JP2014044445A5 - - Google Patents

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Publication number
JP2014044445A5
JP2014044445A5 JP2013248395A JP2013248395A JP2014044445A5 JP 2014044445 A5 JP2014044445 A5 JP 2014044445A5 JP 2013248395 A JP2013248395 A JP 2013248395A JP 2013248395 A JP2013248395 A JP 2013248395A JP 2014044445 A5 JP2014044445 A5 JP 2014044445A5
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JP
Japan
Prior art keywords
objective
intermediate image
pattern
imaging
concave mirror
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Pending
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JP2013248395A
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JP2014044445A (ja
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Publication of JP2014044445A publication Critical patent/JP2014044445A/ja
Publication of JP2014044445A5 publication Critical patent/JP2014044445A5/ja
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Claims (1)

  1. 自身の物体平面上に配置されるパターンを、該パターンが紫外光で照射されたときに自身の像平面に結像させるカタジオプトリック投影対物系であって、
    前記パターンを第１の中間像に結像させるための第１の対物部分であって、前記物体平面から該第１の中間像に該パターンを結像する光学屈折力を有する、該第１の対物部分内の全ての要素が屈折要素である、該第１の対物部分と、
    前記第１の中間像を第２の中間像に結像させるための第２の対物部分であって、単独の凹面鏡を備えた該第２の対物部分と、
    前記第２の中間像を前記像平面に結像させる第３の対物部分と、
    前記凹面鏡に向かう光を曲げるための第１の折り曲げミラーと、該凹面鏡からの光を曲げるための第２の折り曲げミラーと
    を備えた、
    カタジオプトリック投影対物系。
JP2013248395A 2004-05-17 2013-11-29 中間像を有するカタジオプトリック投影対物レンズ Pending JP2014044445A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US57153304P 2004-05-17 2004-05-17
US60/571,533 2004-05-17

Related Parent Applications (1)

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JP2007517043A Division JP5769356B2 (ja) 2004-05-17 2005-05-13 中間像を有するカタジオプトリック投影対物レンズ

Related Child Applications (1)

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JP2015184063A Division JP2016027416A (ja) 2004-05-17 2015-09-17 中間像を有するカタジオプトリック投影対物レンズ

Publications (2)

Publication Number Publication Date
JP2014044445A JP2014044445A (ja) 2014-03-13
JP2014044445A5 true JP2014044445A5 (ja) 2014-04-24

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ID=34966631

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JP2007517043A Expired - Fee Related JP5769356B2 (ja) 2004-05-17 2005-05-13 中間像を有するカタジオプトリック投影対物レンズ
JP2013248395A Pending JP2014044445A (ja) 2004-05-17 2013-11-29 中間像を有するカタジオプトリック投影対物レンズ
JP2015184063A Pending JP2016027416A (ja) 2004-05-17 2015-09-17 中間像を有するカタジオプトリック投影対物レンズ
JP2015204468A Pending JP2016014900A (ja) 2004-05-17 2015-10-16 中間像を有するカタジオプトリック投影対物レンズ
JP2017036980A Withdrawn JP2017102481A (ja) 2004-05-17 2017-02-28 中間像を有するカタジオプトリック投影対物レンズ
JP2017161404A Withdrawn JP2018010311A (ja) 2004-05-17 2017-08-24 中間像を有するカタジオプトリック投影対物レンズ
JP2018165282A Withdrawn JP2018194868A (ja) 2004-05-17 2018-09-04 中間像を有するカタジオプトリック投影対物レンズ

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JP2007517043A Expired - Fee Related JP5769356B2 (ja) 2004-05-17 2005-05-13 中間像を有するカタジオプトリック投影対物レンズ

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JP2015184063A Pending JP2016027416A (ja) 2004-05-17 2015-09-17 中間像を有するカタジオプトリック投影対物レンズ
JP2015204468A Pending JP2016014900A (ja) 2004-05-17 2015-10-16 中間像を有するカタジオプトリック投影対物レンズ
JP2017036980A Withdrawn JP2017102481A (ja) 2004-05-17 2017-02-28 中間像を有するカタジオプトリック投影対物レンズ
JP2017161404A Withdrawn JP2018010311A (ja) 2004-05-17 2017-08-24 中間像を有するカタジオプトリック投影対物レンズ
JP2018165282A Withdrawn JP2018194868A (ja) 2004-05-17 2018-09-04 中間像を有するカタジオプトリック投影対物レンズ

Country Status (7)

Country Link
US (7) US8107162B2 (ja)
EP (1) EP1751601B1 (ja)
JP (7) JP5769356B2 (ja)
KR (10) KR20140043485A (ja)
CN (1) CN100483174C (ja)
DE (1) DE602005003665T2 (ja)
WO (1) WO2005111689A2 (ja)

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