SG152163A1 - Temperature controlled showerhead - Google Patents

Temperature controlled showerhead

Info

Publication number
SG152163A1
SG152163A1 SG200807575-6A SG2008075756A SG152163A1 SG 152163 A1 SG152163 A1 SG 152163A1 SG 2008075756 A SG2008075756 A SG 2008075756A SG 152163 A1 SG152163 A1 SG 152163A1
Authority
SG
Singapore
Prior art keywords
temperature controlled
showerhead
temperature control
cvd
controlled showerhead
Prior art date
Application number
SG200807575-6A
Inventor
Henner Meinhold
Dan M Doble
Lau Stephen
Vince Wilson
Easwar Srinivasan
Original Assignee
Novellus Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/974,945 external-priority patent/US20090095218A1/en
Priority claimed from US11/974,966 external-priority patent/US8137467B2/en
Priority claimed from US12/181,927 external-priority patent/US8673080B2/en
Application filed by Novellus Systems Inc filed Critical Novellus Systems Inc
Publication of SG152163A1 publication Critical patent/SG152163A1/en

Links

Landscapes

  • Chemical Vapour Deposition (AREA)

Abstract

A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger. Fig. 3A
SG200807575-6A 2007-10-16 2008-10-07 Temperature controlled showerhead SG152163A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/974,945 US20090095218A1 (en) 2007-10-16 2007-10-16 Temperature controlled showerhead
US11/974,966 US8137467B2 (en) 2007-10-16 2007-10-16 Temperature controlled showerhead
US12/181,927 US8673080B2 (en) 2007-10-16 2008-07-29 Temperature controlled showerhead

Publications (1)

Publication Number Publication Date
SG152163A1 true SG152163A1 (en) 2009-05-29

Family

ID=40677406

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200807575-6A SG152163A1 (en) 2007-10-16 2008-10-07 Temperature controlled showerhead

Country Status (2)

Country Link
SG (1) SG152163A1 (en)
TW (1) TWM361710U (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8673080B2 (en) 2007-10-16 2014-03-18 Novellus Systems, Inc. Temperature controlled showerhead
US9034142B2 (en) 2009-12-18 2015-05-19 Novellus Systems, Inc. Temperature controlled showerhead for high temperature operations
US9441296B2 (en) 2011-03-04 2016-09-13 Novellus Systems, Inc. Hybrid ceramic showerhead
US10023959B2 (en) 2015-05-26 2018-07-17 Lam Research Corporation Anti-transient showerhead
US10378107B2 (en) 2015-05-22 2019-08-13 Lam Research Corporation Low volume showerhead with faceplate holes for improved flow uniformity
US10741365B2 (en) 2014-05-05 2020-08-11 Lam Research Corporation Low volume showerhead with porous baffle

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8137467B2 (en) 2007-10-16 2012-03-20 Novellus Systems, Inc. Temperature controlled showerhead
CN111238669B (en) * 2018-11-29 2022-05-13 拓荆科技股份有限公司 Temperature measuring method for semiconductor radio frequency processing device

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8673080B2 (en) 2007-10-16 2014-03-18 Novellus Systems, Inc. Temperature controlled showerhead
US9476120B2 (en) 2007-10-16 2016-10-25 Novellus Systems, Inc. Temperature controlled showerhead
US10221484B2 (en) 2007-10-16 2019-03-05 Novellus Systems, Inc. Temperature controlled showerhead
US10584415B2 (en) 2007-10-16 2020-03-10 Novellus Systems, Inc. Temperature controlled showerhead
US9034142B2 (en) 2009-12-18 2015-05-19 Novellus Systems, Inc. Temperature controlled showerhead for high temperature operations
US9441296B2 (en) 2011-03-04 2016-09-13 Novellus Systems, Inc. Hybrid ceramic showerhead
US10400333B2 (en) 2011-03-04 2019-09-03 Novellus Systems, Inc. Hybrid ceramic showerhead
US10741365B2 (en) 2014-05-05 2020-08-11 Lam Research Corporation Low volume showerhead with porous baffle
US10378107B2 (en) 2015-05-22 2019-08-13 Lam Research Corporation Low volume showerhead with faceplate holes for improved flow uniformity
US10023959B2 (en) 2015-05-26 2018-07-17 Lam Research Corporation Anti-transient showerhead
US10494717B2 (en) 2015-05-26 2019-12-03 Lam Research Corporation Anti-transient showerhead

Also Published As

Publication number Publication date
TWM361710U (en) 2009-07-21

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