KR101017226B1 - 반도체 소자 및 이를 이용한 표시 장치 - Google Patents

반도체 소자 및 이를 이용한 표시 장치 Download PDF

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KR101017226B1
KR101017226B1 KR1020030022263A KR20030022263A KR101017226B1 KR 101017226 B1 KR101017226 B1 KR 101017226B1 KR 1020030022263 A KR1020030022263 A KR 1020030022263A KR 20030022263 A KR20030022263 A KR 20030022263A KR 101017226 B1 KR101017226 B1 KR 101017226B1
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insulating film
opening
film
nitride
semiconductor
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KR20030081104A (ko
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사토시 무라카미
마사히코 하야카와
순페이 야마자키
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가부시키가이샤 한도오따이 에네루기 켄큐쇼
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    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
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    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/131—Interconnections, e.g. wiring lines or terminals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/948—Radiation resist
    • Y10S438/95—Multilayer mask including nonradiation sensitive layer

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