A (ja) 2014-01-09
JP2020013141A (ja) 2020-01-23
JP2015148828A (ja) 2015-08-20
US11921382B2 (en) 2024-03-05
JP5376740B2 (ja) 2013-12-25
US11644720B2 (en) 2023-05-09
JP2015156024A (ja) 2015-08-27
US9207504B2 (en) 2015-12-08
JP6953646B2 (ja) 2021-10-27
JP6783363B2 (ja) 2020-11-11
US20210349360A1 (en) 2021-11-11
JP2014044428A (ja) 2014-03-13
CN103257492A (zh) 2013-08-21
US20230004051A1 (en) 2023-01-05
US10684517B2 (en) 2020-06-16
US20110032435A1 (en) 2011-02-10
CN101051134A (zh) 2007-10-10
JP5323279B1 (ja) 2013-10-23
JP2013011910A (ja) 2013-01-17
US20160154283A1 (en) 2016-06-02
US9958736B2 (en) 2018-05-01
JP6012798B2 (ja) 2016-10-25
JP2021043449A (ja) 2021-03-18

Similar Documents

Publication Publication Date Title
JP7326546B2 (ja) 表示装置
JP5148912B2 (ja) 液晶表示装置及び半導体装置、並びに電子機器
KR102245038B1 (ko) 표시장치
JP2007334317A (ja) 液晶表示装置及び半導体装置

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120821

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130430

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140128

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140203

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 5470357

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250