JP2015529015A - SiCエピタキシャル膜を有するSiC基板 - Google Patents
SiCエピタキシャル膜を有するSiC基板 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 122
- 238000006243 chemical reaction Methods 0.000 claims abstract description 126
- 238000000034 method Methods 0.000 claims abstract description 111
- 239000007789 gas Substances 0.000 claims abstract description 108
- 230000008569 process Effects 0.000 claims abstract description 52
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 35
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 30
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 21
- 239000010703 silicon Substances 0.000 claims abstract description 21
- 239000000203 mixture Substances 0.000 claims abstract description 17
- 239000013078 crystal Substances 0.000 claims description 62
- 230000007547 defect Effects 0.000 claims description 35
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 34
- 238000000407 epitaxy Methods 0.000 claims description 30
- 238000000151 deposition Methods 0.000 claims description 22
- 230000008021 deposition Effects 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 229910052786 argon Inorganic materials 0.000 claims description 17
- 229910002804 graphite Inorganic materials 0.000 claims description 13
- 239000010439 graphite Substances 0.000 claims description 13
- 239000001257 hydrogen Substances 0.000 claims description 11
- 229910052739 hydrogen Inorganic materials 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000010926 purge Methods 0.000 claims description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 238000011068 loading method Methods 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 7
- 239000004215 Carbon black (E152) Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 6
- 239000002019 doping agent Substances 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 6
- 229930195733 hydrocarbon Natural products 0.000 claims description 6
- 150000002430 hydrocarbons Chemical class 0.000 claims description 6
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims description 5
- 239000002296 pyrolytic carbon Substances 0.000 claims description 5
- 229910003468 tantalcarbide Inorganic materials 0.000 claims description 5
- 238000005137 deposition process Methods 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 238000012360 testing method Methods 0.000 claims description 4
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- 230000000977 initiatory effect Effects 0.000 claims description 2
- 238000002360 preparation method Methods 0.000 abstract description 5
- 229910010271 silicon carbide Inorganic materials 0.000 description 147
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 101
- 210000004027 cell Anatomy 0.000 description 100
- 238000005229 chemical vapour deposition Methods 0.000 description 54
- 235000012431 wafers Nutrition 0.000 description 53
- 239000000463 material Substances 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 11
- 238000012545 processing Methods 0.000 description 10
- 239000002243 precursor Substances 0.000 description 9
- 238000009826 distribution Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 3
- 239000007833 carbon precursor Substances 0.000 description 3
- 230000003750 conditioning effect Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 239000012686 silicon precursor Substances 0.000 description 3
- 230000000153 supplemental effect Effects 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 241000282461 Canis lupus Species 0.000 description 1
- 239000005046 Chlorosilane Substances 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 241000321453 Paranthias colonus Species 0.000 description 1
- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical compound [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical class [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 241000656145 Thyrsites atun Species 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000004630 atomic force microscopy Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 210000002421 cell wall Anatomy 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical class Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000011217 control strategy Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000002356 laser light scattering Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- 229940095676 wafer product Drugs 0.000 description 1
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- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
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- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45502—Flow conditions in reaction chamber
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- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
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Abstract
Description
本出願は、「SiC SUBSTRATE WITH SiC EPITAXIAL FILM」と題する2013年3月15日に出願された米国特許仮出願第61/798,819号の利益及びその出願に対する優先権を主張し、全開示が参照することにより本明細書に組み込まれる。
本発明は、炭化ケイ素基板の作製に関し、より具体的には、その上に成長されたエピタキシャル膜を有する炭化ケイ素基板に関する。
SiC基板及びエピタキシーの進展は、装置操作及び製造歩留まりに影響を与える欠陥の集中を減少させるために必要とされている。現在、SiCのCVDエピタキシー中に基板の表面上に形成された欠陥は、SiC基板上の半導体装置の操作及び歩留まりに影響を与える最も影響のある欠陥である。具体的には、低オン抵抗を有する大電流(>50A)を扱うために必要とされるSiC電力装置は、片面7mmを超える比較的大きいダイのサイズを使用して作製される。これらの装置の良好な製造歩留まりを達成するために、CVDエピタキシー由来の欠陥を更に減少させる方法が開発される必要がある。これらの問題の解決策は、平坦であり、均一の厚さ及び電気特性である、膜の繰り返し可能かつ一貫した堆積を生成することもできなければならず、これらのパラメータは、高い装置製造歩留まりと更に合致するようにする。
76mmの直径の5個の基板を処理することができる暖壁CVDシステムをエピタキシャル成長のために使用した。
運転ID/ウェハID:1241_AV1006−09
成長温度:1585℃
圧力:12.4kPa(124mbar)
全水素流量:72.4slpm
膜厚:8.1%のウェハ範囲内で5.53μm
成長温度:1585℃
圧力:12.4kPa(124mbar)
全H2流量:72.4slpm
ドーピング:15%のウェハ範囲内で5.5×1015/cm3
欠陥密度:0.4cm−2
RMS粗度0.61nm
100mmの直径の10個の基板を処理することができる暖壁CVDシステムをエピタキシャル成長のために使用した。
運転ID/ウェハID:A0971_AN2152−16
成長温度:1530℃
圧力:20kPa(200mbar)
全H2流量:126slpm
膜厚:6.4%のウェハ範囲内で7μm
膜ドーピング:15.7%のウェハ範囲内で5.7×1015/cm3
欠陥密度:0.83cm−2
RMS粗度0.30nm
Claims (15)
- 単結晶4H−SiC基板上にエピタキシャルSiC膜を備える4H−SiCエピウェハを製造する方法であって、前記方法が、
a.暖壁CVDシステムの反応セル内のサセプタ上に前記単結晶4H−SiC基板を装填することと、
b.前記反応セル内の前記サセプタの温度を制御することによって前記システムを1500℃〜1620℃の範囲まで加熱することと、
c.製造運転を実行して、前記4H−SiCエピウェハを生成することであって、前記製造運転が、全ガス速度が120〜250cm/秒の範囲であるように、前記単結晶4H−SiC基板の表面に平行にガス流を供給することと、10kPa〜15kPa(100〜150mbar)の範囲まで前記反応セルの内側の圧力を制御することと、を含み、前記ガス流が、前記単結晶4H−SiC基板上に前記エピタキシャルSiC膜を生成するために水素ガスとケイ素ガスと炭素ガスとの混合物を含む、生成することと、を含む、方法。 - 25℃/cm〜80℃/cmの範囲で前記エピウェハの表面から前記反応セルの天井まで温度勾配を確立することを更に含む、請求項1に記載の方法。
- a.前記4H−SiCエピウェハの性能測定基準を測定することと、
b.前記4H−SiCエピウェハの前記測定された性能測定基準が許容閾値を下回るとき、前記使用された反応セルを除去することと、を更に含む、請求項1又は2に記載の方法。 - 工程1(a)よりも前記反応セルの前処理が先行し、前記前処理が、
a.前記反応セル内の前記サセプタ上に犠牲基板を装填することと、
b.前記反応セルを封止及び排気することと、
c.不活性ガス及び水素ガスを使用して前記反応セルをパージすることと、
d.1%〜10%の炭化水素ガスと混合された水素ガスを流しながら、1400℃〜1700℃の範囲の温度で前記反応セルをベークすることと、
e.前記反応セルの前記側壁及び天井にSiC膜を堆積させるように、CVD堆積プロセスを実施することと、
f.前記反応セルから前記犠牲基板を除去することと、を含む、請求項1〜3のいずれか一項に記載の方法。 - 工程1(c)が、
a.前記暖壁CVDシステムの前記反応セル内の前記サセプタ上に前記単結晶4H−SiC基板を配置することと、
b.前記反応セルを排気し、その後、アルゴンで前記反応セルをパージすることと、
c.前記アルゴン流を終了させ、前記反応セルへの水素ガス流を開始することと、
d.25℃/cm〜80℃/cmの範囲で前記エピウェハの前記表面から前記天井まで前記温度勾配を確立することと、
e.120〜250cm/秒の全ガス速度で水素ガスとケイ素ガスと炭素ガスとのガス混合物を前記エピウェハの前記表面に平行に流すことと、
f.前記単結晶4H−SiC基板上に前記エピタキシャルSiC膜を生成するために、前記プロセス条件を維持して前記単結晶4H−SiC基板上に合計3〜120μmの膜の堆積を達成することと、
g.300℃未満の温度まで前記システムを冷却することと、
h.前記単結晶4H−SiC基板を除去することと、を含む、請求項1〜4のいずれか一項に記載の方法。 - 前記単結晶4H−SiC基板の性能を試験することを更に含む、請求項1〜5のいずれか一項に記載の方法。
- 工程5(f)において、前記ガス流が、ドーピングガスを更に含む、請求項5に記載の方法。
- 工程5(f)の前にエッチングガスを前記反応セルに流して、前記単結晶4H−SiC基板をエッチングすることを更に含む、請求項5に記載の方法。
- 前記エッチングガスが、ハロゲンガス及び水素を含む、請求項8に記載の方法。
- 前記単結晶4H−SiC基板が、100〜200mmの範囲の直径を有し、かつ少なくとも1×1018/cm3の窒素濃度を有する研磨された4H−SiCウェハを備える、請求項1〜9のいずれか一項に記載の方法。
- 前記エピタキシャルSiC膜が、前記単結晶4H−SiC基板の露出されたケイ素表面上に堆積する、請求項1〜10のいずれか一項に記載の方法。
- 前記エピタキシャルSiC膜が、前記単結晶4H−SiC基板の露出された炭素表面上に堆積する、請求項1〜10のいずれか一項に記載の方法。
- 工程1(a)において、複数の単結晶4H−SiC基板が前記反応セル内に配置される、請求項1〜12のいずれか一項に記載の方法。
- 前記反応セルが、黒鉛反応セルを備え、CVDエピタキシーに使用するために前記セルを組み立てる前に、熱分解炭素膜又は炭化タンタル膜で前記反応セルの黒鉛成分をコーティングすることを更に含む、請求項1〜13のいずれか一項に記載の方法。
- 請求項1〜14のいずれか一項に記載の方法によって生成されたエピタキシャルSiC膜を有する単結晶4H−SiC基板であって、
a.前記SiCエピタキシャル膜のウェハ内全厚変動が、2〜12%(境界値も含む)であり、
b.前記エピタキシャルSiC膜のウェハ内ドーパント濃度が、5〜40%(境界値も含む)であり、
c.前記エピタキシャルSiC膜の上面が、0.2〜1.2nm(境界値も含む)のRMS粗さ値を有し、
d.前記エピタキシャルSiC膜上の表面欠陥の密度が、0.25〜2.0/cm2(境界値も含む)である、エピタキシャルSiC膜を有する単結晶4H−SiC基板。
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US20120280254A1 (en) * | 2009-12-14 | 2012-11-08 | Showa Denko K.K. | Sic epitaxial wafer and method for manufacturing same |
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US20140264384A1 (en) | 2014-09-18 |
JP5955463B2 (ja) | 2016-07-20 |
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US8940614B2 (en) | 2015-01-27 |
WO2014145286A1 (en) | 2014-09-18 |
CN104718601A (zh) | 2015-06-17 |
EP2837020B1 (en) | 2017-05-17 |
KR101632947B1 (ko) | 2016-07-08 |
KR20150052304A (ko) | 2015-05-13 |
CN104718601B (zh) | 2017-04-26 |
EP2837020A1 (en) | 2015-02-18 |
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