WO2010038836A1 - 分散組成物、重合性組成物、遮光性カラーフイルタ、固体撮像素子、液晶表示装置、ウエハレベルレンズ、および撮像ユニツト - Google Patents
分散組成物、重合性組成物、遮光性カラーフイルタ、固体撮像素子、液晶表示装置、ウエハレベルレンズ、および撮像ユニツト Download PDFInfo
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- 0 C*(C)CC(C)(*(C)*)C(OCCOC(c(cccc1)*1C(O)=O)O)=O Chemical compound C*(C)CC(C)(*(C)*)C(OCCOC(c(cccc1)*1C(O)=O)O)=O 0.000 description 8
- IQFJQYATXBICEL-UHFFFAOYSA-O CC[NH+]1c(ccc(C(c2ccccc2)=O)c2)c2-c2c1ccc(C(C(CCSC(CCC(C)[ClH+])=C)=NOCc1ccccc1)=O)c2 Chemical compound CC[NH+]1c(ccc(C(c2ccccc2)=O)c2)c2-c2c1ccc(C(C(CCSC(CCC(C)[ClH+])=C)=NOCc1ccccc1)=O)c2 IQFJQYATXBICEL-UHFFFAOYSA-O 0.000 description 1
- SHDTVGWZVWSJNL-FMIFUCRQSA-N CC[n]1c(ccc(C(c2c(C)cccc2)=O)c2)c2c2c1ccc(C(/C(/CCSc(cc1)ccc1Cl)=N/OC(C)=O)=O)c2 Chemical compound CC[n]1c(ccc(C(c2c(C)cccc2)=O)c2)c2c2c1ccc(C(/C(/CCSc(cc1)ccc1Cl)=N/OC(C)=O)=O)c2 SHDTVGWZVWSJNL-FMIFUCRQSA-N 0.000 description 1
- ZWLPBLYKEWSWPD-UHFFFAOYSA-N Cc1ccccc1C(O)=O Chemical compound Cc1ccccc1C(O)=O ZWLPBLYKEWSWPD-UHFFFAOYSA-N 0.000 description 1
- ZBCGPWAZRMLTKF-UHFFFAOYSA-N OC(c(cc1)ccc1NC=O)=O Chemical compound OC(c(cc1)ccc1NC=O)=O ZBCGPWAZRMLTKF-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/44—Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F265/00—Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00
- C08F265/04—Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00 on to polymers of esters
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/08—Metals
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/18—Oxygen-containing compounds, e.g. metal carbonyls
- C08K3/20—Oxides; Hydroxides
- C08K3/22—Oxides; Hydroxides of metals
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L55/00—Compositions of homopolymers or copolymers, obtained by polymerisation reactions only involving carbon-to-carbon unsaturated bonds, not provided for in groups C08L23/00 - C08L53/00
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0085—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing wafer level optics
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F291/00—Macromolecular compounds obtained by polymerising monomers on to macromolecular compounds according to more than one of the groups C08F251/00 - C08F289/00
- C08F291/14—Macromolecular compounds obtained by polymerising monomers on to macromolecular compounds according to more than one of the groups C08F251/00 - C08F289/00 on to sulfur-containing macromolecules
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/18—Oxygen-containing compounds, e.g. metal carbonyls
- C08K3/20—Oxides; Hydroxides
- C08K3/22—Oxides; Hydroxides of metals
- C08K2003/2237—Oxides; Hydroxides of metals of titanium
- C08K2003/2241—Titanium dioxide
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
Definitions
- the present invention relates to a dispersion composition containing titanium black, a polymerizable composition containing the dispersion composition, a light-shielding color filter obtained using the polymerizable composition, and a solid-state imaging device comprising the light-shielding color filter,
- the present invention relates to a liquid crystal display device, a wafer level lens, and an imaging unit.
- a color filter used in a liquid crystal display device includes a light shielding film called a black matrix for the purpose of shielding light between colored pixels and improving contrast. Also in the solid-state imaging device, a black matrix is provided for the purpose of preventing noise and improving image quality.
- the black matrix is patterned by a photolithography method or the like using a polymerizable composition containing a dispersion composition in which a light-shielding black color material is dispersed, a polymerizable compound, a polymerization initiator, and other components. It is manufactured by.
- a photosensitive resin composition containing a black color material such as carbon black or titanium black is known.
- a black matrix for a liquid crystal display device As a black matrix for a liquid crystal display device, a black matrix having a high light shielding property is required in order to increase contrast and improve visibility.
- a black matrix for a solid-state imaging device needs to have light shielding properties in the infrared region in addition to light shielding properties in the visible region.
- carbon black has been widely used as a light-shielding black matrix.
- a dispersion composition or a polymerizable composition having a high concentration of carbon black as a light shielding material is required for pattern formation of the light shielding layer.
- the black matrix for liquid crystal display devices is mainly required to have a light shielding property in the visible region, whereas the black matrix for a solid-state imaging device needs to have a light shielding property in the infrared region in addition to the light shielding property in the visible region. There is. Further, the black matrix for liquid crystal display devices is required to be miniaturized, while the black matrix for solid-state imaging device (in particular, the surface opposite to the light-receiving element forming surface of the support (hereinafter also referred to as “back surface”)). As for the black matrix for shielding light, it is required to have a performance for uniformly shielding a larger area than the black matrix for liquid crystal display devices.
- Such an imaging unit generally includes a solid-state imaging device such as a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary Metal-Oxide-Semiconductor) image sensor, and a lens for forming a subject image on the solid-state imaging device.
- a solid-state imaging device such as a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary Metal-Oxide-Semiconductor) image sensor
- CMOS Complementary Metal-Oxide-Semiconductor
- a lens module is manufactured by manufacturing a wafer level lens having a configuration in which a plurality of lenses are molded on a substrate, and cutting the substrate to separate each of the plurality of lenses.
- a method for mass production is known.
- the imaging unit is obtained by integrally combining a substrate on which a plurality of lenses are formed and a sensor substrate on which a plurality of solid-state imaging elements are formed, and cutting the sensor substrate together with the substrate so as to include the lens and the solid-state imaging elements as a set.
- a wafer level lens a multilayer wafer level lens configured by superposing substrates on which a plurality of lenses are formed has been described (see, for example, JP-T-2005-539276). Since the wafer level lens is made of a transparent material that allows light to pass through the substrate and the lens and can transmit light at any part, the wafer level lens is diced and mounted on the imaging device to In this case, if light is transmitted or reflected in a region other than the lens surface of the lens, there is a concern that optical performance problems such as ghost and flare are likely to occur during imaging. From the viewpoint of preventing such a problem, for example, a region other than the lens of the wafer level lens is subjected to processing such as providing a light shielding member.
- titanium black has a large specific gravity, it is difficult to disperse, and improvement in dispersibility and dispersion stability is desired, for example, titanium black settles over time even after dispersion.
- a dispersion composition having high dispersibility of titanium black, suppressing precipitation of titanium black after aging, and having high dispersibility and storage stability is provided.
- a uniform coating thickness is obtained with good coatability to the substrate, and residues in unexposed areas are suppressed when pattern forming, and steps after exposure and development (in the black matrix)
- a polymerizable composition having no step and having a good pattern shape.
- a light-shielding color filter having a highly light-shielding colored pattern obtained using the polymerizable composition, and a high-quality solid-state imaging device using the light-shielding color filter, A liquid crystal display device and an imaging unit are provided.
- a wafer level lens having a colored region having a high light shielding property is provided.
- a dispersion composition comprising (A) titanium black, (B) a graft copolymer, and (C) a solvent.
- a dispersion composition comprising (A) titanium black, (B) a graft copolymer, and (C) a solvent.
- a graft copolymer has a graft chain in which the number of atoms excluding hydrogen atoms is in the range of 40 to 10,000.
- the graft chain in the (B) graft copolymer is at least one selected from the group consisting of a polyester structure, a polyether structure, and a polyacrylate structure. object.
- X 1 , X 2 , X 3 , X 4 , X 5 , and X 6 each independently represent a hydrogen atom or a monovalent organic group
- Y 1 , Y 2 , Y 3 , Y 4 , and Y 5 each independently represent a divalent linking group
- Z 1 , Z 2 , Z 3 , Z 4 , and Z 5 each independently represent a hydrogen atom or a monovalent organic group
- R represents a hydrogen atom or a monovalent organic group, and R having a different structure may be present in the copolymer
- n, m, p, q, and r are each independently 1 To an integer of 500.
- the monovalent organic group represented by X 1 , X 2 , X 3 , X 4 , X 5 , or X 6 is an alkyl group having 1 to 12 carbon atoms, ⁇ 1> to ⁇ 4>
- the divalent linking group represented by Y 1 , Y 2 , Y 3 , Y 4 , or Y 5 is selected from the following linking groups (Y-1) to (Y-20) ⁇ 1
- A represents a bond with the left terminal group in Formulas (1) to (5)
- B represents a right terminal group in Formulas (1) to (5). Represents the bond of.
- a monovalent organic group represented by Z 1 , Z 2 , Z 3 , Z 4 , or Z 5 is an alkyl group, a hydroxyl group, an alkoxy group, an aryloxy group, a heteroaryloxy group, an alkylthioether group,
- the (B) graft copolymer contains 10% of the structural unit represented by any one of the formulas (1) to (5) in terms of mass with respect to the total mass of the graft copolymer.
- a polymerizable composition comprising the dispersion composition according to any one of ⁇ 1> to ⁇ 11>, (D) a polymerizable compound, and (E) a polymerization initiator.
- a solid-state imaging device comprising the light-shielding color filter according to ⁇ 14>.
- a liquid crystal display device comprising the light-shielding color filter according to ⁇ 14>.
- a wafer level lens comprising: a substrate on which a plurality of lenses are integrally formed; and the light-shielding color filter according to ⁇ 14> provided in a region of the substrate excluding the lens surface of the lens.
- An imaging unit including the wafer level lens according to ⁇ 17>.
- the dispersion composition in the present invention contains (B) a graft copolymer, preferably a graft copolymer having a graft chain in which the number of atoms excluding hydrogen atoms is in the range of 40 to 10,000 as a dispersant. Therefore, when the graft chain functions as a steric repulsion group, titanium black can be uniformly dispersed with good dispersibility. Even when the dispersion composition is stored at room temperature for a long time, By the interaction with the solvent, the sedimentation of titanium black can be suppressed over a long period of time.
- a dispersion composition having high dispersibility of titanium black, suppressing sedimentation of titanium black, and high storage stability can be provided.
- a uniform coating thickness can be obtained with good coatability on the substrate, and when the pattern is formed, residues in the unexposed areas are suppressed, and there is no step after exposure / development and the pattern shape is A good polymerizable composition can be provided.
- a color filter having a highly light-shielding colored pattern for example, a black matrix
- a liquid crystal display device and an imaging unit can be provided.
- the “light-shielding color filter” is obtained by exposing and developing a photosensitive polymerizable composition containing at least a titanium black dispersion composition, a polymerizable compound, and a photopolymerization initiator.
- a light-shielding pattern may be an achromatic color such as black or gray, or a black or gray color mixed with a chromatic color.
- FIG. 3 is a sectional view taken along line AA in FIG. 2. It is sectional drawing which shows the other structural example of a wafer level lens. It is sectional drawing which shows an example of a structure of an imaging unit.
- the present invention is described in detail below.
- the dispersion composition according to an embodiment of the present invention contains (A) titanium black, (B) a graft copolymer, and (C) a solvent.
- A titanium black
- B a graft copolymer
- C a solvent
- Titanium black in the present invention is black particles having titanium atoms. Preferred is low titanium oxide or titanium oxynitride.
- the surface of titanium black particles can be modified as necessary for the purpose of improving dispersibility and suppressing aggregation. For example, it can be coated with silicon oxide, titanium oxide, germanium oxide, aluminum oxide, magnesium oxide, zirconium oxide, and treatment with a water repellent material as disclosed in JP-A-2007-302836 is also possible. Is possible.
- Titanium black can be produced by heating a mixture of titanium dioxide and titanium metal in a reducing atmosphere for reduction (Japanese Patent Laid-Open No. 49-5432), or ultrafine dioxide obtained by high-temperature hydrolysis of titanium tetrachloride.
- a method of reducing titanium in a reducing atmosphere containing hydrogen Japanese Patent Laid-Open No. 57-205322
- a method of reducing titanium dioxide or titanium hydroxide at high temperature in the presence of ammonia Japanese Patent Laid-Open No. 60-65069, Japanese Patent Laid-Open No.
- the particle size of titanium black particles is not particularly limited, but from the viewpoint of dispersibility and colorability, the average primary particle size is preferably in the range of 3 nm to 2000 nm, more preferably the average primary particle size is 10 nm. It is in the range of ⁇ 500 nm, more preferably in the range of 10 nm to 100 nm.
- the specific surface area of titanium black is not limited to specified ones, such a titanium black from the viewpoint of water repellency after the surface treatment with a water repellent agent to a predetermined performance, specific surface area measured by BET method is 5 m 2 / It is preferably about g to 150 m 2 / g, particularly 20 m 2 / g to 100 m 2 / g.
- titanium black examples include, for example, Titanium Black 10S, 12S, 13R, 13M, 13M-C, 13R, 13R-N manufactured by Mitsubishi Materials Corporation, and Tilac D manufactured by Ako Kasei Co., Ltd.
- the present invention is not limited to these examples.
- an extender pigment may be added as needed in addition to titanium black.
- extender pigments include barium sulfate, barium carbonate, calcium carbonate, silica, basic magnesium carbonate, alumina white, gloss white, titanium white, and hydrotalcite. These extender pigments can be used alone or in admixture of two or more.
- the amount of extender used is usually 0 to 100 parts by weight, preferably 5 to 50 parts by weight, and more preferably 10 to 40 parts by weight with respect to 100 parts by weight of titanium black.
- the titanium black and extender pigment can be used by modifying the surface with a polymer in some cases.
- the amount of titanium black added to the dispersion composition of the present invention is such that the content of titanium black in the dispersion composition is in the range of 20% by mass to 94% by mass, more preferably in the range of 40% by mass to 92% by mass. More preferably, it is adjusted to be in the range of 40% by mass to 80% by mass.
- the amount of titanium black is within the above range, the curability of the polymerizable composition of the present invention is improved, and a uniform film can be formed.
- titanium black is contained at a high concentration, sufficient light shielding properties can be obtained, and a polymerizable composition containing titanium black can be suitably used for forming a light shielding color filter.
- pigments other than titanium black are not particularly limited as long as it has absorbance in the visible light region, and the above-mentioned extender pigment, carbon black, C.I. I. Pigment Blue 1, 2, 15, 15: 1, 15: 2, 15: 3, 15: 4, 15: 6, 16, 22, 60, 64, 66, 79, 80, C.I. I. Pigment Violet 1, 19, 23, 27, 32, 37, 42, C.I. I. Pigment Brown 25, 28, C.I. I. And organic pigments such as Pigment Black 1 and 7.
- Examples of mixing light-shielding pigments other than titanium black include a mixture of titanium black and carbon black in a ratio of 6: 1, and a mixture of titanium black and titanium oxide in a ratio of 3: 1.
- the light-shielding pigment other than titanium black to be mixed can be used in the range of 0.01 to 99.99 parts by mass, preferably in the range of 20 to 70 parts by mass with respect to 100 parts by mass of titanium black.
- the dispersion composition of the present invention contains a graft copolymer (hereinafter also referred to as “specific resin”).
- the graft copolymer of the present invention preferably has a graft chain in which the number of atoms excluding hydrogen atoms is in the range of 40 to 10,000.
- the graft chain refers to the base of the main chain of the copolymer, From the main chain to the end of the branched group.
- this specific resin is a dispersion resin that imparts dispersibility to titanium black, and has excellent dispersibility and affinity with a solvent due to a graft chain. Excellent dispersion stability after aging.
- a polymerizable composition when a polymerizable composition is prepared, it has an affinity with a polymerizable compound or other resin that can be used in combination with a graft chain, so that a residue is hardly generated by alkali development.
- the polymerizable resin of the present invention has the alkali-soluble dispersion resin itself essential for the dispersion of titanium black. Therefore, such a polymerizable composition is preferable because it is excellent in the light shielding property of the exposed portion and the alkali developability of the unexposed portion is improved.
- the graft copolymer (B) used in the present invention preferably has 40 to 10,000 atoms excluding hydrogen atoms per graft chain, and hydrogen atoms per graft chain.
- the number of atoms excluding is more preferably 50 to 2000, and the number of atoms excluding hydrogen atoms per graft chain is more preferably 60 to 500.
- poly (meth) acryl poly (meth) acryl, polyester, polyurethane, polyurea, polyamide, polyether, etc.
- poly (meth) acryl poly (meth) acryl, polyester, polyurethane, polyurea, polyamide, polyether, etc.
- it improves the interaction between the graft site and the solvent, thereby improving dispersibility.
- it is preferably a graft chain having poly (meth) acryl, polyester or polyether, more preferably having polyester or polyether.
- the structure of the macromonomer having such a polymer structure as a graft chain is not particularly limited as long as it has a substituent capable of reacting with the polymer main chain portion and satisfies the requirements of the present invention.
- a macromonomer having a reactive double bond group can be preferably used.
- Examples of commercially available macromonomers suitably used for the synthesis of the specific resin include AA-6 (manufactured by Toa Gosei), AA-10 (manufactured by Toa Gosei), AB-6 (manufactured by Toa Gosei), AS-6.
- AA-6 manufactured by Toa Gosei
- AA-10 manufactured by Toa Gosei
- AB-6 manufactured by Toa Gosei
- AS-6 manufactured by Toa Gosei
- AN-6 a prefix of Toa Gosei
- AA-6 manufactured by Toa Gosei
- AB-6 manufactured by Toa Gosei
- AS-6 manufactured by Toa Gosei
- AN-6 a prefix 6
- AA-10 manufactured by Toa Gosei
- AS-6 manufactured by Toa Gosei
- AN-6 manufactured by Toa Gosei
- AN-6 are preferable.
- Bremer PME-4000 manufactured by NOF Corporation
- the specific resin used in the present invention preferably contains at least a structural unit represented by any one of the following formulas (1) to (5) as a graft site.
- X 1 , X 2 , X 3 , X 4 , X 5 , and X 6 each independently represent a hydrogen atom or a monovalent organic group.
- a hydrogen atom or an alkyl group having 1 to 12 carbon atoms is preferable, a hydrogen atom or a methyl group is more preferable, and a methyl group is particularly preferable.
- Y 1 , Y 2 , Y 3 , Y 4 , and Y 5 are each independently a divalent linking group and are not particularly limited in structure. Specific examples thereof include the following (Y-1) to (Y-20) linking groups.
- A means a bond with the left terminal group in formulas (1) to (5)
- B means a bond with the right terminal group in formulas (1) to (5).
- (Y-2) and (Y-13) are more preferred because of the ease of synthesis.
- Z 1 , Z 2 , Z 3 , Z 4 , and Z 5 are each independently a hydrogen atom or a monovalent organic group, and the monovalent organic group is particularly Although the structure is not limited, specific examples include a hydroxyl group, an alkoxy group, an aryloxy group, a heteroaryloxy group, an alkylthioether group, an arylthioether group, a heteroarylthioether group, and an amino group.
- Z 1 , Z 3 , and Z 4 are preferably an alkoxy group having 5 to 24 carbon atoms, particularly from the viewpoint of having a steric repulsion effect for improving dispersibility.
- Z 2 is preferably an alkylcarbonyloxy group having an alkyl moiety having 5 to 24 carbon atoms. Among them, an alkylcarbonyloxy group having a branched alkyl group having 5 to 24 carbon atoms or a cyclic alkyl group having 5 to 24 carbon atoms is particularly preferable. The alkylcarbonyloxy group having is preferable.
- Z 5 is preferably a hydrogen atom from the viewpoint of synthesis. In the formulas (1) to (5), n, m, p, q, and r are each independently an integer of 1 to 500.
- the structural units represented by the formulas (1) to (5) may be included in a range of 10% to 90% in terms of mass with respect to the total mass of the specific resin. Preferably, it is contained in the range of 30% to 70%. Within this range, the dispersibility of titanium black is high, and the developability when a resist is formed is good.
- the specific resin used in the present invention may be a combination of two or more graft copolymers having different structures.
- R represents a hydrogen atom or a monovalent organic group and is not particularly limited in terms of structure, but is preferably a hydrogen atom, an alkyl group, an aryl group, or a heteroaryl group, more preferably a hydrogen atom.
- two or more types of R having different structures may exist in the specific resin.
- the plurality of R may be the same or different, or the structure represented by the formula (5) in the specific resin The unit may be the same or different.
- a functional group capable of interacting with titanium black can be introduced in addition to the graft site.
- a structural unit having an acid group as a functional group a structural unit having a basic group, a structural unit having a coordinating group, a structural unit having reactivity, and the like can be introduced into the specific resin.
- the acid group examples include a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, a phenolic hydroxyl group, and the like, and particularly preferably, a carboxylic acid group that has good adsorptive power to titanium black and has high dispersibility. It is. These can be used alone or in combination of two or more. By introducing such an acid group, there is also an advantage that the alkali developability of the specific resin is improved.
- the content of these copolymer components preferably used in the specific resin of the present invention is 0.1 mol% to 50 mol%, and particularly preferably 1 mol from the viewpoint of suppressing damage to the image strength due to alkali development. % To 30 mol%.
- Examples of the basic group include a primary amino group, a secondary amino group, a tertiary amino group, a heterocyclic ring containing an N atom, an amide group, and the like. Is a tertiary amino group having good dispersibility. These can be used alone or in combination of two or more.
- the content of these copolymer components suitably used for the specific resin of the present invention is 0.01 mol% to 50 mol%, and particularly preferably 0.01 mol% to 50 mol% from the viewpoint of inhibiting developability inhibition. 30 mol%.
- Examples of the coordinating group or reactive group include acetylacetoxy group, trialkoxysilyl group, isocyanate group, acid anhydride residue, acid chloride residue and the like, and particularly preferably pigment. It is an acetylacetoxy group that has a good adsorptive power to and high dispersibility. These can be used alone or in combination of two or more.
- the content of these copolymerization components preferably used in the specific resin of the present invention is 0.5 mol% to 50 mol%, and particularly preferably 1 mol% to 30 mol from the viewpoint of inhibiting developability inhibition. %.
- the structure of the functional group capable of interacting with titanium black other than the graft site is not particularly limited as long as it contains a functional group capable of interacting with titanium black other than the above graft site. It is preferable to have at least one repeating unit obtained from the monomer represented by any of (i) to (iii).
- R 1 , R 2 , and R 3 are each independently a hydrogen atom, a halogen atom (for example, fluorine, chlorine, bromine, etc.), or a carbon atom having 1 to 6 carbon atoms.
- An alkyl group (for example, a methyl group, an ethyl group, a propyl group, etc.) is represented.
- R 1 , R 2 , and R 3 are more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and most preferably a hydrogen atom or a methyl group.
- R 2 and R 3 are particularly preferably a hydrogen atom.
- X represents an oxygen atom (—O—) or an imino group (—NH—), and is preferably an oxygen atom.
- L is a single bond or a divalent linking group.
- a divalent aliphatic group for example, alkylene group, substituted alkylene group, alkenylene group, substituted alkenylene group, alkynylene group, substituted alkynylene group
- divalent aromatic group for example, arylene group
- Substituted arylene groups divalent heterocyclic groups and their oxygen atoms (—O—), sulfur atoms (—S—), imino groups (—NH—), substituted imino groups (—NR 31 —, R 31 may be a combination with an aliphatic group, aromatic group or heterocyclic group) or a carbonyl group (—CO—).
- the divalent aliphatic group may have a cyclic structure or a branched structure.
- the aliphatic group has preferably 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and still more preferably 1 to 10 carbon atoms.
- the aliphatic group is preferably a saturated aliphatic group rather than an unsaturated aliphatic group.
- the aliphatic group may have a substituent. Examples of this substituent include a halogen atom, a hydroxyl group, an aromatic group, and a heterocyclic group.
- the number of carbon atoms of the divalent aromatic group is preferably 6 to 20, more preferably 6 to 15, and most preferably 6 to 10.
- the aromatic group may have a substituent. Examples of this substituent include a halogen atom, a hydroxyl group, an aliphatic group, an aromatic group, and a heterocyclic group.
- the divalent heterocyclic group preferably has a 5-membered or 6-membered ring as a heterocycle.
- the heterocycle may be condensed with another heterocycle, aliphatic ring or aromatic ring.
- the heterocyclic group may have a substituent. Examples of the substituent include a halogen atom, a hydroxy group, an oxo group ( ⁇ O), a thioxo group ( ⁇ S), an imino group ( ⁇ NH), a substituted imino group ( ⁇ N—R 32 , where R 32 represents Aliphatic group, aromatic group or heterocyclic group), aliphatic group, aromatic group and heterocyclic group.
- L is preferably a single bond, an alkylene group or a divalent linking group containing an oxyalkylene structure.
- the oxyalkylene structure is more preferably an oxyethylene structure or an oxypropylene structure.
- L may contain a polyoxyalkylene structure containing two or more oxyalkylene structures.
- the polyoxyalkylene structure is preferably a polyoxyethylene structure or a polyoxypropylene structure.
- the polyoxyethylene structure is represented by — (OCH 2 CH 2 ) n—, where n is preferably an integer of 2 or more, and more preferably an integer of 2 to 10.
- Z represents a functional group capable of interacting with titanium black other than the graft site, preferably a carboxylic acid or a tertiary amino group, and preferably a carboxylic acid. More preferred.
- Y represents a methine group or a nitrogen atom.
- R 4 , R 5 , and R 6 are each independently a hydrogen atom, a halogen atom (eg, fluorine, chlorine, bromine, etc.), or an alkyl group having 1 to 6 carbon atoms ( For example, it represents a methyl group, an ethyl group, a propyl group, etc.), Z, or -LZ.
- L and Z are as defined above.
- R 4 , R 5 and R 6 are preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, more preferably a hydrogen atom.
- R 1 , R 2 , and R 3 are a hydrogen atom or a methyl group, and L includes an alkylene group or an oxyalkylene structure 2
- a compound in which X is an oxygen atom or an imino group and Z is a carboxylic acid is preferable.
- R 1 is a hydrogen atom or a methyl group
- L is an alkylene group
- Z is a carboxylic acid
- Y is a methine group.
- R 4 , R 5 , and R 6 are a hydrogen atom or a methyl group and Z is a carboxylic acid is preferable.
- Examples of representative compounds represented by formulas (i) to (iii) include Methacrylic acid, crotonic acid, isocrotonic acid, a reaction product of a compound having an addition polymerizable double bond and a hydroxyl group in the molecule (for example, 2-hydroxyethyl methacrylate) and succinic anhydride, and addition polymerization in the molecule.
- Reaction product of a compound having a heavy bond and a hydroxyl group and phthalic anhydride addition polymerizable compound in the molecule and a reaction product of a compound having a double bond and hydroxyl group and tetrahydroxyphthalic anhydride, addition polymerizable compound in the molecule Reaction product of a compound having a heavy bond and a hydroxyl group with trimellitic anhydride, a reaction product of a compound having an addition polymerizable double bond and hydroxyl group in the molecule and pyromellitic anhydride, acrylic acid, acrylic acid dimer, acrylic Acid oligomer, maleic acid, itaconic acid, fumaric acid, 4-vinylbenzoic acid, vinylphenol, 4-hydroxyphenylmethacrylamide Etc., and the like.
- the content of functional groups that can interact with titanium black such as monomers with acidic groups in specific resins is specified from the viewpoint of interaction with titanium black, dispersion stability, and permeability to developer.
- 0.05 mass% to 90 mass% with respect to the resin is preferable, 1.0 mass% to 80 mass% is more preferable, and 10 mass% to 70 mass% is still more preferable.
- the specific resin contained in the dispersion composition of titanium black according to the present invention is not limited to the structural unit having the graft site and titanium as long as the effects of the present invention are not impaired for the purpose of improving various performances such as image strength.
- other structural units having various functions for example, a structural unit having a functional group having an affinity for the dispersion medium used in the dispersion, are copolymerized components. Can be included as
- the copolymer component that can be copolymerized with the specific resin according to the present invention is selected from, for example, acrylic esters, methacrylic esters, styrenes, acrylonitriles, methacrylonitriles, acrylamides, methacrylamides, and the like.
- a radically polymerizable compound is mentioned.
- acrylic esters such as alkyl acrylate (the alkyl group is preferably an alkyl group having 1 to 20 carbon atoms) Butyl acrylate, sec-butyl acrylate, t-butyl acrylate, 4-t-butylphenyl acrylate, 4-chlorophenyl acrylate, pentachlorophenyl acrylate, 4-cyanobenzyl acrylate, cyanomethyl acrylate, cyclohexyl acrylate, 2-ethoxyethyl acrylate, Ethyl acrylate, 2-ethylhexyl acrylate, heptyl acrylate, hexyl acrylate, isobornyl acrylate, isopropyl acrylate, methyl acrylate, , 5-Dimethyladamantyl acrylate, 2-naphthyl acrylate
- Methacrylic acid esters for example, benzyl methacrylate, 4-biphenyl methacrylate, butyl methacrylate, sec-butyl methacrylate, t-butyl methacrylate
- alkyl methacrylate the alkyl group is preferably an alkyl group having 1 to 20 carbon atoms
- 4-tert-butylphenyl methacrylate 4-chlorophenyl methacrylate, pentachlorophenyl methacrylate, 4-cyanophenyl methacrylate, cyanomethyl methacrylate, cyclohexyl methacrylate, 2-ethoxyethyl methacrylate, ethyl methacrylate, 2-ethylhexyl methacrylate, heptyl methacrylate, hexyl methacrylate , Isobornyl methacrylate, isopropyl methacrylate, methyl methacrylate 3,5-dimethyla
- Styrenes such as styrene and alkyl styrene (for example, methyl styrene, dimethyl styrene, trimethyl styrene, ethyl styrene, diethyl styrene, isopropyl styrene, butyl styrene, hexyl styrene, cyclohexyl styrene, decyl styrene, benzyl styrene, chloromethyl styrene, Trifluoromethyl styrene, ethoxymethyl styrene, acetoxymethyl styrene, etc.), alkoxy styrene (eg methoxy styrene, 4-methoxy-3-methyl styrene, dimethoxy styrene etc.), halogen styrene (
- methacrylic acid esters, acrylamides, methacrylamides and styrenes are preferably used, and benzyl methacrylate, t-butyl methacrylate, 4-t-butylphenyl methacrylate, pentachlorophenyl methacrylate, 4-cyanophenyl methacrylate, cyclohexyl methacrylate, ethyl methacrylate, 2-ethylhexyl methacrylate, isobornyl methacrylate, isopropyl methacrylate, methyl methacrylate, 3,5-dimethyladamantyl methacrylate, 2- Naphthyl methacrylate, neopentyl methacrylate, phenyl methacrylate, tetrahydrofurfuryl methacrylate, 2-hydroxyethyl Methacrylate, 3-hydroxypropyl methacrylate, 2-hydroxypropyl methacrylate, 2-hydroxypropyl methacryl
- Styrene methyl styrene, dimethyl styrene, trimethyl styrene, isopropyl styrene, butyl styrene, cyclohexyl styrene, chloromethyl styrene, trifluoromethyl styrene, ethoxymethyl styrene, acetoxymethyl styrene, methoxy styrene, 4-methoxy-3-methyl styrene , Chlorostyrene, dichlorostyrene, trichlorostyrene, tetrachlorostyrene, pentachlorostyrene, bromostyrene, dibromostyrene, iodostyrene, fluorostyrene, trifluorostyrene, 2-bromo-4-trifluoromethylstyrene, 4-fluoro -3-Trifluoromethylstyrene.
- the above radical polymerizable compounds can be used singly or in combination of two or more.
- the content of these copolymer components in the specific resin is 0 mol% to 90 mol%, and particularly preferably 0 mol% to 60 mol%. When the content is in the above range, sufficient pattern formation can be obtained.
- Examples of the solvent used for synthesizing the specific resin of the present invention include ethylene dichloride, cyclohexanone, methyl ethyl ketone, acetone, methanol, ethanol, propanol, butanol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, 2-methoxyethyl.
- Examples include acetate, 1-methoxy-2-propanol, 1-methoxy-2-propyl acetate, N, N-dimethylformamide, N, N-dimethylacetamide, dimethyl sulfoxide, toluene, ethyl acetate, methyl lactate, and ethyl lactate. . These solvents may be used alone or in combination of two or more.
- Specific examples of such specific resins include the following exemplified compounds 1 to 16 and exemplified compounds 20 to 71.
- the suffix (wt%) of each structural unit is based on mass.
- the acid value of the specific resin is preferably in the range of 5.0 mgKOH / g to 200 mgKOH / g, more preferably in the range of 10 mgKOH / g to 150 mgKOH / g, and still more preferably in the range of 15 mgKOH / g to 100 mgKOH / g. It is preferable that If the acid value is 200 mgKOH / g or less, pattern peeling during development can be suppressed, and if it is 5.0 mgKOH / g or more, alkali developability is good.
- the acid value of the specific resin can be calculated, for example, from the average content of acid groups in the specific resin. Moreover, resin which has a desired acid value can be obtained by changing content of the monomer unit containing the acid group which comprises specific resin.
- the weight average molecular weight of the specific resin in the present invention is preferably 10,000 to 300,000, more preferably 15,000 to 200,000, from the viewpoint of pattern peeling inhibition during development and developability. 20,000 to 100,000 is more preferable, and 25,000 to 50,000 is particularly preferable. In addition, the weight average molecular weight of specific resin can be measured by GPC (gel permeation chromatography), for example.
- the content of the specific resin in the total solid content of the dispersion composition of the present invention is preferably in the range of 0.1% by mass to 50% by mass from the viewpoint of dispersibility and dispersion stability, and 5% by mass to 40% by mass.
- the range of 10% by mass to 30% by mass is more preferable.
- the dispersion composition of the present invention may contain a resin (hereinafter sometimes referred to as “other resin”) in addition to the specific resin for the purpose of adjusting the dispersibility of titanium black.
- Other resins that can be used in the present invention include polymer dispersants [for example, polyamidoamine and its salt, polycarboxylic acid and its salt, high molecular weight unsaturated acid ester, modified polyurethane, modified polyester, modified poly (meta ) Acrylate, (meth) acrylic copolymer, naphthalenesulfonic acid formalin condensate], and polyoxyethylene alkyl phosphate ester, polyoxyethylene alkyl amine, alkanolamine, pigment derivative, and the like.
- Other resins can be further classified into linear polymers, terminal-modified polymers, graft polymers, and block polymers based on their structures.
- resins include “Disperbyk-101 (polyamideamine phosphate), 107 (carboxylic acid ester), 110 (copolymer containing an acid group), 130 (polyamide), 161, 162 manufactured by BYK Chemie.
- the dispersion composition of the present invention contains various organic solvents as a solvent.
- solvents used here are acetone, methyl ethyl ketone, cyclohexane, ethyl acetate, ethylene dichloride, tetrahydrofuran, toluene, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol dimethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl.
- Ether acetylacetone, cyclohexanone, diacetone alcohol, ethylene glycol monomethyl ether acetate, ethylene glycol ethyl ether acetate, ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether acetate, 3-methoxypropanol, methoxymethoxyethanol, diethylene glycol monomethyl ether , Diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, 3-methoxypropyl acetate, N, N-dimethylformamide, dimethyl sulfoxide, ⁇ -butyrolactone, methyl lactate, lactic acid Examples include ethyl. These solvents can be used alone or in combination. The concentration of the solid content with respect to the solvent is preferably 2 to 60% by mass.
- Polymerizable composition which concerns on one Embodiment of this invention contains the said dispersion composition, (D) polymeric compound, (E) polymerization initiator, etc. Details of the polymerizable composition will be described below.
- the polymerizable compound (D) that can be used in the polymerizable composition of the present invention is an addition polymerizable compound having at least one ethylenically unsaturated double bond, and is terminally ethylenically unsaturated. It is selected from compounds having at least one bond, preferably two or more bonds. Such compounds are widely known in the industrial field, and can be used without any particular limitation in the present invention. These have chemical forms such as monomers, prepolymers, i.e. dimers, trimers and oligomers, or mixtures thereof and copolymers thereof.
- Examples of monomers and copolymers thereof include unsaturated carboxylic acids (for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.), and esters and amides thereof.
- unsaturated carboxylic acids for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.
- esters and amides thereof examples include unsaturated carboxylic acids (for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.), and esters and amides thereof.
- an ester of an unsaturated carboxylic acid and an aliphatic polyhydric alcohol compound, or an amide of an unsaturated carboxylic acid and an aliphatic polyvalent amine compound is used.
- unsaturated carboxylic acid esters or unsaturated carboxylic acid amides having a nucleophilic substituent such as hydroxyl group, amino group, mercapto group, monofunctional or polyfunctional isocyanates, or monofunctional or polyfunctional epoxy An addition reaction product of the above; and a dehydration condensation reaction product of the above unsaturated carboxylic acid ester or unsaturated carboxylic acid amide with a monofunctional or polyfunctional carboxylic acid is also preferably used.
- ester monomer of an aliphatic polyhydric alcohol compound and an unsaturated carboxylic acid include acrylic acid esters such as ethylene glycol diacrylate, triethylene glycol diacrylate, 1,3-butanediol diacrylate, and tetramethylene glycol.
- Methacrylic acid esters include tetramethylene glycol dimethacrylate, triethylene glycol dimethacrylate, neopentyl glycol dimethacrylate, trimethylolpropane trimethacrylate, trimethylolethane trimethacrylate, ethylene glycol dimethacrylate, 1,3-butanediol dimethacrylate, Hexanediol dimethacrylate, pentaerythritol dimethacrylate, pentaerythritol trimethacrylate, pentaerythritol tetramethacrylate, dipentaerythritol dimethacrylate, dipentaerythritol hexamethacrylate, sorbitol trimethacrylate, sorbitol tetramethacrylate, bis [p- (3-methacryloxy- 2-hydroxyp Epoxy) phenyl] dimethyl methane, bis - [p- (me
- Itaconic acid esters include ethylene glycol diitaconate, propylene glycol diitaconate, 1,3-butanediol diitaconate, 1,4-butanediol diitaconate, tetramethylene glycol diitaconate, pentaerythritol diitaconate Sorbitol tetritaconate and the like;
- crotonic acid esters include ethylene glycol dicrotonate, tetramethylene glycol dicrotonate, pentaerythritol dicrotonate, and sorbitol tetradicrotonate;
- isocrotonic acid esters include ethylene glycol diisocrotonate, pentaerythritol diisocrotonate, and sorbitol tetraisocrotonate;
- maleic acid esters include ethylene glycol dimaleate, triethylene glycol dimaleate, pentaery
- esters examples include aliphatic alcohol esters described in JP-B-51-47334 and JP-A-57-196231, JP-A-59-5240, and JP-A-59-5241.
- Esters having an aromatic skeleton described in JP-A-2-226149, and esters containing an amino group described in JP-A-1-165613 are also preferably used.
- mixtures of the aforementioned ester monomers can be used.
- amide monomers of aliphatic polyvalent amine compounds and unsaturated carboxylic acids include methylene bis-acrylamide, methylene bis-methacrylamide, 1,6-hexamethylene bis-acrylamide, 1,6-hexamethylene bis. -Methacrylamide, diethylenetriamine trisacrylamide, xylylene bisacrylamide, xylylene bismethacrylamide and the like.
- examples of other preferable amide monomers include monomers having a cyclohexylene structure described in JP-B No. 54-21726.
- a urethane addition polymerizable compound produced by using an addition reaction of an isocyanate and a hydroxyl group is also suitable. Specific examples thereof include, for example, one molecule described in JP-B-48-41708. It contains two or more polymerizable vinyl groups in one molecule obtained by adding a vinyl monomer containing a hydroxyl group represented by the following formula (V) to a polyisocyanate compound having two or more isocyanate groups.
- V vinyl monomer containing a hydroxyl group represented by the following formula (V)
- a vinyl urethane compound etc. are mentioned.
- R 7 and R 8 each independently represent H or CH 3 .
- urethane acrylates as described in JP-A-51-37193, JP-B-2-32293, JP-B-2-16765, JP-B-58-49860, JP-B-56- Urethane compounds having an ethylene oxide skeleton described in Japanese Patent No. 17654, Japanese Patent Publication No. 62-39417, and Japanese Patent Publication No. 62-39418 are also suitable.
- polymerizable compounds having an amino structure or a sulfide structure in the molecule described in JP-A-63-277653, JP-A-63-260909, and JP-A-1-105238 it is possible to obtain a polymerizable composition having a very high photosensitive speed.
- polyester acrylates examples include polyester acrylates, epoxy resins and (meth) acrylic acid described in JP-A-48-64183, JP-B-49-43191, JP-B-52-30490, and JP-B-52-30490. Mention may be made of polyfunctional acrylates and methacrylates such as epoxy acrylates obtained by reaction. Further, specific unsaturated compounds described in JP-B-46-43946, JP-B-1-40337, JP-B-1-40336, and vinylphosphonic acid compounds described in JP-A-2-25493 are also included. be able to. In some cases, a structure containing a perfluoroalkyl group described in JP-A-61-22048 is preferably used. Furthermore, the Japan Adhesion Association magazine vol. 20, no. 7, photocurable monomers and oligomers described on pages 300 to 308 (1984) can also be used.
- the details of usage methods can be arbitrarily set according to the final performance design of polymeric composition.
- it is selected from the following viewpoints.
- a structure having a large unsaturated group content per molecule is preferable, and in many cases, a bifunctional or higher functionality is preferable.
- those having three or more functionalities are preferable, and those having different functional numbers and different polymerizable groups (for example, acrylic acid ester, methacrylic acid ester, styrene compound, vinyl ether compound).
- a method of adjusting both sensitivity and intensity by using them together is also effective.
- a polymerizable compound is also required for compatibility and dispersibility with other components contained in the polymerizable composition (for example, a polymerization initiator, a light shielding material (pigment, dye) such as titanium black).
- a polymerization initiator for example, a polymerization initiator, a light shielding material (pigment, dye) such as titanium black.
- a specific structure may be selected for the purpose of improving adhesion to a hard surface such as a substrate.
- the amount of the polymerizable compound (D) is preferably in the range of 5% by mass to 90% by mass, and more preferably in the range of 10% by mass to 85% by mass.
- the range of 20% by mass to 80% by mass is more preferable. Within this range, both adhesion sensitivity and developability are favorable and preferable without diminishing the hue.
- the (E) polymerization initiator used in the present invention is a compound that decomposes by light and initiates and / or accelerates the polymerization of the polymerizable compound (D), and has a wavelength of 300 nm to 500 nm. It is preferable to have absorption. Moreover, a polymerization initiator can be used individually or in combination of 2 or more types.
- organic halogenated compounds for example, organic halogenated compounds, oxydiazole compounds, carbonyl compounds, ketal compounds, benzoin compounds, acridine compounds, organic peroxide compounds, azo compounds, coumarin compounds, azide compounds, metallocene compounds
- examples include hexaarylbiimidazole compounds, organic boric acid compounds, disulfonic acid compounds, oxime ester compounds, onium salt compounds, and acylphosphine (oxide) compounds.
- organic halogenated compounds include Wakabayashi et al., “Bull Chem. Soc Japan” 42, 2924 (1969), US Pat. No. 3,905,815, Japanese Patent Publication No. 46-4605, 48-36281, JP-A-55-32070, JP-A-60-239736, JP-A-61-169835, JP-A-61-169837, JP-A-62-58241 JP-A-62-212401, JP-A-63-70243, JP-A-63-298339, M.K. P.
- Examples include compounds described in Hutt “Journal of Heterocyclic Chemistry” 1 (No 3), (1970) ”, and in particular, oxazole compounds substituted with a trihalomethyl group and s-triazine compounds.
- the s-triazine compound is more preferably an s-triazine derivative in which at least one mono-, di-, or trihalogen-substituted methyl group is bonded to the s-triazine ring, and specifically, for example, 2,4,6-tris (Monochloromethyl) -s-triazine, 2,4,6-tris (dichloromethyl) -s-triazine, 2,4,6-tris (trichloromethyl) -s-triazine, 2-methyl-4,6-bis (Trichloromethyl) -s-triazine, 2-n-propyl-4,6-bis (trichloromethyl) -s-triazine, 2- ( ⁇ , ⁇ , ⁇ -trichloroethyl) -4,6-bis (trichloromethyl) ) -S-triazine, 2-phenyl-4,6-bis (trichloromethyl) -s-triazine, 2- (p
- Examples of oxydiazole compounds include 2-trichloromethyl-5-styryl-1,3,4-oxodiazole, 2-trichloromethyl-5- (cyanostyryl) -1,3,4-oxodiazole, 2-trichloromethyl-5- (naphth-1-yl) -1,3,4-oxodiazole, 2-trichloromethyl-5- (4-styryl) styryl-1,3,4-oxodiazole, etc. Can be mentioned.
- carbonyl compounds examples include benzophenone, Michler ketone, 2-methylbenzophenone, 3-methylbenzophenone, 4-methylbenzophenone, 2-chlorobenzophenone, 4-bromobenzophenone, benzophenone derivatives such as 2-carboxybenzophenone, 2,2-dimethoxy -2-phenylacetophenone, 2,2-diethoxyacetophenone, 1-hydroxycyclohexyl phenyl ketone, ⁇ -hydroxy-2-methylphenylpropanone, 1-hydroxy-1-methylethyl- (p-isopropylphenyl) ketone, 1 -Hydroxy-1- (p-dodecylphenyl) ketone, 2-methyl- (4 '-(methylthio) phenyl) -2-morpholino-1-propanone, 1,1,1-trichloromethyl- (p-butylphenol) E) ketones, acetophenone derivatives such as 2-benzyl-2-dimethylamin
- ketal compound examples include benzyl methyl ketal and benzyl- ⁇ -methoxyethyl ethyl acetal.
- benzoin compound examples include m-benzoin isopropyl ether, benzoin isobutyl ether, benzoin methyl ether, methyl o-benzoylbenzoate and the like.
- acridine compound examples include 9-phenylacridine, 1,7-bis (9-acridinyl) heptane and the like.
- organic peroxide compound examples include trimethylcyclohexanone peroxide, acetylacetone peroxide, 1,1-bis (tert-butylperoxy) -3,3,5-trimethylcyclohexane, 1,1-bis (tert-butylperoxide).
- Examples of the azo compound include azo compounds described in JP-A-8-108621.
- Examples of coumarin compounds include 3-methyl-5-amino-((s-triazin-2-yl) amino) -3-phenylcoumarin, 3-chloro-5-diethylamino-((s-triazin-2-yl). ) Amino) -3-phenylcoumarin, 3-butyl-5-dimethylamino-((s-triazin-2-yl) amino) -3-phenylcoumarin, and the like.
- azide compound examples include organic azide compounds described in US Pat. No. 2,848,328, US Pat. No. 2,852,379 and US Pat. No. 2,940,853, 2,6-bis (4-azidobenzylidene) -4 -Ethylcyclohexanone (BAC-E) and the like.
- Examples of the metallocene compound include JP 59-152396, JP 61-151197, JP 63-41484, JP 2-249, JP 2-4705,
- Examples include various titanocene compounds described in JP-A-5-83588. Specific examples thereof include di-cyclopentadienyl-Ti-bis-phenyl, di-cyclopentadienyl-Ti-bis-2,6- Difluorophenyl-1-yl, di-cyclopentadienyl-Ti-bis-2,4-di-fluorophenyl-1-yl, di-cyclopentadienyl-Ti-bis-2,4,6-trifluoro Phenyl-1-yl, di-cyclopentadienyl-Ti-bis-2,3,5,6-tetrafluorophenyl-1-yl, di-cyclopentadienyl-Ti-bis 2,3,4,5,6-pentafluorophenyl-1-y
- a hexaarylbiimidazole compound (rophine dimer compound) is preferable.
- the hexaarylbiimidazole compound include lophine dimers described in JP-B-45-37377 and JP-B-44-86516, JP-B-6-29285, US Pat. No. 3,479,185, and the like. Examples include various compounds described in each specification such as 4,311,783 and 4,622,286.
- organic borate compound examples include JP-A-62-143044, JP-A-62-1050242, JP-A-9-188865, JP-A-9-188686, JP-A-9-188710, JP-A-2000. -131837, Japanese Patent Application Laid-Open No. 2002-107916, Japanese Patent No. 2764769, Japanese Patent Application Laid-Open No. 2002-116539, etc., and Kunz, Martin “Rad Tech'98. Proceeding April 19-22, 1998, Chicago”, etc.
- Organic borate salts organic boron sulfonium complexes or organic boron oxosulfonium complexes described in JP-A-6-157623, JP-A-6-175564, JP-A-6-175561, JP-A-6-175554 Gazette, JP-A-6-175553
- Organoboron iodonium complexes described in JP-A-9-188710, organoboron phosphonium complexes described in JP-A-9-188710, JP-A-6-34811, JP-A-7-128785, JP-A-7-140589, JP-A-7 Specific examples include organoboron transition metal coordination complexes described in JP-A-306527 and JP-A-7-292014.
- Examples of the disulfone compound include compounds described in JP-A Nos. 61-166544 and 2002-328465.
- the (E) polymerization initiator used in the present invention is preferably an oxime compound from the viewpoints of sensitivity, stability over time, and coloring during post-heating.
- oxime compounds include J.M. C. S. Perkin II (1979) 1653-1660), J. MoI. C. S. Perkin II (1979) 156-162, Journal of Photopolymer Science and Technology (1995) 202-232, JP-A 2000-66385, compounds described in JP-A 2000-80068, JP-T 2004-534797 Compounds and the like.
- the oxime compound used in the present invention is more preferably a compound represented by the following formula (a) from the viewpoints of sensitivity and stability over time.
- R and X each independently represent a monovalent substituent
- A represents a divalent organic group
- Ar represents an aryl group
- n is an integer of 0 to 5.
- the plurality of Xs may be the same or different.
- Preferred examples of the monovalent substituent represented by R in the formula (a) include the following monovalent nonmetallic atomic groups.
- Examples of the monovalent nonmetallic atomic group represented by R in the formula (a) include an alkyl group which may have a substituent, an aryl group which may have a substituent, and a substituent.
- an alkyl group having 1 to 30 carbon atoms is preferable.
- the aryl group which may have a substituent is preferably an aryl group having 6 to 30 carbon atoms, such as a phenyl group, a biphenyl group, a 1-naphthyl group, a 2-naphthyl group, a 9-anthryl group, and a 9-phenanthryl.
- the alkenyl group which may have a substituent is preferably an alkenyl group having 2 to 10 carbon atoms, and examples thereof include a vinyl group, an allyl group, and a styryl group.
- the alkynyl group which may have a substituent is preferably an alkynyl group having 2 to 10 carbon atoms, and examples thereof include an ethynyl group, a propynyl group, and a propargyl group.
- the alkylsulfinyl group which may have a substituent is preferably an alkylsulfinyl group having 1 to 20 carbon atoms.
- the arylsulfinyl group which may have a substituent is preferably an arylsulfinyl group having 6 to 30 carbon atoms, such as a phenylsulfinyl group, 1-naphthylsulfinyl group, 2-naphthylsulfinyl group, 2-chlorophenylsulfinyl group, 2-methylphenylsulfinyl group, 2-methoxyphenylsulfinyl group, 2-butoxyphenylsulfinyl group, 3-chlorophenylsulfinyl group, 3-trifluoromethylphenylsulfinyl group, 3-cyanophenylsulfinyl group, 3-nitrophenylsulfinyl group, 4-fluorophenylsulfinyl group, 4-cyanophenylsulfinyl group, 4-methoxyphenylsulfinyl group, 4-methylsulf
- the alkylsulfonyl group which may have a substituent is preferably an alkylsulfonyl group having 1 to 20 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, an isopropylsulfonyl group, a butylsulfonyl group, a hexylsulfonyl group.
- the arylsulfonyl group which may have a substituent is preferably an arylsulfonyl group having 6 to 30 carbon atoms, such as a phenylsulfonyl group, a 1-naphthylsulfonyl group, a 2-naphthylsulfonyl group, a 2-chlorophenylsulfonyl group, 2-methylphenylsulfonyl group, 2-methoxyphenylsulfonyl group, 2-butoxyphenylsulfonyl group, 3-chlorophenylsulfonyl group, 3-trifluoromethylphenylsulfonyl group, 3-cyanophenylsulfonyl group, 3-nitrophenylsulfonyl group, 4-fluorophenylsulfonyl group, 4-cyanophenylsulfonyl group, 4-methoxyphenylsulfonyl group
- the acyl group which may have a substituent is preferably an acyl group having 2 to 20 carbon atoms.
- acetyl group, propanoyl group, butanoyl group, trifluoromethylcarbonyl group, pentanoyl group benzoyl group, 1-naphthoyl Group, 2-naphthoyl group, 4-methylsulfanylbenzoyl group, 4-phenylsulfanylbenzoyl group, 4-dimethylaminobenzoyl group, 4-diethylaminobenzoyl group, 2-chlorobenzoyl group, 2-methylbenzoyl group, 2-methoxybenzoyl Group, 2-butoxybenzoyl group, 3-chlorobenzoyl group, 3-trifluoromethylbenzoyl group, 3-cyanobenzoyl group, 3-nitrobenzoyl group, 4-fluorobenzoyl group, 4-cyanobenzoyl group, 4-methoxybenzoyl group
- the alkoxycarbonyl group which may have a substituent is preferably an alkoxycarbonyl group having 2 to 20 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, a propoxycarbonyl group, a butoxycarbonyl group, a hexyloxycarbonyl group, an octyl group.
- alkoxycarbonyl group having 2 to 20 carbon atoms
- Examples thereof include an oxycarbonyl group, a decyloxycarbonyl group, an octadecyloxycarbonyl group, and a trifluoromethyloxycarbonyl group.
- the phosphinoyl group which may have a substituent is preferably a phosphinoyl group having 2 to 50 carbon atoms, for example, dimethylphosphinoyl group, diethylphosphinoyl group, dipropylphosphinoyl group, diphenylphosphinoyl group.
- a phosphinoyl group having 2 to 50 carbon atoms for example, dimethylphosphinoyl group, diethylphosphinoyl group, dipropylphosphinoyl group, diphenylphosphinoyl group.
- the heterocyclic group which may have a substituent is preferably an aromatic or aliphatic heterocyclic ring containing a nitrogen atom, an oxygen atom, a sulfur atom, or a phosphorus atom.
- thienyl group benzo [b] thienyl group, naphtho [2,3-b] thienyl group, thiantenyl group, furyl group, pyranyl group, isobenzofuranyl group, chromenyl group, xanthenyl group, phenoxathinyl group, 2H-pyrrolyl, pyrrolyl, pyrrolyl, imidazolyl, pyrazolyl, pyridyl, pyrazinyl, pyrimidinyl, pyridazinyl, indolizinyl, isoindolyl, 3H-indolyl, indolyl, 1H-indazolyl, purinyl, 4H- Quin
- alkylthiocarbonyl group which may have a substituent include, for example, methylthiocarbonyl group, propylthiocarbonyl group, butylthiocarbonyl group, hexylthiocarbonyl group, octylthiocarbonyl group, decylthiocarbonyl group, octadecylthiocarbonyl group, Examples thereof include a trifluoromethylthiocarbonyl group.
- dialkylaminocarbonyl group which may have a substituent include a dimethylaminocarbonyl group, a dimethylaminocarbonyl group, a dipropylaminocarbonyl group, and a dibutylaminocarbonyl group.
- dialkylaminothiocarbonyl group which may have a substituent include a dimethylaminothiocarbonyl group, a dipropylaminothiocarbonyl group, and a dibutylaminothiocarbonyl group.
- R in the formula (a) is more preferably an acyl group, and specifically, an acetyl group, an ethyloyl group, a propioyl group, a benzoyl group, or a toluyl group is preferable.
- Examples of the divalent organic group represented by A in the formula (a) include an optionally substituted alkylene group having 1 to 12 carbon atoms, an optionally substituted cyclohexylene group, and a substituent.
- the alkynylene group which may have is mentioned.
- substituents that can be introduced into these groups include halogen groups such as fluorine atom, chlorine atom, bromine atom and iodine atom, alkoxy groups such as methoxy group, ethoxy group and tert-butoxy group, phenoxy group, p- Aryloxy groups such as tolyloxy group, alkoxycarbonyl groups such as methoxycarbonyl group, butoxycarbonyl group, phenoxycarbonyl group, acyloxy groups such as acetoxy group, propionyloxy group, benzoyloxy group, acetyl group, benzoyl group, isobutyryl group, acryloyl group Group, acyl group such as methacryloyl group, methoxalyl group, alkylsulfanyl group such as methylsulfanyl group, tert-butylsulfanyl group, arylsulfanyl group such as phenylsulfanyl group, p
- Mercapto group sulfo group, mesyl group, p-toluenesulfonyl group, amino group, nitro group, cyano group, trifluoromethyl group, trichloromethyl group, trimethylsilyl group, phosphinico group, phosphono group, trimethylammonium group, dimethylsulfoniu Mill group, triphenylphenacylphos Honiumiru group, and the like.
- a in the formula (a) is an unsubstituted alkylene group, alkyl group (for example, a methyl group, an ethyl group, a tert-butyl group, a dodecyl group) from the viewpoint of increasing sensitivity and suppressing coloring due to heating.
- alkyl group for example, a methyl group, an ethyl group, a tert-butyl group, a dodecyl group
- An alkylene group substituted with an alkenyl group for example, a vinyl group, an allyl group
- an aryl group for example, a phenyl group, a p-tolyl group, a xylyl group, a cumenyl group, a naphthyl group, an anthryl group
- An alkylene group substituted with a phenanthryl group or a styryl group is preferred.
- the aryl group represented by Ar in the formula (a) is preferably an aryl group having 6 to 30 carbon atoms, and may have a substituent. Specific examples include a phenyl group, a biphenyl group, a 1-naphthyl group, a 2-naphthyl group, a 9-anthryl group, a 9-phenanthryl group, a 1-pyrenyl group, a 5-naphthacenyl group, a 1-indenyl group, and a 2-azurenyl group.
- substituents include halogen groups such as fluorine atom, chlorine atom, bromine atom and iodine atom, alkoxy groups such as methoxy group, ethoxy group and tert-butoxy group.
- aryloxy group such as phenoxy group, p-tolyloxy group, methylthioxy group, ethylthioxy group, alkylthioxy group such as tert-butylthioxy group, arylthiooxy group such as phenylthioxy group, p-tolyloxy group, methoxycarbonyl Groups, butoxycarbonyl groups, alkoxycarbonyl groups such as phenoxycarbonyl groups, acyloxy groups such as acetoxy groups, propionyloxy groups, benzoyloxy groups, acetyl groups, benzoyl groups, isobutyryl groups, acryloyl groups, methacryloyl groups, methoxalyl groups, etc.
- Base Alkylsulfanyl groups such as methylsulfanyl group, tert-butylsulfanyl group, arylsulfanyl groups such as phenylsulfanyl group, p-tolylsulfanyl group, alkylamino groups such as methylamino group, cyclohexylamino group, dimethylamino group, diethylamino group, Dialkylamino groups such as morpholino group and piperidino group, arylamino groups such as phenylamino group and p-tolylamino group, alkyl groups such as ethyl group, tert-butyl group and dodecyl group, hydroxy group, carboxy group, formyl group, mercapto Group, sulfo group, mesyl group, p-toluenesulfonyl group, amino group, nitro group, cyano group, trifluoromethyl group,
- the structure of “SAr” formed by the Ar and the adjacent S is the following structure.
- Examples of the monovalent substituent represented by X in the formula (a) include an alkyl group that may have a substituent, an aryl group that may have a substituent, and an alkenyl group that may have a substituent.
- An arylthiooxy group that may have, an acyloxy group that may have a substituent, an alkylsulfanyl group that may have a substituent, an arylsulfanyl group that may have a substituent, and a substituent
- Has good acyl group and substituent An alkoxycarbonyl group which may have a substituent, a carbamoyl group which may have a substituent, a sulfamoyl group which may have a substituent, an amino group which may have a substituent, a phosphinoyl group which may have a substituent And a heterocyclic group which may have a substituent, a halogen group and the like.
- an alkyl group having 1 to 30 carbon atoms is preferable.
- an aryl group having 6 to 30 carbon atoms is preferable, and a phenyl group, a biphenyl group, a 1-naphthyl group, a 2-naphthyl group, a 9-anthryl group, a 9-phenanthryl group, 1-pyrenyl group, 5-naphthacenyl group, 1-indenyl group, 2-azurenyl group, 9-fluorenyl group, terphenyl group, quarterphenyl group, o-, m-, and p-tolyl group, xylyl group, o- , M-, and p-cumenyl, mesityl, pentarenyl, binaphthalenyl, tarnaphthalenyl, quarternaphthalenyl, heptalenyl, biphenylenyl, indacenyl, fluoranthenyl, acen
- the alkenyl group which may have a substituent is preferably an alkenyl group having 2 to 10 carbon atoms, and examples thereof include a vinyl group, an allyl group, and a styryl group.
- the alkynyl group which may have a substituent is preferably an alkynyl group having 2 to 10 carbon atoms, and examples thereof include an ethynyl group, a propynyl group, and a propargyl group.
- the alkoxy group which may have a substituent is preferably an alkoxy group having 1 to 30 carbon atoms.
- the aryloxy group which may have a substituent is preferably an aryloxy group having 6 to 30 carbon atoms, such as a phenyloxy group, a 1-naphthyloxy group, a 2-naphthyloxy group, a 2-chlorophenyloxy group, 2-methylphenyloxy group, 2-methoxyphenyloxy group, 2-butoxyphenyloxy group, 3-chlorophenyloxy group, 3-trifluoromethylphenyloxy group, 3-cyanophenyloxy group, 3-nitrophenyloxy group, Examples include 4-fluorophenyloxy group, 4-cyanophenyloxy group, 4-methoxyphenyloxy group, 4-dimethylaminophenyloxy group, 4-methylsulfanylphenyloxy group, 4-phenylsulfanylphenyloxy group, and the like.
- the alkylthioxy group which may have a substituent is preferably a thioalkoxy group having 1 to 30 carbon atoms.
- the arylthioxy group which may have a substituent is preferably an arylthioxy group having 6 to 30 carbon atoms, such as a phenylthioxy group, a 1-naphthylthioxy group, a 2-naphthylthioxy group, 2 -Chlorophenylthioxy group, 2-methylphenylthioxy group, 2-methoxyphenylthioxy group, 2-butoxyphenylthioxy group, 3-chlorophenylthioxy group, 3-trifluoromethylphenylthioxy group, 3-cyano Phenylthioxy group, 3-nitrophenylthioxy group, 4-fluorophenylthioxy group, 4-cyanophenylthioxy group, 4-methoxyphenylthioxy group, 4-dimethylaminophenylthioxy group, 4-methylsulfanyl Examples thereof include a phenylthioxy group and a 4-phenylsulfanylphenylthioxy group.
- the acyloxy group which may have a substituent is preferably an acyloxy group having 2 to 20 carbon atoms.
- acyloxy group having 2 to 20 carbon atoms For example, acetyloxy group, propanoyloxy group, butanoyloxy group, pentanoyloxy group, trifluoromethylcarbonyloxy Group, benzoyloxy group, 1-naphthylcarbonyloxy group, 2-naphthylcarbonyloxy group and the like.
- the alkylsulfanyl group which may have a substituent is preferably an alkylsulfanyl group having 1 to 20 carbon atoms, such as a methylsulfanyl group, an ethylsulfanyl group, a propylsulfanyl group, an isopropylsulfanyl group, a butylsulfanyl group, or a hexylsulfanyl group.
- the arylsulfanyl group which may have a substituent is preferably an arylsulfanyl group having 6 to 30 carbon atoms.
- the alkylsulfinyl group which may have a substituent is preferably an alkylsulfinyl group having 1 to 20 carbon atoms.
- the arylsulfinyl group which may have a substituent is preferably an arylsulfinyl group having 6 to 30 carbon atoms, such as a phenylsulfinyl group, 1-naphthylsulfinyl group, 2-naphthylsulfinyl group, 2-chlorophenylsulfinyl group, 2-methylphenylsulfinyl group, 2-methoxyphenylsulfinyl group, 2-butoxyphenylsulfinyl group, 3-chlorophenylsulfinyl group, 3-trifluoromethylphenylsulfinyl group, 3-cyanophenylsulfinyl group, 3-nitrophenylsulfinyl group, 4-fluorophenylsulfinyl group, 4-cyanophenylsulfinyl group, 4-methoxyphenylsulfinyl group, 4-methylsulf
- the alkylsulfonyl group which may have a substituent is preferably an alkylsulfonyl group having 1 to 20 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, an isopropylsulfonyl group, a butylsulfonyl group, a hexylsulfonyl group.
- the arylsulfonyl group which may have a substituent is preferably an arylsulfonyl group having 6 to 30 carbon atoms, such as a phenylsulfonyl group, a 1-naphthylsulfonyl group, a 2-naphthylsulfonyl group, a 2-chlorophenylsulfonyl group, 2-methylphenylsulfonyl group, 2-methoxyphenylsulfonyl group, 2-butoxyphenylsulfonyl group, 3-chlorophenylsulfonyl group, 3-trifluoromethylphenylsulfonyl group, 3-cyanophenylsulfonyl group, 3-nitrophenylsulfonyl group, 4-fluorophenylsulfonyl group, 4-cyanophenylsulfonyl group, 4-methoxyphenylsulfonyl group
- the acyl group which may have a substituent is preferably an acyl group having 2 to 20 carbon atoms.
- acetyl group, propanoyl group, butanoyl group, trifluoromethylcarbonyl group, pentanoyl group benzoyl group, 1-naphthoyl Group, 2-naphthoyl group, 4-methylsulfanylbenzoyl group, 4-phenylsulfanylbenzoyl group, 4-dimethylaminobenzoyl group, 4-diethylaminobenzoyl group, 2-chlorobenzoyl group, 2-methylbenzoyl group, 2-methoxybenzoyl Group, 2-butoxybenzoyl group, 3-chlorobenzoyl group, 3-trifluoromethylbenzoyl group, 3-cyanobenzoyl group, 3-nitrobenzoyl group, 4-fluorobenzoyl group, 4-cyanobenzoyl group, 4-methoxybenzoyl group
- the alkoxycarbonyl group which may have a substituent is preferably an alkoxycarbonyl group having 2 to 20 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, a propoxycarbonyl group, a butoxycarbonyl group, a hexyloxycarbonyl group, an octyl group.
- the carbamoyl group which may have a substituent is preferably a carbamoyl group having 1 to 30 carbon atoms, for example, an N-methylcarbamoyl group, an N-ethylcarbamoyl group, an N-propylcarbamoyl group, an N-butylcarbamoyl group.
- the sulfamoyl group which may have a substituent is preferably a sulfamoyl group having 0 to 30 carbon atoms in total, for example, sulfamoyl group, N-alkylsulfamoyl group, N-arylsulfamoyl group, N, N- Examples thereof include a dialkylsulfamoyl group, an N, N-diarylsulfamoyl group, and an N-alkyl-N-arylsulfamoyl group.
- More specific examples include N-methylsulfamoyl group, N-ethylsulfamoyl group, N-propylsulfamoyl group, N-butylsulfamoyl group, N-hexylsulfamoyl group, N- Cyclohexylsulfamoyl group, N-octylsulfamoyl group, N-2-ethylhexylsulfamoyl group, N-decylsulfamoyl group, N-octadecylsulfamoyl group, N-phenylsulfamoyl group, N- 2-methylphenylsulfamoyl group, N-2-chlorophenylsulfamoyl group, N-2-methoxyphenylsulfamoyl group, N-2-isopropoxyphenylsulfamoyl group, N-3-chloropheny
- the amino group which may have a substituent is preferably an amino group having 0 to 50 carbon atoms in total, for example, —NH 2 , N-alkylamino group, N-arylamino group, N-acylamino group, N— Examples include sulfonylamino group, N, N-dialkylamino group, N, N-diarylamino group, N-alkyl-N-arylamino group, N, N-disulfonylamino group and the like.
- More specific examples include N-methylamino group, N-ethylamino group, N-propylamino group, N-isopropylamino group, N-butylamino group, N-tert-butylamino group, N-hexylamino.
- the phosphinoyl group which may have a substituent is preferably a phosphinoyl group having 2 to 50 carbon atoms, for example, dimethylphosphinoyl group, diethylphosphinoyl group, dipropylphosphinoyl group, diphenylphosphinoyl group.
- a phosphinoyl group having 2 to 50 carbon atoms for example, dimethylphosphinoyl group, diethylphosphinoyl group, dipropylphosphinoyl group, diphenylphosphinoyl group.
- the heterocyclic group which may have a substituent is preferably an aromatic or aliphatic heterocyclic ring containing a nitrogen atom, an oxygen atom, a sulfur atom, or a phosphorus atom.
- thienyl group benzo [b] thienyl group, naphtho [2,3-b] thienyl group, thiantenyl group, furyl group, pyranyl group, isobenzofuranyl group, chromenyl group, xanthenyl group, phenoxathinyl group, 2H-pyrrolyl, pyrrolyl, pyrrolyl, imidazolyl, pyrazolyl, pyridyl, pyrazinyl, pyrimidinyl, pyridazinyl, indolizinyl, isoindolyl, 3H-indolyl, indolyl, 1H-indazolyl, purinyl, 4H- Quin
- halogen group examples include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
- alkyl group which may have a substituent mentioned above the aryl group which may have a substituent, the alkenyl group which may have a substituent, the alkynyl group which may have a substituent, a substituent
- An acyloxy group which may have a substituent an alkylsulfanyl group which may have a substituent, an arylsulfanyl group which may have a substituent, an alkylsulfinyl group which may have a substituent, and a substituent.
- arylsulfinyl group alkylsulfonyl group which may have a substituent, arylsulfonyl group which may have a substituent, acyl group which may have a substituent, alkoxycarbonyl which may have a substituent
- a carbamoyl group which may have a substituent, a sulfamoyl group which may have a substituent, an amino group which may have a substituent, a heterocyclic group which may have a substituent, It may have a substituent.
- Such further substituent include halogen groups such as fluorine atom, chlorine atom, bromine atom and iodine atom, alkoxy groups such as methoxy group, ethoxy group and tert-butoxy group, phenoxy group and p-tolyloxy group.
- Aryloxy group such as, methoxycarbonyl group, butoxycarbonyl group, alkoxycarbonyl group such as phenoxycarbonyl group, acyloxy group such as acetoxy group, propionyloxy group, benzoyloxy group, acetyl group, benzoyl group, isobutyryl group, acryloyl group, Acyl group such as methacryloyl group, methoxalyl group, alkylsulfanyl group such as methylsulfanyl group, tert-butylsulfanyl group, arylsulfanyl group such as phenylsulfanyl group, p-tolylsulfanyl group, methylamino group, cyclohexane Alkylamino group such as xylamino group, dialkylamino group such as dimethylamino group, diethylamino group, morpholino group, piperidino group, arylamin
- an alkyl group which may have a substituent from the viewpoint of improving solvent solubility and absorption efficiency in the long wavelength region, an alkyl group which may have a substituent, an aryl group which may have a substituent, An alkenyl group that may have a substituent, an alkynyl group that may have a substituent, an alkoxy group that may have a substituent, an aryloxy group that may have a substituent, and a substituent
- An alkylthioxy group which may be substituted, an arylthioxy group which may have a substituent, and an amino group which may have a substituent are preferable.
- n represents an integer of 0 to 5, and an integer of 0 to 2 is preferable.
- the oxime compound represented by the formula (a) has a function as a photopolymerization initiator that is decomposed by light and initiates and / or accelerates the polymerization of the photopolymerizable compound.
- the oxime compound has excellent sensitivity to a light source of 365 nm or 405 nm.
- onium salt compounds examples include S.I. I. Schlesinger, Photogr. Sci. Eng. , 18, 387 (1974), T.A. S. Bal et al, Polymer, 21, 423 (1980), diazonium salts, US Pat. No. 4,069,055, ammonium salts described in JP-A-4-365049, US Pat. No. 4,069, The phosphonium salts described in the specifications of Nos. 055 and 4,069,056, the specifications of European Patent No. 104,143, and the specifications of JP-A-2-150848 and JP-A-2-296514 Examples include iodonium salts.
- the iodonium salt that can be suitably used in the present invention is a diaryl iodonium salt, and is preferably substituted with two or more electron donating groups such as an alkyl group, an alkoxy group, and an aryloxy group from the viewpoint of stability. .
- Examples of the sulfonium salt that can be suitably used in the present invention include European Patent Nos. 370,693, 390,214, 233,567, 297,443, 297,442, and U.S. Pat. 933,377, 4,760,013, 4,734,444, 2,833,827, German Patents 2,904,626, 3,604,580, Examples include sulfonium salts described in each specification of 3,604,581, and from the viewpoint of stability and sensitivity, it is preferably substituted with an electron-withdrawing group.
- the electron withdrawing group preferably has a Hammett value greater than zero. Examples of preferred electron withdrawing groups include halogen atoms and carboxylic acids.
- sulfonium salts include sulfonium salts in which one substituent of the triarylsulfonium salt has a coumarin structure or an anthraquinone structure and absorbs at 300 nm or more.
- a sulfonium salt having absorption at 300 nm or more in which the triarylsulfonium salt has an aryloxy group or arylthio group as a substituent is another preferable sulfonium salt having absorption at 300 nm or more in which the triarylsulfonium salt has an aryloxy group or arylthio group as a substituent.
- onium salt compounds J. Org. V. Crivello et al, Macromolecules, 10 (6), 1307 (1977), J. MoI. V. Crivello et al, J.A. Polymer Sci. , Polymer Chem. Ed. , 17, 1047 (1979), a selenonium salt described in C.I. S. Wen et al, Teh, Proc. Conf. Rad. Curing ASIA, p478 Tokyo, Oct (1988) and onium salts such as arsonium salts.
- acylphosphine (oxide) compound examples include Irgacure 819, Darocur 4265, Darocur TPO, etc. manufactured by Ciba Specialty Chemicals.
- the polymerization initiator (E) used in the polymerizable composition of the present invention from the viewpoint of exposure sensitivity, a trihalomethyltriazine compound, a benzyldimethyl ketal compound, an ⁇ -hydroxyketone compound, an ⁇ -aminoketone compound, an acylphosphine compound, Phosphine oxide compound, metallocene compound, oxime compound, triallylimidazole dimer, onium compound, benzothiazole compound, benzophenone compound, acetophenone compound and derivative thereof, cyclopentadiene-benzene-iron complex and salt thereof, halomethyloxadiazole compound, Compounds selected from the group consisting of 3-aryl substituted coumarin compounds are preferred.
- trihalomethyltriazine compounds More preferred are trihalomethyltriazine compounds, ⁇ -aminoketone compounds, acylphosphine compounds, phosphine oxide compounds, oxime compounds, triallylimidazole dimers, onium compounds, benzophenone compounds, acetophenone compounds, trihalomethyltriazine compounds, ⁇ -aminoketones
- Most preferred is at least one compound selected from the group consisting of compounds, oxime compounds, triallylimidazole dimer, and benzophenone compounds.
- the polymerizable composition of the present invention when used for the production of a color filter of a solid-state imaging device, it is necessary to form fine pixels with a sharp shape, and therefore, a residue is left in the unexposed area as well as curability. It is important that it is developed without any problems. From such a viewpoint, an oxime compound is particularly preferable.
- stepper exposure is used for curing exposure, but this exposure machine may be damaged by halogen, and it is necessary to keep the addition amount of a polymerization initiator low. Considering these points, it is most preferable to use an oxime compound as the polymerization initiator (E) in order to form a finely colored pattern such as a solid-state imaging device.
- the amount of the (E) polymerization initiator contained in the polymerizable composition of the present invention is preferably 0.1% by mass to 50% by mass, more preferably 0%, based on the total solid content of the polymerizable composition. It is from 5% by mass to 30% by mass, more preferably from 1% by mass to 20% by mass. Within this range, good sensitivity and pattern formability can be obtained.
- the amount of titanium black based on the total solid content of the polymerizable composition of the present invention is preferably in the range of 0.1% by mass to 60% by mass from the viewpoints of developing necessary light shielding properties and imparting developability.
- the range of mass% to 40 mass% is more preferable, and the range of 5 mass% to 30 mass% is more preferable.
- the polymerizable composition of the present invention may further contain optional components described in detail below, if necessary. Hereinafter, optional components that the polymerizable composition may contain will be described.
- Sensitizer The polymerizable composition of the present invention may contain a sensitizer for the purpose of improving the radical generation efficiency of the radical initiator and increasing the photosensitive wavelength.
- the sensitizer that can be used in the present invention those that sensitize the above-described (E) polymerization initiator by an electron transfer mechanism or an energy transfer mechanism are preferable.
- sensitizer examples include those belonging to the compounds listed below and having an absorption wavelength in a wavelength region of 300 nm to 450 nm.
- polynuclear aromatics for example, phenanthrene, anthracene, pyrene, perylene, triphenylene, 9,10-dialkoxyanthracene
- xanthenes for example, fluorescein, eosin, erythrosine, rhodamine B, rose bengal
- thioxanthones Isopropylthioxanthone, diethylthioxanthone, chlorothioxanthone
- cyanines eg thiacarbocyanine, oxacarbocyanine
- merocyanines eg merocyanine, carbomerocyanine
- phthalocyanines thiazines (eg thionine, methylene blue, toluidine blue)
- Acridines e.g
- a 1 represents a sulfur atom or NR 50
- R 50 represents an alkyl group or an aryl group
- L 1 represents a basic nucleus of the dye in combination with adjacent A 1 and a carbon atom.
- R 51 and R 52 each independently represents a hydrogen atom or a monovalent nonmetallic atomic group, and R 51 and R 52 are bonded to each other to form an acidic nucleus of the dye. May be.
- W represents an oxygen atom or a sulfur atom.
- Ar 1 and Ar 2 each independently represent an aryl group, and are linked via a bond with —L 2 —.
- W is synonymous with W in formula (e-1).
- a 2 represents a sulfur atom or NR 59
- L 3 represents a nonmetallic atomic group that forms a basic nucleus of the dye in combination with A 2 and a carbon atom
- R 53 , R 54 , R 55 , R 56 , R 57 and R 58 each independently represent a group of a monovalent nonmetallic atomic group
- R 59 represents an alkyl group or an aryl group.
- a 3 and A 4 each independently represent —S— or —NR 62
- R 62 represents a substituted or unsubstituted alkyl group or a substituted or unsubstituted aryl group.
- L 4 represents a non-metallic atomic group that forms a basic nucleus of the dye together with adjacent A 3 and a carbon atom
- L 5 represents a basicity of the dye combined with adjacent A 4 and a carbon atom.
- R 60 and R 61 each independently represent a monovalent nonmetallic atomic group, or may be bonded to each other to form an aliphatic or aromatic ring. it can.
- the amount of the sensitizer in the polymerizable composition is preferably 0.1% by mass to 20% by mass in terms of solid content from the viewpoint of light absorption efficiency in the deep part and decomposition efficiency of the initiator. More preferably, the content is 5% by mass to 15% by mass.
- a sensitizer may be used individually by 1 type and may use 2 or more types together.
- a compound represented by the following general formula (II) and a compound represented by the general formula (III) are selected. At least one kind. These may be used individually by 1 type, and may use 2 or more types together.
- R 11 and R 12 each independently represents a monovalent substituent
- R 13 , R 14 , R 15 and R 16 each independently represent a hydrogen atom or a monovalent substituent.
- n represents an integer of 0 to 5
- n ′ represents an integer of 0 to 5
- n and n ′ cannot both be 0.
- n is 2 or more
- a plurality of R 11 may be the same or different.
- n ′ is 2 or more
- a plurality of R 12 may be the same or different.
- the isomer by the double bond is not limited to either.
- the compound represented by the general formula (II) preferably has a molar extinction coefficient ⁇ at a wavelength of 365 nm of 500 mol ⁇ 1 ⁇ L ⁇ cm ⁇ 1 or more, and ⁇ at a wavelength of 365 nm of 3000 mol ⁇ 1 ⁇ L ⁇ cm ⁇ 1. More preferably, ⁇ at a wavelength of 365 nm is most preferably 20000 mol ⁇ 1 ⁇ L ⁇ cm ⁇ 1 or more. It is preferable that the value of the molar extinction coefficient ⁇ at each wavelength is in the above range because the sensitivity improvement effect is high from the viewpoint of light absorption efficiency.
- a 5 represents an aromatic ring or a hetero ring which may have a substituent
- X 4 represents an oxygen atom, a sulfur atom, or —N (R 23 ) —
- Y represents oxygen It represents an atom, a sulfur atom, or —N (R 23 ) —.
- R 21 , R 22 , and R 23 each independently represent a hydrogen atom or a monovalent nonmetallic atomic group, and A 5 , R 21 , R 22 , and R 23 are bonded to each other to form an aliphatic group Or aromatic rings may be formed.
- R 21 , R 22 , and R 23 each independently represent a hydrogen atom or a monovalent nonmetallic atomic group.
- R 21 , R 22 , and R 23 represent a monovalent nonmetallic atom, a substituted or unsubstituted alkyl group, a substituted or unsubstituted aryl group, a substituted or unsubstituted alkenyl group, a substituted or unsubstituted aromatic It is preferably a group heterocyclic residue, a substituted or unsubstituted alkoxy group, a substituted or unsubstituted alkylthio group, a hydroxyl group, or a halogen atom.
- Y is preferably an oxygen atom or —N (R 23 ) — from the viewpoint of improving the decomposition efficiency of the photopolymerization initiator.
- R 23 represents a hydrogen atom or a monovalent nonmetallic atomic group. Further, Y is most preferably —N (R 23 ) —.
- the polymerizable composition of the present invention preferably further contains a co-sensitizer.
- the co-sensitizer has functions such as (E) further improving the sensitivity of the polymerization initiator and sensitizer to actinic radiation, or suppressing (D) polymerization inhibition of the polymerizable compound by oxygen. .
- co-sensitizers examples include amines such as M.I. R. Sander et al., “Journal of Polymer Society”, Vol. 10, page 3173 (1972), Japanese Patent Publication No. 44-20189, Japanese Patent Publication No. 51-82102, Japanese Patent Publication No. 52-134692, Japanese Patent Publication No. 59-138205. No. 60-84305, JP-A 62-18537, JP-A 64-33104, Research Disclosure 33825, and the like. Specific examples include triethanolamine. P-dimethylaminobenzoic acid ethyl ester, p-formyldimethylaniline, p-methylthiodimethylaniline and the like.
- co-sensitizers include thiols and sulfides such as thiol compounds described in JP-A-53-702, JP-B-55-500806, JP-A-5-142772, No. 56-75643, such as 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, 2-mercaptobenzimidazole, 2-mercapto-4 (3H) -quinazoline, ⁇ -mercapto. And naphthalene.
- thiols and sulfides such as thiol compounds described in JP-A-53-702, JP-B-55-500806, JP-A-5-142772, No. 56-75643, such as 2-mercaptobenzothiazole, 2-mercaptobenzoxazole, 2-mercaptobenzimidazole, 2-mercapto-4 (3H) -quinazoline, ⁇ -mercapto. And naphthalene.
- co-sensitizers include amino acid compounds (eg, N-phenylglycine), organometallic compounds described in JP-B-48-42965 (eg, tributyltin acetate), JP-B 55- And a hydrogen donor described in JP 34414 and a sulfur compound (eg, trithiane) described in JP-A-6-308727.
- amino acid compounds eg, N-phenylglycine
- organometallic compounds described in JP-B-48-42965 eg, tributyltin acetate
- a hydrogen donor described in JP 34414
- a sulfur compound eg, trithiane
- the amount of these co-sensitizers is in the range of 0.1% by mass to 30% by mass with respect to the mass of the total solid content of the polymerizable composition from the viewpoint of improving the curing rate by balancing the polymerization growth rate and chain transfer.
- the range of 1% by mass to 25% by mass is more preferable, and the range of 1.5% by mass to 20% by mass is still more preferable.
- Polymerization inhibitor in the present invention, a polymerization inhibitor may be added to prevent unnecessary polymerization of a compound having an ethylenically unsaturated double bond that can be polymerized during production or storage of the polymerizable composition.
- Polymerization inhibitors that can be used in the present invention include phenolic hydroxyl group-containing compounds, N-oxide compounds, piperidine 1-oxyl free radical compounds, pyrrolidine 1-oxyl free radical compounds, N-nitrosophenylhydroxylamines, diazonium compounds And transition dye compounds such as cationic dyes, sulfide group-containing compounds, nitro group-containing compounds, FeCl 3 , CuCl 2 and the like.
- Phenol hydroxyl group-containing compounds are hydroquinone, p-methoxyphenol, di-t-butyl-p-cresol, pyrogallol, t-butylcatechol, benzoquinone, 4,4-thiobis (3-methyl-6-t-butylphenol), 2 2,2′-methylenebis (4-methyl-6-tert-butylphenol), a phenol resin, and a compound selected from the group consisting of cresol resins.
- N-oxide compounds are 5,5-dimethyl-1-pyrroline N-oxide, 4-methylmorpholine N-oxide, pyridine N-oxide, 4-nitropyridine N-oxide, 3-hydroxypyridine N-oxide, picoline A compound selected from the group consisting of acid N-oxide, nicotinic acid N-oxide, and isonicotinic acid N-oxide is preferred.
- Piperidine 1-oxyl free radical compounds are represented by piperidine 1-oxyl free radical, 2,2,6,6-tetramethylpiperidine 1-oxyl free radical, 4-oxo-2,2,6,6-tetramethylpiperidine 1 -Oxyl free radical, 4-hydroxy-2,2,6,6-tetramethylpiperidine 1-oxyl free radical, 4-acetamido-2,2,6,6-tetramethylpiperidine 1-oxyl free radical, 4-maleimide -2,2,6,6-tetramethylpiperidine 1-oxyl free radical, and 4- Preference is given to compounds selected from the group consisting of phosphonoxy-2,2,6,6-tetramethylpiperidine 1-oxyl free radicals.
- the pyrrolidine 1-oxyl free radical compound is preferably a 3-carboxyproxyl free radical (3-carboxy-2,2,5,5-tetramethylpyrrolidine 1-oxyl free radical).
- N-nitrosophenylhydroxylamines are preferably compounds selected from the group consisting of N-nitrosophenylhydroxylamine primary cerium salts and N-nitrosophenylhydroxylamine aluminum salts.
- the diazonium compound is selected from the group consisting of 4-diazophenyldimethylamine hydrogen sulfate, 4-diazodiphenylamine tetrafluoroborate, and 3-methoxy-4-diazodiphenylamine hexafluorophosphate It is preferable that
- the cationic dye is preferably a compound selected from the group consisting of crystal violet, methyl violet, ethyl violet and Victoria pure blue BOH.
- phenol polymerization inhibitor examples include the following exemplary compounds (P-1) to (P-24).
- Examples of amine polymerization inhibitors include the following exemplary compounds (N-1) to (N-7).
- sulfur-containing polymerization inhibitor examples include the following exemplary compounds (S-1) to (S-5).
- Examples of the phosphite polymerization inhibitor include the following exemplary compounds (R-1) to (R-5).
- each compound shown below can also be used as a suitable polymerization inhibitor.
- a preferable addition amount of the polymerization inhibitor is preferably 0.01 parts by mass to 10 parts by mass, and more preferably 0.01 parts by mass to 8 parts by mass with respect to 100 parts by mass of the polymerization initiator (E). It is preferably in the range of 0.05 to 5 parts by mass.
- Binder polymer In the polymerizable composition, a binder polymer can be further used as necessary for the purpose of improving the film properties. It is preferable to use a linear organic polymer as the binder. As such a linear organic polymer, a well-known thing can be used arbitrarily. Preferably, a linear organic polymer that is soluble or swellable in water or weak alkaline water is selected in order to enable water development or weak alkaline water development. The linear organic polymer is selected and used not only as a film forming agent but also according to the use as water, weak alkaline water or an organic solvent developer. For example, when a water-soluble organic polymer is used, water development is possible.
- linear organic polymer examples include radical polymers having a carboxylic acid group in the side chain, such as JP-A-59-44615, JP-B-54-34327, JP-B-58-12777, and JP-B-sho. No. 54-25957, JP-A-54-92723, JP-A-59-53836, JP-A-59-71048, ie, a monomer having a carboxyl group alone.
- a copolymerized resin a resin having an acid anhydride alone or copolymerized, a resin in which an acid anhydride unit is hydrolyzed, half-esterified or half-amidated, an epoxy resin with an unsaturated monocarboxylic acid and an acid anhydride And epoxy acrylate modified with 1.
- the monomer having a carboxyl group include acrylic acid, methacrylic acid, itaconic acid, crotonic acid, maleic acid, fumaric acid, and 4-carboxylstyrene.
- the monomer having an acid anhydride include maleic anhydride. It is done.
- there is an acidic cellulose derivative having a carboxylic acid group in the side chain there is an acidic cellulose derivative having a carboxylic acid group in the side chain.
- those obtained by adding a cyclic acid anhydride to a polymer having a hydroxyl group are useful.
- a monomer other than the above-mentioned monomers can also be used as the compound to be copolymerized.
- examples of other monomers include the following compounds (1) to (12).
- Vinyl ethers such as ethyl vinyl ether, 2-chloroethyl vinyl ether, hydroxyethyl vinyl ether, propyl vinyl ether, butyl vinyl ether, octyl vinyl ether, and phenyl vinyl ether.
- Vinyl esters such as vinyl acetate, vinyl chloroacetate, vinyl butyrate and vinyl benzoate.
- Styrenes such as styrene, ⁇ -methylstyrene, methylstyrene, chloromethylstyrene, and p-acetoxystyrene.
- Vinyl ketones such as methyl vinyl ketone, ethyl vinyl ketone, propyl vinyl ketone, and phenyl vinyl ketone.
- Olefins such as ethylene, propylene, isobutylene, butadiene, and isoprene.
- N-vinylpyrrolidone (10) N-vinylpyrrolidone, acrylonitrile, methacrylonitrile and the like.
- Unsaturated imides such as maleimide, N-acryloylacrylamide, N-acetylmethacrylamide, N-propionylmethacrylamide, N- (p-chlorobenzoyl) methacrylamide.
- a methacrylic acid monomer having a hetero atom bonded to the ⁇ -position for example, compounds described in JP-A Nos. 2002-309057 and 2002-311569).
- a (meth) acrylic resin having an allyl group, a vinyl ester group, and a carboxyl group in the side chain, and a side chain described in JP-A Nos. 2000-187322 and 2002-62698 are doubled.
- An alkali-soluble resin having a bond and an alkali-soluble resin having an amide group in the side chain described in JP-A No. 2001-242612 are preferable because of excellent balance of film strength, sensitivity, and developability.
- Japanese Patent Publication No. 7-12004 Japanese Patent Publication No. 7-120041, Japanese Patent Publication No. 7-120042, Japanese Patent Publication No. 8-12424, Japanese Patent Publication No. 63-287944, Japanese Patent Publication No. 63-287947.
- the urethane binder polymer containing an acid group described in JP-A No. 1-271741 and the like, and the urethane binder polymer having an acid group and a double bond in a side chain described in JP-A No. 2002-107918 are described below. Since it is very excellent in strength, it is advantageous in terms of printing durability and suitability for low exposure.
- an acetal-modified polyvinyl alcohol binder polymer having an acid group described in European Patent 993966, European Patent 1204000, Japanese Patent Application Laid-Open No. 2001-318463, and the like is preferable because of its excellent balance of film strength and developability.
- polyvinyl pyrrolidone, polyethylene oxide, and the like are useful as the water-soluble linear organic polymer.
- alcohol-soluble nylon, polyether of 2,2-bis- (4-hydroxyphenyl) -propane and epichlorohydrin are also useful.
- the weight average molecular weight of the binder polymer that can be used in the polymerizable composition of the present invention is preferably 5,000 or more, more preferably in the range of 10,000 to 300,000, and the number average molecular weight is preferably 1,000. More preferably, it is in the range of 2,000 to 250,000.
- the polydispersity (weight average molecular weight / number average molecular weight) is preferably 1 or more, more preferably 1.1 to 10.
- These binder polymers may be any of random polymers, block polymers, graft polymers and the like.
- the binder polymer that can be used in the present invention can be synthesized by a conventionally known method.
- the solvent used in the synthesis include tetrahydrofuran, ethylene dichloride, cyclohexanone, methyl ethyl ketone, acetone, methanol, ethanol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, 2-methoxyethyl acetate, diethylene glycol dimethyl ether, 1-methoxy.
- Examples include -2-propanol, 1-methoxy-2-propyl acetate, N, N-dimethylformamide, N, N-dimethylacetamide, toluene, ethyl acetate, methyl lactate, ethyl lactate, dimethyl sulfoxide, water and the like. These solvents may be used alone or in combination of two or more.
- Examples of the radical polymerization initiator used when synthesizing the binder polymer that can be used in the polymerizable composition of the present invention include known compounds such as an azo initiator and a peroxide initiator.
- the amount of the binder polymer is preferably 1% by mass to 40% by mass, more preferably 3% by mass to 30% by mass, and 4% by mass to 20% by mass. More preferably.
- Adhesion improver In the polymerizable composition of the present invention, an adhesion improver can be added to improve adhesion to a hard surface such as a substrate.
- the adhesion improver include a silane coupling agent and a titanium coupling agent.
- silane coupling agents include ⁇ - (2-aminoethyl) aminopropyltrimethoxysilane, ⁇ - (2-aminoethyl) aminopropyldimethoxysilane, ⁇ - (3,4-epoxycyclohexyl) ethyltrimethoxysilane.
- ⁇ -methacryloxypropyltrimethoxysilane, ⁇ -methacryloxypropyltriethoxysilane, ⁇ -acryloxypropyltrimethoxysilane, ⁇ -acryloxypropyltriethoxysilane, ⁇ -mercaptopropyltrimethoxysilane, ⁇ -aminopropyl Triethoxysilane and phenyltrimethoxysilane are preferred, and ⁇ -methacryloxypropyltrimethoxysilane is most preferred.
- the addition amount of the adhesion improver is preferably 0.5% by mass to 30% by mass and more preferably 0.7% by mass to 20% by mass in the total solid content of the polymerizable composition.
- additives such as inorganic fillers, plasticizers, and sensitizers may be added to the polymerizable composition.
- plasticizer include dioctyl phthalate, didodecyl phthalate, triethylene glycol dicaprylate, dimethyl glycol phthalate, tricresyl phosphate, dioctyl adipate, dibutyl sebacate, triacetyl glycerin and the like.
- a plasticizer in an amount of 10% by mass or less can be added with respect to the total mass of the polymerizable compound and the binder polymer.
- the dispersibility of titanium black is high, the residue in the unexposed area is suppressed, and the applicability at the time of application to the substrate is good, so it is suitable for forming a light-shielding color filter. Can be used.
- Light-shielding color filter having the colored pattern of the present invention is formed using the above-described polymerizable composition of the present invention.
- a colored pattern (for example, a black matrix) formed using the polymerizable composition of the present invention has a good shape with suppressed residue, high flatness, no steps, and the like.
- the step means a step observed in a colored pattern (for example, a black matrix) having a side of about 200 ⁇ m or more formed by applying, exposing, and developing a polymerizable composition.
- a colored pattern for example, a black matrix
- the step may be observed as a line that is substantially similar to the pattern edge of the colored pattern (for example, the black matrix).
- FIG. 1 is a diagram schematically showing a state in which a step occurs in the black matrix 10.
- the solid line represents the pattern edge 1 of the light-shielding color filter, and the broken line represents step 2.
- the film thickness of the black matrix is the area inside the step (area surrounded by step 2 in FIG. 1) in the area outside the step (area between the pattern edge 1 and step 2 in FIG. 1). It is thinner than.
- the area outside the step (hereinafter also referred to as “step area”) has a low light shielding ability, which causes noise when used as a black matrix for a solid-state image sensor. Effect.
- the thickness of the colored pattern is not particularly limited, but from the viewpoint of obtaining the effect of the present invention more effectively, the thickness after drying is preferably 0.2 ⁇ m to 50 ⁇ m, preferably 0.5 ⁇ m. It is more preferably from 30 ⁇ m, and even more preferably from 0.7 ⁇ m to 20 ⁇ m.
- the size (length of one side) of the coloring pattern (for example, black matrix) is preferably 0.001 mm to 5 mm, more preferably 0.05 mm to 4 mm, from the viewpoint of obtaining the effect of the present invention more effectively. 1 mm to 3.5 mm is more preferable.
- the light-shielding color filter of the present invention has a colored pattern (for example, a black matrix) formed using the polymerizable composition of the present invention on a substrate.
- a light-shielding color filter having a colored pattern (for example, a black matrix) of the present invention will be described in detail through a manufacturing method thereof.
- the method for producing a light-shielding color filter of the present invention comprises forming a polymerizable composition layer on a substrate by applying the polymerizable composition of the present invention (hereinafter referred to as “polymerizable composition layer forming step” as appropriate). Abbreviated), exposing the polymerizable composition layer through a mask (hereinafter abbreviated as “exposure step” as appropriate), and developing the polymerizable composition layer after exposure to form a colored pattern (Hereinafter abbreviated as “development step” where appropriate).
- the polymerizable composition of the present invention is applied on a substrate directly or via another layer to form a polymerizable composition layer (polymerizable composition layer forming step), and a predetermined mask.
- a polymerizable composition layer forming step By exposing only the coating film portion exposed through the pattern and curing the light (exposure process) and developing with a developer (development process), a pattern-like film composed of pixels is formed, and the light-shielding property of the present invention A color filter can be manufactured.
- exposure process Exposure process
- development process developing with a developer
- a color filter can be manufactured.
- each process in the manufacturing method of the light-shielding color filter of this invention is demonstrated.
- Polymerizable composition layer forming step In the polymerizable composition layer forming step, the polymerizable composition layer of the present invention is applied on a substrate to form a polymerizable composition layer.
- the substrate examples include non-alkali glass, soda glass, Pyrex (registered trademark) glass, quartz glass, and those obtained by attaching a transparent conductive film to these substrates, solid-state imaging devices, and the like.
- examples thereof include a photoelectric conversion element substrate such as a silicon substrate and a complementary metal oxide semiconductor (CMOS).
- CMOS complementary metal oxide semiconductor
- an undercoat layer may be provided on these substrates in order to improve adhesion with the upper layer, prevent diffusion of substances, or planarize the substrate surface.
- various coating methods such as slit coating, ink jet method, spin coating, cast coating, roll coating, screen printing method and the like can be applied.
- the coating thickness of the polymerizable composition is preferably 0.35 ⁇ m to 1.5 ⁇ m from the viewpoint of resolution and developability. More preferably, it is 40 ⁇ m to 1.0 ⁇ m.
- the polymerizable composition applied on the substrate is usually dried at 70 ° C. to 110 ° C. for about 2 minutes to 4 minutes to form a polymerizable composition layer.
- Exposure Step the polymerizable composition layer formed in the polymerizable composition layer forming step is exposed through a mask, and only the coating film portion irradiated with light is cured.
- the exposure is preferably performed by irradiation of radiation, and as radiation that can be used for exposure, ultraviolet rays such as g-line, h-line, and i-line are preferably used, and a high-pressure mercury lamp is more preferable.
- the irradiation intensity is preferably from 5mJ / cm 2 ⁇ 1500mJ / cm 2, more preferably 10mJ / cm 2 ⁇ 1000mJ / cm 2, and most preferably 10mJ / cm 2 ⁇ 800mJ / cm 2.
- an alkali development treatment (development step) is performed to elute the light unirradiated portion in the exposure step into an alkaline aqueous solution. Thereby, only the photocured part remains.
- the developer when producing a light-shielding color filter having a black matrix for a solid-state imaging device, an organic alkali developer that does not cause damage to the underlying circuit or the like is desirable.
- the development temperature is usually 20 ° C. to 30 ° C., and the development time is 20 seconds to 90 seconds.
- alkaline aqueous solution for example, as an inorganic developer, sodium hydroxide, potassium hydroxide, sodium carbonate, sodium bicarbonate, sodium oxalate, or sodium metasuccinate, as an organic alkaline developer, aqueous ammonia, Alkaline compounds such as ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, choline, pyrrole, piperidine, 1,8-diazabicyclo- [5,4,0] -7-undecene, An alkaline aqueous solution dissolved so as to be 0.001% by mass to 10% by mass, preferably 0.01% by mass to 1% by mass can be mentioned.
- a water-soluble organic solvent such as methanol or ethanol, a surfactant, or the like can be added to the alkaline aqueous solution.
- a developer composed of such an alkaline aqueous solution it is generally washed (rinsed) with pure water after development.
- a colored pattern for example, a black matrix formed as necessary after the above-described polymerizable composition layer forming step, exposure step, and development step is performed.
- a step of curing by heating and / or exposure (curing step) may be included.
- the formed colored pattern (for example, a black matrix) exhibits high adhesion to the support substrate, and the cured composition is resistant to Since the developability is excellent, it is possible to form a high-resolution pattern that has excellent exposure sensitivity, good adhesion to the substrate of the exposed portion, and gives a desired cross-sectional shape. Therefore, it can be suitably used for a solid-state imaging device such as a liquid crystal display device or a CCD (Charge Coupled Device), and particularly suitable for a high-resolution CCD device exceeding 1 million pixels, a CMOS (Complementary Metal Oxide Semiconductor), or the like. is there.
- a solid-state imaging device such as a liquid crystal display device or a CCD (Charge Coupled Device)
- CCD Charge Coupled Device
- CMOS Complementary Metal Oxide Semiconductor
- the light-shielding color filter provided with the black matrix of the present invention is preferably applied to a solid-state image sensor.
- the light-shielding color filter of the present invention can be used, for example, as a black matrix disposed between a light receiving portion of each pixel constituting a CCD and a microlens for condensing light.
- the solid-state image sensor of the present invention comprises the above-described light-shielding color filter (for example, a black matrix) of the present invention and a patterned film composed of pixels of other colors (three colors or four colors) as necessary. Having a color filter. Since the solid-state imaging device of the present invention includes the light-shielding color filter (for example, black matrix) of the present invention in which a decrease in light shielding ability in the peripheral portion is suppressed, noise can be reduced and color reproducibility can be improved. it can.
- the configuration of the solid-state imaging device of the present invention is a configuration provided with the light-shielding color filter (for example, black matrix) of the present invention, and is not particularly limited as long as the configuration functions as a solid-state imaging device.
- CCD image sensor, CMOS image sensor, etc. The structure etc. with which the light-shielding color filter (for example, black matrix) of this invention was equipped are mentioned.
- a liquid crystal display device includes a color filter, a liquid crystal layer, and liquid crystal driving means (a simple matrix driving method and an active matrix driving method) between a pair of light-transmitting substrates.
- a light-shielding color filter having a plurality of pixel groups as described above, and each pixel constituting the pixel group made of the polymerizable composition of the present invention. (For example, a black matrix; the same applies hereinafter) is used. Since the light-shielding color filter has high flatness, a liquid crystal display device provided with the light-shielding color filter does not cause cell gap unevenness between the color filter and the substrate, and causes display defects such as color unevenness. There is no.
- a liquid crystal display device includes at least a color filter, a liquid crystal layer, and liquid crystal driving means between a pair of light-transmitting substrates, and the liquid crystal driving means is active.
- a light-shielding color filter for example, a black matrix
- the elements for example, TFTs.
- the wafer level lens of the present invention is configured by providing a color filter having the light-shielding color filter (for example, black matrix) of the present invention described above.
- 2 is a plan view showing an example of the configuration of the wafer level lens
- FIG. 3 is a cross-sectional view taken along the line AA of FIG.
- the wafer level lens includes a substrate 1 and a plurality of lenses 10 arranged on the substrate 1.
- the plurality of lenses 10 are arranged one-dimensionally or two-dimensionally with respect to the substrate 1.
- FIG. 2 a configuration in which a plurality of lenses 10 are two-dimensionally arranged on the substrate 1 will be described as an example.
- the lens 10 is made of the same material as the substrate 1 and is formed on the substrate 1.
- the lens 10 has a concave lens surface 10a and a lens edge 10b around the lens surface 10a.
- the lens surface 10a has an optical characteristic that condenses or diverges light incident on the lens 10 in a desired direction, and is a part of a portion where the curvature and the surface shape are designed in consideration of this optical characteristic. It shall mean a surface.
- the height of the lens edge 10b relative to the substrate 1 is configured to be higher than the center of the lens surface 10a.
- the shape of the lens 10 is not particularly limited.
- the lens 10 may be a so-called convex lens in which the lens surface 10a protrudes in a convex shape, or may be an aspherical lens.
- a configuration in which a plurality of lenses 10 are provided on one surface of the substrate 1 is illustrated, but a configuration in which a plurality of lenses 10 are provided on both surfaces of the substrate 1 may be employed.
- the lens is molded so that the optical axis of each lens on one surface coincides with the optical axis of each lens on the other surface.
- the wafer level lens is configured to have one layer of the substrate 1 on which a plurality of lenses 10 are molded, but may be configured to stack two or more layers.
- the wafer level lens is provided with a light shielding layer 14 so as to cover the surface of the lens edge 10b of the lens 10 and the surface of the substrate 1 between the lenses 10.
- the light shielding layer 14 is patterned in a region of the substrate 1 excluding the lens surface 10a of the lens. In the configuration in which the wafer level lens has one or more substrates, the light shielding layer 14 is provided on the surface of at least one substrate.
- the light shielding layer 14 is composed of a black resist layer. Since the black resist layer has a lower light reflectance than a metal layer or the like, it is possible to reduce inconveniences such as ghost and flare caused by light reflection.
- the black resist layer contains a black resist composition.
- FIG. 4 is a cross-sectional view showing another configuration example of the wafer level lens.
- a lens 10 having the same shape as that shown in FIG. 3 is molded on one surface of the substrate 1, and a convex lens 20 is molded on the other surface.
- a spacer is formed for securing a distance when overlapping with another wafer lens array.
- the spacer 12 is a lattice-like member in plan view, and is joined to the other surface of the substrate 1.
- the substrate 1 is separated by dicing so that a lens 10 and a lens 20 are provided.
- the spacer 12 may be formed integrally with the substrate 1 as a part of the substrate 1.
- FIG. 5 is a cross-sectional view illustrating an example of the configuration of the imaging unit.
- the imaging unit includes a lens module obtained by dicing a wafer level lens and separating each lens, an imaging element (here, a solid-state imaging element) D, and a sensor substrate W provided with the solid-state imaging element D.
- an imaging element here, a solid-state imaging element
- a sensor substrate W provided with the solid-state imaging element D.
- three lens modules LM1, LM2, and LM3 are stacked in this order from the light incident side (upper side in FIG. 5).
- a convex lens 10A is molded on the upper surface of the substrate 1A, and a lens 20A having a concave lens surface is molded on the lower surface.
- a light shielding layer 14 patterned in a region excluding the lens surface of the lens 10A is provided on the upper surface of the substrate 1A.
- the lens 20A is provided with a light shielding layer 14 patterned in a region excluding the lens surface.
- a concave lens 10B is molded on the upper surface of the substrate 1B, and a lens 20B having a convex lens surface is molded on the lower surface.
- This lens module LM2 is basically the same as the configuration shown in FIG.
- a light shielding layer 14 patterned in a region excluding the lens surface of the lens 10A, that is, a lens edge and a region of the substrate surface is provided on the upper surface of the substrate 1A.
- the light shielding layer 14 is not provided on the lower surface of the substrate 1B, but the patterned light shielding layer 14 may be provided in a region other than the lens surface of the lens 20B.
- an aspherical lens 10C is molded on the upper surface of the substrate 1C, and a lens 20C having an aspherical lens surface is molded on the lower surface.
- the lens 10C and the lens 20C are provided with a light shielding layer 14 patterned in a region excluding the lens surface.
- the light shielding layer 14 is formed using the dispersion composition or the polymerizable composition of the present invention.
- the lenses 10A, 10B, 10C, 20A, 20B, and 20C are all provided in a shape that is rotationally symmetric with respect to the optical axis.
- the lens modules LM1, LM2, and LM3 are joined via the spacer 12 so that the optical axes of all the lenses 10A, 10B, 10C, 20A, 20B, and 20C coincide.
- the lens modules LM1, LM2, and LM3 are bonded to the sensor substrate W through the spacer 12.
- the lenses 10A, 10B, 10C, 20A, 20B, and 20C of the lens modules LM1, LM2, and LM3 form a subject image on the solid-state imaging device D provided on the sensor substrate W.
- the sensor substrate W is formed by cutting a wafer formed of a semiconductor material such as silicon into a substantially rectangular shape in plan view.
- the solid-state imaging device D is provided at a substantially central portion of the sensor substrate W.
- the solid-state image sensor D is, for example, a CCD image sensor or a CMOS image sensor.
- the solid-state imaging device D can be configured to be bonded on a semiconductor substrate on which wirings and the like are formed after being formed into a chip.
- the solid-state imaging device D performs a well-known film formation process, photolithography process, etching process, impurity addition process, etc. on the sensor substrate W, and forms electrodes, insulating films, wirings, etc. on the sensor substrate W. It may be configured.
- the spacer 12 of the lens module LM3 and the sensor substrate W are bonded using, for example, an adhesive.
- Each spacer 12 is designed such that the lenses 10A, 10B, 10C, 20A, 20B, and 20C of the lens modules LM1, LM2, and LM3 form a subject image on the solid-state imaging device D. Further, each spacer 12 is arranged so that the lenses 10A, 10B, 10C, 20A, 20B, and 20C are not in contact with each other, or the lens modules LM3 and LM3 are not in contact with each other. It is formed with a thickness separating a predetermined distance therebetween.
- the spacer 12 is a range in which the lens modules LM1, LM2, and LM3 can be held between each other, or the distance between the lens module LM3 and the sensor substrate W can be held in a positional relationship with a predetermined distance therebetween. can do.
- the spacer 12 may be a columnar member provided at each of the four corners of the substrates 1A, 1B, and 1C.
- the spacer 12 may be a frame-shaped member that surrounds the solid-state imaging device D. If the solid-state image pickup device D is isolated from the outside by being surrounded by the frame-shaped spacer 12, the solid-state image pickup device D can be shielded from light other than the light passing through the lens. Moreover, it can prevent that dust adheres to the solid-state image sensor D by sealing the solid-state image sensor D from the outside.
- a reflective layer is provided instead of the light shielding layer 14 on the surface of the uppermost substrate closest to the light incident side. May be.
- the reflective layer includes a reflective material having a small transmittance of 0.01% or less with respect to light and a high reflectance of (4%) or more.
- a metal such as chromium (Cr) or a metal material.
- the imaging unit configured as described above is reflow-mounted on a circuit board (not shown) built in a portable terminal or the like.
- the circuit board is preliminarily printed with paste-like solder at a position where the imaging unit is mounted, and the imaging unit is mounted on the circuit board.
- the circuit board including the imaging unit is irradiated with infrared rays or hot air is blown. Heat treatment is performed, and the imaging unit is welded to the circuit board.
- Precursor M1 80.0 g, methacrylic acid 20.0 g, dodecyl mercaptan 2.3 g and propylene glycol monomethyl ether acetate 233.3 g were introduced into a nitrogen-substituted three-necked flask, and a stirrer (Shinto Scientific Co., Ltd .: Three-One Motor) And heated to 75 ° C. while flowing nitrogen into the flask. To this, 0.2 g of 2,2-azobis (2,4-dimethylvaleronitrile) (“V-65” manufactured by Wako Pure Chemical Industries, Ltd.) was added, and the mixture was heated and stirred at 75 ° C. for 2 hours. . Two hours later, 0.2 g of V-65 was further added, and after 3 hours of heating and stirring, a 30% solution of the specific resin 1 was obtained.
- V-65 2,2-azobis (2,4-dimethylvaleronitrile
- Example 1 Preparation of Titanium Black Dispersion After kneading the following composition 1 with a kneader for 30 minutes, a high-viscosity dispersion treatment was performed with two rolls to obtain a dispersion.
- Composition 1 Titanium black with average primary particle size of 75nm (Mitsubishi Materials Corporation 13M-C) 39 parts ⁇ Propylene glycol monomethyl ether acetate 60 parts
- composition 2 was added to the obtained dispersion and stirred for 3 hours using a homogenizer under the condition of 3000 rpm.
- the obtained mixed solution was subjected to a fine dispersion treatment using a zirconia bead having a diameter of 0.3 mm for 4 hours with a disperser (trade name: Dispermat, manufactured by GETZMANN), and a titanium black dispersion A (hereinafter, “ (TB dispersion A ”).
- Composition 2 -30 parts by mass of propylene glycol monomethyl ether acetate 30% by weight of specific resin 1
- the silicon wafer substrate on which the irradiated coating film is formed is placed on a horizontal rotary table of a spin shower developing machine (DW-30 type, manufactured by Chemitronics Co., Ltd.), and CD-2000 (Fuji Film). Paddle development was performed at 23 ° C. for 60 seconds using Electronics Materials Co., Ltd.
- the silicon wafer on which the coating film is formed is fixed to the horizontal rotary table by a vacuum chuck method, and pure water is ejected from above the rotation center while rotating the silicon wafer substrate at a rotation speed of 50 rpm by a rotating device.
- a rinsing process was performed by supplying a shower from the nozzle.
- spray drying was performed to form a wafer having a black matrix.
- Examples 2 to 18 and Comparative Examples 1 to 6 In the preparation of the dispersion composition of Example 1, the specific resin 1 is replaced with the specific resin shown in Table 2 or the comparative resin, and the polymerization initiator of the polymerizable composition is replaced with the polymerization initiator shown in Table 2. The same operation as in Example 1 was performed.
- the polymerization initiators listed in Table 2 are as follows.
- Viscosity of dispersion composition The viscosity of the dispersion composition was measured using an E-type rotational viscometer (manufactured by Toki Sangyo Co., Ltd.). The smaller the viscosity of the dispersion composition, the higher the dispersibility.
- Evaluation of residue The presence or absence of the residue of the area
- the evaluation criteria are as follows. Evaluation criteria (circle): The residue was not confirmed at all in the unexposed part. ⁇ : A slight residue was confirmed in the unexposed area, but it was practically unproblematic. X: Residue was remarkably confirmed in the unexposed part.
- each polymerizable composition was evaluated by the following method. That is, each polymerizable composition was applied with a spin coater so that the film thickness after drying was 1 ⁇ m, and observed with an optical microscope to evaluate uniform coatability.
- the evaluation criteria are as follows. Evaluation criteria ⁇ : No coating unevenness was confirmed. ⁇ : Some coating unevenness was confirmed. X: Many coating unevenness was confirmed.
- the obtained black matrix (pattern formed from the polymerizable composition) was photographed with an optical microscope (100 times magnification), and the width of the step region was measured.
- a black matrix a color filter having a black matrix
- a pattern edge 1 which is an end portion of a pattern formed from a polymerizable composition
- a step region from a central portion in a black matrix peripheral portion.
- the distance between the boundary line 2 and the region where the film thickness becomes thinner was measured. This distance is divided by the length of one side of the formed pattern and is shown in% in Table 2.
- the prepared black matrix exhibits good storage stability, and has good uniform coating property when applied to a substrate, and in the unexposed area. It was found that the residue was suppressed, the step width during exposure and development was small, and the shape was good.
- Examples 1 to 14 have a smaller step width and an excellent pattern shape by using an oxime compound as a polymerization initiator.
- Examples 19 to 32 and Comparative Examples 7 to 12 Preparation of Black Matrix for Liquid Crystal Display Device
- a color filter having a black matrix for a liquid crystal display device was prepared and evaluated using the polymerizable composition used for the solid-state imaging device as it was. That is, using the same polymerizable composition as that used in the production of the color filter for the solid-state imaging device, slit coating was performed on a 250 mm ⁇ 350 mm glass substrate under the following conditions. Then, it was made to stand by for 10 minutes as it was, and vacuum-dried and prebaked (100 degreeC, 80 second), and formed the polymeric composition coating film.
- the entire surface was exposed to 1000 mJ / cm 2 (illuminance was 20 mW / cm 2 ) and exposed with a 1% aqueous solution of an alkali developer (trade name: CDK-1, manufactured by Fuji Film Electronics Materials Co., Ltd.).
- the coating film was covered and held for 60 seconds. Thereafter, pure water was sprayed in a shower to wash away the developer.
- the coating film subjected to the exposure process and the development process was heat-treated (post-baked) in an oven at 220 ° C. for 1 hour to form a black matrix on the glass substrate.
- Evaluation of residue The presence or absence of the residue of the area
- the evaluation criteria are as follows. Evaluation criteria ⁇ : No residue was observed in the unexposed area. ⁇ : A slight residue was confirmed in the unexposed area, but it was practically unproblematic. X: Residue was remarkably confirmed in the unexposed part.
- the obtained black matrix (pattern formed from the polymerizable composition) was photographed with an optical microscope (10 times magnification), and the width of the step region was measured.
- a black matrix a color filter having a black matrix
- a pattern edge 1 which is an end portion of a pattern formed from a polymerizable composition
- a step region from a central portion in a black matrix peripheral portion.
- the distance between the boundary line 2 and the region where the film thickness becomes thinner was measured. This distance is divided by the length of one side of the formed pattern and is shown in% in Table 3.
- Example 33 Preparation of Solid-State Imaging Device Preparation of Chromatic Colored Polymerizable Composition From 40 parts of the following pigment, 50 parts of Disperbyk-161 (manufactured by BYK), 30% solution) as a dispersant, and 110 parts of propylene glycol monomethyl ether as a solvent The resulting mixture was mixed and dispersed by a bead mill for 15 hours to prepare a pigment dispersion (P1).
- composition / colorant pigment dispersion (P1) 350 parts / polymerization initiator (oxime photopolymerization initiator) (CGI-124, manufactured by Ciba Specialty Chemicals Co., Ltd.) 30 parts / TO-1382 25 parts (polymerizable compound, carboxyl group-containing pentafunctional acrylate manufactured by Toagosei Co., Ltd.) ⁇ Dipentaerythritol hexaacrylate 30 parts ⁇ Solvent (PGMEA) 200 parts ⁇ Substrate adhesion agent (3-methacryloxypropyltrimethoxysilane) 1 part
- Example 34 Preparation of Liquid Crystal Display Device Preparation of Chromatic Colored Polymerizable Composition Using the dispersion-treated pigment dispersion (P1), the mixture was stirred and mixed so as to have the following composition ratio to prepare a coating liquid R-2 for the polymerizable composition. .
- the coating solution G-2 for green (G) and the coating solution for blue (B) are prepared in the same manner as the prepared coating solution R-2.
- a coating solution B-2 was prepared.
- Example 1 Production of color filter for liquid crystal display device
- the light-shielding filter produced in Example 1 was used as a black matrix, and the coating liquid R-2 for red (R) was used on the black matrix, as described in Example 1.
- a red (R) coloring pattern of 80 ⁇ 80 ⁇ m was formed in the same manner as in the above method.
- a green (G) chromatic coloring pattern is formed using the green (G) coating liquid G-2, and a blue (B) coating is performed using the blue (B) coating liquid B-2.
- a chromatic color pattern was sequentially formed to produce a color filter having a black matrix for a liquid crystal display device.
- a full-color color filter was processed such as an ITO transparent electrode and an alignment film to provide a liquid crystal display device.
- the polymerizable composition of the present invention had good uniformity on the coated surface, the liquid crystal display device had no display unevenness, and the image quality was good.
- Example 35 Production of Wafer Level Lens Using the polymerizable composition produced in Example 1, this was applied onto a silicon wafer provided with a lens, thereby producing a wafer level lens provided with a light shielding layer.
- the produced wafer level lens was cut, and a lens module was produced thereon, and then an imaging device and a sensor substrate were attached to produce an imaging unit.
- the wafer level lens of the present invention has high uniformity of the coating surface of the light shielding layer portion and high light shielding properties, and the image quality when using this imaging unit was good.
Abstract
Description
液晶表示装置用や固体撮像素子用のブラックマトリクスを形成するための組成物としては、カーボンブラックやチタンブラック等の黒色色材を含有する感光性樹脂組成物が知られている。
従来、遮光性のブラックマトリクスとしては、専らカーボンブラックが多用されてきた。しかし、カーボンブラックを用いてブラックマトリクスの遮光性を高めようとすると、ブラックマトリクス中のカーボンブラックの量を高めることが必要となる。このため遮光材であるカーボンブラックの濃度の高い分散組成物、あるいは重合性組成物が遮光層のパターン成形に必要となる。しかし、高い遮光性を得るためにカーボンブラックの含有量を増やすと、カーボンブラックの組成物中への分散が困難になり、またパターン成形性が悪化するといったような問題も発生していた。
さらに、現像後の未露光部における組成物の残渣が少なく、また、感光性樹脂組成物を基板に塗布した際の塗布膜の均一性、及び遮光膜周辺部に遮光膜中央部よりも膜厚が薄くなる領域(ステップ)が生じにくく形状が良いことが要求される。
また、液晶表示装置用ブラックマトリクスについては微細化が要求されている一方、固体撮像素子用ブラックマトリクス(特に、支持体の受光素子形成面に対し反対側の面(以下、「裏面」ともいう)を遮光するためのブラックマトリックス)については、液晶表示装置用ブラックマトリクスよりも広い面積を均一に遮光する性能が要求されている。
また、高い遮光性を得るために黒色色材の含有量を増やすと遮光膜周辺部に残渣が発生しやすくなり、感度も低下するという問題を有していた。更に、感度を向上させるため、重合開始剤量を増やすと経時安定性が低下してしまう問題を有していた。
本発明の一態様によれば、チタンブラックの分散性が高く、経時後のチタンブラックの沈降が抑制され、かつ分散性及び保存安定性の高い分散組成物が提供される。
本発明の別の態様によれば、基板への塗布性が良好で均一な膜厚が得られ、パターン成形したときには未露光部における残渣が抑制され、露光・現像後のステップ(ブラックマトリックス中の段差)がなく、パターン形状が良好な重合性組成物が提供される。
本発明の更に別の態様によれば、上記重合性組成物を用いて得られる遮光性の高い着色パターンを有する遮光性カラーフィルタ、並びに該遮光性カラーフィルタを用いた高画質の固体撮像素子、及び液晶表示装置、及び撮像ユニットが提供される。
本発明の更に別の態様によれば、遮光性の高い着色領域を有するウエハレベルレンズが提供される。
<1> (A)チタンブラック、(B)グラフト共重合体、および、(C)溶媒を含む分散組成物。
<2> 前記(B)グラフト共重合体が、水素原子を除いた原子数が40~10000の範囲であるグラフト鎖を有する、<1>に記載の分散組成物。
<3> 前記(B)グラフト共重合体におけるグラフト鎖が、ポリエステル構造、ポリエーテル構造、およびポリアクリレート構造の群から選ばれた少なくとも1種である<1>または<2>に記載の分散組成物。
<8> 前記式(5)におけるRにより表される1価の有機基が、アルキル基、アリール基、又はヘテロアリール基である、<1>~<7>のいずれか1つに記載の分散組成物。
<11> 前記(B)グラフト共重合体が、さらにカルボン酸基、スルホン酸基、リン酸基のうち少なくとも1種を含有する<1>~<10>のいずれか1つに記載の分散組成物。
<13> 前記(E)重合開始剤が、オキシム重合開始剤である<12>に記載の重合性組成物。
<15> <14>に記載の遮光性カラーフィルタを備えた固体撮像素子。
<16> <14>に記載の遮光性カラーフィルタを備えた液晶表示装置。
<17> 複数のレンズが一体に成形された基板と、該基板の前記レンズのレンズ面を除く領域に設けられた前記<14>に記載の遮光性カラーフィルタと、を備えたウエハレベルレンズ。
<18> <17>に記載のウエハレベルレンズを備えた撮像ユニット。
また、通常グラフト共重合体を分散剤として用いた重合性組成物によりパターン形成する場合には、現像性が低下し、残渣が発生しやすい傾向があるが、本発明の分散組成物では、適度な長さのグラフト鎖を有する重合体を用いているために、現像液に対する溶解性の低下に起因すると推定される残渣の発生が低減される。
また、本発明のグラフト共重合体を用いたことにより、本発明の分散組成物を用いた重合性組成物を塗布すると塗布面が均一になることがわかった。これは本発明のグラフト共重合体のグラフト鎖と溶媒とが良好な相互作用を行うためと推定される。
さらに、特に、本発明の特定構造のグラフト共重合体とオキシム開始剤とを合わせて用いることにより、ステップがなく、パターン形状が良好になることがわかった。
本発明の別の態様によれば、基板への塗布性が良好で均一な膜厚が得られ、パターン成形したときには未露光部における残渣が抑制され、露光・現像後のステップがなくパターン形状が良好な重合性組成物を提供することができる。
本発明の更に別の態様によれば、上記重合性組成物を用いて得られる遮光性の高い着色パターン(例えば、ブラックマトリクス)を有するカラーフィルタ、並びに該カラーフィルタを用いる高画質の固体撮像素子、液晶表示装置、及び撮像ユニットを提供することができる。
本発明の更に別の態様によれば、遮光性の高い着色領域を有するウエハレベルレンズを提供することができる。
本発明の一実施形態に係る分散組成物は、(A)チタンブラック、(B)グラフト共重合体、及び(C)溶媒を含有する。以下、本発明の分散組成物に含まれる各成分について説明する。
本発明におけるチタンブラックとは、チタン原子を有する黒色粒子である。好ましくは低酸化チタン又は酸窒化チタン等である。チタンブラック粒子は、分散性向上、凝集性抑制などの目的で必要に応じ、表面を修飾することが可能である。例えば、酸化ケイ素、酸化チタン、酸化ゲルマニウム、酸化アルミニウム、酸化マグネシウム、酸化ジルコニウムで被覆することが可能であり、また、特開2007-302836号公報に表されるような撥水性物質での処理も可能である。
チタンブラックの量が上記範囲内であると、本発明の重合性組成物の硬化性が良好となり、かつ均一な膜を形成することができる。また、チタンブラックを高濃度に含有することから、充分な遮光性が得られ、チタンブラックを含有する重合性組成物を遮光性カラーフィルタの形成に好適に用いることができる。
このような混合可能な遮光用顔料としては、可視光領域に吸光度を有するものであれば特に限定はされず、上記した体質顔料、カーボンブラック、C.I.Pigment Blue 1,2,15,15:1,15:2,15:3,15:4,15:6,16,22,60,64,66,79,80、C.I.Pigment Violet 1,19,23,27,32,37,42、C.I.Pigment Brown 25,28、C.I.Pigment Black 1,7等の有機顔料等を挙げることができる。
チタンブラック以外の遮光用顔料を混合する例として、チタンブラックとカーボンブラックを6:1で混合した物、チタンブラックと酸化チタンを3:1で混合した物などが挙げられる。
混合するチタンブラック以外の遮光用顔料は、チタンブラック100質量部に対して、0.01~99.99質量部の範囲、好ましくは、20~70質量部の範囲で用いることができる。
本発明の分散組成物は、グラフト共重合体(以下、「特定樹脂」ともいう)を含む。本発明のグラフト共重合体は、水素原子を除いた原子数が40~10000の範囲であるグラフト鎖を有することが好ましく、この場合のグラフト鎖とは、共重合体の主鎖の根元から、主鎖から枝分かれしている基の末端までを示す。分散組成物において、この特定樹脂は、チタンブラックに分散性を付与する分散樹脂であり、優れた分散性と、グラフト鎖による溶媒との親和性を有するために、チタンブラックの分散性、及び、経時後の分散安定性に優れる。また、重合性組成物を作成したとき、グラフト鎖による重合性化合物もしくはその他の併用可能な樹脂などとの親和性を有するので、アルカリ現像で残渣を生じにくくなる。
式(1)~式(5)において、Y1、Y2、Y3、Y4、およびY5はそれぞれ独立に、2価の連結基であり、特に構造上制約されない。具体例としては、下記の(Y-1)から(Y-20)の連結基などが挙げられる。下記構造式において、Aは式(1)~式(5)における左末端基との結合、Bは式(1)~式(5)における右末端基との結合を意味する。下記に示した構造のうち、合成の簡便性から、(Y-2)、(Y-13)がより好ましい。
式(1)~式(5)において、n、m、p、q、および、rはそれぞれ独立に、1~500の整数である。
このような酸基を導入することで、特定樹脂のアルカリ現像性を向上させるという利点をも有する。
本発明の特定樹脂に好適に使用されるこれら共重合成分の含有量は、0.1モル%~50モル%であり、特に好ましくは、アルカリ現像による画像強度のダメージ抑制という観点から、1モル%~30モル%である。
R1、R2、及びR3は、より好ましくは水素原子、または炭素原子数1~3のアルキル基であり、最も好ましくは、水素原子またはメチル基である。R2及びR3は、水素原子であることが特に好ましい。
Xは、酸素原子(-O-)又はイミノ基(-NH-)を表し、酸素原子であることが好ましい。
また、上記一般式(ii)で表される単量体として、R1が水素原子又はメチル基であって、Lがアルキレン基であって、Zがカルボン酸であって、Yがメチン基である化合物が好ましい。
また、上記一般式(iii)で表される単量体として、R4、R5、及びR6が水素原子又はメチル基であって、Zがカルボン酸である化合物が好ましい。
メタクリル酸、クロトン酸、イソクロトン酸、分子内に付加重合性二重結合及び水酸基を有する化合物(例えば、メタクリル酸2-ヒドロキシエチル)とコハク酸無水物との反応物、分子内に付加重合性二重結合及び水酸基を有する化合物とフタル酸無水物との反応物、分子内に付加重合性二重結合及び水酸基を有する化合物とテトラヒドロキシフタル酸無水物との反応物、分子内に付加重合性二重結合及び水酸基を有する化合物と無水トリメリット酸との反応物、分子内に付加重合性二重結合及び水酸基を有する化合物とピロメリット酸無水物との反応物、アクリル酸、アクリル酸ダイマー、アクリル酸オリゴマー、マレイン酸、イタコン酸、フマル酸、4-ビニル安息香酸、ビニルフェノール、4-ヒドロキシフェニルメタクリルアミドなどが挙げられる。
本発明の分散組成物には、チタンブラックの分散性を調整する目的で、上記特定樹脂以外に樹脂(以下、「その他の樹脂」と称する場合がある)が含有されていてもよい。
本発明に用いることができるその他の樹脂としては、高分子分散剤〔例えば、ポリアミドアミンとその塩、ポリカルボン酸とその塩、高分子量不飽和酸エステル、変性ポリウレタン、変性ポリエステル、変性ポリ(メタ)アクリレート、(メタ)アクリル共重合体、ナフタレンスルホン酸ホルマリン縮合物〕、及び、ポリオキシエチレンアルキルリン酸エステル、ポリオキシエチレンアルキルアミン、アルカノールアミン、顔料誘導体等を挙げることができる。
その他の樹脂は、その構造から更に直鎖状高分子、末端変性型高分子、グラフト型高分子、ブロック型高分子に分類することができる。
一方で、その他の樹脂は顔料表面を改質することで、分散樹脂の吸着を促進させる効果を有する。
これらのその他の樹脂は、単独で使用してもよく、2種以上を組み合わせて使用してもよい。
本発明の分散組成物は、溶媒として、種々の有機溶剤を含む。
ここで使用する溶剤の例としては、アセトン、メチルエチルケトン、シクロヘキサン、酢酸エチル、エチレンジクロライド、テトラヒドロフラン、トルエン、エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、エチレングリコールジメチルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、アセチルアセトン、シクロヘキサノン、ジアセトンアルコール、エチレングリコールモノメチルエーテルアセテート、エチレングリコールエチルエーテルアセテート、エチレングリコールモノイソプロピルエーテル、エチレングリコールモノブチルエーテルアセテート、3-メトキシプロパノール、メトキシメトキシエタノール、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールジメチルエーテル、ジエチレングリコールジエチルエーテル、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート、3-メトキシプロピルアセテート、N,N-ジメチルホルムアミド、ジメチルスルホキシド、γ-ブチロラクトン、乳酸メチル、乳酸エチルなどが挙げられる。
これらの溶媒は、単独で、或いは混合して使用することができる。溶剤に対する固形分の濃度は、2~60質量%であることが好ましい。
本発明の一実施形態に係る重合性組成物は、上記分散組成物、(D)重合性化合物、および(E)重合開始剤などを含有する。以下に重合性組成物の詳細を述べる。
本発明の重合性組成物に用いることができる(D)重合性化合物は、少なくとも一個のエチレン性不飽和二重結合を有する付加重合性化合物であり、末端エチレン性不飽和結合を少なくとも1個、好ましくは2個以上有する化合物から選ばれる。このような化合物は当該産業分野において広く知られるものであり、本発明においてはこれらを特に限定無く用いることができる。
これらは、例えばモノマー、プレポリマー、すなわち2量体、3量体及びオリゴマー、又はそれらの混合物並びにそれらの共重合体などの化学的形態をもつ。モノマー及びその共重合体の例としては、不飽和カルボン酸(例えば、アクリル酸、メタクリル酸、イタコン酸、クロトン酸、イソクロトン酸、マレイン酸など)や、そのエステル類、アミド類が挙げられ、好ましくは、不飽和カルボン酸と脂肪族多価アルコール化合物とのエステル、不飽和カルボン酸と脂肪族多価アミン化合物とのアミド類が用いられる。また、ヒドロキシル基やアミノ基、メルカプト基等の求核性置換基を有する不飽和カルボン酸エステル類或いは不飽和カルボン酸アミド類と、単官能若しくは多官能イソシアネート類或いは単官能若しくは多官能エポキシ類との付加反応物;及び上記不飽和カルボン酸エステル類或いは不飽和カルボン酸アミド類と、単官能若しくは多官能のカルボン酸との脱水縮合反応物等も好適に使用される。また、イソシアネート基や、エポキシ基等の親電子性置換基を有する不飽和カルボン酸エステル類或いは不飽和カルボン酸アミド類と、単官能若しくは多官能のアルコール類、アミン類、チオール類との付加反応物;更にハロゲン基や、トシルオキシ基等の脱離性置換基を有する不飽和カルボン酸エステル類或いは不飽和カルボン酸アミド類と、単官能若しくは多官能のアルコール類、アミン類、チオール類との置換反応物も好適に使用される。また、別の例として、上記の不飽和カルボン酸を、不飽和ホスホン酸、スチレン、ビニルエーテル等に置き換えて得られる化合物群を使用することも可能である。
クロトン酸エステルとしては、エチレングリコールジクロトネート、テトラメチレングリコールジクロトネート、ペンタエリスリトールジクロトネート、ソルビトールテトラジクロトネート等が挙げられ;
イソクロトン酸エステルとしては、エチレングリコールジイソクロトネート、ペンタエリスリトールジイソクロトネート、ソルビトールテトライソクロトネート等が挙げられ;
マレイン酸エステルとしては、エチレングリコールジマレート、トリエチレングリコールジマレート、ペンタエリスリトールジマレート、ソルビトールテトラマレート等が挙げられる。
その他の好ましいアミドモノマーの例としては、特公昭54-21726号公報記載のシクロへキシレン構造を有するモノマーを挙げることができる。
下記式(V)中、R7及びR8はそれぞれ独立に、H又はCH3を示す。
感度の点では1分子あたりの不飽和基含量が多い構造が好ましく、多くの場合、2官能以上が好ましい。また、硬化膜の強度を高くするためには、3官能以上のものがよく、更に、異なる官能数・異なる重合性基(例えばアクリル酸エステル、メタクリル酸エステル、スチレン化合物、ビニルエーテル化合物)のものを併用することで、感度と強度の両方を調節する方法も有効である。
また、重合性組成物に含有される他の成分(例えば、重合開始剤、チタンブラック等の遮光材(顔料、染料)等)との相溶性、分散性に対しても、重合性化合物の選択・使用法は重要な要因である。例えば、低純度化合物の使用や、2種以上の他の成分の併用により相溶性を向上させうることがある。また、基板などの硬質表面との密着性を向上させる目的で特定の構造を選択することもあり得る。
この範囲内であると、色相を薄めることなく、密着感度及び現像性が共に良好で好ましい。
本発明に用いられる(E)重合開始剤は、光により分解し、(D)重合性化合物の重合を開始及び/又は促進する化合物であり、波長300nm~500nmの領域に吸収を有することが好ましい。また、重合開始剤は、単独で、又は2種以上を併用して用いることができる。
ヘキサアリールビイミダゾール化合物としては、例えば、特公昭45-37377号公報、特公昭44-86516号公報記載のロフィンダイマー類、特公平6-29285号公報、米国特許第3,479,185号、同第4,311,783号、同第4,622,286号等の各明細書に記載の種々の化合物が挙げられ、具体例としては、2,2’-ビス(o-クロロフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(o-ブロモフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(o,p-ジクロロフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(o-クロロフェニル)-4,4’,5,5’-テトラ(m-メトキシフェニル)ビイジダゾール、2,2’-ビス(o,o’-ジクロロフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(o-ニトロフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(o-メチルフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール、2,2’-ビス(o-トリフルオロフェニル)-4,4’,5,5’-テトラフェニルビイミダゾール等が挙げられる。
オキシム化合物としては、J.C.S.Perkin II(1979)1653-1660)、J.C.S.Perkin II(1979)156-162、Journal of Photopolymer Science and Technology(1995)202-232、特開2000-66385号公報記載の化合物、特開2000-80068号公報、特表2004-534797号公報記載の化合物等が挙げられる。
式(a)のRで表される一価の非金属原子団の例としては、置換基を有してもよいアルキル基、置換基を有してもよいアリール基、置換基を有してもよいアルケニル基、置換基を有してもよいアルキニル基、置換基を有してもよいアルキルスルフィニル基、置換基を有してもよいアリールスルフィニル基、置換基を有してもよいアルキルスルホニル基、置換基を有してもよいアリールスルホニル基、置換基を有してもよいアシル基、置換基を有してもよいアルコキシカルボニル基、置換基を有してもよいアリールオキシカルボニル基、置換基を有してもよいホスフィノイル基、置換基を有してもよい複素環基、置換基を有してもよいアルキルチオカルボニル基、置換基を有してもよいアリールチオカルボニル基、置換基を有してもよいジアルキルアミノカルボニル基、置換基を有してもよいジアルキルアミノチオカルボニル基等が挙げられる。
これらの基に導入しうる置換基としては、例えば、フッ素原子、塩素原子、臭素原子、ヨウ素原子等のハロゲン基、メトキシ基、エトキシ基、tert-ブトキシ基等のアルコキシ基、フェノキシ基、p-トリルオキシ基等のアリールオキシ基、メトキシカルボニル基、ブトキシカルボニル基、フェノキシカルボニル基等のアルコキシカルボニル基、アセトキシ基、プロピオニルオキシ基、ベンゾイルオキシ基等のアシルオキシ基、アセチル基、ベンゾイル基、イソブチリル基、アクリロイル基、メタクリロイル基、メトキサリル基等のアシル基、メチルスルファニル基、tert-ブチルスルファニル基等のアルキルスルファニル基、フェニルスルファニル基、p-トリルスルファニル基等のアリールスルファニル基、メチルアミノ基、シクロヘキシルアミノ基等のアルキルアミノ基、ジメチルアミノ基、ジエチルアミノ基、モルホリノ基、ピペリジノ基等のジアルキルアミノ基、フェニルアミノ基、p-トリルアミノ基等のアリールアミノ基、メチル基、エチル基、tert-ブチル基、ドデシル基等のアルキル基、フェニル基、p-トリル基、キシリル基、クメニル基、ナフチル基、アンスリル基、フェナントリル基等のアリール基、等の他、ヒドロキシ基、カルボキシ基、ホルミル基、メルカプト基、スルホ基、メシル基、p-トルエンスルホニル基、アミノ基、ニトロ基、シアノ基、トリフルオロメチル基、トリクロロメチル基、トリメチルシリル基、ホスフィニコ基、ホスホノ基、トリメチルアンモニウミル基、ジメチルスルホニウミル基、トリフェニルフェナシルホスホニウミル基等が挙げられる。
中でも、式(a)のAとしては、感度を高め、加熱経時による着色を抑制する点から、無置換のアルキレン基、アルキル基(例えば、メチル基、エチル基、tert-ブチル基、ドデシル基)で置換されたアルキレン基、アルケニル基(例えば、ビニル基、アリル基)で置換されたアルキレン基、アリール基(例えば、フェニル基、p-トリル基、キシリル基、クメニル基、ナフチル基、アンスリル基、フェナントリル基、スチリル基)で置換されたアルキレン基が好ましい。
具体例としては、フェニル基、ビフェニル基、1-ナフチル基、2-ナフチル基、9-アンスリル基、9-フェナントリル基、1-ピレニル基、5-ナフタセニル基、1-インデニル基、2-アズレニル基、9-フルオレニル基、ターフェニル基、クオーターフェニル基、o-、m-、及びp-トリル基、キシリル基、o-、m-、及びp-クメニル基、メシチル基、ペンタレニル基、ビナフタレニル基、ターナフタレニル基、クオーターナフタレニル基、ヘプタレニル基、ビフェニレニル基、インダセニル基、フルオランテニル基、アセナフチレニル基、アセアントリレニル基、フェナレニル基、フルオレニル基、アントリル基、ビアントラセニル基、ターアントラセニル基、クオーターアントラセニル基、アントラキノリル基、フェナントリル基、トリフェニレニル基、ピレニル基、クリセニル基、ナフタセニル基、プレイアデニル基、ピセニル基、ペリレニル基、ペンタフェニル基、ペンタセニル基、テトラフェニレニル基、ヘキサフェニル基、ヘキサセニル基、ルビセニル基、コロネニル基、トリナフチレニル基、ヘプタフェニル基、ヘプタセニル基、ピラントレニル基、オバレニル基等が挙げられる。中でも、感度を高め、加熱経時による着色を抑制する点から、置換又は無置換のフェニル基が好ましい。
また、式(a)におけるnは0~5の整数を表すが、0~2の整数が好ましい。
また、その他の好ましいスルホニウム塩としては、トリアリールスルホニウム塩の1つの置換基がクマリン構造又はアントアキノン構造を有し、300nm以上に吸収を有するスルホニウム塩が挙げられる。別の好ましいスルホニウム塩としては、トリアリールスルホニウム塩が、アリロキシ基又はアリールチオ基を置換基に有する300nm以上に吸収を有するスルホニウム塩が挙げられる。
増感剤
本発明の重合性組成物は、ラジカル開始剤のラジカル発生効率の向上、感光波長の長波長化の目的で、増感剤を含有していてもよい。
本発明に用いることができる増感剤としては、前記した(E)重合開始剤に対し、電子移動機構又はエネルギー移動機構で増感させるものが好ましい。
例えば、多核芳香族類(例えば、フェナントレン、アントラセン、ピレン、ペリレン、トリフェニレン、9,10-ジアルコキシアントラセン)、キサンテン類(例えば、フルオレッセイン、エオシン、エリスロシン、ローダミンB、ローズベンガル)、チオキサントン類(イソプロピルチオキサントン、ジエチルチオキサントン、クロロチオキサントン)、シアニン類(例えば、チアカルボシアニン、オキサカルボシアニン)、メロシアニン類(例えば、メロシアニン、カルボメロシアニン)、フタロシアニン類、チアジン類(例えば、チオニン、メチレンブルー、トルイジンブルー)、アクリジン類(例えば、アクリジンオレンジ、クロロフラビン、アクリフラビン)、アントラキノン類(例えば、アントラキノン)、スクアリウム類(例えば、スクアリウム)、アクリジンオレンジ、クマリン類(例えば、7-ジエチルアミノ-4-メチルクマリン)、ケトクマリン、フェノチアジン類、フェナジン類、スチリルベンゼン類、アゾ化合物、ジフェニルメタン、トリフェニルメタン、ジスチリルベンゼン類、カルバゾール類、ポルフィリン、スピロ化合物、キナクリドン、インジゴ、スチリル、ピリリウム化合物、ピロメテン化合物、ピラゾロトリアゾール化合物、ベンゾチアゾール化合物、バルビツール酸誘導体、チオバルビツール酸誘導体、アセトフェノン、ベンゾフェノン、チオキサントン、ミヒラーズケトンなどの芳香族ケトン化合物、N-アリールオキサゾリジノンなどのヘテロ環化合物などが挙げられる。
増感剤は、1種単独で用いてもよいし、2種以上を併用してもよい。
くとも一種が挙げられる。
これらは一種単独で用いてもよいし、二種以上を併用してもよい。
なお、本明細書においては、化学式は簡略構造式により記載することもあり、特に元素や置換基の明示がない実線等は、炭化水素基を表す。
本発明の重合性組成物は、更に共増感剤を含有することも好ましい。
本発明において共増感剤は、(E)重合開始剤や増感剤の活性放射線に対する感度を一層向上させる、或いは、酸素による(D)重合性化合物の重合阻害を抑制する等の作用を有する。
本発明においては、重合性組成物の製造中あるいは保存中において重合可能なエチレン性不飽和二重結合を有する化合物の不要な重合を阻止するために、重合禁止剤を添加することが好ましい。
本発明に用いうる重合禁止剤としては、フェノール水酸基含有化合物、N-オキシド化合物類、ピペリジン1-オキシルフリーラジカル化合物類、ピロリジン1-オキシルフリーラジカル化合物類、N-ニトロソフェニルヒドロキシルアミン類、ジアゾニウム化合物類、及びカチオン染料類、スルフィド基含有化合物類、ニトロ基含有化合物類、FeCl3、CuCl2等の遷移金属化合物類が挙げられる。
モルホリンN-オキシド、ピリジンN-オキシド、4-ニトロピリジンN-オキシド、3-ヒドロキシピリジンN-オキシド、ピコリン酸N-オキシド、ニコチン酸N-オキシド、およびイソニコチン酸N-オキシドからなる群より選択される化合物であることが好ましい。
ラジカル、2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカル、4-オ
キソ-2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカル、4-ヒドロ
キシ-2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカル、4-アセト
アミド-2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカル、4-マレ
イミド-2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカル、及び4-
ホスホノキシ-2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカルから
なる群より選択される化合物であることが好ましい。
より好ましくは、2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカル、4-オキソ-2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカル、4-ヒドロキシ-2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカル、4-アセトアミド-2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカル、4-マレイミド-2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカル、及び4-ホスホノキシ-2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカルのピペリジン1-オキシルフリーラジカル化合物、若しくはN-ニトロソフェニルヒドロキシルアミン第一セリウム塩及びN-ニトロソフェニルヒドロキシルアミンアルミニウム塩のN-ニトロソフェニルヒドロキシルアミン化合物であり、
更に好ましくは、N-ニトロソフェニルヒドロキシルアミン第一セリウム塩及びN-ニトロソフェニルヒドロキシルアミンアルミニウム塩のN-ニトロソフェニルヒドロキシルアミン化合物である。
上記範囲とすることで、非画像部における硬化反応抑制および画像部における硬化反応促進が充分おこなわれ、画像形成性および感度が良好となる。
重合性組成物においては、皮膜特性向上などの目的で、必要に応じて、更にバインダーポリマーを使用することができる。バインダーとしては線状有機ポリマーを用いることが好ましい。このような線状有機ポリマーとしては、公知のものを任意に使用できる。好ましくは水現像或いは弱アルカリ水現像を可能とするために、水或いは弱アルカリ水に可溶性又は膨潤性である線状有機ポリマーが選択される。線状有機ポリマーは、皮膜形成剤としてだけでなく、水、弱アルカリ水或いは有機溶剤現像剤としての用途に応じて選択使用される。例えば、水可溶性有機ポリマーを用いると水現像が可能になる。このような線状有機ポリマーとしては、側鎖にカルボン酸基を有するラジカル重合体、例えば特開昭59-44615号公報、特公昭54-34327号公報、特公昭58-12577号公報、特公昭54-25957号公報、特開昭54-92723号公報公報、特開昭59-53836号公報、特開昭59-71048号公報に記載されている重合体、すなわち、カルボキシル基を有するモノマーを単独或いは共重合させた樹脂、酸無水物を有するモノマーを単独或いは共重合させ酸無水物ユニットを加水分解若しくはハーフエステル化若しくはハーフアミド化させた樹脂、エポキシ樹脂を不飽和モノカルボン酸及び酸無水物で変性させたエポキシアクリレート等が挙げられる。カルボキシル基を有するモノマーとしては、アクリル酸、メタクリル酸、イタコン酸、クロトン酸、マレイン酸、フマル酸、4-カルボキシルスチレン等があげられ、酸無水物を有するモノマーとしては、無水マレイン酸等が挙げられる。
また、同様に側鎖にカルボン酸基を有する酸性セルロース誘導体がある。この他に水酸基を有する重合体に環状酸無水物を付加させたものなどが有用である。
(2)アクリル酸メチル、アクリル酸エチル、アクリル酸プロピル、アクリル酸ブチル、アクリル酸イソブチル、アクリル酸アミル、アクリル酸ヘキシル、アクリル酸2-エチルヘキシル、アクリル酸オクチル、アクリル酸ベンジル、アクリル酸-2-クロロエチル、グリシジルアクリレート、3,4-エポキシシクロヘキシルメチルアクリレート、ビニルアクリレート、2-フェニルビニルアクリレート、1-プロペニルアクリレート、アリルアクリレート、2-アリロキシエチルアクリレート、プロパルギルアクリレート等のアルキルアクリレート。
(4)アクリルアミド、メタクリルアミド、N-メチロールアクリルアミド、N-エチルアクリルアミド、N-ヘキシルメタクリルアミド、N-シクロヘキシルアクリルアミド、N-ヒドロキシエチルアクリルアミド、N-フェニルアクリルアミド、N-ニトロフェニルアクリルアミド、N-エチル-N-フェニルアクリルアミド、ビニルアクリルアミド、ビニルメタクリルアミド、N,N-ジアリルアクリルアミド、N,N-ジアリルメタクリルアミド、アリルアクリルアミド、アリルメタクリルアミド等のアクリルアミド若しくはメタクリルアミド。
(6)ビニルアセテート、ビニルクロロアセテート、ビニルブチレート、安息香酸ビニル等のビニルエステル類。
(7)スチレン、α-メチルスチレン、メチルスチレン、クロロメチルスチレン、p-アセトキシスチレン等のスチレン類。
(8)メチルビニルケトン、エチルビニルケトン、プロピルビニルケトン、フェニルビニルケトン等のビニルケトン類。
(9)エチレン、プロピレン、イソブチレン、ブタジエン、イソプレン等のオレフィン類。
(11)マレイミド、N-アクリロイルアクリルアミド、N-アセチルメタクリルアミド、N-プロピオニルメタクリルアミド、N-(p-クロロベンゾイル)メタクリルアミド等の不飽和イミド。
(12)α位にヘテロ原子が結合したメタクリル酸モノマー(例えば、特開2002-309057号明細書、特開2002-311569号明細書等に記載されている化合物)を挙げる事ができる。
また、欧州特許993966、欧州特許1204000、特開2001-318463号公報等に記載の酸基を有するアセタール変性ポリビニルアルコールバインダーポリマーは、膜強度、現像性のバランスに優れており、好適である。
更にこの他に水溶性線状有機ポリマーとして、ポリビニルピロリドンやポリエチレンオキサイド等が有用である。また硬化皮膜の強度を上げるためにアルコール可溶性ナイロンや2,2-ビス-(4-ヒドロキシフェニル)-プロパンとエピクロロヒドリンのポリエーテル等も有用である。
これらのバインダーポリマーは、ランダムポリマー、ブロックポリマー、グラフトポリマー等いずれでもよい。
本発明の重合性組成物において用いうるバインダーポリマーを合成する際に用いられるラジカル重合開始剤の例としては、アゾ開始剤、過酸化物開始剤等、公知の化合物が挙げられる。
本発明の重合性組成物においては、基板などの硬質表面との密着性を向上させるために、密着向上剤を添加することができる。密着向上剤の例としては、シランカップリング剤、及びチタンカップリング剤等が挙げられる。
更に、重合性組成物に対しては、硬化皮膜の物性を改良するために無機充填剤や、可塑剤、感脂化剤等の公知の添加剤を加えてもよい。
可塑剤としては、例えば、ジオクチルフタレート、ジドデシルフタレート、トリエチレングリコールジカプリレート、ジメチルグリコールフタレート、トリクレジルホスフェート、ジオクチルアジペート、ジブチルセバケート、トリアセチルグリセリン等が挙げられる。結合剤を使用した場合、重合性化合物とバインダーポリマーとの合計質量に対し10質量%以下の量の可塑剤を添加することができる。
本発明の着色パターンを有する遮光性カラーフィルタは、前述の本発明の重合性組成物を用いて形成される。本発明の重合性組成物を用いて形成された着色パターン(例えばブラックマトリックス)は、残渣が抑制され、平坦性が高く、ステップがなく、良好な形状を有する。
ブラックマトリックスの膜厚は、ステップより外側の領域(図1中、パターンエッジ1とステップ2とにより挟まれた領域)では、ステップより内側の領域(図1中、ステップ2で囲まれた領域)よりも薄くなっている。即ち、ステップより外側の領域(以下、「ステップ領域」ともいう)では遮光能が低いため、固体撮像素子用のブラックマトリックスとして用いた際にノイズの原因となる等、固体撮像素子の性能に悪影響を及ぼす。
なお本発明の重合性組成物を用いてブラックマトリックスを形成した際、ブラックマトリックス周辺部に中央部よりも膜厚が薄くなる領域(ステップ領域)を生じる現象を抑制でき、周辺部における遮光能の低下を抑制できる。
着色パターン(例えばブラックマトリックス)のサイズ(一辺の長さ)は、本発明による効果をより効果的に得る観点からは、0.001mm~5mmが好ましく、0.05mm~4mmがより好ましく、0.1mm~3.5mmが更に好ましい。
次に、本発明の遮光性カラーフィルタ及びその製造方法について説明する。
本発明の遮光性カラーフィルタは、基板上に、本発明の重合性組成物を用いてなる着色パターン(例えばブラックマトリックス)を有する。
以下、本発明の着色パターン(例えばブラックマトリックス)を有する遮光性カラーフィルタについて、その製造方法を通じて詳述する。
以下、本発明の遮光性カラーフィルタの製造方法における各工程について説明する。
重合性組成物層形成工程では、基板上に、本発明の重合性組成物を塗布して重合性組成物層を形成する。
また、これらの基板上には、必要により、上部の層との密着改良、物質の拡散防止或いは基板表面の平坦化のために下塗り層を設けてもよい。
露光工程では、前記重合性組成物層形成工程において形成された重合性組成物層をマスクを介して露光し、光照射された塗布膜部分だけを硬化させる。
露光は放射線の照射により行うことが好ましく、露光に際して用いることができる放射線としては、特に、g線、h線、i線等の紫外線が好ましく用いられ、高圧水銀灯がより好まれる。照射強度は5mJ/cm2~1500mJ/cm2が好ましく、10mJ/cm2~1000mJ/cm2がより好ましく、10mJ/cm2~800mJ/cm2が最も好ましい。
露光工程に次いで、アルカリ現像処理(現像工程)を行い、露光工程における光未照射部分をアルカリ水溶液に溶出させる。これにより、光硬化した部分だけが残る。
現像液としては、固体撮像素子用のブラックマトリクスを有する遮光性カラーフィルタを作製する場合には、下地の回路などにダメージを起さない、有機アルカリ現像液が望ましい。現像温度は通常20℃~30℃であり、現像時間は20秒~90秒である。
従って、液晶表示装置やCCD(Charge Coupled Device)等の固体撮像素子に好適に用いることができ、特に100万画素を超えるような高解像度のCCD素子やCMOS(Complementary Metal Oxide Semiconductor)等に好適である。すなわち、本発明のブラックマトリクスを備えた遮光性カラーフィルタは、固体撮像素子に適用されることが好ましい。
本発明の遮光性カラーフィルタは、例えば、CCDを構成する各画素の受光部と集光するためのマイクロレンズとの間に配置されるブラックマトリックスとして用いることができる。
本発明の固体撮像素子は、既述の本発明の遮光性カラーフィルタ(例えばブラックマトリックス)と、必要により他の色(3色あるいは4色)の画素からなるパターン状皮膜と、を有するカラーフィルタを備える。
本発明の固体撮像素子は、周辺部における遮光能の低下が抑制された本発明の遮光性カラーフィルタ(例えばブラックマトリックス)を備えているため、ノイズを低減でき、色再現性を向上させることができる。
本発明の固体撮像素子の構成としては、本発明の遮光性カラーフィルタ(例えばブラックマトリックス)が備えられた構成であり、固体撮像素子として機能する構成であれば特に限定はないが、例えば、基板上に、固体撮像素子(CCDイメージセンサー、CMOSイメージセンサー、等)の受光エリアを構成する複数のフォトダイオード及びポリシリコン等からなる受光素子を有し、基板の受光素子形成面の反対側の面に本発明の遮光性カラーフィルタ(例えばブラックマトリックス)が備えられた構成等が挙げられる。
本発明の一実施形態に係る液晶表示装置は、少なくとも1つが光透過性の1対の基板の間にカラーフィルター、液晶層および液晶駆動手段(単純マトリックス駆動方式、及びアクティブマトリックス駆動方式を含む)を少なくとも備えており、カラーフィルタとして、前記のごとき複数の画素群を有し、前記画素群を構成する各画素が、互いに本発明の重合性組成物により作成された遮光性カラーフィルタ(例えばブラックマトリックス;以下同様)により離画されているカラーフィルタを用いるものである。前記遮光性カラーフィルタは平坦性が高いため、この遮光性カラーフィルタを備える液晶表示装置は、カラーフィルタと基板との間にセルギャップムラが発生せず、色ムラ等の表示不良が発生することがない。
本発明のウエハレベルレンズは、既述の本発明の遮光性カラーフィルタ(例えばブラックマトリックス)を有するカラーフィルタを設けて構成されている。図2は、ウエハレベルレンズの構成の一例を示す平面図であり、図3は図2のA-A線断面図である。
この例では、基板1の一方の面に図3と同様の形状のレンズ10が成形され、他方の面に凸状のレンズ20が成形されている。また、他方の面には、他のウェハレンズアレイに重ね合わせる際に距離を確保するためのスペーサが形成されている。スペーサ12は、平面視において格子状の部材であって、基板1の他方の面に接合される。この例では、ウエハレベルレンズにスペーサを接合した後、ダイシングによって、基板1にレンズ10及びレンズ20が1個ずつ備えられた構成となるように分離したものである。スペーサ12は、基板1の一部として該基板1に一体に成形されたものとしてもよい。
撮像ユニットは、ウエハレベルレンズをダイシングしてレンズごとに分離したレンズモジュールと、撮像素子(ここでは、固体撮像素子)Dと、固体撮像素子Dが設けられたセンサ基板Wとを備える。この例では、3つのレンズモジュールLM1,LM2,LM3を光の入射側(図5の上側)からのこの順に積層した構成としている。
なお、レンズ10A,10B,10C,20A,20B,20Cは、いずれも光軸に対して回転対称となる形状で設けられている。レンズモジュールLM1,LM2,LM3は、全てのレンズ10A,10B,10C,20A,20B,20Cの光軸が一致するように、スペーサ12を介して接合されている。
500mL三口フラスコに、ε-カプロラクトン 600.0g、2-エチル-1-ヘキサノール 22.8gを導入し、窒素を吹き込みながら、攪拌溶解した。モノブチル錫オキシド 0.1gを加え、100℃に加熱した。8時間後、ガスクロマトグラフィーにて、原料が消失したのを確認後、80℃まで冷却した。2,6-ジt-ブチル-4-メチルフェノール 0.1gを添加した後、2-メタクリロイロキシエチルイソシアネート 27.2gを添加した。5時間後、1H-NMRにて原料が消失したのを確認後、室温まで冷却し、固体状の前駆体M1(下記構造)を200g得た。M1であることは、1H-NMR、IR、質量分析により確認した。
特定樹脂1の構成要素を変更して、特定樹脂1の合成方法と同様の方法により、下記に記載の特定樹脂2~13、および比較樹脂1~3を合成した。表1にこれら樹脂の組成比、水素原子を除いたグラフト鎖の原子数、重量平均分子量を示す。
チタンブラック分散物の調製
下記組成1をニーダーで30分混練した後、二本ロールにて高粘度分散処理を施し、分散物を得た。
・平均一次粒径75nmのチタンブラック(三菱マテリアルズ(株)製13M-C)
39部
・プロピレングリコールモノメチルエーテルアセテート 60部
・特定樹脂1のプロピレングリコールモノメチルエーテルアセテート30質量%溶液
30部
組成A
・ベンジルメタクリレート/アクリル酸共重合体 3.0部
(組成比:ベンジルメタクリレート/アクリル酸共重合体=80/20(質量%)、重量平均分子量:25000;バインダーポリマー)
・ジペンタエリスリトールヘキサアクリレート(重合性化合物) 2.0部
・エトキシ化ペンタエリスリトールテトラアクリレート(重合性化合物) 1.0部
・TB分散液A 26.0部
・プロピレングリコールモノメチルエーテルアセテート(溶剤) 10部
・エチル-3-エトキシプロピオネート(溶剤) 8部
・重合開始剤:下記表2に記載の化合物 0.8部
・4-メトキシフェノール(重合禁止剤) 0.01部
上記の重合性組成物Aをレジスト溶液として、この塗布膜の乾燥膜厚が0.7μmになるように、下塗り層付シリコンウエハの下塗り層上にスピーンコーター塗布した。その後、10分間そのままの状態で待機させ、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)を行った。
次いで、i線ステッパー露光装置FPA-3000i5+(Canon(株)製)を使用して365nmの波長でパターンが2μm四方のIslandパターンマスクを通して1000mJ/cm2の露光量で露光した。
次いで、塗布膜が形成されているシリコンウエハを真空チャック方式で前記水平回転テーブルに固定し、回転装置によって該シリコンウエハ基板を回転数50rpmで回転させつつ、その回転中心の上方より純水を噴出ノズルからシャワー状に供給してリンス処理を行なった。その後スプレー乾燥し、ブラックマトリックスを有するウエハを形成した。
実施例1の分散組成物の調製において、特定樹脂1を表2に示す特定樹脂、あるいは比較樹脂に代え、また重合性組成物の重合開始剤を表2に示す重合開始剤に代える以外は、実施例1と同様に操作を行った。
上記のようにして得られた分散組成物、および重合性組成物を用いて、以下の評価を行った。その結果を表2に示す。
分散組成物の粘度をE型回転粘度計(東機産業社製)を用いて測定した。分散組成物の粘度が小さいほど分散性が高いことを示している。
各重合性組成物を室温で1ケ月保存した後、チタンブラックの沈降の度合いを下記判定基準に従って評価した。保存安定性を示す数値は、可視光吸光度計(varian製cary-5)により、PGMEAで1000倍に希釈した重合性組成物の吸光度変化率から算出したものである。
判定基準
○:0%以上2%未満のチタンブラックの沈降が観測された。
△:2%以上5%未満のチタンブラックの沈降が観測された。
×:5%以上のチタンブラックの沈降が観測された。
上記した露光工程で光が照射されなかった領域(未露光部)の残渣の有無をSEMで観察し、残渣を評価した。評価基準は以下の通りである。
評価基準
○:未露光部には、残渣がまったく確認されなかった。
△:未露光部に、残渣がわずかに確認されたが、実用上問題のない程度であった。
×:未露光部に、残渣が著しく確認された。
各重合性組成物の塗布時の均一塗布性について、下記の方法で評価した。即ち、各重合性組成物をスピンコータ-で、乾燥後の膜厚が1μmになるように塗布し、光学顕微鏡で観察し、均一塗布性を評価した。評価基準は以下の通りである。
評価基準
○:全く塗布ムラが確認されなかった。
△:多少の塗布ムラが確認された。
×:多くの塗布ムラが確認された。
得られたブラックマトリクス(重合性組成物により形成されたパターン)を光学顕微鏡(倍率100倍)で撮影し、ステップ領域の幅を測定した。図1に示すように、ブラックマトリクス(ブラックマトリクスを有するカラーフィルタ)10において、重合性組成物により形成されたパターンの端部であるパターンエッジ1と、ステップ領域(ブラックマトリクス周辺部における中央部よりも膜厚の薄くなる領域)との境界線2との間の距離を測定した。この距離を形成されたパターンの1辺の長さで除して、表2には%で表示した。
液晶表示装置用ブラックマトリックスの作製
次に、固体撮像素子用で用いた重合性組成物をそのまま用いて、液晶表示装置用ブラックマトリックスを有するカラーフィルタを作製し、評価を行った。
即ち、固体撮像素子用カラーフィルタの作製で用いたものと同一の重合性組成物を用いて、250mm×350mmのガラス基板に下記条件でスリット塗布した。その後、10分間そのままの状態で待機させ、真空乾燥とプリベーク(100℃、80秒)を施して重合性組成物塗膜を形成した。その後、全面に1000mJ/cm2の露光(照度は20mW/cm2)をし、アルカリ現像液(商品名:CDK-1、富士フイルムエレクトロニクスマテリアルズ(株)製)の1%水溶液にて露光済みの塗布膜を覆い、60秒間保持した。その後、純水をシャワー状に散布して現像液を洗い流した。以上のように、露光処理および現像処理を施した塗布膜を220℃のオーブンで1時間加熱処理(ポストベーク)を施し、ガラス基板上にブラックマトリックスを形成した。
・塗布ヘッド先端の開口部の間隙: 50μm
・塗布速度: 100mm/秒
・基板と塗布ヘッドとのクリヤランス: 150μm
・乾燥膜厚 1.75μm
・塗布温度: 23℃
上記のようにして得られた塗布基板、および重合性組成物を用いて、以下の評価を行った。その結果を表3に示す。
上記重合性組成物をスリット塗布した後、10分間そのままの状態で待機させた後、さらにガラス基板に塗布し、ホットプレートで、90℃、60秒間プリベークした。その後、塗布面のスジ状のムラをナトリウム光源を用いて目視にて観察し、以下の基準で評価した。
塗布基板の面状評価の基準
○:塗布面にスジ状のムラが全くない。
△:スジ状のムラが1~5本観察された。
×:スジ状のムラが6本以上、あるいは異物のいずれかが観察された。
上記した露光工程で光が照射されなかった領域(未露光部)の残渣の有無をSEMで観察し、残渣を評価した。評価基準は以下の通りである。
評価基準
○:未露光部には、残渣がまったく確認されなかった。
△:未露光部に、残渣がわずかに確認されたが、実用上問題のない程度であった。
×:未露光部に、残渣が著しく確認された。
得られたブラックマトリクス(重合性組成物により形成されたパターン)を光学顕微鏡(倍率10倍)で撮影し、ステップ領域の幅を測定した。図1に示すように、ブラックマトリクス(ブラックマトリクスを有するカラーフィルタ)10において、重合性組成物により形成されたパターンの端部であるパターンエッジ1と、ステップ領域(ブラックマトリクス周辺部における中央部よりも膜厚の薄くなる領域)との境界線2との間の距離を測定した。この距離を形成されたパターンの1辺の長さで除して、表3には%で表示した。
固体撮像素子の作製
有彩色着色重合性組成物の調製
下記顔料40部、分散剤としてDisperbyk-161(ビックケミー(BYK)社製、30%溶液)50部、及び溶剤としてプロピレングリコールモノメチルエーテル110部からなる混合液を、ビーズミルにより15時間混合・分散して、顔料分散液(P1)を調製した。
・赤色(R)用顔料
C.I.ピグメントレッド254
・緑色(G)用顔料
C.I.ピグメント グリーン36とC.I.ピグメント イエロー219との30/70〔質量比〕混合物
・青色(B)用顔料
C.I.ピグメント ブルー15:6とC.I.ピグメント バイオレット23との30/70〔質量比〕混合物
組成
・着色剤(顔料分散液(P1)) 350部
・重合開始剤(オキシム光重合開始剤)
(CGI-124、チバ・スペシャルティ・ケミカルズ社製) 30部
・TO-1382 25部
(重合性化合物 東亜合成化学(株)製 カルボキシル基含有5官能アクリレート)
・ジペンタエリスリトールヘキサアクリレート 30部
・溶剤(PGMEA) 200部
・基板密着剤(3-メタクリロキシプロピルトリメトキシシラン) 1部
前記実施例1で作製したブラックマトリックスを有する遮光性フィルタのウエハ上に、前記赤色(R)用の塗布液R-1を用いて、1.6×1.6μmの赤色(R)の着色パターンを形成した。さらに、同様にして緑色(G)用の塗布液G-1を用いて1.6×1.6μmの緑色(G)の着色パターンを、及び青色(B)用の塗布液B-1を用いて青色(B)の着色パターンを順次形成して固体撮像素子用のカラーフィルタを作製した。
フルカラーのカラーフィルタを固体撮像素子に組み込んだところ、該固体撮像素子は、ブラックマトリックスの遮光性が高く、高解像度で、色分離性に優れることが確認された。
液晶表示装置の作製
有彩色着色重合性組成物の調製
前記分散処理した顔料分散液(P1)を用いて下記組成比となるよう撹拌混合し、重合性組成物の塗布液R-2を調製した。
組成
・着色剤(顔料分散液(P1)) 200部
・プロピレングリコールモノメチルエーテルアセテート 19.20部
(PGMEA:溶剤)
・乳酸エチル 36.67部
・樹脂(メタクリル酸ベンジル/メタクリル酸/メタクリル酸-2-ヒドロキシエチル
共重合体(モル比=60/22/18)の40%PGMEA溶液)33.51部
・エチレン性不飽和二重結合含有化合物(ジペンタエリスリトールヘキサアクリレート)
12.20部
・重合禁止剤(p-メトキシフェノール) 0.0061部
・フッ素界面活性剤(F-475、大日本インキ化学工業(株)製)
0.83部
・光重合開始剤(トリハロメチルトリアジン光重合開始剤) 0.586部
前記実施例1で作製した遮光性フィルタをブラックマトリックスとし、該ブラックマトリックス上に、前記赤色(R)用の塗布液R-2を用いて、実施例1に記載の方法と同じ要領で80×80μmの赤色(R)の着色パターンを形成した。さらに、同様にして緑色(G)用の塗布液G-2を用いて緑色(G)の有彩色着色パターンを、及び青色(B)用の塗布液B-2を用いて青色(B)の有彩色着色パターンを順次形成して液晶表示装置用のブラックマトリクスを有するカラーフィルタを作製した。
フルカラーのカラーフィルタにITO透明電極、配向膜等の加工を施し、液晶表示装置を設けた。本発明の重合性組成物は塗布面が均一性が良好で、液晶表示装置は表示ムラも無く、画質は良好であった。
ウエハレベルレンズの作製
実施例1で作製した重合性組成物を用い、これをレンズを設けたシリコンウエハ上に塗布することにより、遮光層が設けられたウエハレベルレンズを作製した。
本発明のウエハレベルレンズは、遮光層の部分の塗布面の均一性が高く、遮光性が高く、この撮像ユニットを際の画質は良好であった。
Claims (18)
- (A)チタンブラック、(B)グラフト共重合体、および、(C)溶媒を含む分散組成物。
- 前記(B)グラフト共重合体が、水素原子を除いた原子数が40~10000の範囲であるグラフト鎖を有する、請求項1に記載の分散組成物。
- 前記(B)グラフト共重合体におけるグラフト鎖が、ポリエステル構造、ポリエーテル構造、およびポリアクリレート構造の群から選ばれた少なくとも1種である請求項1または請求項2に記載の分散組成物。
- X1、X2、X3、X4、X5、又はX6により表される1価の有機基が、炭素数1~12のアルキル基である、請求項1~4のいずれか1項に記載の分散組成物。
- Z1、Z2、Z3、Z4、又はZ5により表される1価の有機基が、アルキル基、水酸基、アルコキシ基、アリールオキシ基、ヘテロアリールオキシ基、アルキルチオエーテル基、アリールチオエーテル基、ヘテロアリールチオエーテル基、又はアミノ基である、請求項1~6のいずれか1項に記載の分散組成物。
- 前記式(5)におけるRにより表される1価の有機基が、アルキル基、アリール基、又はヘテロアリール基である、請求項1~7のいずれか1項に記載の分散組成物。
- 前記(B)グラフト共重合体が、前記式(1)~式(5)のいずれかで表される構造単位を、該グラフト共重合体の総質量に対し質量換算で、10%~90%の範囲で含む、請求項4~8のいずれか1項に記載の分散組成物。
- 前記(B)グラフト共重合体が、チタンブラックと相互作用しうる官能基を含有する構造単位をさらに含む、請求項1~請求項9のいずれか1項に記載の分散組成物。
- 前記(B)グラフト共重合体が、さらにカルボン酸基、スルホン酸基、リン酸基のうち少なくとも1種を含有する、請求項1~請求項10のいずれか1項に記載の分散組成物。
- 請求項1~請求項11のいずれか1項に記載の分散組成物、(D)重合性化合物、および(E)重合開始剤を含む重合性組成物。
- 前記(E)重合開始剤が、オキシム重合開始剤である請求項12に記載の重合性組成物。
- 基板上に、請求項12または請求項13に記載の重合性組成物を用いてなる着色パターンを有する遮光性カラーフィルタ。
- 請求項14に記載の遮光性カラーフィルタを備えた固体撮像素子。
- 請求項14に記載の遮光性カラーフィルタを備えた液晶表示装置。
- 複数のレンズが一体に成形された基板と、該基板の前記レンズのレンズ面を除く領域に設けられた請求項14に記載の遮光性カラーフィルタと、を備えたウエハレベルレンズ。
- 請求項17に記載のウエハレベルレンズを備えた撮像ユニット。
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Also Published As
Publication number | Publication date |
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EP2354187A1 (en) | 2011-08-10 |
TWI450935B (zh) | 2014-09-01 |
KR101423087B1 (ko) | 2014-07-25 |
US8278386B2 (en) | 2012-10-02 |
CN102171287A (zh) | 2011-08-31 |
TW201022373A (en) | 2010-06-16 |
CN102171287B (zh) | 2014-04-09 |
JP5340102B2 (ja) | 2013-11-13 |
JP2010106268A (ja) | 2010-05-13 |
JP2013076086A (ja) | 2013-04-25 |
JP5456149B2 (ja) | 2014-03-26 |
EP2354187A4 (en) | 2013-08-14 |
KR20110090882A (ko) | 2011-08-10 |
EP2354187B1 (en) | 2016-03-02 |
US20110124824A1 (en) | 2011-05-26 |
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