DE68916451T2 - Optisches Projektionssystem. - Google Patents

Optisches Projektionssystem.

Info

Publication number
DE68916451T2
DE68916451T2 DE68916451T DE68916451T DE68916451T2 DE 68916451 T2 DE68916451 T2 DE 68916451T2 DE 68916451 T DE68916451 T DE 68916451T DE 68916451 T DE68916451 T DE 68916451T DE 68916451 T2 DE68916451 T2 DE 68916451T2
Authority
DE
Germany
Prior art keywords
projection system
optical projection
optical
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68916451T
Other languages
English (en)
Other versions
DE68916451D1 (de
Inventor
Nobuhiro Araki
Takeo Sato
Koichi Kawata
Noboru Nomura
Keisuke Koga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1042381A external-priority patent/JPH0748089B2/ja
Priority claimed from JP4234989A external-priority patent/JPH02220015A/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE68916451D1 publication Critical patent/DE68916451D1/de
Application granted granted Critical
Publication of DE68916451T2 publication Critical patent/DE68916451T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
DE68916451T 1988-03-11 1989-03-09 Optisches Projektionssystem. Expired - Fee Related DE68916451T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP5873988 1988-03-11
JP1042381A JPH0748089B2 (ja) 1988-03-11 1989-02-22 精密投影光学系
JP4234989A JPH02220015A (ja) 1989-02-22 1989-02-22 精密投影光学系

Publications (2)

Publication Number Publication Date
DE68916451D1 DE68916451D1 (de) 1994-08-04
DE68916451T2 true DE68916451T2 (de) 1994-11-17

Family

ID=27291174

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68916451T Expired - Fee Related DE68916451T2 (de) 1988-03-11 1989-03-09 Optisches Projektionssystem.

Country Status (3)

Country Link
US (1) US4948238A (de)
EP (1) EP0332201B1 (de)
DE (1) DE68916451T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3360387B2 (ja) * 1993-11-15 2002-12-24 株式会社ニコン 投影光学系及び投影露光装置
JP3396935B2 (ja) * 1993-11-15 2003-04-14 株式会社ニコン 投影光学系及び投影露光装置
JPH08179204A (ja) 1994-11-10 1996-07-12 Nikon Corp 投影光学系及び投影露光装置
JPH116957A (ja) * 1997-04-25 1999-01-12 Nikon Corp 投影光学系および投影露光装置並びに投影露光方法
JPH1195095A (ja) 1997-09-22 1999-04-09 Nikon Corp 投影光学系
JPH11214293A (ja) 1998-01-22 1999-08-06 Nikon Corp 投影光学系及び該光学系を備えた露光装置並びにデバイス製造方法
US6700645B1 (en) 1998-01-22 2004-03-02 Nikon Corporation Projection optical system and exposure apparatus and method
US5986824A (en) * 1998-06-04 1999-11-16 Nikon Corporation Large NA projection lens system with aplanatic lens element for excimer laser lithography
US5969803A (en) * 1998-06-30 1999-10-19 Nikon Corporation Large NA projection lens for excimer laser lithographic systems
DE19939088A1 (de) * 1998-08-18 2000-02-24 Nikon Corp Belichtungsvorrichtung und -verfahren
DE19942281A1 (de) * 1999-05-14 2000-11-16 Zeiss Carl Fa Projektionsobjektiv
JP3359302B2 (ja) 1999-06-14 2002-12-24 キヤノン株式会社 投影露光装置
JP2000356741A (ja) 1999-06-14 2000-12-26 Canon Inc 投影光学系
US6867922B1 (en) 1999-06-14 2005-03-15 Canon Kabushiki Kaisha Projection optical system and projection exposure apparatus using the same
KR100854052B1 (ko) 1999-12-29 2008-08-26 칼 짜이스 에스엠테 아게 인접한 비구면 렌즈 표면을 구비한 투사 대물 렌즈
DE10064685A1 (de) 2000-12-22 2002-07-04 Zeiss Carl Lithographieobjektiv mit einer ersten Linsengruppe, bestehend ausschließlich aus Linsen positiver Brechkraft
KR20030072568A (ko) 2000-12-22 2003-09-15 칼-짜이스-스티프퉁 트레이딩 에즈 칼 짜이스 하나 이상의 비구면 렌즈를 갖는 대물렌즈
WO2002052303A2 (de) 2000-12-22 2002-07-04 Carl Zeiss Smt Ag Projektionsobjektiv
JP2002244034A (ja) 2001-02-21 2002-08-28 Nikon Corp 投影光学系および該投影光学系を備えた露光装置
JP2002323652A (ja) 2001-02-23 2002-11-08 Nikon Corp 投影光学系，該投影光学系を備えた投影露光装置および投影露光方法
US8208198B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
US20080151364A1 (en) 2004-01-14 2008-06-26 Carl Zeiss Smt Ag Catadioptric projection objective
KR20180078354A (ko) 2004-05-17 2018-07-09 칼 짜이스 에스엠티 게엠베하 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
TWI435138B (zh) 2011-06-20 2014-04-21 Largan Precision Co 影像拾取光學系統
TWI547713B (zh) 2014-07-30 2016-09-01 大立光電股份有限公司 攝影用光學鏡頭、取像裝置以及電子裝置
TWI510804B (zh) 2014-08-01 2015-12-01 Largan Precision Co Ltd 取像用光學鏡組、取像裝置及電子裝置
TWI534467B (zh) 2015-02-17 2016-05-21 大立光電股份有限公司 攝影系統、取像裝置及電子裝置
CN110178068B (zh) 2017-01-20 2022-02-01 松下知识产权经营株式会社 单焦点透镜系统及相机
TWI600940B (zh) 2017-03-01 2017-10-01 大立光電股份有限公司 光學影像透鏡系統組、取像裝置及電子裝置
TWI632411B (zh) 2018-01-19 2018-08-11 大立光電股份有限公司 光學攝像鏡組、取像裝置及電子裝置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE831156C (de) * 1950-05-18 1952-02-11 Askania Werke Ag Mehrteiliges afokales Vorsatzlinsensystem fuer photographische Objektive
SE363410B (de) * 1972-05-30 1974-01-14 Aga Ab
JPS5712966A (en) * 1980-06-21 1982-01-22 Tomie Numahata Mixed cake from rice and barley
JPS6039624A (ja) * 1983-08-11 1985-03-01 Matsushita Electric Ind Co Ltd エレクトロクロミツク表示装置
JPS60169818A (ja) * 1984-02-15 1985-09-03 Olympus Optical Co Ltd 内視鏡用対物レンズ

Also Published As

Publication number Publication date
DE68916451D1 (de) 1994-08-04
US4948238A (en) 1990-08-14
EP0332201B1 (de) 1994-06-29
EP0332201A3 (de) 1991-07-17
EP0332201A2 (de) 1989-09-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee