JP2014078032A5 - Objective system for sample imaging with wide usable spectral range - Google Patents

Objective system for sample imaging with wide usable spectral range Download PDF

Info

Publication number
JP2014078032A5
JP2014078032A5 JP2013264334A JP2013264334A JP2014078032A5 JP 2014078032 A5 JP2014078032 A5 JP 2014078032A5 JP 2013264334 A JP2013264334 A JP 2013264334A JP 2013264334 A JP2013264334 A JP 2013264334A JP 2014078032 A5 JP2014078032 A5 JP 2014078032A5
Authority
JP
Japan
Prior art keywords
objective system
sample
lenses
spectral range
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013264334A
Other languages
Japanese (ja)
Other versions
JP2014078032A (en
JP5901607B2 (en
Filing date
Publication date
Priority claimed from US10/903,494 external-priority patent/US7672043B2/en
Application filed filed Critical
Publication of JP2014078032A publication Critical patent/JP2014078032A/en
Publication of JP2014078032A5 publication Critical patent/JP2014078032A5/en
Application granted granted Critical
Publication of JP5901607B2 publication Critical patent/JP5901607B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Claims (7)

光を捉えて中間像に変換する複数個のレンズと、
中間像を捉えて中間光をもたらす少なくとも１個の像面レンズと、
中間光を捉え標本に制御光を供給するよう、少なくとも１個の像面レンズと標本の間に配置されたカタジオプトリック群と、
を備え、
各像面レンズが、中間像とカタジオプトリック群の間、且つ、中間像形成位置から完全に離れた位置に配置されており、
使用可能スペクトル域の幅が、少なくとも５５ｎｍであることを特徴とする、使用可能スペクトル域が広い標本イメージング用の対物系。 A plurality of lenses that capture light and convert it into an intermediate image;
At least one field lens that captures an intermediate image and provides intermediate light;
A catadioptric group disposed between at least one field lens and the sample to capture intermediate light and provide control light to the sample;
Equipped with
Each image surface lens is disposed between the intermediate image and the catadioptric group and at a position completely away from the intermediate image forming position,
An objective system for sample imaging having a wide usable spectral range, wherein the width of the usable spectral range is at least 55 nm . 請求項１記載の対物系であって、その使用可能スペクトル域が少なくとも１９３〜２６６ｎｍの領域に亘る対物系。The objective according to claim 1, wherein the usable spectral range extends over at least the region of 193 to 266 nm. 請求項１記載の対物系であって、その像面位置における多色シュトレール比が０．９超である対物系。The objective system according to claim 1, wherein the multicolor Strehl ratio at the image plane position is greater than 0.9. 請求項１記載の対物系であって、そのカタジオプトリック群が、マンジャンミラーに更に他のレンズを備えた構成を有する対物系。The objective system according to claim 1, wherein the catadioptric group further comprises another lens on a Mangin mirror. 請求項１記載の対物系であって、その像面レンズのうち少なくとも１個が熔融シリカによって形成された対物系。The objective system according to claim 1, wherein at least one of the image plane lenses is formed of fused silica. 請求項５記載の対物系であって、像面レンズのうち少なくとも１個に加えられた他のレンズのうち少なくとも１個が弗化カルシウムによって形成された対物系。6. The objective according to claim 5, wherein at least one of the other lenses added to at least one of the field lenses is formed by calcium fluoride. 請求項１記載の対物系であって、標本に射突した光のうち少なくとも一部が標本から戻り、カタジオプトリック群、並びに上記複数個のレンズのうち少なくとも１個を通り抜ける対物系。The objective system according to claim 1, wherein at least a part of the light impinging on the sample returns from the sample and passes through the catadioptric group and at least one of the plurality of lenses.
JP2013264334A 2004-07-29 2013-12-20 Objective system for specimen imaging with wide usable spectral range Active JP5901607B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/903,494 2004-07-29
US10/903,494 US7672043B2 (en) 2003-02-21 2004-07-29 Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007523820A Division JP2008508560A (en) 2004-07-29 2005-07-28 Deep UV spectral range extended catadioptric imaging system

Publications (3)

Publication Number Publication Date
JP2014078032A JP2014078032A (en) 2014-05-01
JP2014078032A5 true JP2014078032A5 (en) 2014-08-14
JP5901607B2 JP5901607B2 (en) 2016-04-13

Family

ID=35787828

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2007523820A Pending JP2008508560A (en) 2004-07-29 2005-07-28 Deep UV spectral range extended catadioptric imaging system
JP2013264334A Active JP5901607B2 (en) 2004-07-29 2013-12-20 Objective system for specimen imaging with wide usable spectral range

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2007523820A Pending JP2008508560A (en) 2004-07-29 2005-07-28 Deep UV spectral range extended catadioptric imaging system

Country Status (4)

Country Link
US (1) US7672043B2 (en)
EP (1) EP1771753A4 (en)
JP (2) JP2008508560A (en)
WO (1) WO2006015142A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3358387A1 (en) 2010-08-27 2018-08-08 The Board of Trustees of The Leland Stanford Junior University Microscopy imaging device with advanced imaging properties
JP5627476B2 (en) * 2011-01-19 2014-11-19 キヤノン株式会社 Catadioptric optical system and imaging apparatus having the same
JP5656682B2 (en) * 2011-02-22 2015-01-21 キヤノン株式会社 Catadioptric optical system and imaging apparatus having the same
JP5836686B2 (en) * 2011-07-28 2015-12-24 キヤノン株式会社 Catadioptric optical system and imaging apparatus having the same
CN103309019A (en) * 2013-06-24 2013-09-18 中国科学院长春光学精密机械与物理研究所 Optical system of ultraviolet multi-band panoramic imaging instrument
DE102013112212B4 (en) * 2013-11-06 2022-03-10 Carl Zeiss Smt Gmbh Optical zoom device, optical imaging device, optical zoom method and imaging method for microscopy
JP6493087B2 (en) * 2015-08-24 2019-04-03 株式会社デンソー In-vehicle camera device
JP6931705B2 (en) * 2017-02-10 2021-09-08 ノバダック テクノロジーズ ユーエルシー Open Field Handheld Fluorescence Imaging Systems and Methods
CA3160205A1 (en) * 2019-11-22 2021-05-27 Howard Hughes Medical Institute Catadioptric microscopy
KR102507043B1 (en) * 2022-04-18 2023-03-07 (주)그린광학 Optical System for Imaging with High Resolution

Family Cites Families (64)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE108181C (en)
US1973066A (en) 1932-11-11 1934-09-11 Zeiss Carl Fa Microscope for examining the profiles of surfaces
US2661658A (en) 1948-07-19 1953-12-08 Ass Elect Ind Optical system for increasing the working distances of microscope objectives
US3237515A (en) 1963-04-16 1966-03-01 Bausch & Lomb Afocal telecentric catadioptric optical system for measuring instruments
US5449597A (en) 1966-04-21 1995-09-12 Sawyer; George M. Lippmann process of color photography, which produces a photograph with a 2-dimensional image, to result in another process of color photography which produces a photograph with a 3-dimensional image
US4155630A (en) 1977-11-17 1979-05-22 University Of Delaware Speckle elimination by random spatial phase modulation
US4511220A (en) 1982-12-23 1985-04-16 The United States Of America As Represented By The Secretary Of The Air Force Laser target speckle eliminator
GB8410973D0 (en) 1984-04-30 1984-06-06 Crosfield Electronics Ltd Modifying coherent radiation
US4779966A (en) 1984-12-21 1988-10-25 The Perkin-Elmer Corporation Single mirror projection optical system
US4795244A (en) 1985-09-20 1989-01-03 Nikon Corporation Projection type exposure apparatus
US4758088A (en) 1987-05-01 1988-07-19 Laser Precision Corporation Microscope accessory which facilitates radiation transmission measurements in the reflectance mode
US4898471A (en) 1987-06-18 1990-02-06 Tencor Instruments Particle detection on patterned wafers and the like
DE3742806A1 (en) 1987-12-17 1989-07-13 Zeiss Carl Fa Method and device for producing fluorescence images
US5110505A (en) 1989-02-24 1992-05-05 E. I. Du Pont De Nemours And Company Small-particle semiconductors in rigid matrices
US4971428A (en) 1989-03-27 1990-11-20 Lenzar Optics Corporation Catadioptric zoom lens
US5140459A (en) 1989-08-29 1992-08-18 Texas Instruments Apparatus and method for optical relay and reimaging
JPH058576Y2 (en) * 1989-11-07 1993-03-03
US4989471A (en) * 1989-12-01 1991-02-05 Ford New Holland, Inc. Method of calibrating clutches in transmissions
US4974094A (en) 1989-12-04 1990-11-27 Yuhkoh Morito Direct lighting/illuminating system for miniature CCD camera
US5114238A (en) 1990-06-28 1992-05-19 Lockheed Missiles & Space Company, Inc. Infrared catadioptric zoom relay telescope
US5089913A (en) 1990-07-11 1992-02-18 International Business Machines Corporation High resolution reduction catadioptric relay lens
US5031976A (en) * 1990-09-24 1991-07-16 Kla Instruments, Corporation Catadioptric imaging system
US5274494A (en) 1991-04-25 1993-12-28 Hughes Aircraft Company Speckle suppression illuminator
US5177559A (en) 1991-05-17 1993-01-05 International Business Machines Corporation Dark field imaging defect inspection system for repetitive pattern integrated circuits
US5668673A (en) 1991-08-05 1997-09-16 Nikon Corporation Catadioptric reduction projection optical system
US5233460A (en) 1992-01-31 1993-08-03 Regents Of The University Of California Method and means for reducing speckle in coherent laser pulses
US5264912A (en) 1992-02-07 1993-11-23 Tencor Instruments Speckle reduction track filter apparatus for optical inspection of patterned substrates
US6219015B1 (en) 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
GB9215595D0 (en) 1992-07-22 1992-09-02 Univ Nottingham Optical systems
US5337170A (en) 1992-07-29 1994-08-09 The United States Of America As Represented By The Secretary Of The Air Force Quadratic optical processor for reducing multiplicative noise and other uses
US5309456A (en) 1992-10-30 1994-05-03 The United States Of America As Represented By The United States Department Of Energy Pulse stretcher
US5323263A (en) 1993-02-01 1994-06-21 Nikon Precision Inc. Off-axis catadioptric projection system
JPH09311278A (en) 1996-05-20 1997-12-02 Nikon Corp Reflection type dioptric system
US5636066A (en) 1993-03-12 1997-06-03 Nikon Corporation Optical apparatus
JP3635684B2 (en) 1994-08-23 2005-04-06 株式会社ニコン Catadioptric reduction projection optical system, catadioptric optical system, and projection exposure method and apparatus
US5428442A (en) 1993-09-30 1995-06-27 Optical Specialties, Inc. Inspection system with in-lens, off-axis illuminator
US5515207A (en) 1993-11-03 1996-05-07 Nikon Precision Inc. Multiple mirror catadioptric optical system
US5434662A (en) 1993-12-23 1995-07-18 Hughes Aircraft Company Speckle resistant method and apparatus with chirped laser beam
DE4413832C2 (en) 1994-04-20 2000-05-31 Siemens Ag Devices for checking semiconductor wafers
JP3395801B2 (en) 1994-04-28 2003-04-14 株式会社ニコン Catadioptric projection optical system, scanning projection exposure apparatus, and scanning projection exposure method
US5990983A (en) 1994-09-30 1999-11-23 Laser Power Corporation High resolution image projection system and method employing lasers
US5488229A (en) 1994-10-04 1996-01-30 Excimer Laser Systems, Inc. Deep ultraviolet microlithography system
US5621529A (en) 1995-04-05 1997-04-15 Intelligent Automation Systems, Inc. Apparatus and method for projecting laser pattern with reduced speckle noise
US6512631B2 (en) * 1996-07-22 2003-01-28 Kla-Tencor Corporation Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
US5729374A (en) 1995-07-03 1998-03-17 The Regents Of The University Of California Speckle averaging system for laser raster-scan image projection
WO1997012226A1 (en) 1995-09-25 1997-04-03 Tencor Instruments Improved system for surface inspection
US5748365A (en) 1996-03-26 1998-05-05 Hughes Electronics Catadioptric one-to-one telecentric image combining system
DE19616922A1 (en) 1996-04-27 1997-10-30 Zeiss Carl Fa High-resolution, bright lens
JPH103041A (en) 1996-06-14 1998-01-06 Nikon Corp Catadioptric reduction optical system
JPH1020195A (en) 1996-06-28 1998-01-23 Nikon Corp Cata-dioptric system
US6064517A (en) 1996-07-22 2000-05-16 Kla-Tencor Corporation High NA system for multiple mode imaging
US5999310A (en) 1996-07-22 1999-12-07 Shafer; David Ross Ultra-broadband UV microscope imaging system with wide range zoom capability
US5717518A (en) * 1996-07-22 1998-02-10 Kla Instruments Corporation Broad spectrum ultraviolet catadioptric imaging system
US6483638B1 (en) * 1996-07-22 2002-11-19 Kla-Tencor Corporation Ultra-broadband UV microscope imaging system with wide range zoom capability
AU8882698A (en) 1998-08-20 2000-03-14 Orbotech Ltd. Laser repetition rate multiplier
US6370178B1 (en) 1998-12-21 2002-04-09 Imed Lasers Wide area laser and multi-pass laser optical cavity for use therein
EP1059550A4 (en) * 1998-12-25 2003-03-19 Nikon Corp Reflection refraction image-forming optical system and projection exposure apparatus comprising the optical system
US6191887B1 (en) 1999-01-20 2001-02-20 Tropel Corporation Laser illumination with speckle reduction
US6362923B1 (en) * 2000-03-10 2002-03-26 Kla-Tencor Lens for microscopic inspection
JP2002083766A (en) * 2000-06-19 2002-03-22 Nikon Corp Projectoin optical system, method of manufacturing the optical system, and projection exposure system equipped with the optical system
US6842298B1 (en) * 2000-09-12 2005-01-11 Kla-Tencor Technologies Corporation Broad band DUV, VUV long-working distance catadioptric imaging system
US6548797B1 (en) 2000-10-20 2003-04-15 Nikon Corporation Apparatus and method for measuring a wavefront using a screen with apertures adjacent to a multi-lens array
JP4066079B2 (en) * 2001-11-26 2008-03-26 株式会社ニコン Objective lens and optical apparatus using the same
US8675276B2 (en) * 2003-02-21 2014-03-18 Kla-Tencor Corporation Catadioptric imaging system for broad band microscopy

Similar Documents

Publication Publication Date Title
JP2014078032A5 (en) Objective system for sample imaging with wide usable spectral range
JP2014130375A5 (en)
JP2012518804A5 (en)
JP2014044445A5 (en)
JP2016081005A5 (en)
JP2011501872A5 (en)
JP2012181545A5 (en)
JP2014052511A5 (en)
JP2013033283A5 (en)
JP2014029392A5 (en)
JP2012212106A5 (en)
JP2014513319A5 (en)
JP2014102529A5 (en)
WO2015017348A3 (en) Mechanical zoom imaging apparatus
JP2011232543A5 (en)
JP2014010399A5 (en)
TW201614311A (en) Optical image capturing system
JP2009294513A5 (en)
JP2013048309A5 (en)
JP2013187729A5 (en)
JP2006234892A5 (en)
JP2013244385A5 (en)
TW201612577A (en) Optical image capturing system
JP2014008176A5 (en)
JP2014157225A5 (en)