JP2007146290A5 - - Google Patents

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Publication number
JP2007146290A5
JP2007146290A5 JP2006296371A JP2006296371A JP2007146290A5 JP 2007146290 A5 JP2007146290 A5 JP 2007146290A5 JP 2006296371 A JP2006296371 A JP 2006296371A JP 2006296371 A JP2006296371 A JP 2006296371A JP 2007146290 A5 JP2007146290 A5 JP 2007146290A5
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shield
deposition
insulator
deposits
heat exchanger
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JP2006296371A
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JP2007146290A (ja
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Priority claimed from US11/553,982 external-priority patent/US9127362B2/en
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JP2006296371A 2005-10-31 2006-10-31 基板処理チャンバのためのプロセスキット及びターゲット Pending JP2007146290A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US73232405P 2005-10-31 2005-10-31
US11/553,982 US9127362B2 (en) 2005-10-31 2006-10-27 Process kit and target for substrate processing chamber

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JP2007146290A JP2007146290A (ja) 2007-06-14
JP2007146290A5 true JP2007146290A5 (enExample) 2009-12-10

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JP2006296371A Pending JP2007146290A (ja) 2005-10-31 2006-10-31 基板処理チャンバのためのプロセスキット及びターゲット

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US (3) US9127362B2 (enExample)
JP (1) JP2007146290A (enExample)
KR (2) KR101322342B1 (enExample)
CN (2) CN103147049B (enExample)
DE (1) DE102006051443A1 (enExample)
TW (1) TWI435941B (enExample)

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* Cited by examiner, † Cited by third party
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