JP2014078032A5 - 使用可能スペクトル域が広い標本イメージング用の対物系 - Google Patents

使用可能スペクトル域が広い標本イメージング用の対物系 Download PDF

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JP2014078032A5
JP2014078032A5 JP2013264334A JP2013264334A JP2014078032A5 JP 2014078032 A5 JP2014078032 A5 JP 2014078032A5 JP 2013264334 A JP2013264334 A JP 2013264334A JP 2013264334 A JP2013264334 A JP 2013264334A JP 2014078032 A5 JP2014078032 A5 JP 2014078032A5
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objective system
sample
lenses
spectral range
light
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JP2014078032A (ja
JP5901607B2 (ja
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Priority claimed from US10/903,494 external-priority patent/US7672043B2/en
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Claims (7)

  1. 光を捉えて中間像に変換する複数個のレンズと、
    中間像を捉えて中間光をもたらす少なくとも１個の像面レンズと、
    中間光を捉え標本に制御光を供給するよう、少なくとも１個の像面レンズと標本の間に配置されたカタジオプトリック群と、
    を備え、
    各像面レンズが、中間像とカタジオプトリック群の間、且つ、中間像形成位置から完全に離れた位置に配置されており、
    使用可能スペクトル域の幅が、少なくとも５５ｎｍであることを特徴とする、使用可能スペクトル域が広い標本イメージング用の対物系。
  2. 請求項１記載の対物系であって、その使用可能スペクトル域が少なくとも１９３〜２６６ｎｍの領域に亘る対物系。
  3. 請求項１記載の対物系であって、その像面位置における多色シュトレール比が０．９超である対物系。
  4. 請求項１記載の対物系であって、そのカタジオプトリック群が、マンジャンミラーに更に他のレンズを備えた構成を有する対物系。
  5. 請求項１記載の対物系であって、その像面レンズのうち少なくとも１個が熔融シリカによって形成された対物系。
  6. 請求項５記載の対物系であって、像面レンズのうち少なくとも１個に加えられた他のレンズのうち少なくとも１個が弗化カルシウムによって形成された対物系。
  7. 請求項１記載の対物系であって、標本に射突した光のうち少なくとも一部が標本から戻り、カタジオプトリック群、並びに上記複数個のレンズのうち少なくとも１個を通り抜ける対物系。
JP2013264334A 2004-07-29 2013-12-20 使用可能スペクトル域が広い標本イメージング用の対物系 Active JP5901607B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/903,494 2004-07-29
US10/903,494 US7672043B2 (en) 2003-02-21 2004-07-29 Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth

Related Parent Applications (1)

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JP2007523820A Division JP2008508560A (ja) 2004-07-29 2005-07-28 深紫外スペクトル域拡張型カタジオプトリック結像系

Publications (3)

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JP2014078032A JP2014078032A (ja) 2014-05-01
JP2014078032A5 true JP2014078032A5 (ja) 2014-08-14
JP5901607B2 JP5901607B2 (ja) 2016-04-13

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JP2007523820A Pending JP2008508560A (ja) 2004-07-29 2005-07-28 深紫外スペクトル域拡張型カタジオプトリック結像系
JP2013264334A Active JP5901607B2 (ja) 2004-07-29 2013-12-20 使用可能スペクトル域が広い標本イメージング用の対物系

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US (1) US7672043B2 (ja)
EP (1) EP1771753A4 (ja)
JP (2) JP2008508560A (ja)
WO (1) WO2006015142A2 (ja)

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