GB9215595D0 - Optical systems - Google Patents

Optical systems

Info

Publication number
GB9215595D0
GB9215595D0 GB929215595A GB9215595A GB9215595D0 GB 9215595 D0 GB9215595 D0 GB 9215595D0 GB 929215595 A GB929215595 A GB 929215595A GB 9215595 A GB9215595 A GB 9215595A GB 9215595 D0 GB9215595 D0 GB 9215595D0
Authority
GB
United Kingdom
Prior art keywords
optical systems
optical
systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB929215595A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Nottingham
Original Assignee
University of Nottingham
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Nottingham filed Critical University of Nottingham
Priority to GB929215595A priority Critical patent/GB9215595D0/en
Publication of GB9215595D0 publication Critical patent/GB9215595D0/en
Priority to GB9315214A priority patent/GB2269024A/en
Pending legal-status Critical Current

Links

GB929215595A 1992-07-22 1992-07-22 Optical systems Pending GB9215595D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB929215595A GB9215595D0 (en) 1992-07-22 1992-07-22 Optical systems
GB9315214A GB2269024A (en) 1992-07-22 1993-07-22 Optical system having at least one tilted Mangin mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929215595A GB9215595D0 (en) 1992-07-22 1992-07-22 Optical systems

Publications (1)

Publication Number Publication Date
GB9215595D0 true GB9215595D0 (en) 1992-09-02

Family

ID=10719122

Family Applications (2)

Application Number Title Priority Date Filing Date
GB929215595A Pending GB9215595D0 (en) 1992-07-22 1992-07-22 Optical systems
GB9315214A Withdrawn GB2269024A (en) 1992-07-22 1993-07-22 Optical system having at least one tilted Mangin mirror

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB9315214A Withdrawn GB2269024A (en) 1992-07-22 1993-07-22 Optical system having at least one tilted Mangin mirror

Country Status (1)

Country Link
GB (2) GB9215595D0 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6512631B2 (en) * 1996-07-22 2003-01-28 Kla-Tencor Corporation Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
US7136234B2 (en) 2000-09-12 2006-11-14 Kla-Tencor Technologies Corporation Broad band DUV, VUV long-working distance catadioptric imaging system
US6842298B1 (en) 2000-09-12 2005-01-11 Kla-Tencor Technologies Corporation Broad band DUV, VUV long-working distance catadioptric imaging system
US7136159B2 (en) 2000-09-12 2006-11-14 Kla-Tencor Technologies Corporation Excimer laser inspection system
US7884998B2 (en) 2003-02-21 2011-02-08 Kla - Tencor Corporation Catadioptric microscope objective employing immersion liquid for use in broad band microscopy
US7639419B2 (en) 2003-02-21 2009-12-29 Kla-Tencor Technologies, Inc. Inspection system using small catadioptric objective
US7180658B2 (en) 2003-02-21 2007-02-20 Kla-Tencor Technologies Corporation High performance catadioptric imaging system
US7646533B2 (en) 2003-02-21 2010-01-12 Kla-Tencor Technologies Corporation Small ultra-high NA catadioptric objective
US7672043B2 (en) 2003-02-21 2010-03-02 Kla-Tencor Technologies Corporation Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth
KR100833230B1 (en) * 2003-04-07 2008-05-28 삼성전자주식회사 Illumination optical system and image projection system applied it
US8665536B2 (en) 2007-06-19 2014-03-04 Kla-Tencor Corporation External beam delivery system for laser dark-field illumination in a catadioptric optical system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB812968A (en) * 1955-01-22 1959-05-06 Svenska Ackumulator Ab Improvements in and relating to optical systems
SE455237B (en) * 1986-10-28 1988-06-27 Philips Norden Ab MONOLITIC MIRROR OBJECTIVE AND OPTICAL ARRANGEMENT INCLUDING TWO SADANA MIRROR OBJECTIVES

Also Published As

Publication number Publication date
GB9315214D0 (en) 1993-09-08
GB2269024A (en) 1994-01-26

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