JP2010156058A5 - - Google Patents

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JP2010156058A5
JP2010156058A5 JP2010062302A JP2010062302A JP2010156058A5 JP 2010156058 A5 JP2010156058 A5 JP 2010156058A5 JP 2010062302 A JP2010062302 A JP 2010062302A JP 2010062302 A JP2010062302 A JP 2010062302A JP 2010156058 A5 JP2010156058 A5 JP 2010156058A5
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amidinate
metal
formula
vapor
compound
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JP2010062302A
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JP2010156058A (ja
JP5226717B2 (ja
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JP2010062302A 2002-11-15 2010-03-18 金属アミジナートを用いる原子層の析出 Expired - Lifetime JP5226717B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US42697502P 2002-11-15 2002-11-15
US60/426,975 2002-11-15
US46336503P 2003-04-16 2003-04-16
US60/463,365 2003-04-16

Related Parent Applications (1)

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JP2004570408A Division JP4988159B2 (ja) 2002-11-15 2003-11-14 金属アミジナートを用いる原子層の析出

Related Child Applications (1)

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JP2011137554A Division JP5714989B2 (ja) 2002-11-15 2011-06-21 金属アミジナートを用いる原子層の析出

Publications (3)

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JP2010156058A JP2010156058A (ja) 2010-07-15
JP2010156058A5 true JP2010156058A5 (OSRAM) 2010-12-24
JP5226717B2 JP5226717B2 (ja) 2013-07-03

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Application Number Title Priority Date Filing Date
JP2004570408A Expired - Lifetime JP4988159B2 (ja) 2002-11-15 2003-11-14 金属アミジナートを用いる原子層の析出
JP2010062302A Expired - Lifetime JP5226717B2 (ja) 2002-11-15 2010-03-18 金属アミジナートを用いる原子層の析出
JP2011137554A Expired - Lifetime JP5714989B2 (ja) 2002-11-15 2011-06-21 金属アミジナートを用いる原子層の析出
JP2012033846A Expired - Lifetime JP5814155B2 (ja) 2002-11-15 2012-02-20 金属アミジナートを用いる原子層の析出
JP2015080137A Pending JP2015165050A (ja) 2002-11-15 2015-04-09 金属アミジナートを用いる原子層の析出
JP2016229244A Pending JP2017122273A (ja) 2002-11-15 2016-11-25 金属アミジナートを用いる原子層の析出

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JP2004570408A Expired - Lifetime JP4988159B2 (ja) 2002-11-15 2003-11-14 金属アミジナートを用いる原子層の析出

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JP2011137554A Expired - Lifetime JP5714989B2 (ja) 2002-11-15 2011-06-21 金属アミジナートを用いる原子層の析出
JP2012033846A Expired - Lifetime JP5814155B2 (ja) 2002-11-15 2012-02-20 金属アミジナートを用いる原子層の析出
JP2015080137A Pending JP2015165050A (ja) 2002-11-15 2015-04-09 金属アミジナートを用いる原子層の析出
JP2016229244A Pending JP2017122273A (ja) 2002-11-15 2016-11-25 金属アミジナートを用いる原子層の析出

Country Status (9)

Country Link
US (3) US7557229B2 (OSRAM)
EP (2) EP1563117B1 (OSRAM)
JP (6) JP4988159B2 (OSRAM)
KR (8) KR102220703B1 (OSRAM)
CN (3) CN102312214B (OSRAM)
AT (1) ATE454483T1 (OSRAM)
AU (1) AU2003290956A1 (OSRAM)
DE (1) DE60330896D1 (OSRAM)
WO (1) WO2004046417A2 (OSRAM)

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