SG152163A1 - Temperature controlled showerhead - Google Patents
Temperature controlled showerheadInfo
- Publication number
- SG152163A1 SG152163A1 SG200807575-6A SG2008075756A SG152163A1 SG 152163 A1 SG152163 A1 SG 152163A1 SG 2008075756 A SG2008075756 A SG 2008075756A SG 152163 A1 SG152163 A1 SG 152163A1
- Authority
- SG
- Singapore
- Prior art keywords
- temperature controlled
- showerhead
- temperature control
- cvd
- controlled showerhead
- Prior art date
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger. Fig. 3A
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/974,945 US20090095218A1 (en) | 2007-10-16 | 2007-10-16 | Temperature controlled showerhead |
US11/974,966 US8137467B2 (en) | 2007-10-16 | 2007-10-16 | Temperature controlled showerhead |
US12/181,927 US8673080B2 (en) | 2007-10-16 | 2008-07-29 | Temperature controlled showerhead |
Publications (1)
Publication Number | Publication Date |
---|---|
SG152163A1 true SG152163A1 (en) | 2009-05-29 |
Family
ID=40677406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200807575-6A SG152163A1 (en) | 2007-10-16 | 2008-10-07 | Temperature controlled showerhead |
Country Status (2)
Country | Link |
---|---|
SG (1) | SG152163A1 (en) |
TW (1) | TWM361710U (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8673080B2 (en) | 2007-10-16 | 2014-03-18 | Novellus Systems, Inc. | Temperature controlled showerhead |
US9034142B2 (en) | 2009-12-18 | 2015-05-19 | Novellus Systems, Inc. | Temperature controlled showerhead for high temperature operations |
US9441296B2 (en) | 2011-03-04 | 2016-09-13 | Novellus Systems, Inc. | Hybrid ceramic showerhead |
US10023959B2 (en) | 2015-05-26 | 2018-07-17 | Lam Research Corporation | Anti-transient showerhead |
US10378107B2 (en) | 2015-05-22 | 2019-08-13 | Lam Research Corporation | Low volume showerhead with faceplate holes for improved flow uniformity |
US10741365B2 (en) | 2014-05-05 | 2020-08-11 | Lam Research Corporation | Low volume showerhead with porous baffle |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8137467B2 (en) | 2007-10-16 | 2012-03-20 | Novellus Systems, Inc. | Temperature controlled showerhead |
CN111238669B (en) * | 2018-11-29 | 2022-05-13 | 拓荆科技股份有限公司 | Temperature measuring method for semiconductor radio frequency processing device |
-
2008
- 2008-10-07 SG SG200807575-6A patent/SG152163A1/en unknown
- 2008-10-15 TW TW97218423U patent/TWM361710U/en not_active IP Right Cessation
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8673080B2 (en) | 2007-10-16 | 2014-03-18 | Novellus Systems, Inc. | Temperature controlled showerhead |
US9476120B2 (en) | 2007-10-16 | 2016-10-25 | Novellus Systems, Inc. | Temperature controlled showerhead |
US10221484B2 (en) | 2007-10-16 | 2019-03-05 | Novellus Systems, Inc. | Temperature controlled showerhead |
US10584415B2 (en) | 2007-10-16 | 2020-03-10 | Novellus Systems, Inc. | Temperature controlled showerhead |
US9034142B2 (en) | 2009-12-18 | 2015-05-19 | Novellus Systems, Inc. | Temperature controlled showerhead for high temperature operations |
US9441296B2 (en) | 2011-03-04 | 2016-09-13 | Novellus Systems, Inc. | Hybrid ceramic showerhead |
US10400333B2 (en) | 2011-03-04 | 2019-09-03 | Novellus Systems, Inc. | Hybrid ceramic showerhead |
US10741365B2 (en) | 2014-05-05 | 2020-08-11 | Lam Research Corporation | Low volume showerhead with porous baffle |
US10378107B2 (en) | 2015-05-22 | 2019-08-13 | Lam Research Corporation | Low volume showerhead with faceplate holes for improved flow uniformity |
US10023959B2 (en) | 2015-05-26 | 2018-07-17 | Lam Research Corporation | Anti-transient showerhead |
US10494717B2 (en) | 2015-05-26 | 2019-12-03 | Lam Research Corporation | Anti-transient showerhead |
Also Published As
Publication number | Publication date |
---|---|
TWM361710U (en) | 2009-07-21 |
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