New! View global litigation for patent families

US3679460A - Composite wear resistant material and method of making same - Google Patents

Composite wear resistant material and method of making same Download PDF

Info

Publication number
US3679460A
US3679460A US3679460DA US3679460A US 3679460 A US3679460 A US 3679460A US 3679460D A US3679460D A US 3679460DA US 3679460 A US3679460 A US 3679460A
Authority
US
Grant status
Grant
Patent type
Prior art keywords
coating
oxide
roughness
surface
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
Inventor
Edwin Durham Reid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Coatings Service Technology Corp
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00Coating starting from inorganic powder
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/02Pretreatment of the material to be coated, e.g. for coating on selected surface areas
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11Oxides
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension

Abstract

A METHOD OF FORMING A METAL OXIDE COATING UPON A WORKPIECE, WHICH COATING MAY HAVE A CLOSELY CONTROLLED SURFACE ROOUHNESS OVER A WIDE RANGE OF COATING THICKNESSES. THE METHOD CONSISTS OF APPLYING A METAL OXIDE BASE COATING BY AN ARC TORCH DEPOSITION PROCESS AND THEREAFTER APPLYING A TOP FURFACE COATING OF METAL OXIDE WITH A DETONATION GUN DEPOSITION PROCESS. A WEAR-RESISTANT COMPOSITE COATING HAVING AN ARC TORCH-APPLIED BASE PORTION WITH A ROUGHNES OF 100 A.A. TO 150 A.A. COMBINED WITH A DETONATION GUM-APPLIED TOP SURFACE COATING HAVING SURFACE ROUGHNESS OF 150 A.A. TO 450 A.A. IS ALSO DISCLOSED AS A PREFERRED TEXTILE SURFACE.

Description

BEST AVAILABLE COPY u y 1972 E. D. REID 3,679,460

COMPOSITE WEAR RESISTANT MATERIAL AND METHOD OF MAKING SAME Filed O0t. a, 1970 4 Sheets-Sheet 1 IOO- (ROUGHNESS-A. A.)

l l I l l l l l l I u l I; GRIT- .001" .002" .003" .004 .005'. .006" .007" .008 .009- 0:0

BLAST (THICKNESS) INVENTOR EDV J IN DURHAM REID July 25, 1972 Filed Oc t. a. 1970 BEST AVAILABLE COPY E. ol REID 3,679,460

COMPOSITE WEAR RESISTANT MATERIAL AND METHOD OF MAKING SAME 4 Sheets-Sheet 2 I l .OOI" .002" .003" .004." .005" .006" .00?" .008" .009" .OIO"

(THICKNESS) INVENTOR EDWIN DURHAM REID ATTORNEY July 25, 1972 Filed Oct. 8, 1970 (ROUGHNESS -A.A.)

BESTAVAJLABLE COPY E. o; REID 3,679,460

COMPOSITE WEA RESISTANT MATERIAL AND METHOD OF MAKING SAME 4 Sheets-Sheet 5 Blast l l I I l I II I II I I II I ll I I I I l em- .ool" .002 .003 -.004 .005" .006 .00? .008 .009 .0|0'

(THICKNESS) 0,

INVENTOR ATTORNEY July 25, 1972 E. D. REID BEST AVAILABLE COPY Filed Oct. 8. 1970 4 Sheets-Sheet 4 l l l l l l l l l l l J l I l,,l l,,l l.lw l l l 1 GRIT- .001 .002 .003 .004 .005 .006 .007 .008 .009 .010

BLAST (THICKNESS) iNVENTQR ATTORNEY United States Patent Int. Cl. C2311 5/10 U.S. Cl. 117-931 PF 7 Claims ABSTRACT OF THE DISCLOSURE -A method of forming a metal oxide coating upon a workpiece, which coating may have a closely controlled surface roughness over a wide range of coating thicknesses. The method consists of applying a metal oxide base coating by an arc torch deposition process and thereafter applying a top surface coating of metal oxide with a detonation gun deposition process. A wear-resistant composite coating having an arc torch-applied base portion with a roughness of 100 AA. to 150 AA. combined with a detonation gun-applied top surface coating having surface roughness of 150 AA. to 450 AA. is also disclosed as a preferred textile surface.

This application is a continuation-in-part of application Ser. No. 20,582, filed Mar. 18, 1970, and now abandoned.

This invention relates to a ceramic coated workpiece and more particularly to ceramic coated workpieces for the textile industry which have closely controlled surface roughness over a wide range of coating thicknesses.

It has heretofore been proposed to coat workpieces with ceramic metal oxide materials such as chrome oxide, aluminum oxide, and the like, for increasing the wear resistance of the workpiece when the same is contacted by a moving textile fiber. In order that the textile fiber pass over the ceramic surface without being damaged, it has been necessary to closely control the roughness of the ceramic surface.

It is often desirable that a ceramic coating have not only a specified surface roughness, but that it have this roughness with a specified coating thickness.

Since it has heretofore been found that with any given process for forming the ceramic coating the surface roughness varies as a function of the thickness of the coating, it has been extremely diflicult to meet many specifications requiring certain combinations of roughness and coating thickness, i.e., it has not been possible to control the surface roughness of a ceramic coating independently of its thickness over a substantial thickness range.

One solution to overcoming this difliculty has been to utilize a metal base coating, such as nickel or aluminum, to build up the workpiece to some intermediate thickness followed by applying an arc torch coating of ceramic material on top of the base metal to the desired roughness. This procedure is not only expensive, but also prevents the easy removal of the entire coating to expose the original workpiece, i.e., grinding or turning is necessary to remove the metal undercoat after the top coating has been removed by a grit blast operation;

One object of the invention is to provide a wear-resistant textile fiber compatible ceramic coating which can have a roughness substantially independent of its thickness over a substantial coating thickness range.

Another object is to provide a ceramic coating which is compatible with a textile fiber moving in contact therewith, which coating is also totally removable by grit blasting and without the need for grinding or turning.

3,679,460 Patented July 25, 1972 Other objects and advantages of the invention will be apparent from the following disclosure and appended claims.

In the drawings:

FIG. 1 is a diagram in the nature of a graph showing the relationship of surface roughness versus coating thickness for an aluminum oxide coating applied to a workpiece with an arc torch of the type disclosed in U.S. Pat. No. 3,016,447;

FIG. 2 is a diagram in the nature of a graph showing surface roughness of an aluminum oxide coating versus coating thickness when the same is applied to a workpiece with a detonation gun as disclosed in U.S. Pat. No. 2,714,563;

FIG. 3 is a graph showing the relationship of surface roughness versus coating thickness for a chrome oxide coating applied to a workpiece with an arc torch of the type disclosed in U.S. Pat. No. 3,016,447; and

FIG. 4 is a graph showing the relationship of surface roughness versus coating thickness for a chrome oxide coating applied to a workpiece with a detonation gun as disclosed in U.S. Pat. No. 2,714,563.

Briefly, this invention is based upon the discovery that a ceramic metal oxide coating when applied with a detonation gun will adhere tenaciously to a previously formed metal oxide coating applied to a workpiece with an arc torch.

'It has also been found that the resultant composite ceramic material can be easily removed from the workpiece in a single grit blasting operation.

The surface roughness to thickness variation of a metal oxide coating applied with a detonation gun differs substantially from the same metal oxide coating when applied with an arc torch. A combination of an arc torch-applied base coating having a certain thickness with a top coating applied by the detonation gun to the same or different thickness can be used as an effective process for achieving a desired roughness over a much wider range of coating thicknesses than could be attained by either the arc torch process or the detonation gun process utilized alone.

While the arc torch-applied base coating and the detonation gun-applied top surface coating will usually have the same chemical composition, different metal oxides may also be used if necessary to obtain a desired specification of roughness and coating thickness.

More specifically, a composite wear-resistant ceramic material having a surface compatible to textile fiber may be formed according to the invention. Such material comprises in combination with a workpiece, a metal oxide base coating on the workpiece having a surface roughness of between 70 AA. and AA. and a top coating of metal oxide on top of the base coating having a surface roughness of between 150 AA. and 450 AA. The composite material is formed with a base coating thickness of .001" to 015", the top coating provided as a thickness of .001" to .010". :Preferred metal oxide materials are aluminum oxide and chrome oxide.

The surface roughness terminology and measurements as used throughout the specification and claims are in microinches and the reference A.A. refers to the arithmetical average of the same.

In practice a workpiece, for example, is one formed of aluminum or steel, which is first chemically cleaned with a suitable degreasing solvent, such as trichloroethylene. Thereafter the workpiece surface to be coated is grit blasted with a dry, free-flowing aluminum oxide blasting grain grit, e.g., #30 to #60 mesh grain size.

The workpiece is next subjected to a continuous stream of aluminum oxide or chrome oxide material which has been electrically are heated by a high temperature arc" torch device which causes the metal oxide material to be formed into a high velocity molten stream. When the molten stream from the arc torch impinges upon the surface oftheworkpiece a coating having tenacious bond is formed thereon. V v r The amount of metal oxide deposited by the arc torch is determined by first determining the thickness of the detonation gun-applied metal oxide coating which corresponds with the surface roughness required. Thereafter the thickness of coating to be applied by the arc torch is determined by subtracting from the total thickness of coating desired, the thickness of the detonation gunapplied coating necessary to attain the required roughness.

The invention will now. be illustrated by referring to the following examples.

EXAMPLE NO. 1

It is desired to form aluminum oxide coating having a surface roughness of 150 A.A. to 250 A.A. and a thickness of .0075". As shown in FIG. 1, the roughness of a .0075" thick arc torch-applied coating would be approximately 125 A.A., which is substantially less than required.

Referring to FIG. 2, a .0075 thick detonation gunapplied coating would have a roughness of about 350 A.A., which is substantially higher than the roughness required. According to the invention, a roughness of 200 A.A. (the midpoint between the 150 A.A. and 250 A.A. required) of a detonation gun-applied coating would correspond with a coating thickness of about .003". Since the total coatingthickness in this instance is .0075", the amount of base coating to be applied with an arc torch will be about .0075" minus .003" or .0045".

EXAMPLE NO. 2

It is desired to form an aluminum oxide coating having a surface roughness of 250 A.A. to 350 A.A. and a coating thickness of .015". As shown in FIG. 1, an arc torchapplied aluminum oxide coating will not offer sufficient roughness to meet the required specification. As shown in FIG. 2, however, a detonation gun-applied aluminum J oxide coating having a surface roughness of 300 (the middle between 250 A.A. and 350 A.A.) corresponds with a coating thickness of .006". In order to meet the surface roughness and thickness specification an arc torch- ,formed base coating of aluminum oxide is applied to a thickness of .015 minus .006". The top coating of alumiemployed to provide a top coating detonation gun-de- (a) spraying" an electrically arc-lheat ed continuous stream of metal oxide material onto'the surface of the workpiece to form a base coating thereon and r thereafter, I (b) spraying by detonation gun means a pulsed highvelocity stream of molten metal'oxide particles on top of said base coating to form a top coating thereon.

. 2. The method of claim 1, wherein said metal oxide is in each instance aluminum oxide. 3. The method of claim 1, wherein said metal 7 oxide is m each instance chrome oxide.

4. A method as claimed in claim 1, wherein step (a) is continued until a base coating having a thickness of 0.001 inch to 0.015 inch is formed and thereafter step (b) is continued until said top coating has a thickness of 0.001 inch to 0.010 inch. J

5. A composite wear resistant material comprising a workpiece having on its surface a metal oxide base coating 1 between 0.001 inch and 0.015 inch thick with a surface roughness between A.A. and 150 A.A., and a top coating of a metal oxide on top of said base coating between 0.001 and 0.010 inch thick with asurface roughness of between 150 A.A. and 450 A.A. 7

6. The composite material of claim 5 wherein said base coating is aluminum oxide having a surface roughness between A.A. and A.A., and wherein said top coatingis aluminum oxide having a surface roughness of between 150 A.A. and 450 A.A.

7. The composite material as in claim 5 whereinfsaid base coating is chrome oxide having a surface roughness. of between 70 A.A. and 150 A.A., and wherein said top coating is chrome oxide having a surface roughness of a between 150 A.A. and 275 A.A.

References Cited I UNITED STATES PATENTS 3,080,134 3/1963 England et al. 117-129 X 3,091,548 5/1963 Dillon 117-429 X ALFRED L. LEAVITI, Primary Examiner A J. H. NEWSOME, Assistant Examiner US. Cl. X.R. 117-1052, 129

US3679460A 1970-10-08 1970-10-08 Composite wear resistant material and method of making same Expired - Lifetime US3679460A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US7909070 true 1970-10-08 1970-10-08

Publications (1)

Publication Number Publication Date
US3679460A true US3679460A (en) 1972-07-25

Family

ID=22148359

Family Applications (1)

Application Number Title Priority Date Filing Date
US3679460A Expired - Lifetime US3679460A (en) 1970-10-08 1970-10-08 Composite wear resistant material and method of making same

Country Status (1)

Country Link
US (1) US3679460A (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836394A (en) * 1971-07-29 1974-09-17 Alusuisse Method of manufacture of a conductor rail
US4311283A (en) * 1980-07-18 1982-01-19 Bounds William E Condiment grater
FR2577471A1 (en) * 1985-02-15 1986-08-22 Aerospatiale layered refractory wall structure and provided with such a refractory structure
EP0287023A2 (en) * 1987-04-14 1988-10-19 Castolin S.A. Process for producing a sprayed surface with a particular roughness, and its use
US20050089699A1 (en) * 2003-10-22 2005-04-28 Applied Materials, Inc. Cleaning and refurbishing chamber components having metal coatings
US20060105182A1 (en) * 2004-11-16 2006-05-18 Applied Materials, Inc. Erosion resistant textured chamber surface
US20060110620A1 (en) * 2004-11-24 2006-05-25 Applied Materials, Inc. Process chamber component with layered coating and method
US20070173059A1 (en) * 2005-11-25 2007-07-26 Applied Materials, Inc. Process kit components for titanium sputtering chamber
US20070283884A1 (en) * 2006-05-30 2007-12-13 Applied Materials, Inc. Ring assembly for substrate processing chamber
US7670436B2 (en) 2004-11-03 2010-03-02 Applied Materials, Inc. Support ring assembly
US7762114B2 (en) 2005-09-09 2010-07-27 Applied Materials, Inc. Flow-formed chamber component having a textured surface
US7942969B2 (en) 2007-05-30 2011-05-17 Applied Materials, Inc. Substrate cleaning chamber and components
US7964085B1 (en) 2002-11-25 2011-06-21 Applied Materials, Inc. Electrochemical removal of tantalum-containing materials
US7981262B2 (en) 2007-01-29 2011-07-19 Applied Materials, Inc. Process kit for substrate processing chamber
US8617672B2 (en) 2005-07-13 2013-12-31 Applied Materials, Inc. Localized surface annealing of components for substrate processing chambers
US9127362B2 (en) 2005-10-31 2015-09-08 Applied Materials, Inc. Process kit and target for substrate processing chamber

Cited By (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836394A (en) * 1971-07-29 1974-09-17 Alusuisse Method of manufacture of a conductor rail
US4311283A (en) * 1980-07-18 1982-01-19 Bounds William E Condiment grater
FR2577471A1 (en) * 1985-02-15 1986-08-22 Aerospatiale layered refractory wall structure and provided with such a refractory structure
EP0193429A1 (en) * 1985-02-15 1986-09-03 AEROSPATIALE Société Nationale Industrielle Refractory multilayer structure and wall provided with this structure
EP0287023A2 (en) * 1987-04-14 1988-10-19 Castolin S.A. Process for producing a sprayed surface with a particular roughness, and its use
EP0287023A3 (en) * 1987-04-14 1990-06-20 Castolin S.A. Process for producing a sprayed surface with a particular roughness, and its use
US9068273B2 (en) 2002-11-25 2015-06-30 Quantum Global Technologies LLC Electrochemical removal of tantalum-containing materials
US7964085B1 (en) 2002-11-25 2011-06-21 Applied Materials, Inc. Electrochemical removal of tantalum-containing materials
US20050089699A1 (en) * 2003-10-22 2005-04-28 Applied Materials, Inc. Cleaning and refurbishing chamber components having metal coatings
US7910218B2 (en) 2003-10-22 2011-03-22 Applied Materials, Inc. Cleaning and refurbishing chamber components having metal coatings
US7670436B2 (en) 2004-11-03 2010-03-02 Applied Materials, Inc. Support ring assembly
US20060105182A1 (en) * 2004-11-16 2006-05-18 Applied Materials, Inc. Erosion resistant textured chamber surface
US20060110620A1 (en) * 2004-11-24 2006-05-25 Applied Materials, Inc. Process chamber component with layered coating and method
US7579067B2 (en) 2004-11-24 2009-08-25 Applied Materials, Inc. Process chamber component with layered coating and method
WO2006073585A3 (en) * 2004-11-24 2006-09-08 Applied Materials Inc Process chamber component with layered coating and method
US20100086805A1 (en) * 2004-11-24 2010-04-08 Applied Materials, Inc. Process chamber component with layered coating and method
WO2006073585A2 (en) * 2004-11-24 2006-07-13 Applied Materials, Inc. Process chamber component with layered coating and method
CN101065510B (en) 2004-11-24 2011-04-06 应用材料股份有限公司 Process chamber component with layered coating and method
US8021743B2 (en) 2004-11-24 2011-09-20 Applied Materials, Inc. Process chamber component with layered coating and method
US8617672B2 (en) 2005-07-13 2013-12-31 Applied Materials, Inc. Localized surface annealing of components for substrate processing chambers
US9481608B2 (en) 2005-07-13 2016-11-01 Applied Materials, Inc. Surface annealing of components for substrate processing chambers
US7762114B2 (en) 2005-09-09 2010-07-27 Applied Materials, Inc. Flow-formed chamber component having a textured surface
US9127362B2 (en) 2005-10-31 2015-09-08 Applied Materials, Inc. Process kit and target for substrate processing chamber
US20070173059A1 (en) * 2005-11-25 2007-07-26 Applied Materials, Inc. Process kit components for titanium sputtering chamber
US8790499B2 (en) 2005-11-25 2014-07-29 Applied Materials, Inc. Process kit components for titanium sputtering chamber
US20070283884A1 (en) * 2006-05-30 2007-12-13 Applied Materials, Inc. Ring assembly for substrate processing chamber
US7981262B2 (en) 2007-01-29 2011-07-19 Applied Materials, Inc. Process kit for substrate processing chamber
US8980045B2 (en) 2007-05-30 2015-03-17 Applied Materials, Inc. Substrate cleaning chamber and components
US7942969B2 (en) 2007-05-30 2011-05-17 Applied Materials, Inc. Substrate cleaning chamber and components

Similar Documents

Publication Publication Date Title
US3419414A (en) Wear-resistant repellent-finished article and process of making the same
US3378392A (en) High temperature flame spray powder and process
US3911891A (en) Coating for metal surfaces and method for application
US3787229A (en) Low-friction, wear-resistant material
US4704776A (en) Press roll for paper machines
US4552784A (en) Method of coating a substrate with a rapidly solidified metal
Mohanty et al. Sliding wear behavior of thermally sprayed 75/25 Cr3C2/NiCr wear resistant coatings
US3754976A (en) Peen plating
US3475161A (en) Method of forming cemented carbide coatings on metal surfaces by employing volatile,organic liquid solvents and organic binders
US5380564A (en) High pressure water jet method of blasting low density metallic surfaces
US6186508B1 (en) Wear resistant coating for brush seal applications
US4578290A (en) Method of and apparatus for coating
US6432487B1 (en) Dense vertically cracked thermal barrier coating process to facilitate post-coat surface finishing
US4612256A (en) Wear-resistant coating
US3295198A (en) Process of adhering stainless steel to aluminum and products produced thereby
US4787837A (en) Wear-resistant ceramic, cermet or metallic embossing surfaces, methods for producing same, methods of embossing articles by same and novel embossed articles
US4449714A (en) Turbine engine seal and method for repair thereof
US3934379A (en) Removal of built up layers of organic coatings
US3261673A (en) Oxide coated articles with metal undercoat
US5857950A (en) Fluid metering roll
US4526839A (en) Process for thermally spraying porous metal coatings on substrates
US2927043A (en) Aluminum coating processes and compositions
US4751113A (en) Method and means of applying an antifouling coating on marine hulls
US2588422A (en) Application of spray metal linings for aluminum engine cylinders of or for reciprocating engines
US5080056A (en) Thermally sprayed aluminum-bronze coatings on aluminum engine bores

Legal Events

Date Code Title Description
AS Assignment

Owner name: MORGAN GUARANTY TRUST COMPANY OF NEW YORK, AND MOR

Free format text: MORTGAGE;ASSIGNORS:UNION CARBIDE CORPORATION, A CORP.,;STP CORPORATION, A CORP. OF DE.,;UNION CARBIDE AGRICULTURAL PRODUCTS CO., INC., A CORP. OF PA.,;AND OTHERS;REEL/FRAME:004547/0001

Effective date: 19860106

AS Assignment

Owner name: UNION CARBIDE CORPORATION,

Free format text: RELEASED BY SECURED PARTY;ASSIGNOR:MORGAN BANK (DELAWARE) AS COLLATERAL AGENT;REEL/FRAME:004665/0131

Effective date: 19860925

AS Assignment

Owner name: UNION CARBIDE COATINGS SERVICE TECHNOLOGY CORPORAT

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:UNION CARBIDE COATINGS SERVICE CORPORATION;REEL/FRAME:005240/0883

Effective date: 19900102