WO2009075233A1 - アルカリ現像性を有する硬化性組成物およびそれを用いた絶縁性薄膜および薄膜トランジスタ - Google Patents

アルカリ現像性を有する硬化性組成物およびそれを用いた絶縁性薄膜および薄膜トランジスタ Download PDF

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Publication number
WO2009075233A1
WO2009075233A1 PCT/JP2008/072181 JP2008072181W WO2009075233A1 WO 2009075233 A1 WO2009075233 A1 WO 2009075233A1 JP 2008072181 W JP2008072181 W JP 2008072181W WO 2009075233 A1 WO2009075233 A1 WO 2009075233A1
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WIPO (PCT)
Prior art keywords
thin film
curable composition
polysiloxane compound
alkali
film transistor
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PCT/JP2008/072181
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English (en)
French (fr)
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Masahito Ide
Takao Manabe
Makoto Seino
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Kaneka Corporation
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Application filed by Kaneka Corporation filed Critical Kaneka Corporation
Priority to CN2008801200544A priority Critical patent/CN101896537B/zh
Priority to EP08859663.0A priority patent/EP2236543B1/en
Priority to KR1020107013798A priority patent/KR101800015B1/ko
Priority to JP2009545399A priority patent/JP5491197B2/ja
Priority to US12/746,891 priority patent/US9464172B2/en
Publication of WO2009075233A1 publication Critical patent/WO2009075233A1/ja

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    • C08G77/04—Polysiloxanes
    • C08G77/38—Polysiloxanes modified by chemical after-treatment
    • C08G77/382—Polysiloxanes modified by chemical after-treatment containing atoms other than carbon, hydrogen, oxygen or silicon
    • C08G77/388—Polysiloxanes modified by chemical after-treatment containing atoms other than carbon, hydrogen, oxygen or silicon containing nitrogen
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    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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Abstract

　本発明の目的は、アルカリ水溶液での現像性を有し、かつ耐熱透明性、絶縁性に優れた硬化物、薄膜を与える、ポリシロキサン系化合物、その硬化性組成物及びそれを用いたパッシベーション膜またはゲート絶縁膜を有する薄膜トランジスタを提供することであり、本発明は、一分子中に光重合性官能基を少なくとも１個有し、かつ、イソシアヌル酸骨格構造と、フェノール性水酸基と、カルボキシル基とからなる群から選ばれる少なくとも一種を同一分子内に有するポリシロキサン系化合物、当該ポリシロキサン系化合物を含有する硬化性組成物、その硬化物に関する。
PCT/JP2008/072181 2007-12-10 2008-12-05 アルカリ現像性を有する硬化性組成物およびそれを用いた絶縁性薄膜および薄膜トランジスタ WO2009075233A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN2008801200544A CN101896537B (zh) 2007-12-10 2008-12-05 具有碱显影性的固化性组合物、使用该组合物的绝缘性薄膜以及薄膜晶体管
EP08859663.0A EP2236543B1 (en) 2007-12-10 2008-12-05 Polysiloxane compound, alkali-developable curable composition, insulating thin film using the same, and thin film transistor
KR1020107013798A KR101800015B1 (ko) 2007-12-10 2008-12-05 알칼리 현상성을 갖는 경화성 조성물 및 그것을 사용한 절연성 박막 및 박막 트랜지스터
JP2009545399A JP5491197B2 (ja) 2007-12-10 2008-12-05 アルカリ現像性を有する硬化性組成物およびそれを用いた絶縁性薄膜および薄膜トランジスタ
US12/746,891 US9464172B2 (en) 2007-12-10 2008-12-05 Alkali-developable curable composition, insulating thin film using the same, and thin film transistor

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007318932 2007-12-10
JP2007-318932 2007-12-10
JP2007339485 2007-12-28
JP2007-339485 2007-12-28
JP2008177079 2008-07-07
JP2008-177079 2008-07-07

Publications (1)

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WO2009075233A1 true WO2009075233A1 (ja) 2009-06-18

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PCT/JP2008/072181 WO2009075233A1 (ja) 2007-12-10 2008-12-05 アルカリ現像性を有する硬化性組成物およびそれを用いた絶縁性薄膜および薄膜トランジスタ

Country Status (7)

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US (1) US9464172B2 (ja)
EP (1) EP2236543B1 (ja)
JP (1) JP5491197B2 (ja)
KR (1) KR101800015B1 (ja)
CN (1) CN101896537B (ja)
TW (1) TWI477537B (ja)
WO (1) WO2009075233A1 (ja)

Cited By (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009173760A (ja) * 2008-01-23 2009-08-06 Kaneka Corp 液状多面体構造ポリシロキサン系化合物および該化合物を用いた組成物と硬化物。
WO2010038767A1 (ja) * 2008-10-02 2010-04-08 株式会社カネカ 光硬化性組成物および硬化物
JP2010235862A (ja) * 2009-03-31 2010-10-21 Kaneka Corp 硬化性組成物
JP2010285519A (ja) * 2009-06-10 2010-12-24 Kaneka Corp 光硬化性組成物およびそれを用いた絶縁性薄膜および薄膜トランジスタ
JP2010285517A (ja) * 2009-06-10 2010-12-24 Kaneka Corp 光硬化性組成物およびそれを用いた絶縁性薄膜および薄膜トランジスタ
WO2011024836A1 (ja) * 2009-08-26 2011-03-03 新日鐵化学株式会社 シリコーン樹脂を含んだアルカリ可溶性樹脂及び感光性樹脂組成物、並びに感光性樹脂組成物を用いた硬化物
WO2011055784A1 (ja) * 2009-11-05 2011-05-12 日立化成工業株式会社 熱重合系開始剤システム及び接着剤組成物
WO2011073044A1 (de) * 2009-12-18 2011-06-23 Basf Se Metalloxid-feldeffekttransistoren auf mechanisch flexiblem polymersubstrat mit aus lösung prozessierbarem dielektrikum bei niedrigen temperaturen
JP2011140627A (ja) * 2009-08-26 2011-07-21 Nippon Steel Chem Co Ltd シリコーン樹脂を含んだアルカリ可溶性樹脂
JP2011141518A (ja) * 2009-08-26 2011-07-21 Nippon Steel Chem Co Ltd シリコーン樹脂を含んだ感光性樹脂組成物、及びこれを用いた硬化物
JP2011151164A (ja) * 2010-01-21 2011-08-04 Jsr Corp 感光性組成物、光学部材、光電変換素子および光電変換素子の製造方法
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