JP6689294B2 - 金誘電体接合部の信頼性を向上させたディスクドライブヘッドサスペンション構造 - Google Patents
金誘電体接合部の信頼性を向上させたディスクドライブヘッドサスペンション構造 Download PDFInfo
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- JP6689294B2 JP6689294B2 JP2017565147A JP2017565147A JP6689294B2 JP 6689294 B2 JP6689294 B2 JP 6689294B2 JP 2017565147 A JP2017565147 A JP 2017565147A JP 2017565147 A JP2017565147 A JP 2017565147A JP 6689294 B2 JP6689294 B2 JP 6689294B2
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- Prior art keywords
- layer
- dielectric layer
- dielectric
- seed
- gold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000725 suspension Substances 0.000 title description 13
- 239000004020 conductor Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 230000009972 noncorrosive effect Effects 0.000 claims description 10
- 238000005260 corrosion Methods 0.000 claims description 8
- 230000007797 corrosion Effects 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 8
- 229910052737 gold Inorganic materials 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
- G11B5/486—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives with provision for mounting or arranging electrical conducting means or circuits on or along the arm assembly
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49025—Making disc drive
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Description
本願は、2015年6月30日に出願された「金誘電体接合部の信頼性を向上させたディスクドライブヘッドサスペンション構造」という発明の名称の米国仮特許出願第62/186,721号の優先権を主張し、あらゆる目的でその全体が言及によって本明細書に組み込まれる。
Claims (10)
- エッジ部を備えた誘電体層と、
導体層と、
前記誘電体層の前記エッジ部を越えて延びるストリップを有する、前記誘電体層と前記導体層との間のシード層と、
前記シード層の前記ストリップ上に延び、前記誘電体層の前記エッジ部と接触する、前記導体層の前記シード層側上の非腐食層と、を含む部分を備えた装置。 - 前記部分は、前記シード層と反対の前記誘電体層の側上にベース層をさらに含む、請求項1に記載の装置。
- 前記部分を含む端子パッドを有する、請求項2に記載の装置。
- 前記部分を含む端子パッドを有する、請求項1に記載の装置。
- 前記部分を含むフライングリードを有する、請求項2に記載の装置。
- 前記部分を含むフライングリードを有する、請求項1に記載の装置。
- 装置の製造方法であって、
シード層によって分離された導体層と誘電体層とを含み、前記誘電体層がエッジ部を備えた構造を準備するステップと、
前記エッジ部に隣接する前記誘電体層の一部を除去して、前記誘電体層の前記エッジ部から延びる前記シード層のストリップを露出させるステップと、
前記導体層の前記シード層側に、及び前記シード層の前記ストリップ上に、前記誘電体層の前記エッジ部と接触する非腐食層を塗布するステップと、を含む方法。 - 前記誘電体層の一部を除去することは、前記誘電体層をエッチングすることを含む、請求項7に記載の方法。
- 非腐食層を塗布することは、前記非腐食層をめっきすることを含む、請求項8に記載の方法。
- 非腐食層を塗布することは、前記非腐食層をめっきすることを含む、請求項7に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562186721P | 2015-06-30 | 2015-06-30 | |
US62/186,721 | 2015-06-30 | ||
PCT/US2016/038677 WO2017003782A1 (en) | 2015-06-30 | 2016-06-22 | Disk drive head suspension structures having improved gold-dielectric joint reliability |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2018519615A JP2018519615A (ja) | 2018-07-19 |
JP2018519615A5 JP2018519615A5 (ja) | 2019-07-25 |
JP6689294B2 true JP6689294B2 (ja) | 2020-04-28 |
Family
ID=57609428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017565147A Active JP6689294B2 (ja) | 2015-06-30 | 2016-06-22 | 金誘電体接合部の信頼性を向上させたディスクドライブヘッドサスペンション構造 |
Country Status (4)
Country | Link |
---|---|
US (4) | US9734852B2 (ja) |
JP (1) | JP6689294B2 (ja) |
CN (1) | CN107735834B (ja) |
WO (1) | WO2017003782A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107735834B (zh) * | 2015-06-30 | 2019-11-19 | 哈钦森技术股份有限公司 | 具有改进的可靠性的盘驱动器头部悬架结构 |
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US9296188B1 (en) | 2015-02-17 | 2016-03-29 | Hutchinson Technology Incorporated | Partial curing of a microactuator mounting adhesive in a disk drive suspension |
CN107735834B (zh) * | 2015-06-30 | 2019-11-19 | 哈钦森技术股份有限公司 | 具有改进的可靠性的盘驱动器头部悬架结构 |
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2016
- 2016-06-22 CN CN201680038786.3A patent/CN107735834B/zh active Active
- 2016-06-22 WO PCT/US2016/038677 patent/WO2017003782A1/en active Application Filing
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US20180012621A1 (en) | 2018-01-11 |
US10290313B2 (en) | 2019-05-14 |
US20170004854A1 (en) | 2017-01-05 |
WO2017003782A1 (en) | 2017-01-05 |
US20180286438A1 (en) | 2018-10-04 |
US9984708B2 (en) | 2018-05-29 |
CN107735834B (zh) | 2019-11-19 |
JP2018519615A (ja) | 2018-07-19 |
US9734852B2 (en) | 2017-08-15 |
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US10748566B2 (en) | 2020-08-18 |
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