GB9215595D0 - Optical systems - Google Patents
Optical systemsInfo
- Publication number
- GB9215595D0 GB9215595D0 GB929215595A GB9215595A GB9215595D0 GB 9215595 D0 GB9215595 D0 GB 9215595D0 GB 929215595 A GB929215595 A GB 929215595A GB 9215595 A GB9215595 A GB 9215595A GB 9215595 D0 GB9215595 D0 GB 9215595D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- optical systems
- optical
- systems
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB929215595A GB9215595D0 (en) | 1992-07-22 | 1992-07-22 | Optical systems |
GB9315214A GB2269024A (en) | 1992-07-22 | 1993-07-22 | Optical system having at least one tilted Mangin mirror |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB929215595A GB9215595D0 (en) | 1992-07-22 | 1992-07-22 | Optical systems |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9215595D0 true GB9215595D0 (en) | 1992-09-02 |
Family
ID=10719122
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB929215595A Pending GB9215595D0 (en) | 1992-07-22 | 1992-07-22 | Optical systems |
GB9315214A Withdrawn GB2269024A (en) | 1992-07-22 | 1993-07-22 | Optical system having at least one tilted Mangin mirror |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9315214A Withdrawn GB2269024A (en) | 1992-07-22 | 1993-07-22 | Optical system having at least one tilted Mangin mirror |
Country Status (1)
Country | Link |
---|---|
GB (2) | GB9215595D0 (en) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6512631B2 (en) * | 1996-07-22 | 2003-01-28 | Kla-Tencor Corporation | Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system |
US7136234B2 (en) | 2000-09-12 | 2006-11-14 | Kla-Tencor Technologies Corporation | Broad band DUV, VUV long-working distance catadioptric imaging system |
US6842298B1 (en) | 2000-09-12 | 2005-01-11 | Kla-Tencor Technologies Corporation | Broad band DUV, VUV long-working distance catadioptric imaging system |
US7136159B2 (en) | 2000-09-12 | 2006-11-14 | Kla-Tencor Technologies Corporation | Excimer laser inspection system |
US7884998B2 (en) | 2003-02-21 | 2011-02-08 | Kla - Tencor Corporation | Catadioptric microscope objective employing immersion liquid for use in broad band microscopy |
US7639419B2 (en) | 2003-02-21 | 2009-12-29 | Kla-Tencor Technologies, Inc. | Inspection system using small catadioptric objective |
US7180658B2 (en) | 2003-02-21 | 2007-02-20 | Kla-Tencor Technologies Corporation | High performance catadioptric imaging system |
US7646533B2 (en) | 2003-02-21 | 2010-01-12 | Kla-Tencor Technologies Corporation | Small ultra-high NA catadioptric objective |
US7672043B2 (en) | 2003-02-21 | 2010-03-02 | Kla-Tencor Technologies Corporation | Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth |
KR100833230B1 (en) * | 2003-04-07 | 2008-05-28 | 삼성전자주식회사 | Illumination optical system and image projection system applied it |
US8665536B2 (en) | 2007-06-19 | 2014-03-04 | Kla-Tencor Corporation | External beam delivery system for laser dark-field illumination in a catadioptric optical system |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB812968A (en) * | 1955-01-22 | 1959-05-06 | Svenska Ackumulator Ab | Improvements in and relating to optical systems |
SE455237B (en) * | 1986-10-28 | 1988-06-27 | Philips Norden Ab | MONOLITIC MIRROR OBJECTIVE AND OPTICAL ARRANGEMENT INCLUDING TWO SADANA MIRROR OBJECTIVES |
-
1992
- 1992-07-22 GB GB929215595A patent/GB9215595D0/en active Pending
-
1993
- 1993-07-22 GB GB9315214A patent/GB2269024A/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
GB9315214D0 (en) | 1993-09-08 |
GB2269024A (en) | 1994-01-26 |
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