JP2944449B2 - 半導体パッケージとその製造方法 - Google Patents
半導体パッケージとその製造方法Info
- Publication number
- JP2944449B2 JP2944449B2 JP7036664A JP3666495A JP2944449B2 JP 2944449 B2 JP2944449 B2 JP 2944449B2 JP 7036664 A JP7036664 A JP 7036664A JP 3666495 A JP3666495 A JP 3666495A JP 2944449 B2 JP2944449 B2 JP 2944449B2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- semiconductor package
- package according
- conductor
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
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- H10W72/30—
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- H10W74/012—
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- H10W74/15—
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- H10W90/00—
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- H10W70/60—
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- H10W70/63—
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- H10W72/072—
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- H10W72/073—
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- H10W72/352—
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- H10W72/354—
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- H10W72/856—
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- H10W72/877—
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- H10W74/00—
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- H10W74/142—
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- H10W90/288—
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- H10W90/722—
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- H10W90/724—
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- H10W90/734—
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- H10W90/756—
Landscapes
- Wire Bonding (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7036664A JP2944449B2 (ja) | 1995-02-24 | 1995-02-24 | 半導体パッケージとその製造方法 |
| US08/604,115 US6188127B1 (en) | 1995-02-24 | 1996-02-20 | Semiconductor packing stack module and method of producing the same |
| EP96102773A EP0729184A3 (en) | 1995-02-24 | 1996-02-23 | Semiconductor package stack module and method of producing the same |
| TW085102110A TW312844B (index.php) | 1995-02-24 | 1996-02-24 | |
| KR1019960004523A KR100231366B1 (ko) | 1995-02-24 | 1996-02-24 | 반도체 패키지 스택 모듈 및 그 제조방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7036664A JP2944449B2 (ja) | 1995-02-24 | 1995-02-24 | 半導体パッケージとその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08236694A JPH08236694A (ja) | 1996-09-13 |
| JP2944449B2 true JP2944449B2 (ja) | 1999-09-06 |
Family
ID=12476134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7036664A Expired - Lifetime JP2944449B2 (ja) | 1995-02-24 | 1995-02-24 | 半導体パッケージとその製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6188127B1 (index.php) |
| EP (1) | EP0729184A3 (index.php) |
| JP (1) | JP2944449B2 (index.php) |
| KR (1) | KR100231366B1 (index.php) |
| TW (1) | TW312844B (index.php) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6383840B1 (en) | 1999-07-22 | 2002-05-07 | Seiko Epson Corporation | Semiconductor device, method of manufacture thereof, circuit board, and electronic device |
Families Citing this family (173)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2728074B2 (ja) * | 1995-12-28 | 1998-03-18 | 日本電気株式会社 | テープキャリアパッケージのスタック構造 |
| DE19626126C2 (de) * | 1996-06-28 | 1998-04-16 | Fraunhofer Ges Forschung | Verfahren zur Ausbildung einer räumlichen Chipanordnung und räumliche Chipanordung |
| WO1998022980A1 (en) * | 1996-11-21 | 1998-05-28 | Hitachi, Ltd. | Semiconductor device and process for manufacturing the same |
| KR100381836B1 (ko) * | 1996-12-13 | 2003-07-18 | 앰코 테크놀로지 코리아 주식회사 | 반도체패키지 |
| JPH10294423A (ja) | 1997-04-17 | 1998-11-04 | Nec Corp | 半導体装置 |
| JP2870530B1 (ja) * | 1997-10-30 | 1999-03-17 | 日本電気株式会社 | スタックモジュール用インターポーザとスタックモジュール |
| JP2000208698A (ja) | 1999-01-18 | 2000-07-28 | Toshiba Corp | 半導体装置 |
| US6274929B1 (en) | 1998-09-01 | 2001-08-14 | Texas Instruments Incorporated | Stacked double sided integrated circuit package |
| US6180881B1 (en) * | 1998-05-05 | 2001-01-30 | Harlan Ruben Isaak | Chip stack and method of making same |
| US6451624B1 (en) * | 1998-06-05 | 2002-09-17 | Micron Technology, Inc. | Stackable semiconductor package having conductive layer and insulating layers and method of fabrication |
| US6297548B1 (en) * | 1998-06-30 | 2001-10-02 | Micron Technology, Inc. | Stackable ceramic FBGA for high thermal applications |
| KR100424188B1 (ko) * | 1998-09-21 | 2004-05-17 | 주식회사 하이닉스반도체 | 칩 사이즈 스택 패키지 |
| US6600364B1 (en) | 1999-01-05 | 2003-07-29 | Intel Corporation | Active interposer technology for high performance CMOS packaging application |
| US6461895B1 (en) * | 1999-01-05 | 2002-10-08 | Intel Corporation | Process for making active interposer for high performance packaging applications |
| TW460927B (en) * | 1999-01-18 | 2001-10-21 | Toshiba Corp | Semiconductor device, mounting method for semiconductor device and manufacturing method for semiconductor device |
| JP2000216334A (ja) | 1999-01-25 | 2000-08-04 | Seiko Epson Corp | 半導体装置 |
| JP3627565B2 (ja) * | 1999-03-30 | 2005-03-09 | セイコーエプソン株式会社 | 半導体装置およびその製造方法 |
| EP1041624A1 (en) | 1999-04-02 | 2000-10-04 | Interuniversitair Microelektronica Centrum Vzw | Method of transferring ultra-thin substrates and application of the method to the manufacture of a multilayer thin film device |
| JP2000315866A (ja) * | 1999-04-30 | 2000-11-14 | Ibiden Co Ltd | 多層配線板およびその製造方法 |
| JP2000340737A (ja) * | 1999-05-31 | 2000-12-08 | Mitsubishi Electric Corp | 半導体パッケージとその実装体 |
| KR100333384B1 (ko) | 1999-06-28 | 2002-04-18 | 박종섭 | 칩 사이즈 스택 패키지 및 그의 제조방법 |
| KR100333385B1 (ko) | 1999-06-29 | 2002-04-18 | 박종섭 | 웨이퍼 레벨 스택 패키지 및 그의 제조 방법 |
| TW417839U (en) * | 1999-07-30 | 2001-01-01 | Shen Ming Tung | Stacked memory module structure and multi-layered stacked memory module structure using the same |
| TW472330B (en) | 1999-08-26 | 2002-01-11 | Toshiba Corp | Semiconductor device and the manufacturing method thereof |
| KR100338929B1 (ko) * | 1999-09-27 | 2002-05-30 | 박종섭 | 적층형 마이크로 비지에이 패키지 및 제조방법 |
| JP2001127088A (ja) * | 1999-10-27 | 2001-05-11 | Mitsubishi Electric Corp | 半導体装置 |
| JP2001144218A (ja) * | 1999-11-17 | 2001-05-25 | Sony Corp | 半導体装置及び半導体装置の製造方法 |
| JP3798597B2 (ja) | 1999-11-30 | 2006-07-19 | 富士通株式会社 | 半導体装置 |
| KR100584003B1 (ko) * | 1999-12-02 | 2006-05-29 | 삼성전자주식회사 | 적층 칩 패키지의 제조 방법 |
| JP4320492B2 (ja) * | 1999-12-08 | 2009-08-26 | 株式会社デンソー | 半導体素子の実装構造および半導体素子の実装構造の製造方法 |
| JP4251421B2 (ja) * | 2000-01-13 | 2009-04-08 | 新光電気工業株式会社 | 半導体装置の製造方法 |
| US6528870B2 (en) * | 2000-01-28 | 2003-03-04 | Kabushiki Kaisha Toshiba | Semiconductor device having a plurality of stacked wiring boards |
| WO2001056067A1 (en) * | 2000-01-31 | 2001-08-02 | Lockheed Martin Corporation | Micro electro-mechanical component and system architecture |
| JP3752949B2 (ja) * | 2000-02-28 | 2006-03-08 | 日立化成工業株式会社 | 配線基板及び半導体装置 |
| JP2001250907A (ja) * | 2000-03-08 | 2001-09-14 | Toshiba Corp | 半導体装置及びその製造方法 |
| JP2001267492A (ja) * | 2000-03-14 | 2001-09-28 | Ibiden Co Ltd | 半導体モジュールの製造方法 |
| JP2001339011A (ja) * | 2000-03-24 | 2001-12-07 | Shinko Electric Ind Co Ltd | 半導体装置およびその製造方法 |
| KR100464561B1 (ko) * | 2000-04-11 | 2004-12-31 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지 및 이것의 제조방법 |
| KR100631934B1 (ko) * | 2000-06-28 | 2006-10-04 | 주식회사 하이닉스반도체 | 스택 패키지 |
| JP3951091B2 (ja) * | 2000-08-04 | 2007-08-01 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
| JP3874062B2 (ja) | 2000-09-05 | 2007-01-31 | セイコーエプソン株式会社 | 半導体装置 |
| JP3722209B2 (ja) | 2000-09-05 | 2005-11-30 | セイコーエプソン株式会社 | 半導体装置 |
| TW503531B (en) * | 2000-09-28 | 2002-09-21 | Toshiba Corp | Multi-layered semiconductor apparatus |
| JP2002176137A (ja) | 2000-09-28 | 2002-06-21 | Toshiba Corp | 積層型半導体デバイス |
| US7094676B1 (en) | 2000-10-13 | 2006-08-22 | Bridge Semiconductor Corporation | Semiconductor chip assembly with embedded metal pillar |
| US7190080B1 (en) | 2000-10-13 | 2007-03-13 | Bridge Semiconductor Corporation | Semiconductor chip assembly with embedded metal pillar |
| US7129575B1 (en) | 2000-10-13 | 2006-10-31 | Bridge Semiconductor Corporation | Semiconductor chip assembly with bumped metal pillar |
| US6876072B1 (en) | 2000-10-13 | 2005-04-05 | Bridge Semiconductor Corporation | Semiconductor chip assembly with chip in substrate cavity |
| US6872591B1 (en) | 2000-10-13 | 2005-03-29 | Bridge Semiconductor Corporation | Method of making a semiconductor chip assembly with a conductive trace and a substrate |
| US7129113B1 (en) | 2000-10-13 | 2006-10-31 | Bridge Semiconductor Corporation | Method of making a three-dimensional stacked semiconductor package with a metal pillar in an encapsulant aperture |
| US7071089B1 (en) | 2000-10-13 | 2006-07-04 | Bridge Semiconductor Corporation | Method of making a semiconductor chip assembly with a carved bumped terminal |
| US7262082B1 (en) | 2000-10-13 | 2007-08-28 | Bridge Semiconductor Corporation | Method of making a three-dimensional stacked semiconductor package with a metal pillar and a conductive interconnect in an encapsulant aperture |
| US7414319B2 (en) * | 2000-10-13 | 2008-08-19 | Bridge Semiconductor Corporation | Semiconductor chip assembly with metal containment wall and solder terminal |
| US7319265B1 (en) | 2000-10-13 | 2008-01-15 | Bridge Semiconductor Corporation | Semiconductor chip assembly with precision-formed metal pillar |
| US7075186B1 (en) | 2000-10-13 | 2006-07-11 | Bridge Semiconductor Corporation | Semiconductor chip assembly with interlocked contact terminal |
| US7132741B1 (en) | 2000-10-13 | 2006-11-07 | Bridge Semiconductor Corporation | Semiconductor chip assembly with carved bumped terminal |
| US7009297B1 (en) | 2000-10-13 | 2006-03-07 | Bridge Semiconductor Corporation | Semiconductor chip assembly with embedded metal particle |
| JP2002134650A (ja) * | 2000-10-23 | 2002-05-10 | Rohm Co Ltd | 半導体装置およびその製造方法 |
| JP3420748B2 (ja) * | 2000-12-14 | 2003-06-30 | 松下電器産業株式会社 | 半導体装置及びその製造方法 |
| KR20020049145A (ko) * | 2000-12-19 | 2002-06-26 | 박종섭 | 반도체 패키지 제조용 절연 테이프와 그를 이용한 반도체패키지 |
| JP2002305286A (ja) * | 2001-02-01 | 2002-10-18 | Mitsubishi Electric Corp | 半導体モジュールおよび電子部品 |
| TW575949B (en) * | 2001-02-06 | 2004-02-11 | Hitachi Ltd | Mixed integrated circuit device, its manufacturing method and electronic apparatus |
| DE10110203B4 (de) * | 2001-03-02 | 2006-12-14 | Infineon Technologies Ag | Elektronisches Bauteil mit gestapelten Halbleiterchips und Verfahren zu seiner Herstellung |
| JP2002270634A (ja) * | 2001-03-08 | 2002-09-20 | Rohm Co Ltd | 半導体装置 |
| US20040099441A1 (en) * | 2001-04-24 | 2004-05-27 | Akira Ichiryu | Printed circuit board,its manufacturing method and csp manufacturing method |
| US20020173077A1 (en) * | 2001-05-03 | 2002-11-21 | Ho Tzong Da | Thermally enhanced wafer-level chip scale package and method of fabricating the same |
| JP3631445B2 (ja) * | 2001-06-06 | 2005-03-23 | 東芝三菱電機産業システム株式会社 | 平型半導体スタック装置 |
| JP3660275B2 (ja) * | 2001-06-14 | 2005-06-15 | シャープ株式会社 | 半導体装置およびその製造方法 |
| US20020190367A1 (en) * | 2001-06-15 | 2002-12-19 | Mantz Frank E. | Slice interconnect structure |
| KR100437539B1 (ko) * | 2001-06-29 | 2004-06-26 | 주식회사 하이닉스반도체 | 클럭 동기 회로 |
| JP3925615B2 (ja) * | 2001-07-04 | 2007-06-06 | ソニー株式会社 | 半導体モジュール |
| US6765287B1 (en) | 2001-07-27 | 2004-07-20 | Charles W. C. Lin | Three-dimensional stacked semiconductor package |
| US6451626B1 (en) | 2001-07-27 | 2002-09-17 | Charles W.C. Lin | Three-dimensional stacked semiconductor package |
| JP4023159B2 (ja) * | 2001-07-31 | 2007-12-19 | ソニー株式会社 | 半導体装置の製造方法及び積層半導体装置の製造方法 |
| US6790710B2 (en) * | 2002-01-31 | 2004-09-14 | Asat Limited | Method of manufacturing an integrated circuit package |
| JP2003078108A (ja) * | 2001-08-31 | 2003-03-14 | Hitachi Chem Co Ltd | 半導体パッケージ用基板、これを用いた半導体パッケージとその積層体、およびこれらの製造方法 |
| US6573461B2 (en) | 2001-09-20 | 2003-06-03 | Dpac Technologies Corp | Retaining ring interconnect used for 3-D stacking |
| US6573460B2 (en) | 2001-09-20 | 2003-06-03 | Dpac Technologies Corp | Post in ring interconnect using for 3-D stacking |
| US7253091B2 (en) * | 2001-09-28 | 2007-08-07 | Hrl Laboratories, Llc | Process for assembling three-dimensional systems on a chip and structure thus obtained |
| JP3861669B2 (ja) * | 2001-11-22 | 2006-12-20 | ソニー株式会社 | マルチチップ回路モジュールの製造方法 |
| KR100486832B1 (ko) * | 2002-02-06 | 2005-05-03 | 삼성전자주식회사 | 반도체 칩과 적층 칩 패키지 및 그 제조 방법 |
| US6750082B2 (en) * | 2002-09-13 | 2004-06-15 | Advanpack Solutions Pte. Ltd. | Method of assembling a package with an exposed die backside with and without a heatsink for flip-chip |
| US6856010B2 (en) * | 2002-12-05 | 2005-02-15 | Staktek Group L.P. | Thin scale outline package |
| KR100484088B1 (ko) | 2002-12-06 | 2005-04-20 | 삼성전자주식회사 | 멀티 칩 패키지용 다이 어태치와 경화 인라인 장치 |
| US20040207990A1 (en) * | 2003-04-21 | 2004-10-21 | Rose Andrew C. | Stair-step signal routing |
| JP2004335624A (ja) | 2003-05-06 | 2004-11-25 | Hitachi Ltd | 半導体モジュール |
| TWI231023B (en) * | 2003-05-27 | 2005-04-11 | Ind Tech Res Inst | Electronic packaging with three-dimensional stack and assembling method thereof |
| JP3858854B2 (ja) * | 2003-06-24 | 2006-12-20 | 富士通株式会社 | 積層型半導体装置 |
| US20040262728A1 (en) * | 2003-06-30 | 2004-12-30 | Sterrett Terry L. | Modular device assemblies |
| KR100506035B1 (ko) * | 2003-08-22 | 2005-08-03 | 삼성전자주식회사 | 반도체 패키지 및 그 제조방법 |
| US7180165B2 (en) * | 2003-09-05 | 2007-02-20 | Sanmina, Sci Corporation | Stackable electronic assembly |
| US7993983B1 (en) | 2003-11-17 | 2011-08-09 | Bridge Semiconductor Corporation | Method of making a semiconductor chip assembly with chip and encapsulant grinding |
| KR100621992B1 (ko) * | 2003-11-19 | 2006-09-13 | 삼성전자주식회사 | 이종 소자들의 웨이퍼 레벨 적층 구조와 방법 및 이를이용한 시스템-인-패키지 |
| US7538415B1 (en) | 2003-11-20 | 2009-05-26 | Bridge Semiconductor Corporation | Semiconductor chip assembly with bumped terminal, filler and insulative base |
| US7425759B1 (en) | 2003-11-20 | 2008-09-16 | Bridge Semiconductor Corporation | Semiconductor chip assembly with bumped terminal and filler |
| JP3821125B2 (ja) * | 2003-12-18 | 2006-09-13 | セイコーエプソン株式会社 | 半導体装置の製造方法、半導体装置、回路基板、電子機器 |
| US7227249B1 (en) | 2003-12-24 | 2007-06-05 | Bridge Semiconductor Corporation | Three-dimensional stacked semiconductor package with chips on opposite sides of lead |
| US7126829B1 (en) * | 2004-02-09 | 2006-10-24 | Pericom Semiconductor Corp. | Adapter board for stacking Ball-Grid-Array (BGA) chips |
| JP4280179B2 (ja) * | 2004-02-27 | 2009-06-17 | 新光電気工業株式会社 | 積層型半導体装置 |
| JP4205613B2 (ja) | 2004-03-01 | 2009-01-07 | エルピーダメモリ株式会社 | 半導体装置 |
| CN1998081B (zh) | 2004-05-11 | 2010-10-13 | 斯班逊有限公司 | 层积型半导体装置用载体以及层积型半导体装置的制造方法 |
| CN1998077B (zh) | 2004-05-20 | 2010-06-16 | 斯班逊有限公司 | 半导体装置的制造方法及半导体装置 |
| JP4561969B2 (ja) * | 2004-05-26 | 2010-10-13 | セイコーエプソン株式会社 | 半導体装置 |
| US6987314B1 (en) * | 2004-06-08 | 2006-01-17 | Amkor Technology, Inc. | Stackable semiconductor package with solder on pads on which second semiconductor package is stacked |
| US7282791B2 (en) * | 2004-07-09 | 2007-10-16 | Elpida Memory, Inc. | Stacked semiconductor device and semiconductor memory module |
| KR20060018453A (ko) * | 2004-08-24 | 2006-03-02 | 삼성전자주식회사 | 히트 싱크를 갖는 반도체 소자 |
| US20060048385A1 (en) * | 2004-09-03 | 2006-03-09 | Staktek Group L.P. | Minimized profile circuit module systems and methods |
| US7498666B2 (en) * | 2004-09-27 | 2009-03-03 | Nokia Corporation | Stacked integrated circuit |
| WO2006035528A1 (ja) * | 2004-09-29 | 2006-04-06 | Murata Manufacturing Co., Ltd. | スタックモジュール及びその製造方法 |
| JP4014591B2 (ja) * | 2004-10-05 | 2007-11-28 | シャープ株式会社 | 半導体装置および電子機器 |
| WO2006043388A1 (ja) * | 2004-10-21 | 2006-04-27 | Matsushita Electric Industrial Co., Ltd. | 半導体内蔵モジュール及びその製造方法 |
| US7750483B1 (en) | 2004-11-10 | 2010-07-06 | Bridge Semiconductor Corporation | Semiconductor chip assembly with welded metal pillar and enlarged plated contact terminal |
| US7446419B1 (en) | 2004-11-10 | 2008-11-04 | Bridge Semiconductor Corporation | Semiconductor chip assembly with welded metal pillar of stacked metal balls |
| US7268421B1 (en) | 2004-11-10 | 2007-09-11 | Bridge Semiconductor Corporation | Semiconductor chip assembly with welded metal pillar that includes enlarged ball bond |
| KR100639702B1 (ko) * | 2004-11-26 | 2006-10-30 | 삼성전자주식회사 | 패키지된 반도체 다이 및 그 제조방법 |
| US7183638B2 (en) * | 2004-12-30 | 2007-02-27 | Intel Corporation | Embedded heat spreader |
| JP2006196709A (ja) * | 2005-01-13 | 2006-07-27 | Sharp Corp | 半導体装置およびその製造方法 |
| WO2006088270A1 (en) * | 2005-02-15 | 2006-08-24 | Unisemicon Co., Ltd. | Stacked package and method of fabricating the same |
| JP5116268B2 (ja) * | 2005-08-31 | 2013-01-09 | キヤノン株式会社 | 積層型半導体装置およびその製造方法 |
| CN100481420C (zh) * | 2005-09-08 | 2009-04-22 | 南茂科技股份有限公司 | 堆叠型芯片封装结构、芯片封装体及其制造方法 |
| US8389867B2 (en) * | 2005-09-30 | 2013-03-05 | Ibiden Co., Ltd. | Multilayered circuit substrate with semiconductor device incorporated therein |
| JP2007123753A (ja) * | 2005-10-31 | 2007-05-17 | National Institute Of Advanced Industrial & Technology | インターポーザ、半導体チップユニットおよび半導体チップ積層モジュール、ならびに製造方法 |
| JPWO2007069606A1 (ja) | 2005-12-14 | 2009-05-21 | 新光電気工業株式会社 | チップ内蔵基板の製造方法 |
| US8067267B2 (en) * | 2005-12-23 | 2011-11-29 | Tessera, Inc. | Microelectronic assemblies having very fine pitch stacking |
| US7990727B1 (en) * | 2006-04-03 | 2011-08-02 | Aprolase Development Co., Llc | Ball grid array stack |
| US7494843B1 (en) | 2006-12-26 | 2009-02-24 | Bridge Semiconductor Corporation | Method of making a semiconductor chip assembly with thermal conductor and encapsulant grinding |
| US7811863B1 (en) | 2006-10-26 | 2010-10-12 | Bridge Semiconductor Corporation | Method of making a semiconductor chip assembly with metal pillar and encapsulant grinding and heat sink attachment |
| TWI312561B (en) * | 2006-10-27 | 2009-07-21 | Advanced Semiconductor Eng | Structure of package on package and method for fabricating the same |
| JP4917874B2 (ja) * | 2006-12-13 | 2012-04-18 | 新光電気工業株式会社 | 積層型パッケージ及びその製造方法 |
| JP4591715B2 (ja) * | 2007-03-30 | 2010-12-01 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
| JP2008311267A (ja) * | 2007-06-12 | 2008-12-25 | Taiyo Yuden Co Ltd | 回路モジュールの製造方法及び回路モジュール |
| JP5054440B2 (ja) * | 2007-06-15 | 2012-10-24 | 新光電気工業株式会社 | 電子部品内蔵基板の製造方法及び電子部品内蔵基板 |
| JP2009094152A (ja) | 2007-10-04 | 2009-04-30 | Hitachi Ltd | 半導体装置、その製造方法及び半導体搭載用フレキシブル基板 |
| US8074581B2 (en) | 2007-10-12 | 2011-12-13 | Steelcase Inc. | Conference table assembly |
| US9024455B2 (en) * | 2010-05-26 | 2015-05-05 | Hitachi Chemical Company, Ltd. | Semiconductor encapsulation adhesive composition, semiconductor encapsulation film-like adhesive, method for producing semiconductor device and semiconductor device |
| JP4550102B2 (ja) * | 2007-10-25 | 2010-09-22 | スパンション エルエルシー | 半導体パッケージ及びその製造方法、半導体パッケージを備える半導体装置 |
| TWI355061B (en) * | 2007-12-06 | 2011-12-21 | Nanya Technology Corp | Stacked-type chip package structure and fabricatio |
| JP5153364B2 (ja) * | 2008-01-30 | 2013-02-27 | 京セラ株式会社 | 積層型半導体パッケージおよび電子装置 |
| KR100936070B1 (ko) * | 2008-02-26 | 2010-01-12 | 재단법인 서울테크노파크 | 웨이퍼 스택 제작 방법 |
| JP5174518B2 (ja) * | 2008-04-17 | 2013-04-03 | スパンション エルエルシー | 積層型半導体装置、及びその製造方法 |
| SG142321A1 (en) * | 2008-04-24 | 2009-11-26 | Micron Technology Inc | Pre-encapsulated cavity interposer |
| KR100997793B1 (ko) * | 2008-09-01 | 2010-12-02 | 주식회사 하이닉스반도체 | 반도체 패키지 및 이의 제조 방법 |
| US10026720B2 (en) * | 2015-05-20 | 2018-07-17 | Broadpak Corporation | Semiconductor structure and a method of making thereof |
| KR20100033012A (ko) | 2008-09-19 | 2010-03-29 | 주식회사 하이닉스반도체 | 반도체 패키지 및 이를 갖는 적층 반도체 패키지 |
| JP5468242B2 (ja) * | 2008-11-21 | 2014-04-09 | 株式会社東芝 | Memsパッケージおよびmemsパッケージの製造方法 |
| JP4833307B2 (ja) * | 2009-02-24 | 2011-12-07 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 半導体モジュール、端子板、端子板の製造方法および半導体モジュールの製造方法 |
| KR101078733B1 (ko) | 2009-06-29 | 2011-11-02 | 주식회사 하이닉스반도체 | 반도체 패키지 |
| US8310835B2 (en) * | 2009-07-14 | 2012-11-13 | Apple Inc. | Systems and methods for providing vias through a modular component |
| TWI397155B (zh) * | 2009-12-24 | 2013-05-21 | 力成科技股份有限公司 | 形成矽穿孔之多晶片堆疊過程 |
| US8884422B2 (en) * | 2009-12-31 | 2014-11-11 | Stmicroelectronics Pte Ltd. | Flip-chip fan-out wafer level package for package-on-package applications, and method of manufacture |
| JP2012033875A (ja) | 2010-06-30 | 2012-02-16 | Canon Inc | 積層型半導体装置 |
| US8847376B2 (en) | 2010-07-23 | 2014-09-30 | Tessera, Inc. | Microelectronic elements with post-assembly planarization |
| FR2964786B1 (fr) * | 2010-09-09 | 2013-03-15 | Commissariat Energie Atomique | Procédé de réalisation d'éléments a puce munis de rainures d'insertion de fils |
| US20120074558A1 (en) * | 2010-09-29 | 2012-03-29 | Mao Bang Electronic Co., Ltd. | Circuit Board Packaged with Die through Surface Mount Technology |
| US9013037B2 (en) | 2011-09-14 | 2015-04-21 | Stmicroelectronics Pte Ltd. | Semiconductor package with improved pillar bump process and structure |
| US8916481B2 (en) | 2011-11-02 | 2014-12-23 | Stmicroelectronics Pte Ltd. | Embedded wafer level package for 3D and package-on-package applications, and method of manufacture |
| CN102522380B (zh) | 2011-12-21 | 2014-12-03 | 华为技术有限公司 | 一种PoP封装结构 |
| US8513795B2 (en) * | 2011-12-27 | 2013-08-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | 3D IC configuration with contactless communication |
| US9059009B2 (en) * | 2012-02-09 | 2015-06-16 | Fuji Electric Co., Ltd. | Semiconductor device |
| CN102623359A (zh) * | 2012-04-17 | 2012-08-01 | 日月光半导体制造股份有限公司 | 半导体封装结构及其制造方法 |
| US9548283B2 (en) * | 2012-07-05 | 2017-01-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package redistribution layer structure and method of forming same |
| CN102945821B (zh) * | 2012-11-28 | 2015-07-29 | 贵州振华风光半导体有限公司 | 高密度厚膜混合集成电路的集成方法 |
| CN103094219B (zh) * | 2012-11-28 | 2015-01-28 | 贵州振华风光半导体有限公司 | 三维集成高密度厚膜多芯片组件的集成方法 |
| WO2014118044A2 (de) * | 2013-01-31 | 2014-08-07 | Pac Tech - Packaging Technologies Gmbh | Chipanordnung und verfahren zur herstellung einer chipanordnung |
| JP5763116B2 (ja) * | 2013-03-25 | 2015-08-12 | 株式会社東芝 | 半導体装置の製造方法 |
| JP6216157B2 (ja) | 2013-05-27 | 2017-10-18 | 新光電気工業株式会社 | 電子部品装置及びその製造方法 |
| US9735078B2 (en) | 2014-04-16 | 2017-08-15 | Infineon Technologies Ag | Device including multiple semiconductor chips and multiple carriers |
| BR112015028568A2 (pt) * | 2014-12-15 | 2017-07-25 | Intel Corp | aparelho de pacote em pacote de molde de suspensão invertida. |
| CN108878398B (zh) | 2017-05-16 | 2020-07-21 | 晟碟半导体(上海)有限公司 | 包括导电凸块互连的半导体器件 |
| JP6984183B2 (ja) * | 2017-06-05 | 2021-12-17 | 富士電機株式会社 | 半導体パッケージ、半導体装置および半導体装置の製造方法 |
| CN113410193B (zh) * | 2021-05-27 | 2024-05-03 | 元成科技(苏州)有限公司 | 一种8+1堆叠式芯片封装装置 |
| TWI848353B (zh) * | 2021-09-02 | 2024-07-11 | 美商愛玻索立克公司 | 基板載體以及包括其之基板組合 |
| JP2023183319A (ja) * | 2022-06-15 | 2023-12-27 | 新光電気工業株式会社 | 積層基板及び積層基板の製造方法 |
Family Cites Families (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS574127A (en) | 1980-06-10 | 1982-01-09 | Fujitsu Ltd | Formation of conductor pattern |
| US5237204A (en) * | 1984-05-25 | 1993-08-17 | Compagnie D'informatique Militaire Spatiale Et Aeronautique | Electric potential distribution device and an electronic component case incorporating such a device |
| JPS61101067A (ja) | 1984-10-24 | 1986-05-19 | Nec Corp | メモリモジユ−ル |
| WO1993013557A1 (fr) * | 1985-02-14 | 1993-07-08 | Yoshiyuki Sato | Structure de montage tridimensionnel de puces a semi-conducteurs |
| US4953005A (en) * | 1987-04-17 | 1990-08-28 | Xoc Devices, Inc. | Packaging system for stacking integrated circuits |
| JP2667689B2 (ja) | 1988-12-29 | 1997-10-27 | 株式会社徳力本店 | 低融点Agはんだ |
| JP2799408B2 (ja) | 1989-12-22 | 1998-09-17 | 株式会社日立製作所 | 半導体装置及びそれを実装した電子装置 |
| JPH02310957A (ja) | 1989-05-26 | 1990-12-26 | Hitachi Ltd | 半導体装置 |
| JPH03295265A (ja) | 1990-04-13 | 1991-12-26 | Hitachi Ltd | マルチチツプ半導体装置 |
| US5043794A (en) * | 1990-09-24 | 1991-08-27 | At&T Bell Laboratories | Integrated circuit package and compact assemblies thereof |
| JP2876773B2 (ja) * | 1990-10-22 | 1999-03-31 | セイコーエプソン株式会社 | プログラム命令語長可変型計算装置及びデータ処理装置 |
| US5216278A (en) * | 1990-12-04 | 1993-06-01 | Motorola, Inc. | Semiconductor device having a pad array carrier package |
| JPH04280695A (ja) * | 1991-03-08 | 1992-10-06 | Hitachi Ltd | 高集積半導体装置及びそれを用いた半導体モジュール |
| JPH04290258A (ja) * | 1991-03-19 | 1992-10-14 | Nec Corp | マルチチップモジュール |
| JPH0574985A (ja) | 1991-04-16 | 1993-03-26 | Nec Corp | 半導体素子の実装構造 |
| JPH0529534A (ja) * | 1991-07-25 | 1993-02-05 | Nec Corp | メモリモジユール |
| JPH05329681A (ja) | 1991-12-10 | 1993-12-14 | Nec Corp | 多層ろう材とその製造方法および接続方法 |
| US5241454A (en) * | 1992-01-22 | 1993-08-31 | International Business Machines Corporation | Mutlilayered flexible circuit package |
| JPH05198708A (ja) | 1992-01-23 | 1993-08-06 | Hitachi Ltd | 半導体集積回路装置 |
| US5222014A (en) * | 1992-03-02 | 1993-06-22 | Motorola, Inc. | Three-dimensional multi-chip pad array carrier |
| JP3201637B2 (ja) | 1992-03-06 | 2001-08-27 | 田中電子工業株式会社 | 半導体素子用のはんだバンプ形成材料 |
| JPH05291480A (ja) | 1992-04-07 | 1993-11-05 | Hitachi Ltd | 積層形マルチチップ半導体装置 |
| US5247423A (en) * | 1992-05-26 | 1993-09-21 | Motorola, Inc. | Stacking three dimensional leadless multi-chip module and method for making the same |
| US5343366A (en) * | 1992-06-24 | 1994-08-30 | International Business Machines Corporation | Packages for stacked integrated circuit chip cubes |
| JP2763478B2 (ja) | 1993-07-12 | 1998-06-11 | 京セラ株式会社 | コンデンサ材料及び多層アルミナ質配線基板並びに半導体素子収納用パッケージ |
| JPH06118129A (ja) | 1992-10-08 | 1994-04-28 | Mitsubishi Electric Corp | 半導体装置の評価装置 |
| JPH06232608A (ja) | 1992-10-29 | 1994-08-19 | Nec Corp | 複合マイクロ波回路モジュール |
| JP2812107B2 (ja) | 1992-10-30 | 1998-10-22 | 日本電気株式会社 | 半導体装置 |
| KR100238197B1 (ko) | 1992-12-15 | 2000-01-15 | 윤종용 | 반도체장치 |
| JPH06244056A (ja) | 1992-12-29 | 1994-09-02 | Sumitomo Kinzoku Ceramics:Kk | 半導体素子収納用パッケージ |
| JPH06260566A (ja) * | 1993-03-04 | 1994-09-16 | Sony Corp | ランドグリッドアレイパッケージ及びその作製方法、並びに半導体パッケージ |
| JPH06268101A (ja) * | 1993-03-17 | 1994-09-22 | Hitachi Ltd | 半導体装置及びその製造方法、電子装置、リ−ドフレ−ム並びに実装基板 |
| JPH06275774A (ja) | 1993-03-19 | 1994-09-30 | Fujitsu Ltd | 回路ユニットの接続装置および該接続装置を用いた回路モジュール |
| JPH06302760A (ja) | 1993-04-13 | 1994-10-28 | Matsushita Electric Ind Co Ltd | 半導体装置 |
| JPH06333983A (ja) | 1993-05-19 | 1994-12-02 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
| KR970000214B1 (ko) * | 1993-11-18 | 1997-01-06 | 삼성전자 주식회사 | 반도체 장치 및 그 제조방법 |
| EP0658937A1 (en) * | 1993-12-08 | 1995-06-21 | Hughes Aircraft Company | Vertical IC chip stack with discrete chip carriers formed from dielectric tape |
-
1995
- 1995-02-24 JP JP7036664A patent/JP2944449B2/ja not_active Expired - Lifetime
-
1996
- 1996-02-20 US US08/604,115 patent/US6188127B1/en not_active Expired - Lifetime
- 1996-02-23 EP EP96102773A patent/EP0729184A3/en not_active Withdrawn
- 1996-02-24 KR KR1019960004523A patent/KR100231366B1/ko not_active Expired - Fee Related
- 1996-02-24 TW TW085102110A patent/TW312844B/zh not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6383840B1 (en) | 1999-07-22 | 2002-05-07 | Seiko Epson Corporation | Semiconductor device, method of manufacture thereof, circuit board, and electronic device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08236694A (ja) | 1996-09-13 |
| TW312844B (index.php) | 1997-08-11 |
| EP0729184A2 (en) | 1996-08-28 |
| EP0729184A3 (en) | 1999-11-03 |
| US6188127B1 (en) | 2001-02-13 |
| KR100231366B1 (ko) | 1999-11-15 |
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