SG192967A1 - Hybrid ceramic showerhead - Google Patents

Hybrid ceramic showerhead Download PDF

Info

Publication number
SG192967A1
SG192967A1 SG2013064803A SG2013064803A SG192967A1 SG 192967 A1 SG192967 A1 SG 192967A1 SG 2013064803 A SG2013064803 A SG 2013064803A SG 2013064803 A SG2013064803 A SG 2013064803A SG 192967 A1 SG192967 A1 SG 192967A1
Authority
SG
Singapore
Prior art keywords
gas distribution
ceramic
faceplate
distribution apparatus
showerhead
Prior art date
Application number
SG2013064803A
Other languages
English (en)
Inventor
Mohamed Sabri
Ramkishan Rao Lingampalli
Karl F Leeser
Original Assignee
Novellus Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novellus Systems Inc filed Critical Novellus Systems Inc
Publication of SG192967A1 publication Critical patent/SG192967A1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45565—Shower nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cleaning In General (AREA)
SG2013064803A 2011-03-04 2012-03-02 Hybrid ceramic showerhead SG192967A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161449537P 2011-03-04 2011-03-04
PCT/US2012/027596 WO2012122054A2 (en) 2011-03-04 2012-03-02 Hybrid ceramic showerhead

Publications (1)

Publication Number Publication Date
SG192967A1 true SG192967A1 (en) 2013-09-30

Family

ID=46752556

Family Applications (2)

Application Number Title Priority Date Filing Date
SG2013064803A SG192967A1 (en) 2011-03-04 2012-03-02 Hybrid ceramic showerhead
SG10201602599XA SG10201602599XA (en) 2011-03-04 2012-03-02 Hybrid ceramic showerhead

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10201602599XA SG10201602599XA (en) 2011-03-04 2012-03-02 Hybrid ceramic showerhead

Country Status (7)

Country Link
US (2) US9441296B2 (enExample)
JP (1) JP5933602B2 (enExample)
KR (2) KR101843609B1 (enExample)
CN (2) CN103403843B (enExample)
SG (2) SG192967A1 (enExample)
TW (2) TWI566295B (enExample)
WO (1) WO2012122054A2 (enExample)

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* Cited by examiner, † Cited by third party
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