KR20080072806A - 내식성 부재 및 내식성 부재의 제조방법 - Google Patents
내식성 부재 및 내식성 부재의 제조방법 Download PDFInfo
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- KR20080072806A KR20080072806A KR1020080067621A KR20080067621A KR20080072806A KR 20080072806 A KR20080072806 A KR 20080072806A KR 1020080067621 A KR1020080067621 A KR 1020080067621A KR 20080067621 A KR20080067621 A KR 20080067621A KR 20080072806 A KR20080072806 A KR 20080072806A
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Abstract
Description
Claims (15)
- 피처리 기판을 처리하는 처리 장치에 사용되는 내식성 부재로서,기재와,그 위에 주기율표 3a족 원소 화합물을 이용하여 용사에 의해 형성되고, 막 두께 50㎛ 이상이고, 절연 파괴 내압 4kV 이상을 갖는, 상기 주기율표 3a족 원소 화합물을 포함하는 막을 구비하고,상기 주기율표 3a족 원소 화합물의 CF4와 Ar과 O2의 혼합 가스의 플라즈마에 의한 삭감량이 알루미나의 삭감량보다 작은 것을 특징으로 하는내식성 부재.
- 제 1 항에 있어서,상기 주기율표 3a족 원소 화합물을 포함하는 막은, 이 주기율표 3a족 원소 화합물에, 추가로 Al2O3를 포함하는 것을 특징으로 하는내식성 부재.
- 제 1 항에 있어서,상기 주기율표 3a족 원소 화합물을 포함하는 막은, 이트륨·알루미늄·가넷을 포함하는 것을 특징으로 하는내식성 부재.
- 제 1 항에 있어서,상기 주기율표 3a족 원소 화합물을 포함하는 막은, Y, La, Ce, Eu 및 Dy 중 어느 하나의 산화물, 또는 Y, La, Ce, Eu 및 Dy 중 어느 하나의 불화물로부터 선택되는 막인 것을 특징으로 하는내식성 부재.
- 피처리 기판을 처리하는 처리 장치에 사용되는 내식성 부재로서,기재와,그 위에 Y2O3를 이용하여 용사에 의해 형성되고, 막 두께 50㎛ 이상이고, 절연 파괴 내압 4kV 이상을 갖는, Y2O3를 포함하는 막을 구비하고,상기 주기율표 3a족 원소 화합물의 CF4와 Ar과 O2의 혼합 가스의 플라즈마에 의한 삭감량이 알루미나의 삭감량보다 작은 것을 특징으로 하는내식성 부재.
- 피처리 기판을 처리하는 처리 장치에 사용되는 내식성 부재의 제조방법으로서,기재를 준비하고, 그 위에 주기율표 3a족 원소 화합물을 이용하여 막 두께 50㎛ 이상이고, 절연 파괴 내압 4kV 이상을 갖는, 주기율표 3a족 원소 화합물을 포함하는 막을 용사에 의해 형성하고, 상기 주기율표 3a족 원소 화합물의 CF4와 Ar과 O2의 혼합 가스의 플라즈마에 의한 삭감량이 알루미나의 삭감량보다 작은 것을 특징으로 하는내식성 부재의 제조방법.
- 제 6 항에 있어서,상기 주기율표 3a족 원소 화합물을 포함하는 막은, 이트륨·알루미늄·가넷을 포함하는 것을 특징으로 하는내식성 부재의 제조방법.
- 제 6 항에 있어서,상기 주기율표 3a족 원소 화합물을 포함하는 막은, 실질적으로 Y, La, Ce, Eu 및 Dy의 산화물 또는 불화물 중 어느 하나로부터 선택되는 막인 것을 특징으로 하는내식성 부재의 제조방법.
- 피처리 기판을 처리하는 처리 장치에 사용되는 내식성 부재의 제조방법으로서,기재를 준비하고, 그 위에 Y2O3를 이용하여 막 두께 50㎛ 이상이고, 절연 파괴 내압 4kV 이상을 갖는, 상기 Y2O3의 막을 용사에 의해 형성하고, 이 Y2O3의 막의 CF4와 Ar과 O2의 혼합 가스의 플라즈마에 의한 삭감량이 알루미나의 삭감량보다 작은 것을 특징으로 하는내식성 부재의 제조방법.
- 제 1 항 및 제 3 항 내지 제 5 항 중 어느 한 항에 있어서,상기 기재는, 석영, 세라믹, 금속, 금속 합금, 경질 플라스틱 및 표면이 양극 산화 처리된 알루미늄 중 어느 하나로 구성되어 있는 것을 특징으로 하는내식성 부재.
- 제 6 항 내지 제 9 항 중 어느 한 항에 있어서,상기 기재는, 석영, 세라믹, 금속, 금속 합금, 경질 플라스틱 및 표면이 양극 산화 처리된 알루미늄 중 어느 하나로 구성되어 있는 것을 특징으로 하는내식성 부재의 제조방법.
- 제 3 항에 있어서,상기 이트륨·알루미늄·가넷을 포함하는 막은, 비정질인 것을 특징으로 하는내식성 부재.
- 제 7 항에 있어서,상기 이트륨·알루미늄·가넷을 포함하는 막은, 비정질인 것을 특징으로 하는내식성 부재의 제조방법.
- 제 1 항 및 제 3 항 내지 제 5 항 중 어느 한 항에 있어서,상기 처리 장치는, 플라즈마 처리 장치, CVD 처리 장치 또는 애싱 처리 장치인 것을 특징으로 하는내식성 부재.
- 제 1 항 및 제 3 항 내지 제 5 항 중 어느 한 항에 있어서,상기 처리 장치는, 플라즈마 에칭 처리 장치인 것을 특징으로 하는내식성 부재.
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