TWI569418B - 具輔助閘極之非揮發性記憶胞結構 - Google Patents

具輔助閘極之非揮發性記憶胞結構 Download PDF

Info

Publication number
TWI569418B
TWI569418B TW104113730A TW104113730A TWI569418B TW I569418 B TWI569418 B TW I569418B TW 104113730 A TW104113730 A TW 104113730A TW 104113730 A TW104113730 A TW 104113730A TW I569418 B TWI569418 B TW I569418B
Authority
TW
Taiwan
Prior art keywords
region
gate
floating gate
transistor
oxide defining
Prior art date
Application number
TW104113730A
Other languages
English (en)
Other versions
TW201637177A (zh
Inventor
曹沐瀠
陳緯仁
Original Assignee
力旺電子股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 力旺電子股份有限公司 filed Critical 力旺電子股份有限公司
Publication of TW201637177A publication Critical patent/TW201637177A/zh
Application granted granted Critical
Publication of TWI569418B publication Critical patent/TWI569418B/zh

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C5/00—Details of stores covered by group G11C11/00
    • G11C5/06—Arrangements for interconnecting storage elements electrically, e.g. by wiring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C16/00—Erasable programmable read-only memories
    • G11C16/02—Erasable programmable read-only memories electrically programmable
    • G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C16/00—Erasable programmable read-only memories
    • G11C16/02—Erasable programmable read-only memories electrically programmable
    • G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
    • G11C16/0425—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a merged floating gate and select transistor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C16/00—Erasable programmable read-only memories
    • G11C16/02—Erasable programmable read-only memories electrically programmable
    • G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
    • G11C16/0433—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a single floating gate transistor and one or more separate select transistors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C16/00—Erasable programmable read-only memories
    • G11C16/02—Erasable programmable read-only memories electrically programmable
    • G11C16/06—Auxiliary circuits, e.g. for writing into memory
    • G11C16/10—Programming or data input circuits
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C16/00—Erasable programmable read-only memories
    • G11C16/02—Erasable programmable read-only memories electrically programmable
    • G11C16/06—Auxiliary circuits, e.g. for writing into memory
    • G11C16/10—Programming or data input circuits
    • G11C16/14—Circuits for erasing electrically, e.g. erase voltage switching circuits
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C16/00—Erasable programmable read-only memories
    • G11C16/02—Erasable programmable read-only memories electrically programmable
    • G11C16/06—Auxiliary circuits, e.g. for writing into memory
    • G11C16/26—Sensing or reading circuits; Data output circuits
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
    • G11C17/14—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
    • G11C17/16—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM using electrically-fusible links
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
    • G11C17/14—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
    • G11C17/18—Auxiliary circuits, e.g. for writing into memory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
    • H01L23/5252—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising anti-fuses, i.e. connections having their state changed from non-conductive to conductive
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/528—Geometry or layout of the interconnection structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
    • H01L29/0642—Isolation within the component, i.e. internal isolation
    • H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42324—Gate electrodes for transistors with a floating gate
    • H01L29/42328—Gate electrodes for transistors with a floating gate with at least one additional gate other than the floating gate and the control gate, e.g. program gate, erase gate or select gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42364—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity
    • H01L29/42368—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity the thickness being non-uniform
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
    • H01L29/4916—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
    • H01L29/51—Insulating materials associated therewith
    • H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
    • H01L29/512—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being parallel to the channel plane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7816—Lateral DMOS transistors, i.e. LDMOS transistors
    • H01L29/7817—Lateral DMOS transistors, i.e. LDMOS transistors structurally associated with at least one other device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
    • H01L29/7835—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with asymmetrical source and drain regions, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices
    • H10B20/20—Programmable ROM [PROM] devices comprising field-effect components
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices
    • H10B20/20—Programmable ROM [PROM] devices comprising field-effect components
    • H10B20/25—One-time programmable ROM [OTPROM] devices, e.g. using electrically-fusible links
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
    • H10B41/35—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region with a cell select transistor, e.g. NAND
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
    • H10B41/41—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region of a memory region comprising a cell select transistor, e.g. NAND
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/60—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates the control gate being a doped region, e.g. single-poly memory cell
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B43/00—EEPROM devices comprising charge-trapping gate insulators
    • H10B43/40—EEPROM devices comprising charge-trapping gate insulators characterised by the peripheral circuit region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/92—Capacitors having potential barriers
    • H01L29/93—Variable capacitance diodes, e.g. varactors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
    • H01L2924/143—Digital devices
    • H01L2924/1434—Memory

Landscapes

  • Microelectronics & Electronic Packaging (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Geometry (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
  • Read Only Memory (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)

Description

具輔助閘極之非揮發性記憶胞結構
本發明概括而言係關於非揮發性記憶體(NVM)元件領域，特別是一種具有輔助閘極的單層多晶矽非揮發性記憶胞結構。
非揮發性記憶體(NVM)元件，例如廣泛使用在電子裝置中儲存資料的電子抹除式可程式化唯讀記憶體(EEPROM)和快閃記憶體(flash memory)，具有可電子抹除資料和再程式化特性，而且在關閉電源的情況下，資料仍可留存。非揮發性記憶體元件大致上分成多次程式化記憶體(MTP)和單次程式化記憶體(OTP)。多次程式化記憶體(MTP)可多次讀取和程式化，例如電子抹除式可程式化唯讀記憶體和快閃記憶體被設計具有相關的電子電路，可支援不同的操作，例如程式化，抹除和讀取。單次程式化記憶體(OTP)具有程式化和讀取功能的電子電路，但並不具備抹除功能的電子電路。
單層多晶矽非揮發性記憶體結構因為可減少額外製程步驟而被提出來。單層多晶矽非揮發性記憶體用單層多晶矽形成儲存電荷的浮動閘極，可和一般互補式金氧半導體場效電晶體(CMOS)製程相容，因此可應用在嵌入式記憶體、混和模式電路的嵌入式非揮發性記憶體，以及微控制器(例如系統單晶片，SOC)等領域。
目前已知可用熱電子注入(又稱為通道熱電子CHE)技術來程式化記憶體。程式化和驗證運算時的漏電流，隨著核心元件尺寸縮小而惡化。再者，隨著快閃記憶體元件微縮及記憶胞的通道長度縮小，相鄰元件引起的程式化干 擾也會增加。當程式化時，干擾會發生在共用同一字元線的相鄰記憶胞之間。另外，隨著該記憶胞單位的尺寸和穿隧氧化層持續微縮，保存資料的遺失和浮動閘極的電荷漏洩問題逐漸嚴重。因此，業界對於改善非揮發性記憶體的資料保存能力或耐久度有強烈的需求。
本發明的目的為提供一具有輔助閘極的改良單層多晶矽非揮發性記憶胞結構，可達到較佳耐久度、較大開/關容許範圍、減少程式化電流(可減少約百分之20)、降低程式化電壓，和減少程式化干擾。
根據本發明一實施例，非揮發性記憶胞包括一半導體基底，其上設置有N型井區；N型井區內有一第一氧化物定義區和一第二氧化物定義區；在第一氧化物定義區上設有一PMOS選擇電晶體；一PMOS浮動閘極電晶體也設在第一氧化物定義區上，且與PMOS選擇電晶體串聯，其中PMOS浮動閘極電晶體的浮動閘極覆蓋在第一氧化物定義區上；一輔助閘極，自浮動閘極一末端延伸凸出至第二氧化物定義區的一邊，因而使輔助閘極與第二氧化物定義區及N型井區電容耦合。選擇電晶體、浮動閘極電晶體以及輔助閘極均同樣位於N型井區。
無庸置疑的，該領域的技術人士讀完接下來本發明較佳實施例的詳細描述與圖式後，均可了解本發明的目的。
1‧‧‧非揮發性記憶胞
100‧‧‧半導體基底
110‧‧‧N型井區
120‧‧‧P型井區
200‧‧‧第一氧化物定義(OD)區
210‧‧‧第二氧化物定義(OD)區
220‧‧‧第三氧化物定義(OD)區
230‧‧‧隔離區
10‧‧‧選擇電晶體
20‧‧‧浮動閘極電晶體
12‧‧‧P+源極摻雜區
14‧‧‧共用P+摻雜區
32‧‧‧選擇閘極通道區
2‧‧‧選擇閘極
2a‧‧‧(選擇)閘極介電層
4‧‧‧浮動閘極
16‧‧‧汲極摻雜區
34‧‧‧浮動閘極通道區
4a‧‧‧(浮動)閘極介電層
6‧‧‧輔助閘極
6a‧‧‧水平區段
6b‧‧‧垂直區段
8‧‧‧抹除閘極
18‧‧‧N+摻雜區
19‧‧‧N+摻雜區
PW‧‧‧P型井區
NW‧‧‧N型井區
SL‧‧‧源極線
BL‧‧‧位元線
EL‧‧‧抹除線
SG‧‧‧選擇閘極
WL‧‧‧字元線
FG‧‧‧浮動閘極
AG‧‧‧輔助閘極
EG‧‧‧抹除閘極
所附圖式提供對於此實施例更深入的了解，並納入此說明書成為其中一部分。這些圖式與描述，用來說明一些實施例的原理。
第1圖是本發明一實施例俯視圖，為一具單層多晶矽非揮發性記憶胞元件。
第2圖是沿第1圖切線I-I’截取的示意性剖面圖。
第3圖是沿第1圖切線II-II’截取的示意性剖面圖。
第4圖是沿第1圖切線III-III’截取的示意性剖面圖。
第5圖和第6圖分別說明第1圖所示記憶胞的等效電路，並例示程式化(PGM)、讀取(REG)及抹除(ERS)時的操作條件。
第7圖說明由第1圖所示非揮發性記憶胞1所組成的記憶體陣列局部佈局。
須注意的是所有圖式均為示意圖，以說明和製圖方便為目的，相對尺寸及比例都經過調整。相同的符號在不同的實施例中代表相對應或類似的特徵。
藉由接下來的敘述及所提供的眾多特定細節，可充分了解本發明。然而對於此領域中的技術人員，在沒有這些特定細節下依然可實行本發明。再者，一些此領域中公知的系統配置和製程步驟並未在此詳述，因為這些應是此領域中的技術人員所熟知的。在不悖離本發明的範圍內，可做結構、邏輯和電性上的修改並應用在其他實施例上。
同樣地，實施例的圖式為示意圖，並未照實際比例繪製，為了清楚呈現而放大一些尺寸。在此公開和描述的多個實施例中若具有共通或類似的某些特徵時，為了方便圖示及描述，類似的特徵通常會以相同的標號表示。
專有名詞”氧化物定義(oxide define,OD)區”在該技術領域中普遍認為是一基底上矽質主表面的某一區域，通常為局部矽氧化(LOCOS)或淺溝渠絕緣(STI)區域以外的區域。專有名詞”氧化物定義(OD)區”也普遍可被認為是形成及操作主動電路元件例如電晶體的”主動區域”。
第1圖至第4圖是根據本發明一實施例的一單層多晶矽非揮發性記憶胞示意圖。第1圖是根據本發明一實施例的一單層多晶矽非揮發性記憶胞的佈局 平面圖。第2圖是沿著第1圖切線I-I’方向截取的示意性剖面圖。第3圖是沿著第1圖切線II-II’方向截取的示意性剖面圖。第4圖是沿著第1圖切線III-III’方向截取的示意性剖面圖。所例示的非揮發性記憶胞結構可作為多次程式化記憶體(MTP)單元。應了解的是本發明也可應用於其他記憶體元件。
如第1圖所示，非揮發性記憶胞1包含三個被區隔開但彼此緊密排列的氧化物定義(OD)區，包含有一第一氧化物定義(OD)區210，一第二氧化物定義(OD)區220，和一第三氧化物定義(OD)區230，由嵌入在一半導體基底100(例如P型摻雜矽基底P-Sub)主表面的隔離區200區隔開。根據此實施例，隔離區200可為淺溝渠絕緣(STI)區，但不僅限於此。應了解第1圖的佈局僅為示意圖。
根據本發明實施例，第一氧化物定義(OD)區210及第二氧化物定義(OD)區220位於N型井區(NW)110內，第三氧化物定義(OD)區230位於P型井區(PW)120內。
由第1圖和第2圖可知，非揮發性記憶胞1包含一選擇電晶體10和一與之串聯的浮動閘極電晶體20，直接形成在第一氧化物定義(OD)區210上。根據本發明實施例，選擇電晶體10為P型金氧半導體(PMOS)電晶體，包含一P+源極摻雜區12(與一源極線SL耦合)位於N型井區(NW)110中；一與P+源極摻雜區12分隔開的共用P+摻雜區14；一選擇閘極(SG)通道區32，位在P+源極摻雜區12和共用P+摻雜區14之間並接近半導體基底100主要表面；一選擇閘極(SG)2覆蓋在選擇閘極通道32區上，並與字元線(WL)耦合；一閘極介電層2a，位於選擇閘極(SG)2和選擇閘極通道區32之間。
一浮動閘極電晶體20位於第一氧化物定義(OD)區210上。浮動閘極電晶體20藉由共用P+摻雜區14與選擇電晶體10連結。浮動閘極電晶體20與選擇電晶體10分享共用P+摻雜區14，因而形成兩串連的電晶體，在此實施例中，為兩串連的PMOS電晶體。
浮動閘極電晶體20包含一浮動閘極(FG)4，覆蓋在第一氧化物定義(OD)區210上。根據本發明實施例，浮動閘極4由單層多晶矽構成，例如N+摻雜多晶矽，或P+摻雜多晶矽，且浮動閘極電晶體20為非揮發性記憶胞1的儲存元件。選擇閘極(SG)2和浮動閘極(FG)4均為直線型，沿著一第1方向(參考x軸方向)延伸。
浮動閘極電晶體20另包含共用P+摻雜區14位於浮動閘極4的一邊，一P+摻雜汲極區16位於另外一邊，且與位元線(BL)耦合；一浮動閘極通道區34介於共用P+摻雜區14和P+摻雜汲極區16之間；一閘極介電層4a位於浮動閘極4與浮動閘極通道區34之間。根據本發明實施例，閘極介電層4a的厚度與閘極介電層2a的厚度一致，且選擇電晶體10與浮動閘極電晶體20共用N型井區110。
由第1圖和第3圖可知，根據本發明實施例，非揮發性記憶胞1另包含一輔助閘極(AG)6，自浮動閘極4一末端延伸凸出至第二氧化物定義(OD)區220的一邊，且與第二氧化物定義(OD)區220及N型井區110具電容式耦合。由上方俯視，輔助閘極(AG)6部分重疊第二氧化物定義(OD)區220，且部分重疊面對第一氧化物定義(OD)區210的邊緣。
在第二氧化物定義(OD)區220未被輔助閘極(AG)6覆蓋的區域形成有一N+摻雜區18，N+摻雜區18作為N型井區拾取接點並位於第二氧化物定義(OD)區，提供N型井區110一N型井區電壓(VNW)。根據本發明實施例，輔助閘極(AG)6與N型井區110之間不需要額外的摻雜區或離子井區。可藉由N型井區電壓(VNW)控制一耦合至輔助閘極(AG)6的感應電壓。上述感應電壓是由於輔助閘極(AG)6與偏壓下的N型井區110之間的偶和效應所產生的，將在程式化操作時產生更多的載子注入至浮動閘極，使得寫入效率可以提升。輔助閘極(AG)6可由N+摻雜多晶矽或P+摻雜多晶矽構成。
根據本發明實施例，輔助閘極(AG)6包含一水平區段6a，自浮動閘極 (FG)4沿第1方向(參考x軸方向)連續延伸出，並直接與浮動閘極(FG)4相連。輔助閘極(AG)6另包含一垂直區段6b，沿第2方向(參考y軸方向)延伸出，並直接與水平區段6a相連。
根據本發明實施例，輔助閘極(AG)6與浮動閘極(FG)4是由相同的製程形成。輔助閘極(AG)6可藉由N型井區110自動偏壓，如此可以增加耦合率和程式化效率，也可減少程式化干擾和降低程式化電流/電壓。另外，非揮發性記憶胞1可抑制IOFF和IOFF電流上升問題，因而達到較大的耐久性和開/關容忍度。輔助閘極(AG)6提供浮動閘極電晶體20額外能力來補償耦合比，因而可較有效的控制通道。
由第1圖和第4圖可知，根據本發明實施例，非揮發性記憶胞1另包含一抹除閘極(EG)8，自垂直區段6b沿著第二方向(參考y軸方向)連續延伸出去，且橫越N型井區110和P型井區120的接合處。根據本發明實施例，抹除閘極(EG)8一末端重疊P型井區120內的第三氧層定義(OD)區230，藉由這樣的結構，抹除閘極(EG)8可與第三氧層定義(OD)區230及P型井區120電容耦合。一N+摻雜區19位於三氧層定義(OD)區230未被抹除閘極(EG)8覆蓋的區域上。
第5圖和第6圖分別說明第1圖中的記憶胞單位的等效電路並例示程式化(PGM)、讀取(REG)及抹除(ERS)時的操作條件。根據第5圖和第6圖所示，在程式化(PGM)操作時，選擇閘極(SG)與一字元線電壓VWL=VDD連接；抹除線(EL)與一抹除線電壓VEL=VDD連接；源極線(SL)與一源極線電壓VSL=VPP連接；位元線(BL)接地(VBL=0V)；N型井區(NW)110與一N型井區電壓VNW=VPP連接；P型井區(PW)120與一P型井區電壓VPW=0V連接。根據本發明實施例，VPP與VEE可在2V至15V之間，VDD可在2V至10V之間。在上述操作條件下，非揮發性記憶胞1可藉由通道熱電子注入(CHEI)機制被程式化。
在抹除(ERS)操作時，選擇閘極(SG)與一字元線電壓VWL=0V連接； 抹除線(EL)與一抹除線電壓VEL=VEE連接；源極線(SL)與一源極線電壓VSL=0V連接；位元線(BL)接地(VBL=0V)；N型井區(NW)110與一N型井區電壓VNW=0V連接；P型井區(PW)120與一P型井區電壓VPW=0V連接。根據本發明實施例，VPP與VEE可在2V至15V之間，VDD可在2V至10V之間。在上述操作條件下，非揮發性記憶胞1可藉由Fowler Nordheim(FN)機制被抹除。
在讀取(READ)操作時，選擇閘極(SG)與一字元線電壓VWL=0V連接；抹除線(EL)與一抹除線電壓VEL=0V連接；源極線(SL)與一源極線電壓VSL=VDD連接；位元線(BL)接地(VBL=0V)；N型井區(NW)110與一N型井區電壓VNW=VDD連接；P型井區(PW)120與一P型井區電壓VPW=0V連接。根據本發明實施例，VPP與VEE可為2V至15V之間，VDD可為2V至10V之間。
第7圖說明由第1圖所示非揮發性記憶胞1所組成的記憶體陣列局部佈局。如第7圖所示，記憶體陣列包含至少一非揮發性記憶胞1a及一非揮發性記憶胞1b。非揮發性記憶胞1a即為第1圖所示結構，而非揮發性記憶胞1b則為其對於中心線80的鏡像對稱。
以上所述僅為本發明之較佳實施例，凡依本發明申請專利範圍所做之均等變化與修飾，皆應屬本發明之涵蓋範圍。
1‧‧‧非揮發性記憶胞
110‧‧‧N型井區
120‧‧‧P型井區
200‧‧‧第一氧化物定義(OD)區
210‧‧‧第二氧化物定義(OD)區
220‧‧‧第三氧化物定義(OD)區
230‧‧‧隔離區
10‧‧‧選擇電晶體
20‧‧‧浮動閘極電晶體
12‧‧‧P+源極摻雜區
14‧‧‧共用P+摻雜區
2‧‧‧選擇閘極
4‧‧‧浮動閘極
16‧‧‧汲極摻雜區
6‧‧‧輔助閘極
6a‧‧‧水平區段
6b‧‧‧垂直區段
8‧‧‧抹除閘極
18‧‧‧N+摻雜區
19‧‧‧N+摻雜區
PW‧‧‧P型井區
NW‧‧‧N型井區
SL‧‧‧源極線
BL‧‧‧位元線
EL‧‧‧抹除線
SG‧‧‧選擇閘極
WL‧‧‧字元線
FG‧‧‧浮動閘極
AG‧‧‧輔助閘極
EG‧‧‧抹除閘極

Claims (12)

  1. 一種非揮發性記憶胞，包含有：一半導體基底，其中設有一N型井區；一第一氧化物定義區及一第二氧化物定義區，設於該N型井區之內；一PMOS選擇電晶體設於該第一氧化物定義區上；一PMOS浮動閘極電晶體設於該第一氧化物定義區上並與該PMOS選擇電晶體串聯，其中該PMOS浮動閘極電晶體包含有一覆蓋在該第一氧化物定義區上的一浮動閘極，其中該浮動閘極作為一電荷儲存元件；以及一輔助閘極，自該浮動閘極一末端延伸至該第二氧化物定義區的一邊緣，使該輔助閘極與該N型井區電容耦合，其中係藉由N型井區的一偏壓來控制一耦合至該輔助閘極的一感應電壓。
  2. 如申請專利範圍第1項所述的非揮發性記憶胞，其中該選擇電晶體與該浮動閘極電晶體共用該N型井區。
  3. 如申請專利範圍第1項所述的非揮發性記憶胞，其中該選擇電晶體包含有一P+源極摻雜區，位於該N型井區內；一共用P+摻雜區，與該P+源極摻雜區分隔開；一選擇閘極通道區，位在該P+源極摻雜區與該共用P+摻雜區之間且接近該半導體基底主表面位；一選擇閘極，覆蓋在該選擇閘極通道區上方；以及一閘極介電層，位於該選擇閘極與該選擇閘極通道區之間。
  4. 如申請專利範圍第3項所述的非揮發性記憶胞，其中該P+源極摻雜區與一源極線耦合。
  5. 如申請專利範圍第3項所述的非揮發性記憶胞，其中該浮動閘極電晶體另包含該共用P+摻雜區位於該浮動閘極一側；一P+汲極摻雜區位於該浮動閘極另外一側；一浮動閘極通道區介於該共用P+摻雜區與該P+汲極摻雜區之間；一閘極介電層位於該浮動閘極與該浮動閘極通道區之間。
  6. 如申請專利範圍第5項所述的非揮發性記憶胞，其中P+汲極摻雜區與一位元線耦合。
  7. 一種非揮發性記憶胞，包含有：一半導體基底，其中設有一N型井區；一第一氧化物定義區及一第二氧化物定義區，設於該N型井區之內；一PMOS選擇電晶體設於該第一氧化物定義區上；一PMOS浮動閘極電晶體設於該第一氧化物定義區上並與該PMOS選擇電晶體串聯，其中該PMOS浮動閘極電晶體包含有一覆蓋在該第一氧化物定義區上的一浮動閘極；以及一輔助閘極，自該浮動閘極一末端延伸至該第二氧化物定義區的一邊緣，使該輔助閘極與該N型井區電容耦合，其中係藉由N型井區的一偏壓來控制一耦合至該輔助閘極的一感應電壓，其中該輔助閘極與該浮動閘極由單層多晶矽一體成型構成。
  8. 一種非揮發性記憶胞，包含有：一半導體基底，其中設有一N型井區；一第一氧化物定義區及一第二氧化物定義區，設於該N型井區之內；一PMOS選擇電晶體設於該第一氧化物定義區上；一PMOS浮動閘極電晶體設於該第一氧化物定義區上並與該PMOS選擇電晶體串聯，其中該PMOS浮動閘極電晶體包含有一覆蓋在該第一氧化物定義區上的一浮動閘極；以及一輔助閘極，自該浮動閘極一末端延伸至該第二氧化物定義區的一邊緣，使該輔助閘極與該N型井區電容耦合，其中係藉由N型井區的一偏壓來控制一耦合至該輔助閘極的一感應電壓，其中該輔助閘極包含N+摻雜多晶矽或P+摻雜多晶矽。
  9. 一種非揮發性記憶胞，包含有：一半導體基底，其中設有一N型井區；一第一氧化物定義區及一第二氧化物定義區，設於該N型井區之內；一PMOS選擇電晶體設於該第一氧化物定義區上；一PMOS浮動閘極電晶體設於該第一氧化物定義區上並與該PMOS選擇電晶體串聯，其中該PMOS浮動閘極電晶體包含有一覆蓋在該第一氧化物定義區上的一浮動閘極；以及一輔助閘極，自該浮動閘極一末端延伸至該第二氧化物定義區的一邊緣，使該輔助閘極與該N型井區電容耦合，其中係藉由N型井區的一偏壓來控制一耦合至該輔助閘極的一感應電壓，其中該輔助閘極包含一自該浮動閘極沿一第一方向延伸出且與該浮動閘極相連的水平區段，與一自該水平區段沿一第二方向延伸出且與該水平區段相連的垂直區段。
  10. 如申請專利範圍第1及7-9中任一項所述的非揮發性記憶胞，其中另包含一P型井區位於該半導體基底，以及一第三氧化物定義區，設於該P型井區。
  11. 如申請專利範圍第10項所述的非揮發性記憶胞，另包含一抹除閘極，自該浮動閘極延伸出，且橫跨該N型井區與該P型井區。
  12. 如申請專利範圍第11項所述的非揮發性記憶胞，其中該抹除閘極一末端覆蓋在該第三氧化物定義區上，使該抹除閘極與該第三氧化物定義區與該P型井區電容耦合。
TW104113730A 2014-04-02 2015-04-29 具輔助閘極之非揮發性記憶胞結構 TWI569418B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201461973867P 2014-04-02 2014-04-02
US14/675,758 US9368161B2 (en) 2014-04-02 2015-04-01 Nonvolatile memory cell structure with assistant gate

Publications (2)

Publication Number Publication Date
TW201637177A TW201637177A (zh) 2016-10-16
TWI569418B true TWI569418B (zh) 2017-02-01

Family

ID=52697245

Family Applications (5)

Application Number Title Priority Date Filing Date
TW103137200A TWI570894B (zh) 2014-04-02 2014-10-28 單一多晶矽層非揮發性記憶體的陣列結構
TW103141162A TWI582961B (zh) 2014-04-02 2014-11-27 半導體元件及其製造方法
TW104109724A TWI594375B (zh) 2014-04-02 2015-03-26 改善讀取特性的反熔絲單次可編程記憶胞以及記憶體的操作方法
TW104113730A TWI569418B (zh) 2014-04-02 2015-04-29 具輔助閘極之非揮發性記憶胞結構
TW105137031A TWI582959B (zh) 2014-04-02 2016-11-14 具有輔助閘極之非揮發性記憶胞結構及其記憶體陣列

Family Applications Before (3)

Application Number Title Priority Date Filing Date
TW103137200A TWI570894B (zh) 2014-04-02 2014-10-28 單一多晶矽層非揮發性記憶體的陣列結構
TW103141162A TWI582961B (zh) 2014-04-02 2014-11-27 半導體元件及其製造方法
TW104109724A TWI594375B (zh) 2014-04-02 2015-03-26 改善讀取特性的反熔絲單次可編程記憶胞以及記憶體的操作方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW105137031A TWI582959B (zh) 2014-04-02 2016-11-14 具有輔助閘極之非揮發性記憶胞結構及其記憶體陣列

Country Status (5)

Country Link
US (8) US9508396B2 (zh)
EP (2) EP2930750B1 (zh)
JP (3) JP6050393B2 (zh)
CN (5) CN104979358B (zh)
TW (5) TWI570894B (zh)

Families Citing this family (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9508396B2 (en) * 2014-04-02 2016-11-29 Ememory Technology Inc. Array structure of single-ploy nonvolatile memory
TWI555213B (zh) * 2014-09-04 2016-10-21 力晶科技股份有限公司 快閃記憶體閘極結構及其製作方法
FR3025649B1 (fr) * 2014-09-09 2016-12-09 Stmicroelectronics Rousset Procede de polarisation d’un plan de source enterre d’une memoire non volatile a grilles de selection verticales
US9412667B2 (en) * 2014-11-25 2016-08-09 International Business Machines Corporation Asymmetric high-k dielectric for reducing gate induced drain leakage
TWI546903B (zh) * 2015-01-15 2016-08-21 聯笙電子股份有限公司 非揮發性記憶體單元
US9620176B2 (en) * 2015-09-10 2017-04-11 Ememory Technology Inc. One-time programmable memory array having small chip area
US9870167B2 (en) 2015-10-12 2018-01-16 Sandisk Technologies Llc Systems and methods of storing data
US10032783B2 (en) * 2015-10-30 2018-07-24 Globalfoundries Singapore Pte. Ltd. Integrated circuits having an anti-fuse device and methods of forming the same
US9847133B2 (en) * 2016-01-19 2017-12-19 Ememory Technology Inc. Memory array capable of performing byte erase operation
JP6200983B2 (ja) * 2016-01-25 2017-09-20 力旺電子股▲ふん▼有限公司ｅＭｅｍｏｒｙ Ｔｅｃｈｎｏｌｏｇｙ Ｉｎｃ． ワンタイムプログラマブルメモリセル、該メモリセルを含むメモリアレイのプログラム方法及び読み込み方法
KR102463920B1 (ko) * 2016-02-12 2022-11-07 에스케이하이닉스 주식회사 싱글 폴리 불휘발성 메모리 셀 및 메모리 셀 어레이, 동작 방법
KR102359372B1 (ko) * 2016-02-17 2022-02-09 에스케이하이닉스 주식회사 싱글-폴리 불휘발성 메모리 셀
US9673210B1 (en) * 2016-02-25 2017-06-06 Globalfoundries Inc. Semiconductor structure including a nonvolatile memory cell having a charge trapping layer and method for the formation thereof
JP6608312B2 (ja) * 2016-03-08 2019-11-20 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
KR102567072B1 (ko) * 2016-03-21 2023-08-17 에스케이하이닉스 주식회사 수평형 바이폴라 접합 트랜지스터를 갖는 안티퓨즈 불휘발성 메모리 소자
US10115682B2 (en) 2016-04-13 2018-10-30 Ememory Technology Inc. Erasable programmable non-volatile memory
US20180137927A1 (en) * 2016-04-16 2018-05-17 Chengdu Haicun Ip Technology Llc Three-Dimensional Vertical One-Time-Programmable Memory Comprising No Separate Diode Layer
US10074438B2 (en) * 2016-06-10 2018-09-11 Cypress Semiconductor Corporation Methods and devices for reducing program disturb in non-volatile memory cell arrays
TWI570892B (zh) * 2016-06-30 2017-02-11 世界先進積體電路股份有限公司 記憶體裝置及其製造方法
US9633734B1 (en) * 2016-07-14 2017-04-25 Ememory Technology Inc. Driving circuit for non-volatile memory
KR102178025B1 (ko) * 2016-08-09 2020-11-13 매그나칩 반도체 유한회사 감소된 레이아웃 면적을 갖는 otp 셀
US9589971B1 (en) * 2016-09-12 2017-03-07 Vanguard International Semiconductor Corporation Anti-fuse one-time programmable memory cell and anti-fuse one-time programmable memory array
CN107887389B (zh) * 2016-09-30 2020-08-04 财团法人交大思源基金会 集成电路记忆体及其操作方法
US10395745B2 (en) 2016-10-21 2019-08-27 Synposys, Inc. One-time programmable bitcell with native anti-fuse
US9997253B1 (en) 2016-12-08 2018-06-12 Cypress Semiconductor Corporation Non-volatile memory array with memory gate line and source line scrambling
US10446562B1 (en) * 2017-01-10 2019-10-15 Synopsys, Inc. One-time programmable bitcell with partially native select device
US9882566B1 (en) * 2017-01-10 2018-01-30 Ememory Technology Inc. Driving circuit for non-volatile memory
KR20180085120A (ko) * 2017-01-17 2018-07-26 삼성전자주식회사 반도체 메모리 장치
US10096602B1 (en) * 2017-03-15 2018-10-09 Globalfoundries Singapore Pte. Ltd. MTP memory for SOI process
TWI630623B (zh) * 2017-04-07 2018-07-21 力旺電子股份有限公司 可編程可抹除的非揮發性記憶體
CN108735266B (zh) * 2017-04-24 2021-06-22 物联记忆体科技股份有限公司 具有字元抹除与减少写入干扰的非易失性存储器装置
US10090309B1 (en) * 2017-04-27 2018-10-02 Ememory Technology Inc. Nonvolatile memory cell capable of improving program performance
US10163520B1 (en) * 2017-10-16 2018-12-25 Synopsys, Inc. OTP cell with improved programmability
US10879256B2 (en) 2017-11-22 2020-12-29 Taiwan Semiconductor Manufacturing Co., Ltd. Embedded memory using SOI structures and methods
US11063772B2 (en) 2017-11-24 2021-07-13 Ememory Technology Inc. Multi-cell per bit nonvolatile memory unit
US11367731B2 (en) 2017-11-24 2022-06-21 Taiwan Semiconductor Manufacturing Company Ltd. Memory device and method of manufacturing the same
US10615166B2 (en) 2017-12-19 2020-04-07 International Business Machines Corporation Programmable device compatible with vertical transistor flow
CN109979943B (zh) * 2017-12-28 2022-06-21 联华电子股份有限公司 半导体元件及其制造方法
US10505521B2 (en) * 2018-01-10 2019-12-10 Ememory Technology Inc. High voltage driver capable of preventing high voltage stress on transistors
US10797063B2 (en) * 2018-01-10 2020-10-06 Ememory Technology Inc. Single-poly nonvolatile memory unit
US11011533B2 (en) 2018-01-10 2021-05-18 Ememory Technology Inc. Memory structure and programing and reading methods thereof
CN113097177B (zh) 2018-01-15 2023-07-18 联华电子股份有限公司 半导体元件
KR102422839B1 (ko) * 2018-02-23 2022-07-19 에스케이하이닉스 시스템아이씨 주식회사 수평 커플링 구조 및 단일층 게이트를 갖는 불휘발성 메모리 소자
KR102385951B1 (ko) * 2018-02-23 2022-04-14 에스케이하이닉스 시스템아이씨 주식회사 프로그램 효율이 증대되는 원 타임 프로그래머블 메모리 및 그 제조방법
CN110416213B (zh) * 2018-04-28 2021-07-20 无锡华润上华科技有限公司 Otp存储器件及其制作方法、电子装置
TWI698003B (zh) * 2018-06-15 2020-07-01 卡比科技有限公司 非揮發性記憶體裝置
US11282844B2 (en) * 2018-06-27 2022-03-22 Ememory Technology Inc. Erasable programmable non-volatile memory including two floating gate transistors with the same floating gate
CN108831885B (zh) * 2018-06-29 2022-08-16 上海华虹宏力半导体制造有限公司 改善pmos otp性能的方法
US10685727B2 (en) * 2018-08-10 2020-06-16 Ememory Technology Inc. Level shifter
US10818592B1 (en) * 2019-04-29 2020-10-27 Nanya Technology Corporation Semiconductor memory device including decoupling capacitor array arranged overlying one-time programmable device
US11508719B2 (en) * 2019-05-13 2022-11-22 Ememory Technology Inc. Electrostatic discharge circuit
CN112086115B (zh) * 2019-06-14 2023-03-28 力旺电子股份有限公司 存储器系统
US11031779B2 (en) 2019-06-14 2021-06-08 Ememory Technology Inc. Memory system with a random bit block
CN112397516A (zh) * 2019-08-13 2021-02-23 长鑫存储技术有限公司 反熔丝存储单元及其制作方法
CN112786602B (zh) * 2019-11-06 2022-08-26 成都锐成芯微科技股份有限公司 单层多晶硅非易失性存储单元及其存储器
US11296096B2 (en) * 2019-11-08 2022-04-05 Zhuhai Chuangfeixin Technology Co., Ltd. Antifuse OTP structure with hybrid junctions
CN112802523A (zh) * 2019-11-14 2021-05-14 力旺电子股份有限公司 只读式存储单元及其相关的存储单元阵列
CN111129017B (zh) * 2019-12-26 2022-06-07 华虹半导体(无锡)有限公司 Otp存储器及其制造方法
US11217595B2 (en) * 2020-01-15 2022-01-04 Zhuhai Chuangfeixin Technology Co., Ltd. Antifuse OTP structure with hybrid device and hybrid junction for select transistor
US11158641B2 (en) * 2020-02-12 2021-10-26 Zhuhai Chuangfeixin Technology Co., Ltd. Antifuse OTP structures with hybrid devices and hybrid junctions
US11189356B2 (en) * 2020-02-27 2021-11-30 Taiwan Semiconductor Manufacturing Company, Ltd. One-time-programmable memory
US11018143B1 (en) * 2020-03-12 2021-05-25 Zhuhai Chuangfeixin Technology Co., Ltd. Antifuse OTP structures with hybrid low-voltage devices
US11139006B1 (en) * 2020-03-12 2021-10-05 Ememory Technology Inc. Self-biased sense amplification circuit
CN113496986B (zh) * 2020-04-07 2023-12-12 长鑫存储技术有限公司 反熔丝单元结构及反熔丝阵列
CN113496987B (zh) 2020-04-08 2024-03-29 长鑫存储技术有限公司 反熔丝器件及反熔丝单元
CN113496988B (zh) * 2020-04-08 2023-12-12 长鑫存储技术有限公司 反熔丝单元及反熔丝阵列
US11742024B2 (en) * 2020-05-27 2023-08-29 Taiwan Semiconductor Manufacturing Company Limited Memory device comprising source line coupled to multiple memory cells and method of operation
US11877456B2 (en) * 2020-09-15 2024-01-16 Ememory Technology Inc. Memory cell of non-volatile memory
TWI739598B (zh) 2020-09-15 2021-09-11 力旺電子股份有限公司 運用於多階型記憶胞陣列之編程與驗證方法
TWI747528B (zh) * 2020-09-28 2021-11-21 億而得微電子股份有限公司 小面積低電壓反熔絲元件與陣列
TWI819457B (zh) * 2021-02-18 2023-10-21 力旺電子股份有限公司 多次編程非揮發性記憶體的記憶胞陣列
US11980029B2 (en) 2021-11-15 2024-05-07 Ememory Technology Inc. Erasable programmable single-ploy non-volatile memory cell and associated array structure
WO2023206152A1 (zh) * 2022-04-27 2023-11-02 华为技术有限公司 一种反熔丝存储器及电子设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140183612A1 (en) * 2012-12-27 2014-07-03 Ememory Technology Inc. Nonvolatile memory structure and fabrication method thereof
US20140361358A1 (en) * 2013-06-07 2014-12-11 Ememory Technology Inc. Nonvolatile memory structure

Family Cites Families (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5163180A (en) * 1991-01-18 1992-11-10 Actel Corporation Low voltage programming antifuse and transistor breakdown method for making same
US5241496A (en) * 1991-08-19 1993-08-31 Micron Technology, Inc. Array of read-only memory cells, eacch of which has a one-time, voltage-programmable antifuse element constructed within a trench shared by a pair of cells
US5912842A (en) * 1995-11-14 1999-06-15 Programmable Microelectronics Corp. Nonvolatile PMOS two transistor memory cell and array
US5966329A (en) * 1997-10-09 1999-10-12 Programmable Microelectronics Corporation Apparatus and method for programming PMOS memory cells
US6326663B1 (en) * 1999-03-26 2001-12-04 Vantis Corporation Avalanche injection EEPROM memory cell with P-type control gate
US6191980B1 (en) * 2000-03-07 2001-02-20 Lucent Technologies, Inc. Single-poly non-volatile memory cell having low-capacitance erase gate
TW546840B (en) * 2001-07-27 2003-08-11 Hitachi Ltd Non-volatile semiconductor memory device
US6798693B2 (en) 2001-09-18 2004-09-28 Kilopass Technologies, Inc. Semiconductor memory cell and memory array using a breakdown phenomena in an ultra-thin dielectric
WO2003025944A1 (en) 2001-09-18 2003-03-27 Kilopass Technologies, Inc. Semiconductor memory cell and memory array using a breakdown phenomena in an ultra-thin dielectric
JP3954368B2 (ja) * 2001-11-26 2007-08-08 力旺電子股▲フン▼有限公司 消去型プログラマブルリードオンリーメモリ
US6693819B2 (en) * 2002-01-08 2004-02-17 Broadcom Corporation High voltage switch circuitry
US6678190B2 (en) 2002-01-25 2004-01-13 Ememory Technology Inc. Single poly embedded eprom
US6882574B2 (en) * 2002-01-25 2005-04-19 Ememory Technology Inc. Single poly UV-erasable programmable read only memory
US6667510B2 (en) * 2002-02-19 2003-12-23 Silicon Based Technology Corp. Self-aligned split-gate flash memory cell and its contactless memory array
TW536818B (en) * 2002-05-03 2003-06-11 Ememory Technology Inc Single-poly EEPROM
US20050030827A1 (en) * 2002-09-16 2005-02-10 Impinj, Inc., A Delaware Corporation PMOS memory cell
US7212446B2 (en) * 2002-09-16 2007-05-01 Impinj, Inc. Counteracting overtunneling in nonvolatile memory cells using charge extraction control
JP3941943B2 (ja) * 2003-03-12 2007-07-11 力旺電子股▲ふん▼有限公司 Ｒｏｍ
JP4093359B2 (ja) * 2003-03-19 2008-06-04 力旺電子股▲ふん▼有限公司 電気的に消去可能なプログラマブルロジックデバイス
US6914825B2 (en) * 2003-04-03 2005-07-05 Ememory Technology Inc. Semiconductor memory device having improved data retention
JP4314085B2 (ja) * 2003-09-08 2009-08-12 パナソニック株式会社 不揮発性半導体記憶装置
KR100546391B1 (ko) 2003-10-30 2006-01-26 삼성전자주식회사 소노스 소자 및 그 제조 방법
US7164177B2 (en) * 2004-01-02 2007-01-16 Powerchip Semiconductor Corp. Multi-level memory cell
JP2005235836A (ja) * 2004-02-17 2005-09-02 Nippon Precision Circuits Inc 半導体記憶装置
US7078761B2 (en) 2004-03-05 2006-07-18 Chingis Technology Corporation Nonvolatile memory solution using single-poly pFlash technology
US7015537B2 (en) * 2004-04-12 2006-03-21 Silicon Storage Technology, Inc. Isolation-less, contact-less array of nonvolatile memory cells each having a floating gate for storage of charges, and methods of manufacturing, and operating therefor
TWI227501B (en) * 2004-04-14 2005-02-01 Novatek Microelectronics Corp Apparatus and method for reprogramming by using one-time programming element
US7307534B2 (en) * 2004-04-21 2007-12-11 Impinj, Inc. RFID tag using hybrid non-volatile memory
US7283390B2 (en) 2004-04-21 2007-10-16 Impinj, Inc. Hybrid non-volatile memory
JP4753413B2 (ja) * 2005-03-02 2011-08-24 三洋電機株式会社 不揮発性半導体記憶装置及びその製造方法
US20060203591A1 (en) 2005-03-11 2006-09-14 Lee Dong K One time programmable read-only memory comprised of fuse and two selection transistors
US7277347B2 (en) 2005-06-28 2007-10-02 Cypress Semiconductor Corporation Antifuse capacitor for configuring integrated circuits
US7253496B2 (en) * 2005-06-28 2007-08-07 Cypress Semiconductor Corporation Antifuse circuit with current regulator for controlling programming current
US20070030026A1 (en) * 2005-08-02 2007-02-08 Shih-Pin Hsu Multiple-time programming apparatus and method using one-time programming element
JP4940144B2 (ja) * 2005-10-17 2012-05-30 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
JP5181423B2 (ja) * 2006-03-20 2013-04-10 ソニー株式会社 半導体メモリデバイスとその動作方法
US20070247915A1 (en) * 2006-04-21 2007-10-25 Intersil Americas Inc. Multiple time programmable (MTP) PMOS floating gate-based non-volatile memory device for a general-purpose CMOS technology with thick gate oxide
US8122307B1 (en) * 2006-08-15 2012-02-21 Synopsys, Inc. One time programmable memory test structures and methods
US7474568B2 (en) * 2006-08-24 2009-01-06 Virage Logic Corporation Non-volatile memory with programming through band-to-band tunneling and impact ionization gate current
JP4427534B2 (ja) * 2006-09-29 2010-03-10 株式会社東芝 Ｍｏｓキャパシタ、チャージポンプ回路、及び半導体記憶回路
US7436710B2 (en) * 2007-03-12 2008-10-14 Maxim Integrated Products, Inc. EEPROM memory device with cell having NMOS in a P pocket as a control gate, PMOS program/erase transistor, and PMOS access transistor in a common well
US7869279B1 (en) * 2007-04-03 2011-01-11 Maxim Integrated Products, Inc. EEPROM memory device and method of programming memory cell having N erase pocket and program and access transistors
US7903465B2 (en) * 2007-04-24 2011-03-08 Intersil Americas Inc. Memory array of floating gate-based non-volatile memory cells
US7688627B2 (en) * 2007-04-24 2010-03-30 Intersil Americas Inc. Flash memory array of floating gate-based non-volatile memory cells
US8933492B2 (en) 2008-04-04 2015-01-13 Sidense Corp. Low VT antifuse device
US8344443B2 (en) * 2008-04-25 2013-01-01 Freescale Semiconductor, Inc. Single poly NVM devices and arrays
US7795091B2 (en) * 2008-04-30 2010-09-14 Winstead Brian A Method of forming a split gate memory device and apparatus
JP5239548B2 (ja) * 2008-06-25 2013-07-17 富士通セミコンダクター株式会社 半導体装置及び半導体装置の製造方法
US7983081B2 (en) * 2008-12-14 2011-07-19 Chip.Memory Technology, Inc. Non-volatile memory apparatus and method with deep N-well
US8395923B2 (en) * 2008-12-30 2013-03-12 Intel Corporation Antifuse programmable memory array
JP5328020B2 (ja) 2009-01-15 2013-10-30 セイコーインスツル株式会社 メモリ装置及びメモリアクセス方法
EP2267724A1 (fr) * 2009-06-26 2010-12-29 STMicroelectronics Rousset SAS Architecture de mémoire EEPROM optimisée pour les mémoires embarquées
US8174063B2 (en) * 2009-07-30 2012-05-08 Ememory Technology Inc. Non-volatile semiconductor memory device with intrinsic charge trapping layer
US8344445B2 (en) * 2009-07-30 2013-01-01 Ememory Technology Inc. Non-volatile semiconductor memory cell with dual functions
JP2011119640A (ja) 2009-11-06 2011-06-16 Renesas Electronics Corp 半導体装置およびその製造方法
US20110108926A1 (en) * 2009-11-12 2011-05-12 National Semiconductor Corporation Gated anti-fuse in CMOS process
US8937357B2 (en) 2010-03-01 2015-01-20 Broadcom Corporation One-time programmable semiconductor device
US8797820B2 (en) * 2010-06-08 2014-08-05 Chengdu Kiloway Electronics Inc. Soft breakdown mode, low voltage, low power antifuse-based non-volatile memory cell
US8259518B2 (en) * 2010-06-08 2012-09-04 Sichuan Kiloway Electronics Inc. Low voltage and low power memory cell based on nano current voltage divider controlled low voltage sense MOSFET
US8355282B2 (en) * 2010-06-17 2013-01-15 Ememory Technology Inc. Logic-based multiple time programming memory cell
US8908412B2 (en) * 2010-07-20 2014-12-09 Texas Instruments Incorporated Array architecture for reduced voltage, low power, single poly EEPROM
JP2012039044A (ja) * 2010-08-11 2012-02-23 Toshiba Corp 半導体装置及びその製造方法
US9818478B2 (en) * 2012-12-07 2017-11-14 Attopsemi Technology Co., Ltd Programmable resistive device and memory using diode as selector
EP2541600B1 (en) 2011-06-29 2018-02-14 eMemory Technology Inc. Non-volatile semiconductor memory cell with dual functions and method of operating thereof
TWI490982B (zh) 2011-08-16 2015-07-01 Maxchip Electronics Corp 半導體結構及其製造方法
JP2013187534A (ja) * 2012-03-08 2013-09-19 Ememory Technology Inc 消去可能プログラマブル単一ポリ不揮発性メモリ
US8941167B2 (en) * 2012-03-08 2015-01-27 Ememory Technology Inc. Erasable programmable single-ploy nonvolatile memory
US8592886B2 (en) * 2012-03-08 2013-11-26 Ememory Technology Inc. Erasable programmable single-ploy nonvolatile memory
JP5842717B2 (ja) * 2012-04-05 2016-01-13 株式会社ソシオネクスト 半導体記憶装置
TWI467745B (zh) 2012-05-07 2015-01-01 Ememory Technology Inc 非揮發性記憶體及其製作方法
US8921175B2 (en) * 2012-07-20 2014-12-30 Semiconductor Components Industries, Llc Process of forming an electronic device including a nonvolatile memory cell
US9356158B2 (en) * 2012-07-20 2016-05-31 Semiconductor Components Industries, Llc Electronic device including a tunnel structure
KR101883010B1 (ko) 2012-08-06 2018-07-30 매그나칩 반도체 유한회사 반도체 소자 및 그 소자의 제조 방법
US8681528B2 (en) * 2012-08-21 2014-03-25 Ememory Technology Inc. One-bit memory cell for nonvolatile memory and associated controlling method
US9281074B2 (en) 2013-05-16 2016-03-08 Ememory Technology Inc. One time programmable memory cell capable of reducing leakage current and preventing slow bit response
US9236453B2 (en) * 2013-09-27 2016-01-12 Ememory Technology Inc. Nonvolatile memory structure and fabrication method thereof
US9171856B2 (en) * 2013-10-01 2015-10-27 Ememory Technology Inc. Bias generator for flash memory and control method thereof
US9384815B2 (en) * 2013-10-08 2016-07-05 Taiwan Semiconductor Manufacturing Co., Ltd. Mechanisms for preventing leakage currents in memory cells
EP2924595A1 (en) * 2014-03-28 2015-09-30 Acast AB Method for associating media files with additional content
US9508396B2 (en) * 2014-04-02 2016-11-29 Ememory Technology Inc. Array structure of single-ploy nonvolatile memory
US9431111B2 (en) * 2014-07-08 2016-08-30 Ememory Technology Inc. One time programming memory cell, array structure and operating method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140183612A1 (en) * 2012-12-27 2014-07-03 Ememory Technology Inc. Nonvolatile memory structure and fabrication method thereof
US20140361358A1 (en) * 2013-06-07 2014-12-11 Ememory Technology Inc. Nonvolatile memory structure

Also Published As

Publication number Publication date
TWI582961B (zh) 2017-05-11
TW201539720A (zh) 2015-10-16
JP2015198253A (ja) 2015-11-09
US9324381B2 (en) 2016-04-26
JP6050393B2 (ja) 2016-12-21
US20150287438A1 (en) 2015-10-08
US9601164B2 (en) 2017-03-21
TWI570894B (zh) 2017-02-11
JP2017098551A (ja) 2017-06-01
US9368161B2 (en) 2016-06-14
CN106206591A (zh) 2016-12-07
US20160379688A1 (en) 2016-12-29
EP3139408B1 (en) 2020-06-24
TW201637177A (zh) 2016-10-16
TW201539670A (zh) 2015-10-16
CN104979353A (zh) 2015-10-14
CN104979360A (zh) 2015-10-14
TWI594375B (zh) 2017-08-01
JP6373943B2 (ja) 2018-08-15
US9601501B2 (en) 2017-03-21
EP2930750A2 (en) 2015-10-14
EP2930750A3 (en) 2016-02-17
CN104979353B (zh) 2018-04-06
US9530460B2 (en) 2016-12-27
CN107393924A (zh) 2017-11-24
JP2015198249A (ja) 2015-11-09
CN104979360B (zh) 2018-04-06
US20160379687A1 (en) 2016-12-29
US9953685B2 (en) 2018-04-24
US20150287730A1 (en) 2015-10-08
CN104979358B (zh) 2018-04-06
JP6096237B2 (ja) 2017-03-15
CN106206591B (zh) 2019-05-14
US20160260727A1 (en) 2016-09-08
US20160254032A1 (en) 2016-09-01
US20150287738A1 (en) 2015-10-08
EP3139408A1 (en) 2017-03-08
US9613663B2 (en) 2017-04-04
US20150287732A1 (en) 2015-10-08
EP2930750B1 (en) 2020-02-26
TWI582959B (zh) 2017-05-11
US9508396B2 (en) 2016-11-29
TW201539722A (zh) 2015-10-16
CN104979358A (zh) 2015-10-14
TW201810618A (zh) 2018-03-16

Similar Documents

Publication Publication Date Title
TWI569418B (zh) 具輔助閘極之非揮發性記憶胞結構
TWI514518B (zh) 非揮發性記憶體結構及其製法
TWI646665B (zh) 具有抹除元件的單層多晶矽非揮發性記憶胞結構
TWI658572B (zh) 具抹除閘極區域的非揮發性記憶體
US9041089B2 (en) Nonvolatile memory structure
US9391083B2 (en) Nonvolatile memory structure
US11063772B2 (en) Multi-cell per bit nonvolatile memory unit
US7593261B2 (en) EEPROM devices and methods of operating and fabricating the same
US20070145467A1 (en) EEPROMs with Trenched Active Region Structures and Methods of Fabricating and Operating Same
CN105244352A (zh) 可高度微缩的单层多晶硅非易失性存储单元
US9312014B2 (en) Single-layer gate EEPROM cell, cell array including the same, and method of operating the cell array
US9293468B2 (en) Nonvolatile memory device
US10032852B2 (en) Single poly nonvolatile memory cells
JP2011199240A (ja) ボトムポリ制御ゲートを使用するｐｍｏｓフラッシュセル
TWI694590B (zh) 單層多晶矽非揮發性記憶體單元
JP2008270364A (ja) 不揮発性半導体記憶素子
KR20130050678A (ko) 다중 플로팅 게이트를 갖는 비휘발성 메모리 장치
EP2811531B1 (en) EPROM single-poly memory
EP2811530B1 (en) Single-poly floating-gate transistor comprising an erase gate formed in the substrate