JP2001200363A5 - - Google Patents

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Publication number
JP2001200363A5
JP2001200363A5 JP2000368569A JP2000368569A JP2001200363A5 JP 2001200363 A5 JP2001200363 A5 JP 2001200363A5 JP 2000368569 A JP2000368569 A JP 2000368569A JP 2000368569 A JP2000368569 A JP 2000368569A JP 2001200363 A5 JP2001200363 A5 JP 2001200363A5
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dielectric
layer
monolayer
metal
forming
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JP2000368569A
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JP2001200363A (ja
JP5079183B2 (ja
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Priority claimed from US09/452,844 external-priority patent/US6780704B1/en
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JP2000368569A 1999-12-03 2000-12-04 テクスチャ加工されたキャパシタ電極上のコンフォーマル薄膜 Expired - Fee Related JP5079183B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/452,844 US6780704B1 (en) 1999-12-03 1999-12-03 Conformal thin films over textured capacitor electrodes
US09/452844 1999-12-03

Publications (3)

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JP2001200363A JP2001200363A (ja) 2001-07-24
JP2001200363A5 true JP2001200363A5 (enExample) 2008-01-24
JP5079183B2 JP5079183B2 (ja) 2012-11-21

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JP2000368569A Expired - Fee Related JP5079183B2 (ja) 1999-12-03 2000-12-04 テクスチャ加工されたキャパシタ電極上のコンフォーマル薄膜

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US (3) US6780704B1 (enExample)
JP (1) JP5079183B2 (enExample)
KR (1) KR100737304B1 (enExample)
TW (1) TW486771B (enExample)

Families Citing this family (624)

* Cited by examiner, † Cited by third party
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