TW201729369A - 用於偏移接合通孔陣列之經加固的導線 - Google Patents

用於偏移接合通孔陣列之經加固的導線 Download PDF

Info

Publication number
TW201729369A
TW201729369A TW105137430A TW105137430A TW201729369A TW 201729369 A TW201729369 A TW 201729369A TW 105137430 A TW105137430 A TW 105137430A TW 105137430 A TW105137430 A TW 105137430A TW 201729369 A TW201729369 A TW 201729369A
Authority
TW
Taiwan
Prior art keywords
dielectric layer
wire
microelectronic
wire bond
wire bonds
Prior art date
Application number
TW105137430A
Other languages
English (en)
Inventor
拉傑許 卡特卡爾
阿修克S 普拉布
葛蘭特 維拉維森席歐
相日 李
羅西安 阿拉托勒
賈維爾A 迪拉克魯茲
史考特 麥克葛拉斯
Original Assignee
英帆薩斯公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 英帆薩斯公司 filed Critical 英帆薩斯公司
Publication of TW201729369A publication Critical patent/TW201729369A/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4821Flat leads, e.g. lead frames with or without insulating supports
    • H01L21/4825Connection or disconnection of other leads to or from flat leads, e.g. wires, bumps, other flat leads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4846Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/4853Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/02Containers; Seals
    • H01L23/04Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • H01L23/043Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/02Containers; Seals
    • H01L23/04Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • H01L23/053Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3135Double encapsulation or coating and encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49517Additional leads
    • H01L23/4952Additional leads the additional leads being a bump or a wire
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49833Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers the chip support structure consisting of a plurality of insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/0401Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04042Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/06Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • H01L2224/061Disposition
    • H01L2224/0612Layout
    • H01L2224/0613Square or rectangular array
    • H01L2224/06134Square or rectangular array covering only portions of the surface to be connected
    • H01L2224/06136Covering only the central area of the surface to be connected, i.e. central arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/06Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • H01L2224/061Disposition
    • H01L2224/0618Disposition being disposed on at least two different sides of the body, e.g. dual array
    • H01L2224/06181On opposite sides of the body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001Core members of the bump connector
    • H01L2224/13099Material
    • H01L2224/131Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001Core members of the bump connector
    • H01L2224/13099Material
    • H01L2224/131Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/13101Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
    • H01L2224/13109Indium [In] as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001Core members of the bump connector
    • H01L2224/13099Material
    • H01L2224/131Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/13101Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
    • H01L2224/13111Tin [Sn] as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001Core members of the bump connector
    • H01L2224/13099Material
    • H01L2224/13198Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
    • H01L2224/13199Material of the matrix
    • H01L2224/1329Material of the matrix with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001Core members of the bump connector
    • H01L2224/13099Material
    • H01L2224/13198Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
    • H01L2224/13298Fillers
    • H01L2224/13299Base material
    • H01L2224/133Base material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/16227Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/818Bonding techniques
    • H01L2224/81801Soldering or alloying
    • H01L2224/81805Soldering or alloying involving forming a eutectic alloy at the bonding interface
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/10All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
    • H01L2225/1005All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/1011All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
    • H01L2225/1017All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support
    • H01L2225/1023All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support the support being an insulating substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/10All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
    • H01L2225/1005All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/1011All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
    • H01L2225/1041Special adaptations for top connections of the lowermost container, e.g. redistribution layer, integral interposer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838Geometry or layout
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02Bonding areas ; Manufacturing methods related thereto
    • H01L24/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/06Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L24/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L24/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0655Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next to each other
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0657Stacked arrangements of devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/10Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers
    • H01L25/105Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being of a type provided for in group H01L27/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • H01L2924/143Digital devices
    • H01L2924/1431Logic devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • H01L2924/143Digital devices
    • H01L2924/1433Application-specific integrated circuit [ASIC]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • H01L2924/143Digital devices
    • H01L2924/1434Memory
    • H01L2924/1435Random access memory [RAM]
    • H01L2924/1436Dynamic random-access memory [DRAM]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • H01L2924/143Digital devices
    • H01L2924/1434Memory
    • H01L2924/1435Random access memory [RAM]
    • H01L2924/1437Static random-access memory [SRAM]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • H01L2924/143Digital devices
    • H01L2924/1434Memory
    • H01L2924/1435Random access memory [RAM]
    • H01L2924/1438Flash memory
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15313Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a land array, e.g. LGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1532Connection portion the connection portion being formed on the die mounting surface of the substrate
    • H01L2924/1533Connection portion the connection portion being formed on the die mounting surface of the substrate the connection portion being formed both on the die mounting surface of the substrate and outside the die mounting surface of the substrate
    • H01L2924/15333Connection portion the connection portion being formed on the die mounting surface of the substrate the connection portion being formed both on the die mounting surface of the substrate and outside the die mounting surface of the substrate being a land array, e.g. LGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191Disposition
    • H01L2924/19101Disposition of discrete passive components
    • H01L2924/19107Disposition of discrete passive components off-chip wires

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Wire Bonding (AREA)
  • Geometry (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

一種構件,其可包括大致上平坦元件、覆於所述大致上平坦元件上的強化的介電層、覆於所述強化的介電層上的囊封以及多個導線接合。每一個導線接合在所述囊封的主要表面處皆具有端部。所述導線接合可具有在所述強化的介電層內延伸的第一部分。所述導線接合的至少一些的所述第一部分可具有可改變各自所述導線接合的延伸方向的彎曲部。所述強化的介電層可具有圍繞所述導線接合的各自導線接合的突出區域,與所述突出區域的相鄰突出區域之間的所述強化的介電層的部分相比,所述突出區域延伸至從所述大致上平坦元件的所述第一表面算起還要高的尖峰高度。所述突出區域的所述尖峰高度可與所述強化的介電層和個別導線接合之間的接觸點重合。

Description

用於偏移接合通孔陣列之經加固的導線
本發明在此處的實施例是有關於可被使用在堆疊式封裝組件(package on package assembly)中的各種結構和製造微電子封裝的方式,並且更具體地說,是有關於結合了導線接合的這類結構以作為堆疊式封裝連接(package-on-package connection)的一部分。
相關申請案的交互參照
本申請案請求於2015年11月18日提交的美國臨時專利申請案第62/257,223號的申請日的權益,其揭示內容藉此以引用的方式被併入於此處。
微電子裝置(諸如半導體晶片)通常需要許多輸入以及輸出連接至其它電子構件。半導體晶片或其它可類似裝置的輸入與輸出接點一般是以實質上覆蓋裝置表面的類格柵圖樣(通常被稱為「區域陣列(area array)」)被設置,或是以可延伸平行於且相鄰於裝置前表面的每一個邊緣的細長列被設置,或是被設置在前表面的中央。一般來說,裝置(諸如晶片)必須被實體安裝在基板(諸如印刷電路板)上,並且裝置的接點必須被電性連接至電路板的電性傳導特徵。
半導體晶片通常是以封裝的方式被提供,封裝有助於在製造 期間以及安裝晶片於外部基板(諸如電路板或是其它電路面板)上的期間對晶片進行處理。舉例而言,許多半導體晶片以適用於表面安裝的封裝方式被提供。已經有眾多屬於此一般類型的封裝被提出用於各種應用中。最常見的是,此些封裝包括介電元件,其通常被稱為「晶片載體」,而在介電質上有被形成作為鍍覆或蝕刻金屬結構的端子。這些端子通常藉由特徵結構(諸如沿著晶片載體本身延伸的細跡線)以及藉由延伸在晶片的接點與端子或跡線之間的精細引線或導線被連接至晶片本身的接點。於表面安裝操作中,封裝是被放置在電路板上,以使得封裝上的每一個端子對齊電路板上的對應接觸墊。焊料或是其它接合材料是被提供在端子與接觸墊之間。封裝可藉由加熱組件以熔化或「回焊」焊料或是以其他方式活化接合材料而永久地被接合在原位。
許多封裝包括處於焊料球的形式的焊料塊體,其直徑通常約0.1mm以及約0.8mm(5以及30mils),其會被附接至封裝的端子。具有從其底部表面處突出的焊料球陣列的封裝通常稱為球柵陣列(ball grid array)或「BGA」封裝。稱為平面格柵陣列(land grid array)或「LGA」封裝的其它封裝是藉由自焊料所形成的薄層或平面被固定至基板。屬於此類型的封裝可以是相當小型的。一般稱為「晶片級封裝」的特定封裝佔據電路板的面積會等於或僅略大於併入於封裝中的裝置面積。此優點在於它會縮減組件的總尺寸並且允許在基板上的各種裝置間使用短互連件,因而限定裝置間的訊號傳遞時間且因此有助於組件的高速操作。
經封裝的半導體晶片經常以「堆疊」排列的方式來提供,其中一封裝被提供(舉例而言)在電路板上,並且另一封裝被安裝在第一個 封裝的頂部上。這些排列可以讓數個不同晶片被安裝在電路板上的單一覆蓋區內,並且可以藉由在封裝間提供短互連件而進一步有助於高速運作。經常,此互連距離僅是略大於晶片本身的厚度。為了在晶片封裝的堆疊內達成互連,必須在每一個封裝的兩側(除最頂端的封裝之外)上提供用於機械與電性連接的結構。這已經(舉例而言)藉由在安裝了晶片的基板的兩側上提供接觸墊或平面而達成,墊會藉由傳導通孔或類似物通過基板而連接。焊料球或類似物已經被用來橋接下方基板的頂部上的接點至下一個較高基板的底部上的接點之間的間隙。焊料球必須高於晶片的高度,以便連接接點。堆疊晶片排列與互連結構的範例被提供在美國專利申請公開案第2010/0232129號(亦即,'129公開案)中,在此處以引用的方式將其揭示內容完整併入。
處於細長柱或接腳形式的微接點元件可以被用來連接微電子封裝至電路板並且用於微電子封裝中的其它連接。在一些實例中,微接點是已經藉由蝕刻金屬結構而形成,金屬結構包括用以形成微接點的一或多個金屬層。蝕刻製程會限制微接點的尺寸。習知蝕刻製程通常無法形成具有大的高度與最大寬度之比值(在此處稱為「深寬比(aspect ratio)」)的微接點。一直是困難的或者不可能的是,形成具有顯著高度且相鄰微接點間有超小間距或間隔的微接點陣列。再者,藉由習知蝕刻製程所形成的微接點的配置亦會受到限制。上面的所有描述雖然在本領域中已有進步,但是仍希望在製造與測試微電子封裝中作進一步改善。
根據本發明的態樣,一種構件可包括:大致上平坦元件,其 具有在橫向的第一方向和第二方向上延伸的相反面對的第一表面和第二表面;強化的介電層,其覆於所述大致上平坦元件的所述第一表面上;囊封,其覆於所述強化的介電層上;以及多個導線接合。所述大致上平坦元件可在所述第一表面處具有多個接點。所述囊封可具有背對所述大致上平坦元件的所述第一表面的主要表面。每一個導線接合皆可具有與所述多個接點的其中一個接點連結的基底以及遠離於所述基底在所述囊封的所述主要表面處的端部。
所述導線接合可具有在所述強化的介電層的至少一部分內延伸的第一部分和在所述囊封內延伸的第二部分。所述導線接合的至少一些的所述第一部分可具有在所述第一方向和所述第二方向中的至少一者改變各自所述導線接合的延伸方向的彎曲部。所述強化的介電層可具有圍繞所述多個導線接合的各自導線接合的突出區域,與所述強化的介電層在所述突出區域的相鄰突出區域之間的部分從所述大致上平坦元件的所述第一表面延伸相比,所述突出區域延伸至還要高的尖峰高度。所述突出區域的所述尖峰高度可與所述強化的介電層和所述導線接合的個別導線接合之間的接觸點重合。
在一實施例中,所述構件可包括微電子封裝。所述微電子封裝亦可包括具有相反面對的頂部表面和底部表面的微電子元件。所述底部表面可面對所述大致上平坦元件的所述第一表面並且可與其機械耦合。所述囊封的所述主要表面可覆於所述微電子元件的所述頂部表面上。在特定範例中,所述導線接合的所述至少一些的子集合的所述端部覆於所述微電子元件的所述頂部表面上。在示範性實施例中,所述導線接合的所述基底 在所述基底的相鄰基底之間界定第一最小間距,並且所述導線接合的所述端部在所述端部的相鄰端部之間界定第二最小間距,所述第二最小間距大於所述第一最小間距。在一範例中,所述介電層可覆於所述微電子元件的所述頂部表面上。
在特定實施例中,所述強化的介電層可包括覆於所述大致上平坦元件的所述第一表面上的第一強化的介電層以及覆於所述第一強化的介電層上且界定所述強化的介電層的上表面的第二強化的介電層。在一實施例中,所述導線接合的所述第一部分的所述彎曲部可以是第一彎曲部,並且所述導線接合的所述至少一些各自包括在所述第一方向和所述第二方向中的至少一者改變各自所述導線接合的所述延伸方向的第二彎曲部。在特定範例中,所述導線接合的所述第二彎曲部的至少一些可以是被設置在所述強化的介電層內。在示範性實施例中,所述強化的介電層可被配置以在當在垂直於所述第一方向和所述第二方向的第三方向上對於所述導線接合的所述端部施加力時,在所述第三方向上保持所述導線接合的所述端部的位置。
在一範例中,上面描述的所述微電子封裝亦可包括與所述導線接合的對應導線接合連結的多個上方端子。所述上方端子可以是在所述囊封的所述主要表面處並且可以被配置以與所述微電子封裝外部的構件的傳導元件電性連接。在特定實施例中,微電子組件可包括如上面描述的所述微電子封裝。所述微電子組件亦可包括具有端子的第二構件,所述導線接合的所述端部電性連接至所述端子。在一實施例中,一種系統可包括如上面描述的所述微電子封裝和電性連接至所述微電子封裝的一或多個其他 電子構件。在特定範例中,所述系統亦可包括外殼,所述微電子封裝和所述一或多個其他電子構件與所述外殼組裝。
根據本發明的另一態樣,一種微電子封裝可包括:大致上平坦元件,其具有在橫向的第一方向和第二方向上延伸的相反面對的第一表面和第二表面;強化的介電層,其覆於所述大致上平坦元件的所述第一表面上;囊封,其覆於所述強化的介電層上;微電子元件,其具有相反面對的頂部表面和底部表面;以及多個導線接合。所述大致上平坦元件可在所述第一表面處具有多個接點。所述囊封可具有背對所述大致上平坦元件的所述第一表面的主要表面。所述微電子元件的所述底部表面可面對所述大致上平坦元件的所述第一表面並且可與其機械耦合。所述囊封的所述主要表面可覆於所述微電子元件的所述頂部表面上。
每一個導線接合皆可具有與所述多個接點的其中一個接點連結的基底以及遠離於所述基底在所述囊封的所述主要表面處的端部。所述導線接合可具有在所述強化的介電層的至少一部分內延伸的第一部分和在所述囊封內延伸的第二部分。所述導線接合的至少一些的所述第一部分可具有在所述第一方向和所述第二方向中的至少一者改變各自所述導線接合的延伸方向的彎曲部。與所述微電子元件從所述大致上平坦元件的所述第一表面延伸相比,所述強化的介電層可延伸至還要高的尖峰高度。在示範性實施例中,所述導線接合的所述至少一些的子集合的所述端部可覆於所述微電子元件的所述頂部表面上。在一範例中,所述導線接合的所述第一部分的所述彎曲部可以是第一彎曲部,並且所述導線接合的所述至少一些各自可包括在所述第一方向和所述第二方向中的至少一者改變各自所述 導線接合的所述延伸方向的第二彎曲部。
根據本發明的又另一態樣,一種形成構件的方法可包括:提供大致上平坦元件,其具有在橫向的第一方向和第二方向上延伸的相反面對的第一表面和第二表面;形成多個導線接合;形成強化的介電層,其覆於所述大致上平坦元件上的所述第一表面上;使囊封模流(flowing)在所述強化的介電層和模製膜的下表面之間,所述導線接合的端部延伸至所述模製模中;以及從所述囊封移除所述模製膜。所述大致上平坦元件可在所述第一表面處具有多個接點。每一個導線接合皆可具有與所述多個接點的其中一個接點連結的基底以及遠離所述基底的端部。所述導線接合的至少一些的第一部分可具有在所述第一方向和所述第二方向中的至少一者改變各自所述導線接合的延伸方向的彎曲部。
所述導線接合的所述第一部分可在所述強化的介電層的至少一部分內延伸。所述強化的介電層可具有圍繞所述多個導線接合的各自導線接合的突出區域。與所述強化的介電層在所述突出區域的相鄰突出區域之間的部分從所述大致上平坦元件的所述第一表面延伸相比,所述突出區域可延伸至還要高的尖峰高度。所述突出區域的所述尖峰高度可與所述強化的介電層和所述導線接合的個別導線接合之間的接觸點重合。所述囊封可具有背對所述大致上平坦元件的所述第一表面的主要表面。所述導線接合可具有在所述囊封內延伸的第二部分。所述導線接合的所述端部可以是在所述囊封的所述主要表面處。
在特定實施例中,所述構件可包括如上面描述的微電子封裝。所述微電子封裝亦可包括具有相反面對的頂部表面和底部表面的微電 子元件。所述微電子元件的所述底部表面可面對所述大致上平坦元件的所述第一表面並且可與其機械耦合。所述囊封的所述主要表面可覆於所述微電子元件的所述頂部表面上。在一實施例中,在所述囊封的所述模流之前,所述突出區域可向上芯吸(wick up)所述導線接合並且可達到它們各自的尖峰高度。在特定範例中,所述突出區的所述尖峰高度可以未達到所述導線接合的所述端部。在示範性實施例中,所述方法亦可包括:在所述囊封的所述模流之前,沉積所述模製膜而覆於所述強化的介電層上。所述導線接合的所述端部可延伸至所述模製膜中。
10‧‧‧微電子封裝
20‧‧‧導線接合
20a‧‧‧導線接合
20b‧‧‧位置
21‧‧‧端部
21a‧‧‧端部
21b‧‧‧位置
22‧‧‧基底
23‧‧‧邊緣表面
24‧‧‧未囊封部分
30‧‧‧微電子元件
31‧‧‧底部表面
32‧‧‧頂部表面
33‧‧‧側邊表面
40‧‧‧基板
41‧‧‧第一表面
42‧‧‧第二表面
43‧‧‧接點
44‧‧‧端子
45‧‧‧通孔
50‧‧‧囊封
51‧‧‧主要表面
60‧‧‧模製膜
61‧‧‧下表面
200‧‧‧微電子組件
201‧‧‧第二基板
202‧‧‧第一表面
203‧‧‧第二表面
204‧‧‧第一端子
205‧‧‧第二端子
206‧‧‧通孔
210‧‧‧微電子封裝
220‧‧‧導線接合
220’‧‧‧導線接合
220a‧‧‧導線接合
220b‧‧‧位置
221‧‧‧端部
221a‧‧‧端部
221b‧‧‧位置
222‧‧‧基底
223‧‧‧邊緣表面
225‧‧‧第一部分
226‧‧‧第二部分
227‧‧‧第一彎曲部
228‧‧‧第二彎曲部
229‧‧‧子集合
230‧‧‧微電子元件
231‧‧‧底部表面
232‧‧‧頂部表面
233‧‧‧側邊表面
240‧‧‧基板
241‧‧‧第一表面
243‧‧‧接點
250‧‧‧囊封
251‧‧‧主要表面
270‧‧‧強化的介電層
271‧‧‧主要表面
272‧‧‧下方區域
273‧‧‧突出區域
300‧‧‧微電子組件
301‧‧‧第二基板
310‧‧‧微電子封裝
320‧‧‧導線接合
320a‧‧‧導線接合
320b‧‧‧導線接合
321‧‧‧端部
322‧‧‧基底
325‧‧‧第一部分
326‧‧‧第二部分
327‧‧‧第一彎曲部
328‧‧‧第二彎曲部
330‧‧‧微電子元件
332‧‧‧頂部表面
340‧‧‧基板
341‧‧‧第一表面
350‧‧‧囊封
370‧‧‧強化的介電層
404‧‧‧上方端子
410‧‧‧微電子封裝
443‧‧‧接點
480‧‧‧虛線
500‧‧‧系統
501‧‧‧外殼
502‧‧‧面板
504‧‧‧導體
506‧‧‧模組或構件
508‧‧‧模組或構件
510‧‧‧模組或構件
511‧‧‧構件
圖1說明根據本發明的實施例的微電子封裝的側邊截面圖,微電子封裝包括延伸通過在基板和模製膜之間的囊封物的導線接合。
圖2說明根據圖1的微電子封裝的變化例的微電子封裝的側邊截面圖,微電子封裝包括延伸通過在第一和第二基板之間的加固層和囊封物的導線接合。
圖3說明圖2的微電子封裝的變化例的微電子封裝的側邊截面圖。
圖4說明圖2或圖3的囊封物以及頂部和底部接點的一可能圖解俯視圖。
圖5是根據本發明的一實施例的系統的示意圖。
如圖1中所示,根據本揭示的實施例,處於製程中(in-process)微電子封裝10的形式的構件可以藉由將多個導線接合20和微 電子元件30連結並且電性連接至處於基板40的形式的大致上平坦元件所製成,基板40具有第一表面41和與第一表面相對的第二表面42。電性傳導接點43和電性傳導端子44(其處於接點或墊的形式)可被各別配置在第一表面41和第二表面42處。製程中微電子封裝10可包括囊封50,其形成以延伸在個別導線接合20之間並且覆於微電子元件30和基板40上。模製膜60可被放置在導線接合20的端部21上方,以在形成囊封50時固定導線接合的位置。
如本揭示中所使用的,用語諸如“上(upper)”、“下(lower)”、“頂部(top)”、“底部(bottom)”、“上面(above)”、“下面(below)”以及指示方向的類似用語,參考的是構件自身的參考坐標系,而不是重力參考坐標系。在部件以圖式所示的方向沿重力參考坐標系定向的情況下,在重力參考坐標系中圖式中的頂部在上且圖式中的底部在下時,確實微電子元件的頂部表面在重力參考坐標系中是位於微電子元件的底部表面上面。然而,當部件被翻轉時,在重力參考坐標系中圖式中的頂部面向下時,微電子元件的頂部表面在重力參考坐標系中是位於微電子元件的底部表面下面。
如本揭示中參考一構件(例如,中介件、微電子元件、電路板、基板等等)所使用的,電性傳導元件是“在”構件的表面“處”的聲明所表示的是,當構件未與任何其他元件組裝時,電性傳導元件是可用於與在垂直於構件的表面的方向上從構件外部朝向構件的表面移動的理論點接觸。因此,在基板的表面處的端子或其他傳導元件可從此表面突出;可與此表面齊平;或可相對於此表面在基板中的孔或凹陷中凹入。如在此處 所使用的,用語“約”和“近似”相對於給定數值意指的是,實際值是落在給定數值的相關領域中習知此技術者所知的典型製造公差內。
多個導線接合20可以與至少一些接點43電性連結。導線接合20的每一者可以在其基底22處接合(諸如,球型接合或楔形接合)至各自接點43。導線接合20的每一者可以延伸至遠離此導線接合的基底22和遠離基板20的端部21,並且可以包括從端部21延伸至基底22的邊緣表面23。在特定範例中,導線接合20可具有2密耳(~51微米)、小於2密耳、1.5密耳(~38微米)、小於1.5密耳、1密耳(~25微米)或小於1密耳的直徑。
導線接合20的端部21可以用於電性連接(無論是直接地或間接地如通過焊料球、電性傳導接點或在此處所討論的其他特徵)至微電子封裝10外部的傳導元件。可根據被使用以形成導線接合的材料類型、導線接合和接點43之間所要的連接強度或被使用以形成導線接合的特定製程,改變導線接合20的基底22的特定尺寸和形狀。導線接合20可具有一種構造並且可以用任何合適的方式被形成在基板40上而從接點43延伸,諸如在2012年2月24日所提申的美國專利申請公開案第2013/0093087號中所描述的,其藉以在此處通過引用併入。
微電子元件30可被機械耦合至基板40的第一表面41(例如藉由黏著劑材料),而微電子元件的底部表面31面對基板的第一表面。微電子元件30可具有與底部表面31相對的頂部表面32。微電子元件可在底部表面31或頂部表面32的任一者或兩者處具有元件接點(未示出)。如在此處所描述的,微電子元件30的元件接點亦可被稱為“晶片接點”。在 一範例中,微電子元件30的元件接點可以是在其中心區域內在底部表面31或頂部表面32的一者處。舉例而言,元件接點可以一或兩個平行的列來配置而鄰近於底部表面31或頂部表面32的中央。
雖然未在圖示中例示微電子元件30和基板40之間的特定電性連接,但是本發明欲涵蓋微電子元件和基板之間各種類型的電性連接,包括(舉例而言)“覆晶”配置,其中在微電子元件30的底部表面31處的元件接點(未示出)可被連接至在基板40的第一表面41處的傳導元件,諸如藉由被定位在微電子元件下方的傳導連結元件(未示出)。在一些實施例中,此些傳導連結元件可以是(舉例而言)接合金屬的塊體(諸如焊料、錫、銦、共晶組成(eutectic composition)或它們的組合),或是另一連結材料(諸如導電膏、導電性黏著劑或導電基質材料),或是任何或所有此些接合金屬或導電材料的組合。
在一範例中,藉由延伸通過基板中的孔隙的傳導結構(例如導線接合或引線接合),在微電子元件30的底部表面31處的元件接點可以與在基板40的第二表面42處的接點電性連接。在另一範例中,藉由延伸在微電子元件的頂部表面上面的傳導結構(例如導線接合),在微電子元件30的底部表面32處的元件接點可以與在基板40的第一表面41處的接點電性連接。
在一些實施例中,微電子元件30可以各自是半導體晶片、晶圓或類似者。舉例而言,微電子元件30可以各自包括記憶體儲存元件,其諸如動態隨機存取記憶體(DRAM)儲存陣列,或是其被配置以主要作用為DRAM儲存陣列(例如DRAM積體電路晶片)。如在此處所使用的,“記 憶體儲存元件”意指以列來配置的多個記憶體單元,連同可用以從其儲存和擷取資料的電路,諸如用以傳輸資料以通過電子介面。在一範例中,微電子元件30可具有記憶體儲存陣列的功能。在特定實施例中,微電子元件30為提供記憶體儲存陣列功能而體現的主動裝置的數量可大於任何其它功能。
微電子元件30可體現多個主動裝置(例如電晶體、二極體等等)、多個被動裝置(例如電阻器、電容器、電感器等等)或主動裝置和被動裝置兩者。在特定實施例中,微電子元件30可以被配置以具有如邏輯晶片的主要功能(例如,可程式化的通用或專用處理器、微處理器、現場可程式化閘極陣列(FPGA)裝置、特殊應用積體電路(ASIC)、數位訊號處理器等等),或是除了如邏輯晶片之外諸如記憶體的主要功能(舉例而言,揮發性記憶體儲存區域(動態隨機存取記憶體(DRAM)、靜態隨機存取記憶體(SRAM))、非揮發性記憶體儲存陣例(諸如快閃記憶體或磁性隨機存取記憶體(MRAM)))。如此,圖1的實施例是處於製程中經封裝微電子元件的形式,諸如被使用在電腦或其他電子應用中的半導體晶片組件。
雖然在圖式中例示的是在微電子封裝10中(以及在此處的其他微電子封裝中)的單一個微電子元件30,但是本揭示中的每一個微電子封裝可包括多個微電子元件,其是以沿著基板40的第一表面41而彼此相鄰的方式、以覆於基板的第一表面上的垂直堆疊的方式或是以在該領域中已知的其他配置的方式被配置。
基板40可包括介電元件,其在一些情況下可基本上由聚合性材料所組成,例如樹脂或聚酰亞胺等等,並且其可以是大致上平坦的。 介電元件可以是薄片狀並且可以是薄的。替代而言,基板40可包括具有複合結構的介電元件,諸如玻璃強化的環氧樹脂(例如由BT樹脂或FR-4結構所組成)。在特定實施例中,介電元件可包括一或多層有機介電材料或複合介電材料,諸如(但不限於):聚酰亞胺,聚四氟乙烯(PTFE),環氧樹脂,環氧玻璃(epoxy-glass),FR-4,BT樹脂,熱塑性或熱固性塑料材料。在另一範例中,基板可包括具有由小於每攝氏度百萬分(ppm/℃)之12的熱膨脹係數(CTE)的材料所製成的支撐元件,而接點41、端子42和其他傳導結構可以被設置在其上。舉例而言,此低CTE的元件可基本上由玻璃、陶瓷、半導體材料、或液晶聚合物材料、或此些材料的組合所組成。替代而言,基板40可以是電路面板或電路板。在其一範例中,基板可以是雙直列記憶體模組(DIMM)的模組板。在一範例中,基板可包括由具有小於30ppm/℃的CTE的材料所製成的支撐元件。
第一表面41和第二表面42可以大致上彼此平行並且隔開一段與界定基板的厚度T的該些表面垂直的距離。基板40的厚度可以是對本申請案而言在大致上可接受的厚度範圍內。在一實施例中,第一表面41和第二表面42之間的距離是在約10~500μm之間。為了討論的目的,第一表面41可以被描述為被定位於與第二表面42相對或遠離第二表面42。此描述以及任何其他在此處所使用的元件的相對位置的描述(其指出此些元件的垂直或水平位置)僅是用於說明的目的,以對應圖式中的元件位置,並且是非限制性的。
接點43和端子44可以是平坦、薄電性傳導元件。接點43和端子44可以是固體金屬材料,諸如銅、金、鎳、鈀,或是對於比應用而 言可接受的其他材料,包括含有銅、金、鎳、鈀或它們的組合中的一或多種的各種合金。至少一些接點43可以被互連到相應端子44。此互連可以利用形成在基板40中而可被內襯或填充有傳導金屬的通孔45來完成,傳導金屬可以是由與接點43和端子44相同的材料所形成。選擇性而言,接點43和端子44可以藉由基板40上的跡線(未示出)進一步彼此互連。端子44可以被配置用於與外部構件(諸如,另一微電子封裝或是如電路板的電路面板)電性互連。
與基板40的第一表面41平行的橫向的第一方向D1和第二方向D2(例示於圖4中)在此處被稱為“水平的”或“側向的”方向,而與第一表面垂直的方向(例如,D3)在此處被稱為向上或向下的方向且在此處亦被稱為“垂直的”方向。在此處所提到的方向是在所提到的結構的參考坐標系中。因此,這些方向可位於相對於重力參考坐標系中的一般“上”或“下”方向而言任何指向上。
一特徵是被設置在“一表面上面”與另一特徵相比較高的位置處的聲明所意指的是,一特徵是位於一在相同正交方向上與其他特徵相比離該表面較遠的距離處。相反地,一特徵是被設置在“一表面上面”與另一特徵相比較低的位置處的聲明所意指的是,一特徵是位於一在相同正交方向上與其他特徵相比離該表面較近的距離處。
囊封50可以被形成以延伸在個別導線接合20之間並且覆於微電子元件30的頂部表面32和基板40的第一表面41上。囊封50可以由介電材料所形成,諸如在該領域中已知為被典型地用於囊封或包覆成型(overmold)的那些材料。在圖1的實施例中,囊封50可(舉例而言)藉 由膜輔助模製(film-assisting molding)或類似技術而形成在基板40的第一表面41的未另外被微電子元件30或接點43所覆蓋或佔據的部分上方。
囊封50(理想地是一整體、連續的介電層)可用以保護在微電子封裝10內的傳導元件,特別是導線接合20。囊封50亦可大致上覆蓋微電子元件30、導線接合20(包括基底22)和其邊緣表面23的至少一部分。此外,囊封50可被形成在微電子元件30的延伸在底部表面31和頂部表面32之間的側邊表面33上方。囊封50可以保護微電子元件50,以避免在導線接合20之間電性短路,並且有助於避免由於導線接合和微電子元件之間非故意的電性接觸所造成的故障或可能的損壞。
囊封50可允許更堅固的結構,而較不容易由於其之測試或在運輸或與其他微電子結構的組裝期間受到損壞。囊封50可以是由具有絕緣特性的介電材料所形成,諸如在美國專利申請公開案第2010/0232129號中所描述的,其藉以在此處通過引用併入。
在一些實施例中,導線接合20的部分可以保持未被囊封50所覆蓋,其亦可以被稱為未囊封部分24,藉此使導線接合可用於電性連接至位於囊封50外部的傳導特徵或元件。在一些實施例中,至少導線接合20的端部21和選擇性而言邊緣表面23的部分可保持未被囊封50所覆蓋,諸如在美國專利申請公開案第2013/0093087號中所描述的,其藉以在此處通過引用併入。換句話說,囊封50可以從第一表面41以上覆蓋整個微電子封裝30,除了導線接合20的一部分之外,諸如端部21、邊緣表面23的部分或它們的組合。
導線接合20的端部21可以在形成囊封50時延伸至模製膜 60中。舉例而言,模製膜60可以被提供在模板的內部表面上。在囊封50被形成在含有製程中微電子封裝10和模製膜的模具內之後,模製膜可以從囊封移除,諸如藉由施加合適的化學物質以脫離或溶解模製膜。在一實施例中,模製膜60可以由水溶性的塑膠材料所製成,以使得它可以藉由暴露於水而移除,而不影響製程中單元或微電子封裝10中的其他構件。在另一實施例中,模製膜60可以在暴露於紫外光之後從囊封50移除。在移除模製膜60之後,導線接合20的端部21可以保持未覆蓋,並且因而可用於與其他構件電性連接,諸如另一微電子組件或微電子封裝的跡線、墊或端子。
在圖1的實施例中,導線接合20的端部21可在形成囊封50之前接觸模製膜60,並且導線接合的端部的至少一些會在方向D3上向下偏轉(亦即,朝基板40的第一表面41)。導線接合20的端部21的至少一些的此向下偏轉會妨礙受影響的端部在囊封50的主要表面51處與其他傳導元件電性互連。此外,導線接合20的端部21的至少一些的此向下偏轉會導致在導線接合之間電性短路,和/或由於導線接合和微電子元件30之間非故意的電性接觸所造成的故障或可能的損壞。
舉例而言,如圖1中所示,其中一個導線接合20a的其中一個端部21a會被模製膜60在方向D3上向下偏轉一距離D,以使得端部21a向下移動至位置21b,並且導線接合向下偏轉至位置20b。導線接合20a的此向下偏轉會導致導線接合和微電子元件30之間非故意的電性接觸,和/或在導線接合之間電性短路。
導線接合20的端部21的此向下偏轉對於包括具有約1密耳或更小(約25微米或更小)的直徑的導線接合的BVA和BGA互連而言會 是一個重要的問題。導線接合20的端部21的此向下偏轉對於包括具有大於1密耳的直徑的導線接合的BVA和BGA互連而言亦會是一個重要的問題。在此處所描述的結構可在BVA和BGA互連介面處導致較少的應力。此類結構亦允許微電子結構的連結且具有較小的連結單元尺寸,而可減少經連結的微電子結構的擴散動能(diffusion kinetics)和厚度。
圖2說明包括處於微電子封裝210的形式的構件的微電子組件200,微電子封裝210是圖1的微電子封裝10的變化例。以下未描述的微電子封裝210的元件應被理解為是與上面參照例示於圖1中的微電子封裝10所描述的對應元件相同。
微電子組件200可包括微電子封裝210,其以如下面所描述的方式被連結且電性連接至第二基板201。微電子封裝210可包括多個導線接合220和微電子元件230,其被連結且電性連接至處於基板240的形式的大致上平坦元件。導線接合220的至少一些可包括鄰近於導線接合的基底222的第一部分225與鄰近於導線接合的端部221的第二部分226。
微電子封裝210可包括囊封250,其被形成以延伸在個別導線接合220的第二部分226之間,以及強化的介電層270,其被形成以延伸在個別導線接合220的第一部分225之間且覆於微電子元件230的頂部表面232與基板240的第一表面241上。囊封250的主要表面251可覆於微電子元件230的頂部表面232上。導線接合220的至少一些的端部221可以在囊封250的主要表面251處暴露。
強化的介電層270可在形成囊封250之前形成。強化的介電層270可以與微電子元件230和基板240的第一表面241兩者機械耦合。囊 封250可覆於強化的介電層270的上表面271上,並且可具有覆於強化的介電層和微電子元件230的頂部表面232上的主要表面251。
強化的介電層270可以被形成以延伸在個別導線接合220之間並且覆於微電子元件230的頂部表面232和基板240的第一表面241上。在圖2的實施例中,強化的介電層270可被形成在基板240的第一表面241的未被微電子元件230或接點243所另外覆蓋或佔據的部分上方。強化的介電層270可以是由介電材料所形成之一整體、連續的層。強化的介電層270可界定出背對基板240的第一表面241的上表面271。
強化的介電層270亦可大致上覆蓋微電子元件230、導線接合220的第一部分220(包括基底222)和其邊緣表面223的至少一部分。此外,強化的介電層270可被形成在微電子元件230延伸在底部表面231和頂部表面232之間的側邊表面233上方。強化的介電層270可以保護微電子元件230,以避免在導線接合220間電性短路,並且有助於避免由於導線接合和微電子元件之間非故意的電性接觸所造成的故障或可能的損壞。在一範例中,強化的介電層270的上表面271可覆於微電子元件230的頂部表面231上。
強化的介電層270可被配置以為導線接合220的第一部分225提供加固功能。導線接合220的第一部分225可在強化的介電層270的至少一部分內延伸。強化的介電層270可被配置以在當在垂直於第一方向和第二方向(圖4的D1和D2)的第三方向上對於導線接合的端部施加力時,在所述第三方向D3上保持導線接合220的端部221的位置。
在特定範例中,強化的介電層270可具有比囊封的楊氏模數 還高的楊氏模數。然而,一旦提出所需加固功能,強化的介電層的楊氏模數也可以是任何合適的數值。在一範例中,強化的介電層270可以是由環氧樹脂所製成,並且可具有在5~50Gpa之間的楊氏模數,並且囊封250的楊氏模數的數值和強化的介電層的楊氏模數的數值相比可以較低、較高或相同。
強化的介電層270的上表面271可具有下方區域272和圍繞導線接合220的個別者的突出區域273。下方區域272可延伸在突出區域273的相鄰突出區域273之間。下方區域272可延伸至從基板240的第一表面241算起的第一尖峰高度A1,並且突出區域可延伸至從基板的第一表面算起的第二尖峰高度A2。與強化的介電層270在相鄰突出區域之間的部分272從基板240的第一表面241延伸的尖峰高度A1相比,突出區域273可延伸至更大的尖峰高度A2。突出區域273從基板240的第一表面241算起的尖峰高度A2可與在強化的介電層270和導線接合220的個別導線接合220之間的接觸點重合。在此處所示的範例中,突出區域273的第二尖峰高度A2並未達到囊封250的主要表面251,並且突出區域的第二尖峰高度A2並未達到導線接合220的端部221。
雖然強化的介電層270的上表面271的下方區域272在圖2及圖3中是被示為延伸至從基板240的第一表面241算起的均一第一尖峰高度A1,但不必是這種情況。在一些範例中,強化的介電層270的上表面271的下方區域272的不同部分可延伸至從基板240的第一表面241算起的各種第一尖峰高度A1。在一些範例中,強化的介電層270的上表面271的突出區域273中的個別者可各自延伸至從基板240的第一表面241算起的不同第 二尖峰高度A2。每一個突出區域273可圍繞導線接合270中的一或多個個別導線接合270。每一個突出區域273自己可具有在基板240的第一表面241上面的第二尖峰高度A2而與導線接合270的個別導線接合270中的一者的接觸點重合。
強化的介電層270可以是由具有絕緣特性的介電材料所形成,諸如環氧樹脂或另一合適的聚合性材料。強化的介電層270可以是由相對黏稠(例如,比囊封物250的材料更黏稠)的介電材料所形成。強化的介電層270可以是由介電材料所形成,該介電材料濕潤導線接合220的邊緣表面223,並且可在形成期間芯吸(wick up)邊緣表面向上至從基板240的第一表面241算起的第二尖峰高度A2。在一範例中,在形成囊封物材料250之前,強化的介電層270的上表面271的突出區域273可向上芯吸導線接合220並且達到它們各自的第二尖峰高度A2。在此處所示的範例中,突出區域273的第二尖峰高度A2並未達到導線接合220的端部221。
導線接合220可各自具有連結到接點243中的對應一者的基底222和遠離基底的端部221。導線接合220的至少一些可具有在強化的介電層270的至少一部分內延伸的第一部分225和在囊封250內延伸的第二部分226。導線接合220中的至少一些的第一部分225(其在強化的介電層270內延伸)可各自包括在第一方向D1和第二方向D2中的至少一者改變各自導線接合的延伸方向E1的第一彎曲部227。在一實施例中,導線接合220的第一部分225的第一彎曲部227中的至少一些可以是被設置在強化的介電層270內。
在一些範例中,導線接合220中的至少一些的第二部分226 (其在囊封250內延伸)可各自包括在第一方向D1和第二方向D2中的至少一者改變各自導線接合的延伸方向E1的第二彎曲部228。在一實施例中,導線接合220的第二彎曲部228中的至少一些可以是被設置在強化的介電層270內。在一範例中,導線接合220的第一彎曲部227和第二彎曲部228中的至少一些可以是被設置在強化的介電層270內。如圖2中所示,可不需要讓所有的導線接合220皆具有第一彎曲部227和/或第二彎曲部228。舉例而言,導線接合220’不具有第一彎曲部227或第二彎曲部228。
在特定範例中,導線接合220的第一彎曲部227中的至少一些可以是被設置在強化的介電層270內,而導線接合220的第二彎曲部228中的至少一些可以是被設置在囊封250內。在一些實施例中,導線接合的第一彎曲部227和第二彎曲部228可允許導線接合的子集合229中的端部221覆於微電子元件230的頂部表面232上。
位於基板240的第一表面241上面的各自突出區域273的第二尖峰高度A2可以是比各自導線接合220的第一彎曲部227的高度A3位於更遠的地方。位於基板240的第一表面241上面的各自導線接合220的第二彎曲部228的高度A4可以是比各自突出區域273的第二尖峰高度A2位於更遠的地方。
導線接合220的第一彎曲部227和第二彎曲部228可以在基板240的第一表面241和囊封250的主要表面251之間的導線接合提供間距改變的作用。如同可以在圖2的範例中見到的,導線接合220的基底222可在基底中的相鄰基底之間界定第一最小間距P1,並且導線接合的端部221在端部中的相鄰端部之間界定第二最小間距P2,第二最小間距大於第一最 小間距。在一範例中,第一最小間距P1可以是40~200微米,並且第二最小間距P2可以是150~300微米。
類似於圖1,此類似於模製模60的模製模可以被降低到從基板240的第一表面2414延伸的導線接合220的端部221上,以在形成囊封250時固定導線接合的位置。在形成強化的介電層270之後並且在形成囊封250之前,模製模可以被沉積在導線接合220的端部221上。
在圖2中所示的範例中,當形成強化的介電層270之後導線接合的端部221接觸模製膜時,強化的介電層可在當在第主方向上D3對導線接合的端部施加力時,在第三方向D3上保持導線接合220的端部221的位置。舉例而言,如圖2中所示,當模製模被施加至其中一個導線接合220a的其中一個端部221a時,強化的介電層270可加固導線接合,藉此阻止端部在方向D3上向下偏轉一距離D至位置221b,並且阻止導線接合向下偏轉至位置220b。
在一些實施例中,在囊封物材料250的模流(flowing)之前,模製膜可被沉積在導線接合220的端部221上,而端部延伸至模製膜中,模製模覆於強化的介電層270上。在導線接合220的端部221接觸模製膜之後,囊封物材料250可被模流在強化的介電層270的上表面271和導線接合的端部所延伸於其中的模製膜的下表面(例如,圖1中所示的下表面61)之間。在囊封250被形成在含有微電子封裝210和模製膜的模具內之後,膜製膜可藉由上面參考圖1所描述的任何移除方法從囊封移除,並且導線接合220的至少一些的端部221可在囊封250的主要表面271處暴露。
在一些實施例中,強化的介電層270可包括覆於基板240的 第一表面241上的第一強化的介電層,以及覆於第一強化的介電層上且界定強化的介電層的上表面271的第二強化的介電層。在此些實施例中,第一部分225可延伸通過第一和第二強化的介電層,強化的介電層270的上表面271的下方區域272和突出區域273可被形成在第二強化的介電層中。
如圖2中所示,微電子組件200亦可包括第二基板201。第二基板201可以是具有相對的第一表面202和第二表面203的構件。第二基板201可在第一表面202處具有第一端子204且在第二表面203處具有第二端子205。第一端子204中的至少一些可以被電性互連到第二端子205中的相應者。此互連可以利用形成在基板40中的通孔206來完成,舉例而言,通孔206可被內襯或填充有傳導金屬,傳導金屬可以是由與第一端子204和第二端子205相同的材料所形成。第二端子205可以被配置用於與外部構件(諸如,另一微電子封裝或是如電路板的電路面板)電性互連。在圖2中所示的範例中,導線接合220的端部221可以被電性連接至第二基板201的第一端子204。
在一實施例中,第一端子204可以是封裝210在囊封的主要表面251處的上方端子。在此實施例中,第一端子204可以被配置以與微電子封裝210外部的構件(諸如,第二基板201、另一微電子封裝或是如電路板的電路面板)的傳導元件電性連接。
圖3說明包括處於微電子封裝310的形式的構件的微電子組件300,微電子封裝300是圖2中的微電子封裝210的變化例。以下未描述的微電子封裝310的元件應被理解為是與上面參照例示於圖2中的微電子封裝210所描述的對應元件相同。
微電子組件300可包括微電子封裝310,其被連結且電性連接至第二基板301。微電子封裝310可包括多個導線接合320和微電子元件330,其被連結且電性連接至處於基板340的形式的大致上平坦元件。微電子封裝310可包括囊封350,其被形成以延伸在個別導線接合320的第二部分326之間,以及強化的介電層370,其被形成以延伸在個別導線接合320的第一部分325且覆於微電子元件330的頂部表面332與基板340的第一表面341上。
如可以在圖3中見到的,導線接合320a中的一些可具有第一彎曲部327和第二彎曲部328,其與其他導線接合320b的第一彎曲部和第二彎曲部相比以更大的角度改變導線接合的延伸方向E1。在此實施例中,導線接合320a的端部321和基底322與導線接合320b的端部和基底相比可以在第一方向D1和第二方向D2中的一者或兩者偏移一更大的距離。在側視圖中,導線接合320a的路徑將呈現與導線接合320b的路徑交叉,如圖3中所示。
在圖3中所示的實施例中,強化的介電層370對於導線接合320a的加固功能可以是特別有利的。假如導線接合320a具有第一彎曲部327和第二彎曲部328而使得導線接合的端部321和基底322在第一方向D1和第二方向D2中的一或兩者與圖2的導線接合相比偏離一更大的距離,則此些導線接合320a的端部與圖2的導線接合的端部相比可在第三方向D3上被更容易地移動。因此,與導線接合320b和圖2的導線接合220相比,強化的介電層370可以當在第三方向上對導線接合的端部施加力時,在第三方向D3上更有效地保持導線接合220a的端部321的位置。
在上面相對於圖2和圖3所描述的實施例的進一步變化例中,微電子元件230和330可被省略。在此些範例中,構件可舉例而言具有如同上面相對於圖2所述的結構,但是微電子元件被省略。在此範例中,構件可以在基板的接點243和端子204之間提供間距改變的作用。在特定範例中,微電子元件可以與此構件合併,舉例而言藉由在形成構件之後將微電子元件安裝至基板的第二表面。替代而言,構件的囊封可提供有開口,其被尺寸化以在製造構件之後的時間點在基板的第一表面上面容納微電子元件的置放。
在進一步變化例中,大致上平坦元件可被提供以替代如圖2中所示的基板240。在特定範例中,大致上平坦元件可以是微電子元件。參照圖1,在此變化例的特定形式中,大致上平坦元件可缺少在與平坦元件的第一表面41(導線接合在此處連結到接點43)相對的第二表面42處的端子44。
圖4說明處於微電子封裝410的形式的構件,微電子封裝410是圖2和圖3中的微電子封裝210和310的變化例。以下未描述的微電子封裝210和310的元件應被理解為是與上面參照例示於圖2和圖3中的微電子封裝210和310所描述的對應元件相同。
如同上面參考圖2所描述的,導線接合的第一彎曲部和第二彎曲部可以在基板的第一表面和囊封的主要表面之間的導線接合提供間距改變的作用。如同可以在圖4的範例中見到的,導線接合的基底可連結到的接點443可在其相鄰的中心之間界定第一最小間距P1,並且導線接合的端部可連結到的上方端子404可在其相鄰的中心之間界定第二最小間距 P2,第二最小間距大於第一最小間距。
此外,如同可以在圖4中見到的,上方端子404的數目可以少於接點443的數目。因此,可能需要的是上方端子404中的一或多個各自被連接到至少兩個接點443。此類對應是例示於圖4中,其中虛線480包圍由四個接點443所組成的示範性群組,其全部皆被短接在一起並且被電性連接至上方端子404中單一對應的一者。在一範例中,此些短接在一起的接點443群組可被配置以攜載電力或參考電壓(亦即,接地)。
上面參考圖1至圖4所描述的微電子封裝和微電子組件可被利用於各種電子系統(諸如圖5中所示的系統500)的建構。舉例而言,根據本發明的進一步實施例的系統500包括多個模組或組件506(諸如上面所描述的微電子封裝和微電子組件)而結合其他電子構件508、510和511。
在所示的示範性系統500中,系統可包括電路面板、主機板或豎式面板(riser panel)502(諸如,可撓性印刷電路板),並且電路面板可包括將模組或構件506、508和510彼此互連的眾多導體504,在圖5中僅描繪導體504中之一者。此電路面板502可將信號輸送至系統500所包括的微電子封裝和/或微電子組件中之每一者並且自系統500所包括的微電子封裝和/或微電子組件中之每一者輸送信號。然而,此僅為示範性的;可使用在模組或構件506之間形成電性連接之任何合適結構。
在特定實施例中,系統500亦可包括處理器(諸如半導體晶片508),以使得每一個模組或構件506皆可被配置以在一時脈循環內並行傳送N個資料位元,並且處理器可被配置以在一時脈循環內並行傳送M個資料位元,M大於或等於N。在圖5中描繪的範例中,構件508是半導體晶 片,並且構件510是顯示器螢幕,但任何其它構件皆可在系統500中被使用。當然,儘管為了說明清楚起見而在圖5中僅描繪兩個額外構件508和511,但系統500可包括任何數目的此類組件。
模組或構件506以及構件508及511可被安裝於以虛線示意性地描繪的共同外殼501中,且可在必要時彼此電性互連以形成所要電路。外殼501被描繪為可用於(舉例而言)行動電話或個人數位助理的類型的可攜式外殼,並且螢幕510可在外殼的表面處暴露。在結構506包括光敏感元件(諸如,成像晶片)的實施例中,透鏡511或其他光學裝置亦可被提供,以將光繞送至該結構。再者,圖5中所示的簡化系統僅僅是示範性的;可使用上面所討論的結構製造包括通常被視為固定結構的系統(諸如,桌上型電腦、路由器等等)的其他系統。
應當理解的是,本文中闡述的各種從屬申請專利範圍和特徵可以與初始申請專利範圍中所呈現的方式不同的方式組合。亦應當理解的是,結合個別實施例所描述的特徵可以與所描述實施例中的其他實施例共享。
儘管本發明在此處已經參考特定實施例來加以描述,但將理解的是這些實施例僅僅是說明本發明的原理及應用而已。因此應該理解的是,可對說明的實施例做出許多修改,並且可設計出其它配置,而不脫離如同所附的申請專利範圍所界定的本發明的精神與範疇。
200‧‧‧微電子組件
201‧‧‧第二基板
202‧‧‧第一表面
203‧‧‧第二表面
204‧‧‧第一端子
205‧‧‧第二端子
206‧‧‧通孔
210‧‧‧微電子封裝
220‧‧‧導線接合
220’‧‧‧導線接合
220a‧‧‧導線接合
220b‧‧‧位置
221‧‧‧端部
221a‧‧‧端部
221b‧‧‧位置
222‧‧‧基底
223‧‧‧邊緣表面
225‧‧‧第一部分
226‧‧‧第二部分
227‧‧‧第一彎曲部
228‧‧‧第二彎曲部
229‧‧‧子集合
230‧‧‧微電子元件
231‧‧‧底部表面
232‧‧‧頂部表面
233‧‧‧側邊表面
240‧‧‧基板
241‧‧‧第一表面
243‧‧‧接點
250‧‧‧囊封
251‧‧‧主要表面
270‧‧‧強化的介電層
271‧‧‧主要表面
272‧‧‧下方區域
273‧‧‧突出區域

Claims (21)

  1. 一種構件,其包括:大致上平坦元件,其具有在橫向的第一方向和第二方向上延伸的相反面對的第一表面和第二表面,所述大致上平坦元件在所述第一表面處具有多個接點;強化的介電層,其覆於所述大致上平坦元件的所述第一表面上;囊封,其覆於所述強化的介電層上,所述囊封具有背對所述大致上平坦元件的所述第一表面的主要表面;以及多個導線接合,每一個導線接合皆具有與所述多個接點的其中一個接點連結的基底以及在所述囊封的所述主要表面處之遠離所述基底的端部,所述導線接合具有在所述強化的介電層的至少一部分內延伸的第一部分和在所述囊封內延伸的第二部分,所述導線接合中的至少一些的所述第一部分具有以所述第一方向和所述第二方向中的至少一者改變各自導線接合的延伸方向的彎曲部,其中所述強化的介電層具有圍繞所述多個導線接合的各自導線接合的突出區域,與所述強化的介電層在所述突出區域的鄰近突出區域之間的部分從所述大致上平坦元件的所述第一表面延伸相比,所述突出區域延伸至還要高的尖峰高度,所述突出區域的所述尖峰高度與在所述強化的介電層和所述導線接合的個別導線接合之間的接觸點重合。
  2. 如申請專利範圍第1項所述的構件,其中所述構件包括微電子封裝,所述微電子封裝進一步包括具有相反面對的頂部表面和底部表面的微電子元件,所述底部表面面對所述大致上平坦元件的所述第一表面並與其 機械耦合,並且其中所述囊封的所述主要表面覆於所述微電子元件的所述頂部表面上。
  3. 如申請專利範圍第2項所述的構件,其中所述導線接合中的所述至少一些的子集合的所述端部覆於所述微電子元件的所述頂部表面上。
  4. 如申請專利範圍第1項所述的構件,其中所述導線接合的所述基底在其相鄰基底之間界定第一最小間距,並且所述導線接合的所述端部在其相鄰端部之間界定第二最小間距,所述第二最小間距大於所述第一最小間距。
  5. 如申請專利範圍第2項所述的構件,其中所述強化的介電層覆於所述微電子元件的所述頂部表面上。
  6. 如申請專利範圍第1項所述的構件,其中所述強化的介電層包括覆於所述大致上平坦元件的所述第一表面上的第一強化的介電層以及覆於所述第一強化的介電層上且界定所述強化的介電層的上表面的第二強化的介電層。
  7. 如申請專利範圍第1項所述的構件,其中所述導線接合的所述第一部分的所述彎曲部是第一彎曲部,並且所述導線接合中的所述至少一些皆包括以所述第一方向和所述第二方向中的至少一者改變各自導線接合的所述延伸方向的第二彎曲部。
  8. 如申請專利範圍第7項所述的構件,其中所述導線接合的所述第二彎曲部中的至少一些是被設置在所述強化的介電層內。
  9. 如申請專利範圍第1項所述的構件,其中所述強化的介電層是被配置以在垂直於所述第一方向和所述第二方向的第三方向上對所述導線接合 的所述端部施加力時,在所述第三方向上保持所述導線接合的所述端部的位置。
  10. 如申請專利範圍第2項所述的構件,進一步包括與所述導線接合的對應導線接合連結的多個上方端子,所述上方端子在所述囊封的所述主要表面處並且被配置以與所述微電子封裝外部的構件的傳導元件電性連接。
  11. 一種微電子組件,其包括如申請專利範圍第2項所述的構件,所述微電子組件進一步包括具有端子的第二構件,所述導線接合的所述端部電性連接至所述端子。
  12. 一種系統,其包括如申請專利範圍第2項所述的構件和電性連接至所述微電子封裝的一或多個其他電子構件。
  13. 如申請專利範圍第12項所述的系統,進一步包括外殼,所述微電子封裝和所述一或多個其他電子構件與所述外殼組裝。
  14. 一種微電子封裝,其包括:大致上平坦元件,其具有在橫向的第一方向和第二方向上延伸的相反面對的第一表面和第二表面,所述大致上平坦元件在所述第一表面處具有多個接點;強化的介電層,其覆於所述大致上平坦元件的所述第一表面上;囊封,其覆於所述強化的介電層上,所述囊封具有背對所述大致上平坦元件的所述第一表面的主要表面;微電子元件,其具有相反面對的頂部表面和底部表面,所述底部表面面對所述大致上平坦元件的所述第一表面並與其機械耦合,所述囊封的所述主要表面覆於所述微電子元件的所述頂部表面上;以及 多個導線接合,每一個導線接合皆具有與所述多個接點的其中一個接點連結的基底以及在所述囊封的所述主要表面處之遠離所述基底的端部,所述導線接合具有在所述強化的介電層的至少一部分內延伸的第一部分和在所述囊封內延伸的第二部分,所述導線接合中的至少一些的所述第一部分具有以所述第一方向和所述第二方向中的至少一者改變各自導線接合的延伸方向的彎曲部,其中,與所述微電子元件從所述大致上平坦元件的所述第一表面延伸相比,所述強化的介電層延伸至還要高的尖峰高度。
  15. 如申請專利範圍第14項所述的微電子封裝,其中所述導線接合中的所述至少一些的子集合的所述端部覆於所述微電子元件的所述頂部表面上。
  16. 如申請專利範圍第14項所述的微電子封裝,其中所述導線接合的所述第一部分的所述彎曲部是第一彎曲部,並且所述導線接合中的所述至少一些皆包括以所述第一方向和所述第二方向中的至少一者改變各自導線接合的所述延伸方向的第二彎曲部。
  17. 一種形成構件的方法,其包括:提供大致上平坦元件,其具有在橫向的第一方向和第二方向上延伸的相反面對的第一表面和第二表面,所述大致上平坦元件在所述第一表面處具有多個接點;形成多個導線接合,每一個導線接合皆具有與所述多個接點的其中一個接點連結的基底以及遠離於所述基底的端部,所述導線接合中的至少一些的第一部分具有以所述第一方向和所述第二方向中的至少一者改變各自 導線接合的延伸方向的彎曲部;形成強化的介電層,其覆於所述大致上平坦元件的所述第一表面上,所述導線接合的所述第一部分在所述強化的介電層的至少一部分內延伸,所述強化的介電層具有圍繞所述多個導線接合的各自導線接合的突出區域,與所述強化的介電層在所述突出區域的鄰近突出區域之間的部分從所述大致上平坦元件的所述第一表面延伸相比,所述突出區域延伸至還要高的尖峰高度,所述突出區域的所述尖峰高度與在所述強化的介電層和所述導線接合的個別導線接合之間的接觸點重合;使囊封模流(flowing)在所述強化的介電層和模製膜的下表面之間,所述導線接合的端部延伸至所述模製膜中,所述囊封具有的主要表面背對所述大致上平坦元件的所述第一表面,所述導線接合具有的第二部分在所述囊封內延伸;以及從所述囊封移除所述模製膜,所述導線接合的所述端部是在所述囊封的所述主要表面處。
  18. 如申請專利範圍第17項所述的方法,其中所述構件包括微電子封裝,所述微電子封裝進一步包括具有相反面對的頂部表面和底部表面的微電子元件,所述底部表面面對所述大致上平坦元件的所述第一表面並與其機械耦合,並且其中所述囊封的所述主要表面覆於所述微電子元件的所述頂部表面上。
  19. 如申請專利範圍第17項所述的方法,其中在所述囊封的所述模流之前,所述突出區域向上芯吸(wick up)所述導線接合並且達到它們各自的尖峰高度。
  20. 如申請專利範圍第19項所述的方法,其中所述突出區域的所述尖峰高度並未達到所述導線接合的所述端部。
  21. 如申請專利範圍第17項所述的方法,其進一步包括在所述囊封的所述模流之前,沉積所述模製膜而覆於所述強化的介電層上,所述導線接合的所述端部延伸至所述模製膜中。
TW105137430A 2015-11-18 2016-11-16 用於偏移接合通孔陣列之經加固的導線 TW201729369A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562257223P 2015-11-18 2015-11-18
US15/086,899 US9659848B1 (en) 2015-11-18 2016-03-31 Stiffened wires for offset BVA

Publications (1)

Publication Number Publication Date
TW201729369A true TW201729369A (zh) 2017-08-16

Family

ID=58690828

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105137430A TW201729369A (zh) 2015-11-18 2016-11-16 用於偏移接合通孔陣列之經加固的導線

Country Status (3)

Country Link
US (1) US9659848B1 (zh)
TW (1) TW201729369A (zh)
WO (1) WO2017087502A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019031513A1 (ja) * 2017-08-10 2019-02-14 日立化成株式会社 半導体デバイス及びその製造方法

Family Cites Families (550)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1439262B2 (de) 1963-07-23 1972-03-30 Siemens AG, 1000 Berlin u. 8000 München Verfahren zum kontaktieren von halbleiterbauelementen durch thermokompression
US3358897A (en) 1964-03-31 1967-12-19 Tempress Res Co Electric lead wire bonding tools
US3430835A (en) 1966-06-07 1969-03-04 Westinghouse Electric Corp Wire bonding apparatus for microelectronic components
US3623649A (en) 1969-06-09 1971-11-30 Gen Motors Corp Wedge bonding tool for the attachment of semiconductor leads
DE2119567C2 (de) 1970-05-05 1983-07-14 International Computers Ltd., London Elektrische Verbindungsvorrichtung und Verfahren zu ihrer Herstellung
DE2228703A1 (de) 1972-06-13 1974-01-10 Licentia Gmbh Verfahren zum herstellen einer vorgegebenen lotschichtstaerke bei der fertigung von halbleiterbauelementen
JPS5150661A (zh) 1974-10-30 1976-05-04 Hitachi Ltd
US4067104A (en) 1977-02-24 1978-01-10 Rockwell International Corporation Method of fabricating an array of flexible metallic interconnects for coupling microelectronics components
US4213556A (en) 1978-10-02 1980-07-22 General Motors Corporation Method and apparatus to detect automatic wire bonder failure
US4327860A (en) 1980-01-03 1982-05-04 Kulicke And Soffa Ind. Inc. Method of making slack free wire interconnections
US4422568A (en) 1981-01-12 1983-12-27 Kulicke And Soffa Industries, Inc. Method of making constant bonding wire tail lengths
US4437604A (en) 1982-03-15 1984-03-20 Kulicke & Soffa Industries, Inc. Method of making fine wire interconnections
JPS59189069A (ja) 1983-04-12 1984-10-26 Alps Electric Co Ltd 電気部品の端子のハンダ塗布装置
JPS61125062A (ja) 1984-11-22 1986-06-12 Hitachi Ltd ピン取付け方法およびピン取付け装置
US4604644A (en) 1985-01-28 1986-08-05 International Business Machines Corporation Solder interconnection structure for joining semiconductor devices to substrates that have improved fatigue life, and process for making
US4642889A (en) 1985-04-29 1987-02-17 Amp Incorporated Compliant interconnection and method therefor
US5917707A (en) 1993-11-16 1999-06-29 Formfactor, Inc. Flexible contact structure with an electrically conductive shell
US5476211A (en) 1993-11-16 1995-12-19 Form Factor, Inc. Method of manufacturing electrical contacts, using a sacrificial member
US4716049A (en) 1985-12-20 1987-12-29 Hughes Aircraft Company Compressive pedestal for microminiature connections
US4924353A (en) 1985-12-20 1990-05-08 Hughes Aircraft Company Connector system for coupling to an integrated circuit chip
JPS62158338A (ja) 1985-12-28 1987-07-14 Tanaka Denshi Kogyo Kk 半導体装置
US4793814A (en) 1986-07-21 1988-12-27 Rogers Corporation Electrical circuit board interconnect
US4695870A (en) 1986-03-27 1987-09-22 Hughes Aircraft Company Inverted chip carrier
JPS62226307A (ja) 1986-03-28 1987-10-05 Toshiba Corp ロボツト装置
US4771930A (en) 1986-06-30 1988-09-20 Kulicke And Soffa Industries Inc. Apparatus for supplying uniform tail lengths
JPS6397941A (ja) 1986-10-14 1988-04-28 Fuji Photo Film Co Ltd 感光材料
US4955523A (en) 1986-12-17 1990-09-11 Raychem Corporation Interconnection of electronic components
DE3703694A1 (de) 1987-02-06 1988-08-18 Dynapert Delvotec Gmbh Ball-bondverfahren und vorrichtung zur durchfuehrung derselben
KR970003915B1 (ko) 1987-06-24 1997-03-22 미다 가쓰시게 반도체 기억장치 및 그것을 사용한 반도체 메모리 모듈
JP2642359B2 (ja) 1987-09-11 1997-08-20 株式会社日立製作所 半導体装置
US5138438A (en) 1987-06-24 1992-08-11 Akita Electronics Co. Ltd. Lead connections means for stacked tab packaged IC chips
US4804132A (en) 1987-08-28 1989-02-14 Difrancesco Louis Method for cold bonding
US4845354A (en) 1988-03-08 1989-07-04 International Business Machines Corporation Process control for laser wire bonding
JPH01313969A (ja) 1988-06-13 1989-12-19 Hitachi Ltd 半導体装置
US4998885A (en) 1989-10-27 1991-03-12 International Business Machines Corporation Elastomeric area array interposer
US5077598A (en) 1989-11-08 1991-12-31 Hewlett-Packard Company Strain relief flip-chip integrated circuit assembly with test fixturing
US5095187A (en) 1989-12-20 1992-03-10 Raychem Corporation Weakening wire supplied through a wire bonder
CA2034700A1 (en) 1990-01-23 1991-07-24 Masanori Nishiguchi Substrate for packaging a semiconductor device
AU645283B2 (en) 1990-01-23 1994-01-13 Sumitomo Electric Industries, Ltd. Substrate for packaging a semiconductor device
US5376403A (en) 1990-02-09 1994-12-27 Capote; Miguel A. Electrically conductive compositions and methods for the preparation and use thereof
US5948533A (en) 1990-02-09 1999-09-07 Ormet Corporation Vertically interconnected electronic assemblies and compositions useful therefor
US5083697A (en) 1990-02-14 1992-01-28 Difrancesco Louis Particle-enhanced joining of metal surfaces
US4975079A (en) 1990-02-23 1990-12-04 International Business Machines Corp. Connector assembly for chip testing
US4999472A (en) 1990-03-12 1991-03-12 Neinast James E Electric arc system for ablating a surface coating
US5241456A (en) 1990-07-02 1993-08-31 General Electric Company Compact high density interconnect structure
US5679977A (en) 1990-09-24 1997-10-21 Tessera, Inc. Semiconductor chip assemblies, methods of making same and components for same
US5148265A (en) 1990-09-24 1992-09-15 Ist Associates, Inc. Semiconductor chip assemblies with fan-in leads
US5148266A (en) 1990-09-24 1992-09-15 Ist Associates, Inc. Semiconductor chip assemblies having interposer and flexible lead
US5067382A (en) 1990-11-02 1991-11-26 Cray Computer Corporation Method and apparatus for notching a lead wire attached to an IC chip to facilitate severing the wire
KR940001149B1 (ko) 1991-04-16 1994-02-14 삼성전자 주식회사 반도체 장치의 칩 본딩 방법
JPH04346436A (ja) 1991-05-24 1992-12-02 Fujitsu Ltd バンプ製造方法とバンプ製造装置
US5316788A (en) 1991-07-26 1994-05-31 International Business Machines Corporation Applying solder to high density substrates
US5133495A (en) 1991-08-12 1992-07-28 International Business Machines Corporation Method of bonding flexible circuit to circuitized substrate to provide electrical connection therebetween
US5203075A (en) 1991-08-12 1993-04-20 Inernational Business Machines Method of bonding flexible circuit to cicuitized substrate to provide electrical connection therebetween using different solders
WO1993004375A1 (en) 1991-08-23 1993-03-04 Nchip, Inc. Burn-in technologies for unpackaged integrated circuits
US5220489A (en) 1991-10-11 1993-06-15 Motorola, Inc. Multicomponent integrated circuit package
US5238173A (en) 1991-12-04 1993-08-24 Kaijo Corporation Wire bonding misattachment detection apparatus and that detection method in a wire bonder
JP2931936B2 (ja) 1992-01-17 1999-08-09 株式会社日立製作所 半導体装置用リードフレームの製造方法及び半導体装置用リードフレーム並びに樹脂封止型半導体装置
US5831836A (en) 1992-01-30 1998-11-03 Lsi Logic Power plane for semiconductor device
US5222014A (en) 1992-03-02 1993-06-22 Motorola, Inc. Three-dimensional multi-chip pad array carrier
US5438224A (en) 1992-04-23 1995-08-01 Motorola, Inc. Integrated circuit package having a face-to-face IC chip arrangement
US5494667A (en) 1992-06-04 1996-02-27 Kabushiki Kaisha Hayahibara Topically applied hair restorer containing pine extract
US6054756A (en) 1992-07-24 2000-04-25 Tessera, Inc. Connection components with frangible leads and bus
US5977618A (en) 1992-07-24 1999-11-02 Tessera, Inc. Semiconductor connection components and methods with releasable lead support
JP3151219B2 (ja) 1992-07-24 2001-04-03 テツセラ,インコーポレイテッド 取り外し自在のリード支持体を備えた半導体接続構成体およびその製造方法
US20050062492A1 (en) 2001-08-03 2005-03-24 Beaman Brian Samuel High density integrated circuit apparatus, test probe and methods of use thereof
US6295729B1 (en) 1992-10-19 2001-10-02 International Business Machines Corporation Angled flying lead wire bonding process
US5371654A (en) 1992-10-19 1994-12-06 International Business Machines Corporation Three dimensional high performance interconnection package
JP2716336B2 (ja) 1993-03-10 1998-02-18 日本電気株式会社 集積回路装置
JPH06268101A (ja) 1993-03-17 1994-09-22 Hitachi Ltd 半導体装置及びその製造方法、電子装置、リ−ドフレ−ム並びに実装基板
US5340771A (en) 1993-03-18 1994-08-23 Lsi Logic Corporation Techniques for providing high I/O count connections to semiconductor dies
US20030048108A1 (en) 1993-04-30 2003-03-13 Beaman Brian Samuel Structural design and processes to control probe position accuracy in a wafer test probe assembly
US5811982A (en) 1995-11-27 1998-09-22 International Business Machines Corporation High density cantilevered probe for electronic devices
US7368924B2 (en) 1993-04-30 2008-05-06 International Business Machines Corporation Probe structure having a plurality of discrete insulated probe tips projecting from a support surface, apparatus for use thereof and methods of fabrication thereof
JP2981385B2 (ja) 1993-09-06 1999-11-22 シャープ株式会社 チップ部品型ledの構造及びその製造方法
US5346118A (en) 1993-09-28 1994-09-13 At&T Bell Laboratories Surface mount solder assembly of leadless integrated circuit packages to substrates
US6835898B2 (en) 1993-11-16 2004-12-28 Formfactor, Inc. Electrical contact structures formed by configuring a flexible wire to have a springable shape and overcoating the wire with at least one layer of a resilient conductive material, methods of mounting the contact structures to electronic components, and applications for employing the contact structures
US5455390A (en) 1994-02-01 1995-10-03 Tessera, Inc. Microelectronics unit mounting with multiple lead bonding
KR100437437B1 (ko) 1994-03-18 2004-06-25 히다치 가세고교 가부시끼가이샤 반도체 패키지의 제조법 및 반도체 패키지
US5615824A (en) 1994-06-07 1997-04-01 Tessera, Inc. Soldering with resilient contacts
US5802699A (en) 1994-06-07 1998-09-08 Tessera, Inc. Methods of assembling microelectronic assembly with socket for engaging bump leads
JPH07335783A (ja) 1994-06-13 1995-12-22 Fujitsu Ltd 半導体装置及び半導体装置ユニット
US5468995A (en) 1994-07-05 1995-11-21 Motorola, Inc. Semiconductor device having compliant columnar electrical connections
US6177636B1 (en) 1994-12-29 2001-01-23 Tessera, Inc. Connection components with posts
US6828668B2 (en) 1994-07-07 2004-12-07 Tessera, Inc. Flexible lead structures and methods of making same
US5688716A (en) 1994-07-07 1997-11-18 Tessera, Inc. Fan-out semiconductor chip assembly
US6117694A (en) 1994-07-07 2000-09-12 Tessera, Inc. Flexible lead structures and methods of making same
US5989936A (en) 1994-07-07 1999-11-23 Tessera, Inc. Microelectronic assembly fabrication with terminal formation from a conductive layer
US5518964A (en) 1994-07-07 1996-05-21 Tessera, Inc. Microelectronic mounting with multiple lead deformation and bonding
US5656550A (en) 1994-08-24 1997-08-12 Fujitsu Limited Method of producing a semicondutor device having a lead portion with outer connecting terminal
US5659952A (en) 1994-09-20 1997-08-26 Tessera, Inc. Method of fabricating compliant interface for semiconductor chip
US5541567A (en) 1994-10-17 1996-07-30 International Business Machines Corporation Coaxial vias in an electronic substrate
US5495667A (en) 1994-11-07 1996-03-05 Micron Technology, Inc. Method for forming contact pins for semiconductor dice and interconnects
US5736074A (en) 1995-06-30 1998-04-07 Micro Fab Technologies, Inc. Manufacture of coated spheres
US5971253A (en) 1995-07-31 1999-10-26 Tessera, Inc. Microelectronic component mounting with deformable shell terminals
US5872051A (en) 1995-08-02 1999-02-16 International Business Machines Corporation Process for transferring material to semiconductor chip conductive pads using a transfer substrate
US5810609A (en) 1995-08-28 1998-09-22 Tessera, Inc. Socket for engaging bump leads on a microelectronic device and methods therefor
US5766987A (en) 1995-09-22 1998-06-16 Tessera, Inc. Microelectronic encapsulation methods and equipment
US6211572B1 (en) 1995-10-31 2001-04-03 Tessera, Inc. Semiconductor chip package with fan-in leads
JP3332308B2 (ja) 1995-11-07 2002-10-07 新光電気工業株式会社 半導体装置及びその製造方法
JPH09134934A (ja) 1995-11-07 1997-05-20 Sumitomo Metal Ind Ltd 半導体パッケージ及び半導体装置
US5718361A (en) 1995-11-21 1998-02-17 International Business Machines Corporation Apparatus and method for forming mold for metallic material
US5731709A (en) 1996-01-26 1998-03-24 Motorola, Inc. Method for testing a ball grid array semiconductor device and a device for such testing
US5994152A (en) 1996-02-21 1999-11-30 Formfactor, Inc. Fabricating interconnects and tips using sacrificial substrates
JP3146345B2 (ja) 1996-03-11 2001-03-12 アムコー テクノロジー コリア インコーポレーティド バンプチップスケール半導体パッケージのバンプ形成方法
US6000126A (en) 1996-03-29 1999-12-14 General Dynamics Information Systems, Inc. Method and apparatus for connecting area grid arrays to printed wire board
US6821821B2 (en) 1996-04-18 2004-11-23 Tessera, Inc. Methods for manufacturing resistors using a sacrificial layer
DE19618227A1 (de) 1996-05-07 1997-11-13 Herbert Streckfus Gmbh Verfahren und Vorrichtung zum Verlöten von elektronischen Bauelementen auf einer Leiterplatte
KR100186333B1 (ko) 1996-06-20 1999-03-20 문정환 칩 사이즈 반도체 패키지 및 그 제조방법
JPH1012769A (ja) 1996-06-24 1998-01-16 Ricoh Co Ltd 半導体装置およびその製造方法
JPH10135221A (ja) 1996-10-29 1998-05-22 Taiyo Yuden Co Ltd バンプ形成方法
JPH10135220A (ja) 1996-10-29 1998-05-22 Taiyo Yuden Co Ltd バンプ形成方法
US6492719B2 (en) 1999-07-30 2002-12-10 Hitachi, Ltd. Semiconductor device
US5976913A (en) 1996-12-12 1999-11-02 Tessera, Inc. Microelectronic mounting with multiple lead deformation using restraining straps
US6121676A (en) 1996-12-13 2000-09-19 Tessera, Inc. Stacked microelectronic assembly and method therefor
US6054337A (en) 1996-12-13 2000-04-25 Tessera, Inc. Method of making a compliant multichip package
US6225688B1 (en) 1997-12-11 2001-05-01 Tessera, Inc. Stacked microelectronic assembly and method therefor
US6133072A (en) 1996-12-13 2000-10-17 Tessera, Inc. Microelectronic connector with planar elastomer sockets
JP3400279B2 (ja) 1997-01-13 2003-04-28 株式会社新川 バンプ形成方法
US5898991A (en) 1997-01-16 1999-05-04 International Business Machines Corporation Methods of fabrication of coaxial vias and magnetic devices
US5839191A (en) 1997-01-24 1998-11-24 Unisys Corporation Vibrating template method of placing solder balls on the I/O pads of an integrated circuit package
JPH1118364A (ja) 1997-06-27 1999-01-22 Matsushita Electric Ind Co Ltd キャプスタンモータ
EP1030369B1 (en) 1997-08-19 2007-12-12 Hitachi, Ltd. Multichip module structure and method for manufacturing the same
CA2213590C (en) 1997-08-21 2006-11-07 Keith C. Carroll Flexible circuit connector and method of making same
JP3859318B2 (ja) 1997-08-29 2006-12-20 シチズン電子株式会社 電子回路のパッケージ方法
US6525414B2 (en) 1997-09-16 2003-02-25 Matsushita Electric Industrial Co., Ltd. Semiconductor device including a wiring board and semiconductor elements mounted thereon
JP3937265B2 (ja) 1997-09-29 2007-06-27 エルピーダメモリ株式会社 半導体装置
JP3262531B2 (ja) 1997-10-02 2002-03-04 インターナショナル・ビジネス・マシーンズ・コーポレーション 曲げられたフライング・リード・ワイヤ・ボンデイング・プロセス
JP2978861B2 (ja) 1997-10-28 1999-11-15 九州日本電気株式会社 モールドbga型半導体装置及びその製造方法
US6038136A (en) 1997-10-29 2000-03-14 Hestia Technologies, Inc. Chip package with molded underfill
JP3393800B2 (ja) 1997-11-05 2003-04-07 新光電気工業株式会社 半導体装置の製造方法
JPH11219984A (ja) 1997-11-06 1999-08-10 Sharp Corp 半導体装置パッケージおよびその製造方法ならびにそのための回路基板
US6222136B1 (en) 1997-11-12 2001-04-24 International Business Machines Corporation Printed circuit board with continuous connective bumps
US6038133A (en) 1997-11-25 2000-03-14 Matsushita Electric Industrial Co., Ltd. Circuit component built-in module and method for producing the same
US6002168A (en) 1997-11-25 1999-12-14 Tessera, Inc. Microelectronic component with rigid interposer
JPH11163022A (ja) 1997-11-28 1999-06-18 Sony Corp 半導体装置、その製造方法及び電子機器
US6124546A (en) 1997-12-03 2000-09-26 Advanced Micro Devices, Inc. Integrated circuit chip package and method of making the same
US6260264B1 (en) 1997-12-08 2001-07-17 3M Innovative Properties Company Methods for making z-axis electrical connections
US6052287A (en) 1997-12-09 2000-04-18 Sandia Corporation Silicon ball grid array chip carrier
US5973391A (en) 1997-12-11 1999-10-26 Read-Rite Corporation Interposer with embedded circuitry and method for using the same to package microelectronic units
JPH11220082A (ja) 1998-02-03 1999-08-10 Oki Electric Ind Co Ltd 半導体装置
JP3536650B2 (ja) 1998-02-27 2004-06-14 富士ゼロックス株式会社 バンプ形成方法および装置
JPH11260856A (ja) 1998-03-11 1999-09-24 Matsushita Electron Corp 半導体装置及びその製造方法並びに半導体装置の実装構造
KR100260997B1 (ko) 1998-04-08 2000-07-01 마이클 디. 오브라이언 반도체패키지
US6329224B1 (en) 1998-04-28 2001-12-11 Tessera, Inc. Encapsulation of microelectronic assemblies
US6180881B1 (en) 1998-05-05 2001-01-30 Harlan Ruben Isaak Chip stack and method of making same
JPH11330134A (ja) 1998-05-12 1999-11-30 Hitachi Ltd ワイヤボンディング方法およびその装置並びに半導体装置
KR100266693B1 (ko) 1998-05-30 2000-09-15 김영환 적층가능한 비지에이 반도체 칩 패키지 및 그 제조방법
KR100265563B1 (ko) 1998-06-29 2000-09-15 김영환 볼 그리드 어레이 패키지 및 그의 제조 방법
US6414391B1 (en) 1998-06-30 2002-07-02 Micron Technology, Inc. Module assembly for stacked BGA packages with a common bus bar in the assembly
US6164523A (en) 1998-07-01 2000-12-26 Semiconductor Components Industries, Llc Electronic component and method of manufacture
US5854507A (en) 1998-07-21 1998-12-29 Hewlett-Packard Company Multiple chip assembly
US6399426B1 (en) 1998-07-21 2002-06-04 Miguel Albert Capote Semiconductor flip-chip package and method for the fabrication thereof
US6515355B1 (en) 1998-09-02 2003-02-04 Micron Technology, Inc. Passivation layer for packaged integrated circuits
JP2000091383A (ja) 1998-09-07 2000-03-31 Ngk Spark Plug Co Ltd 配線基板
US6194250B1 (en) 1998-09-14 2001-02-27 Motorola, Inc. Low-profile microelectronic package
US6158647A (en) 1998-09-29 2000-12-12 Micron Technology, Inc. Concave face wire bond capillary
US6684007B2 (en) 1998-10-09 2004-01-27 Fujitsu Limited Optical coupling structures and the fabrication processes
JP2000311915A (ja) 1998-10-14 2000-11-07 Texas Instr Inc <Ti> 半導体デバイス及びボンディング方法
JP3407275B2 (ja) 1998-10-28 2003-05-19 インターナショナル・ビジネス・マシーンズ・コーポレーション バンプ及びその形成方法
US6332270B2 (en) 1998-11-23 2001-12-25 International Business Machines Corporation Method of making high density integral test probe
US6926796B1 (en) 1999-01-29 2005-08-09 Matsushita Electric Industrial Co., Ltd. Electronic parts mounting method and device therefor
US6206273B1 (en) 1999-02-17 2001-03-27 International Business Machines Corporation Structures and processes to create a desired probetip contact geometry on a wafer test probe
KR100319609B1 (ko) 1999-03-09 2002-01-05 김영환 와이어 어래이드 칩 사이즈 패키지 및 그 제조방법
US6177729B1 (en) 1999-04-03 2001-01-23 International Business Machines Corporation Rolling ball connector
US6211574B1 (en) 1999-04-16 2001-04-03 Advanced Semiconductor Engineering Inc. Semiconductor package with wire protection and method therefor
US6258625B1 (en) 1999-05-18 2001-07-10 International Business Machines Corporation Method of interconnecting electronic components using a plurality of conductive studs
US6376769B1 (en) 1999-05-18 2002-04-23 Amerasia International Technology, Inc. High-density electronic package, and method for making same
JP3398721B2 (ja) 1999-05-20 2003-04-21 アムコー テクノロジー コリア インコーポレーティド 半導体パッケージ及びその製造方法
US6228687B1 (en) 1999-06-28 2001-05-08 Micron Technology, Inc. Wafer-level package and methods of fabricating
TW417839U (en) 1999-07-30 2001-01-01 Shen Ming Tung Stacked memory module structure and multi-layered stacked memory module structure using the same
JP4526651B2 (ja) 1999-08-12 2010-08-18 富士通セミコンダクター株式会社 半導体装置
US6168965B1 (en) 1999-08-12 2001-01-02 Tower Semiconductor Ltd. Method for making backside illuminated image sensor
JP5333337B2 (ja) 1999-08-12 2013-11-06 富士通セミコンダクター株式会社 半導体装置の製造方法
EP1139705B1 (en) 1999-09-02 2006-11-22 Ibiden Co., Ltd. Printed wiring board and method of producing the same
US6867499B1 (en) 1999-09-30 2005-03-15 Skyworks Solutions, Inc. Semiconductor packaging
JP3513444B2 (ja) 1999-10-20 2004-03-31 株式会社新川 ピン状ワイヤ等の形成方法
JP2001127246A (ja) 1999-10-29 2001-05-11 Fujitsu Ltd 半導体装置
US6362525B1 (en) 1999-11-09 2002-03-26 Cypress Semiconductor Corp. Circuit structure including a passive element formed within a grid array substrate and method for making the same
JP3619410B2 (ja) 1999-11-18 2005-02-09 株式会社ルネサステクノロジ バンプ形成方法およびそのシステム
JP3798597B2 (ja) 1999-11-30 2006-07-19 富士通株式会社 半導体装置
JP3566156B2 (ja) 1999-12-02 2004-09-15 株式会社新川 ピン状ワイヤ等の形成方法
US6790757B1 (en) 1999-12-20 2004-09-14 Agere Systems Inc. Wire bonding method for copper interconnects in semiconductor devices
KR100426494B1 (ko) 1999-12-20 2004-04-13 앰코 테크놀로지 코리아 주식회사 반도체 패키지 및 이것의 제조방법
KR20010061849A (ko) 1999-12-29 2001-07-07 박종섭 웨이퍼 레벨 패키지
JP2001196407A (ja) 2000-01-14 2001-07-19 Seiko Instruments Inc 半導体装置および半導体装置の形成方法
US6710454B1 (en) 2000-02-16 2004-03-23 Micron Technology, Inc. Adhesive layer for an electronic apparatus having multiple semiconductor devices
JP2001339011A (ja) 2000-03-24 2001-12-07 Shinko Electric Ind Co Ltd 半導体装置およびその製造方法
JP3980807B2 (ja) 2000-03-27 2007-09-26 株式会社東芝 半導体装置及び半導体モジュール
JP2001274196A (ja) 2000-03-28 2001-10-05 Rohm Co Ltd 半導体装置
KR100583491B1 (ko) 2000-04-07 2006-05-24 앰코 테크놀로지 코리아 주식회사 반도체패키지 및 그 제조방법
US6578754B1 (en) 2000-04-27 2003-06-17 Advanpack Solutions Pte. Ltd. Pillar connections for semiconductor chips and method of manufacture
US6531335B1 (en) 2000-04-28 2003-03-11 Micron Technology, Inc. Interposers including upwardly protruding dams, semiconductor device assemblies including the interposers, and methods
JP2001326236A (ja) 2000-05-12 2001-11-22 Nec Kyushu Ltd 半導体装置の製造方法
JP2001326304A (ja) 2000-05-15 2001-11-22 Toshiba Corp 半導体装置及びその製造方法
US6522018B1 (en) 2000-05-16 2003-02-18 Micron Technology, Inc. Ball grid array chip packages having improved testing and stacking characteristics
US6647310B1 (en) 2000-05-30 2003-11-11 Advanced Micro Devices, Inc. Temperature control of an integrated circuit
US6531784B1 (en) 2000-06-02 2003-03-11 Amkor Technology, Inc. Semiconductor package with spacer strips
US6560117B2 (en) 2000-06-28 2003-05-06 Micron Technology, Inc. Packaged microelectronic die assemblies and methods of manufacture
US6476583B2 (en) 2000-07-21 2002-11-05 Jomahip, Llc Automatic battery charging system for a battery back-up DC power supply
SE517086C2 (sv) 2000-08-08 2002-04-09 Ericsson Telefon Ab L M Förfarande för säkring av lodkulor och eventuella komponenter, vilka är fästa på en och samma sida av ett substrat
US20020020898A1 (en) 2000-08-16 2002-02-21 Vu Quat T. Microelectronic substrates with integrated devices
US6462575B1 (en) 2000-08-28 2002-10-08 Micron Technology, Inc. Method and system for wafer level testing and burning-in semiconductor components
JP3874062B2 (ja) 2000-09-05 2007-01-31 セイコーエプソン株式会社 半導体装置
US6507104B2 (en) 2000-09-07 2003-01-14 Siliconware Precision Industries Co., Ltd. Semiconductor package with embedded heat-dissipating device
US7009297B1 (en) 2000-10-13 2006-03-07 Bridge Semiconductor Corporation Semiconductor chip assembly with embedded metal particle
US6423570B1 (en) 2000-10-18 2002-07-23 Intel Corporation Method to protect an encapsulated die package during back grinding with a solder metallization layer and devices formed thereby
AU2002217987A1 (en) * 2000-12-01 2002-06-11 Broadcom Corporation Thermally and electrically enhanced ball grid array packaging
JP4505983B2 (ja) 2000-12-01 2010-07-21 日本電気株式会社 半導体装置
JP3798620B2 (ja) 2000-12-04 2006-07-19 富士通株式会社 半導体装置の製造方法
TW511405B (en) 2000-12-27 2002-11-21 Matsushita Electric Ind Co Ltd Device built-in module and manufacturing method thereof
KR100393102B1 (ko) 2000-12-29 2003-07-31 앰코 테크놀로지 코리아 주식회사 스택형 반도체패키지
AUPR244801A0 (en) 2001-01-10 2001-02-01 Silverbrook Research Pty Ltd A method and apparatus (WSM01)
US6388322B1 (en) 2001-01-17 2002-05-14 Aralight, Inc. Article comprising a mechanically compliant bump
US6653170B1 (en) 2001-02-06 2003-11-25 Charles W. C. Lin Semiconductor chip assembly with elongated wire ball bonded to chip and electrolessly plated to support circuit
JP2002280414A (ja) 2001-03-22 2002-09-27 Mitsubishi Electric Corp 半導体装置およびその製造方法
JP2002289769A (ja) 2001-03-26 2002-10-04 Matsushita Electric Ind Co Ltd 積層型半導体装置およびその製造方法
SG108245A1 (en) 2001-03-30 2005-01-28 Micron Technology Inc Ball grid array interposer, packages and methods
US7115986B2 (en) 2001-05-02 2006-10-03 Micron Technology, Inc. Flexible ball grid array chip scale packages
US6825552B2 (en) 2001-05-09 2004-11-30 Tessera, Inc. Connection components with anisotropic conductive material interconnection
TW544826B (en) 2001-05-18 2003-08-01 Nec Electronics Corp Flip-chip-type semiconductor device and manufacturing method thereof
US6930256B1 (en) 2002-05-01 2005-08-16 Amkor Technology, Inc. Integrated circuit substrate having laser-embedded conductive patterns and method therefor
US6754407B2 (en) 2001-06-26 2004-06-22 Intel Corporation Flip-chip package integrating optical and electrical devices and coupling to a waveguide on a board
US20030006494A1 (en) 2001-07-03 2003-01-09 Lee Sang Ho Thin profile stackable semiconductor package and method for manufacturing
US6765287B1 (en) 2001-07-27 2004-07-20 Charles W. C. Lin Three-dimensional stacked semiconductor package
US6451626B1 (en) 2001-07-27 2002-09-17 Charles W.C. Lin Three-dimensional stacked semiconductor package
JP4023159B2 (ja) 2001-07-31 2007-12-19 ソニー株式会社 半導体装置の製造方法及び積層半導体装置の製造方法
US6550666B2 (en) 2001-08-21 2003-04-22 Advanpack Solutions Pte Ltd Method for forming a flip chip on leadframe semiconductor package
US7605479B2 (en) 2001-08-22 2009-10-20 Tessera, Inc. Stacked chip assembly with encapsulant layer
US7176506B2 (en) 2001-08-28 2007-02-13 Tessera, Inc. High frequency chip packages with connecting elements
US20030057544A1 (en) 2001-09-13 2003-03-27 Nathan Richard J. Integrated assembly protocol
US6977440B2 (en) 2001-10-09 2005-12-20 Tessera, Inc. Stacked packages
DE10297316T5 (de) 2001-10-09 2004-12-09 Tessera, Inc., San Jose Gestapelte Baugruppen
JP2003122611A (ja) 2001-10-11 2003-04-25 Oki Electric Ind Co Ltd データ提供方法及びサーバ装置
JP4257771B2 (ja) 2001-10-16 2009-04-22 シンジーテック株式会社 導電性ブレード
US20030094666A1 (en) 2001-11-16 2003-05-22 R-Tec Corporation Interposer
JP3875077B2 (ja) 2001-11-16 2007-01-31 富士通株式会社 電子デバイス及びデバイス接続方法
JP2003174124A (ja) 2001-12-04 2003-06-20 Sainekkusu:Kk 半導体装置の外部電極形成方法
JP3507059B2 (ja) 2002-06-27 2004-03-15 沖電気工業株式会社 積層マルチチップパッケージ
JP2003197669A (ja) 2001-12-28 2003-07-11 Seiko Epson Corp ボンディング方法及びボンディング装置
TW584950B (en) 2001-12-31 2004-04-21 Megic Corp Chip packaging structure and process thereof
JP3935370B2 (ja) 2002-02-19 2007-06-20 セイコーエプソン株式会社 バンプ付き半導体素子の製造方法、半導体装置及びその製造方法、回路基板並びに電子機器
SG115456A1 (en) 2002-03-04 2005-10-28 Micron Technology Inc Semiconductor die packages with recessed interconnecting structures and methods for assembling the same
US6653723B2 (en) 2002-03-09 2003-11-25 Fujitsu Limited System for providing an open-cavity low profile encapsulated semiconductor package
KR100452819B1 (ko) 2002-03-18 2004-10-15 삼성전기주식회사 칩 패키지 및 그 제조방법
US6979230B2 (en) 2002-03-20 2005-12-27 Gabe Cherian Light socket
US7323767B2 (en) 2002-04-25 2008-01-29 Micron Technology, Inc. Standoffs for centralizing internals in packaging process
US7633765B1 (en) 2004-03-23 2009-12-15 Amkor Technology, Inc. Semiconductor package including a top-surface metal layer for implementing circuit features
US7078822B2 (en) 2002-06-25 2006-07-18 Intel Corporation Microelectronic device interconnects
JP2004047702A (ja) 2002-07-11 2004-02-12 Toshiba Corp 半導体装置積層モジュール
US6756252B2 (en) 2002-07-17 2004-06-29 Texas Instrument Incorporated Multilayer laser trim interconnect method
US6987032B1 (en) 2002-07-19 2006-01-17 Asat Ltd. Ball grid array package and process for manufacturing same
TW549592U (en) 2002-08-16 2003-08-21 Via Tech Inc Integrated circuit package with a balanced-part structure
AU2003265417A1 (en) 2002-08-16 2004-03-03 Tessera, Inc. Microelectronic packages with self-aligning features
US6740546B2 (en) 2002-08-21 2004-05-25 Micron Technology, Inc. Packaged microelectronic devices and methods for assembling microelectronic devices
US6964881B2 (en) 2002-08-27 2005-11-15 Micron Technology, Inc. Multi-chip wafer level system packages and methods of forming same
JP3765778B2 (ja) 2002-08-29 2006-04-12 ローム株式会社 ワイヤボンディング用キャピラリ及びこれを用いたワイヤボンディング方法
JP2004095799A (ja) 2002-08-30 2004-03-25 Toshiba Corp 半導体装置およびその製造方法
US7294928B2 (en) 2002-09-06 2007-11-13 Tessera, Inc. Components, methods and assemblies for stacked packages
US7246431B2 (en) 2002-09-06 2007-07-24 Tessera, Inc. Methods of making microelectronic packages including folded substrates
US7071547B2 (en) 2002-09-11 2006-07-04 Tessera, Inc. Assemblies having stacked semiconductor chips and methods of making same
US7229906B2 (en) 2002-09-19 2007-06-12 Kulicke And Soffa Industries, Inc. Method and apparatus for forming bumps for semiconductor interconnections using a wire bonding machine
CN100380636C (zh) 2002-09-30 2008-04-09 先进互连技术有限公司 用于整体成型组件的热增强封装及其制造方法
US7045884B2 (en) 2002-10-04 2006-05-16 International Rectifier Corporation Semiconductor device package
US6906416B2 (en) 2002-10-08 2005-06-14 Chippac, Inc. Semiconductor multi-package module having inverted second package stacked over die-up flip-chip ball grid array (BGA) package
US6989122B1 (en) 2002-10-17 2006-01-24 National Semiconductor Corporation Techniques for manufacturing flash-free contacts on a semiconductor package
TW567601B (en) 2002-10-18 2003-12-21 Siliconware Precision Industries Co Ltd Module device of stacked semiconductor package and method for fabricating the same
TWI221664B (en) 2002-11-07 2004-10-01 Via Tech Inc Structure of chip package and process thereof
JP2004172157A (ja) 2002-11-15 2004-06-17 Shinko Electric Ind Co Ltd 半導体パッケージおよびパッケージスタック半導体装置
JP2004172477A (ja) 2002-11-21 2004-06-17 Kaijo Corp ワイヤループ形状、そのワイヤループ形状を備えた半導体装置、ワイヤボンディング方法及び半導体製造装置
JP4464041B2 (ja) 2002-12-13 2010-05-19 キヤノン株式会社 柱状構造体、柱状構造体を有する電極、及びこれらの作製方法
KR100621991B1 (ko) 2003-01-03 2006-09-13 삼성전자주식회사 칩 스케일 적층 패키지
JP2004221257A (ja) 2003-01-14 2004-08-05 Seiko Epson Corp ワイヤボンディング方法及びワイヤボンディング装置
WO2004077525A2 (en) 2003-02-25 2004-09-10 Tessera, Inc. Ball grid array with bumps
TW583757B (en) 2003-02-26 2004-04-11 Advanced Semiconductor Eng A structure of a flip-chip package and a process thereof
US20040217471A1 (en) 2003-02-27 2004-11-04 Tessera, Inc. Component and assemblies with ends offset downwardly
JP3885747B2 (ja) 2003-03-13 2007-02-28 株式会社デンソー ワイヤボンディング方法
JP2004343030A (ja) 2003-03-31 2004-12-02 North:Kk 配線回路基板とその製造方法とその配線回路基板を備えた回路モジュール
JP2004319892A (ja) 2003-04-18 2004-11-11 Renesas Technology Corp 半導体装置の製造方法
JP4199588B2 (ja) 2003-04-25 2008-12-17 テセラ・インターコネクト・マテリアルズ,インコーポレイテッド 配線回路基板の製造方法、及び、この配線回路基板を用いた半導体集積回路装置の製造方法
DE10320646A1 (de) 2003-05-07 2004-09-16 Infineon Technologies Ag Elektronisches Bauteil, sowie Systemträger und Nutzen zur Herstellung desselben
JP4145730B2 (ja) 2003-06-17 2008-09-03 松下電器産業株式会社 半導体内蔵モジュール
KR100604821B1 (ko) 2003-06-30 2006-07-26 삼성전자주식회사 적층형 볼 그리드 어레이 패키지 및 그 제조방법
US20040262728A1 (en) 2003-06-30 2004-12-30 Sterrett Terry L. Modular device assemblies
JP2005033141A (ja) 2003-07-11 2005-02-03 Sony Corp 半導体装置及びその製造方法、疑似ウェーハ及びその製造方法、並びに半導体装置の実装構造
US7227095B2 (en) 2003-08-06 2007-06-05 Micron Technology, Inc. Wire bonders and methods of wire-bonding
KR100537892B1 (ko) 2003-08-26 2005-12-21 삼성전자주식회사 칩 스택 패키지와 그 제조 방법
KR100546374B1 (ko) 2003-08-28 2006-01-26 삼성전자주식회사 센터 패드를 갖는 적층형 반도체 패키지 및 그 제조방법
US7372151B1 (en) 2003-09-12 2008-05-13 Asat Ltd. Ball grid array package and process for manufacturing same
US7061096B2 (en) 2003-09-24 2006-06-13 Silicon Pipe, Inc. Multi-surface IC packaging structures and methods for their manufacture
WO2005031861A1 (en) 2003-09-26 2005-04-07 Tessera, Inc. Structure and method of making capped chips including a flowable conductive medium
US7462936B2 (en) 2003-10-06 2008-12-09 Tessera, Inc. Formation of circuitry with modification of feature height
US7495179B2 (en) * 2003-10-06 2009-02-24 Tessera, Inc. Components with posts and pads
JP4272968B2 (ja) 2003-10-16 2009-06-03 エルピーダメモリ株式会社 半導体装置および半導体チップ制御方法
JP4167965B2 (ja) 2003-11-07 2008-10-22 テセラ・インターコネクト・マテリアルズ,インコーポレイテッド 配線回路用部材の製造方法
KR100564585B1 (ko) 2003-11-13 2006-03-28 삼성전자주식회사 이중 스택된 bga 패키지 및 다중 스택된 bga 패키지
TWI227555B (en) 2003-11-17 2005-02-01 Advanced Semiconductor Eng Structure of chip package and the process thereof
KR100621992B1 (ko) 2003-11-19 2006-09-13 삼성전자주식회사 이종 소자들의 웨이퍼 레벨 적층 구조와 방법 및 이를이용한 시스템-인-패키지
JP2005183923A (ja) 2003-11-28 2005-07-07 Matsushita Electric Ind Co Ltd 半導体装置およびその製造方法
US7345361B2 (en) 2003-12-04 2008-03-18 Intel Corporation Stackable integrated circuit packaging
JP2005175019A (ja) 2003-12-08 2005-06-30 Sharp Corp 半導体装置及び積層型半導体装置
JP5197961B2 (ja) 2003-12-17 2013-05-15 スタッツ・チップパック・インコーポレイテッド マルチチップパッケージモジュールおよびその製造方法
DE10360708B4 (de) 2003-12-19 2008-04-10 Infineon Technologies Ag Halbleitermodul mit einem Halbleiterstapel, Umverdrahtungsplatte, und Verfahren zur Herstellung derselben
JP4334996B2 (ja) 2003-12-24 2009-09-30 株式会社フジクラ 多層配線板用基材、両面配線板およびそれらの製造方法
US7495644B2 (en) 2003-12-26 2009-02-24 Semiconductor Energy Laboratory Co., Ltd. Display device and method for manufacturing display device
US6917098B1 (en) 2003-12-29 2005-07-12 Texas Instruments Incorporated Three-level leadframe for no-lead packages
US6900530B1 (en) 2003-12-29 2005-05-31 Ramtek Technology, Inc. Stacked IC
US8207604B2 (en) 2003-12-30 2012-06-26 Tessera, Inc. Microelectronic package comprising offset conductive posts on compliant layer
US7709968B2 (en) 2003-12-30 2010-05-04 Tessera, Inc. Micro pin grid array with pin motion isolation
US7176043B2 (en) 2003-12-30 2007-02-13 Tessera, Inc. Microelectronic packages and methods therefor
JP2005203497A (ja) 2004-01-14 2005-07-28 Toshiba Corp 半導体装置およびその製造方法
US20050173807A1 (en) 2004-02-05 2005-08-11 Jianbai Zhu High density vertically stacked semiconductor device
US8399972B2 (en) 2004-03-04 2013-03-19 Skyworks Solutions, Inc. Overmolded semiconductor package with a wirebond cage for EMI shielding
US7095105B2 (en) 2004-03-23 2006-08-22 Texas Instruments Incorporated Vertically stacked semiconductor device
JP4484035B2 (ja) 2004-04-06 2010-06-16 セイコーエプソン株式会社 半導体装置の製造方法
US8092734B2 (en) 2004-05-13 2012-01-10 Aptina Imaging Corporation Covers for microelectronic imagers and methods for wafer-level packaging of microelectronics imagers
US7629695B2 (en) 2004-05-20 2009-12-08 Kabushiki Kaisha Toshiba Stacked electronic component and manufacturing method thereof
US6962864B1 (en) 2004-05-26 2005-11-08 National Chung Cheng University Wire-bonding method for chips with copper interconnects by introducing a thin layer
US7233057B2 (en) 2004-05-28 2007-06-19 Nokia Corporation Integrated circuit package with optimized mold shape
TWI255022B (en) 2004-05-31 2006-05-11 Via Tech Inc Circuit carrier and manufacturing process thereof
US7453157B2 (en) 2004-06-25 2008-11-18 Tessera, Inc. Microelectronic packages and methods therefor
TWI250596B (en) 2004-07-23 2006-03-01 Ind Tech Res Inst Wafer-level chip scale packaging method
JP4385329B2 (ja) 2004-10-08 2009-12-16 Okiセミコンダクタ株式会社 半導体装置の製造方法
US8646675B2 (en) 2004-11-02 2014-02-11 Hid Global Gmbh Laying apparatus, contact-making apparatus, movement system, laying and contact-making unit, production system, method for production and a transponder unit
US8525314B2 (en) 2004-11-03 2013-09-03 Tessera, Inc. Stacked packaging improvements
US7750483B1 (en) 2004-11-10 2010-07-06 Bridge Semiconductor Corporation Semiconductor chip assembly with welded metal pillar and enlarged plated contact terminal
US7268421B1 (en) 2004-11-10 2007-09-11 Bridge Semiconductor Corporation Semiconductor chip assembly with welded metal pillar that includes enlarged ball bond
KR100674926B1 (ko) 2004-12-08 2007-01-26 삼성전자주식회사 메모리 카드 및 그 제조 방법
JP4504798B2 (ja) 2004-12-16 2010-07-14 パナソニック株式会社 多段構成半導体モジュール
JP2006186086A (ja) 2004-12-27 2006-07-13 Itoo:Kk プリント基板のはんだ付け方法およびブリッジ防止用ガイド板
DE102005006333B4 (de) 2005-02-10 2007-10-18 Infineon Technologies Ag Halbleiterbauteil mit mehreren Bondanschlüssen und gebondeten Kontaktelementen unterschiedlicher Metallzusammensetzung und Verfahren zur Herstellung desselben
DE102005006995B4 (de) 2005-02-15 2008-01-24 Infineon Technologies Ag Halbleiterbauteil mit Kunstoffgehäuse und Außenanschlüssen sowie Verfahren zur Herstellung desselben
KR100630741B1 (ko) 2005-03-04 2006-10-02 삼성전자주식회사 다중 몰딩에 의한 적층형 반도체 패키지 및 그 제조방법
US7939934B2 (en) 2005-03-16 2011-05-10 Tessera, Inc. Microelectronic packages and methods therefor
US7371676B2 (en) 2005-04-08 2008-05-13 Micron Technology, Inc. Method for fabricating semiconductor components with through wire interconnects
TWI284394B (en) 2005-05-12 2007-07-21 Advanced Semiconductor Eng Lid used in package structure and the package structure of having the same
US7393770B2 (en) * 2005-05-19 2008-07-01 Micron Technology, Inc. Backside method for fabricating semiconductor components with conductive interconnects
JP2006324553A (ja) 2005-05-20 2006-11-30 Renesas Technology Corp 半導体装置及びその製造方法
US7216794B2 (en) 2005-06-09 2007-05-15 Texas Instruments Incorporated Bond capillary design for ribbon wire bonding
JP4322844B2 (ja) 2005-06-10 2009-09-02 シャープ株式会社 半導体装置および積層型半導体装置
WO2007004137A2 (en) 2005-07-01 2007-01-11 Koninklijke Philips Electronics N.V. Electronic device
US7476608B2 (en) 2005-07-14 2009-01-13 Hewlett-Packard Development Company, L.P. Electrically connecting substrate with electrical device
TWI263313B (en) 2005-08-15 2006-10-01 Phoenix Prec Technology Corp Stack structure of semiconductor component embedded in supporting board
SG130055A1 (en) 2005-08-19 2007-03-20 Micron Technology Inc Microelectronic devices, stacked microelectronic devices, and methods for manufacturing microelectronic devices
SG130066A1 (en) 2005-08-26 2007-03-20 Micron Technology Inc Microelectronic device packages, stacked microelectronic device packages, and methods for manufacturing microelectronic devices
JP5522561B2 (ja) 2005-08-31 2014-06-18 マイクロン テクノロジー, インク. マイクロ電子デバイスパッケージ、積重ね型マイクロ電子デバイスパッケージ、およびマイクロ電子デバイスを製造する方法
US7675152B2 (en) 2005-09-01 2010-03-09 Texas Instruments Incorporated Package-on-package semiconductor assembly
US7504716B2 (en) 2005-10-26 2009-03-17 Texas Instruments Incorporated Structure and method of molded QFN device suitable for miniaturization, multiple rows and stacking
JP2007123595A (ja) 2005-10-28 2007-05-17 Nec Corp 半導体装置及びその実装構造
TW200733272A (en) 2005-11-01 2007-09-01 Koninkl Philips Electronics Nv Methods of packaging a semiconductor die and die package formed by the methods
JP4530975B2 (ja) 2005-11-14 2010-08-25 株式会社新川 ワイヤボンディング方法
JP2007142042A (ja) 2005-11-16 2007-06-07 Sharp Corp 半導体パッケージとその製造方法,半導体モジュール,および電子機器
US7344917B2 (en) 2005-11-30 2008-03-18 Freescale Semiconductor, Inc. Method for packaging a semiconductor device
US7307348B2 (en) 2005-12-07 2007-12-11 Micron Technology, Inc. Semiconductor components having through wire interconnects (TWI)
US8058101B2 (en) 2005-12-23 2011-11-15 Tessera, Inc. Microelectronic packages and methods therefor
JP4530984B2 (ja) 2005-12-28 2010-08-25 株式会社新川 ワイヤボンディング装置、ボンディング制御プログラム及びボンディング方法
US20070190747A1 (en) 2006-01-23 2007-08-16 Tessera Technologies Hungary Kft. Wafer level packaging to lidded chips
JP2007208159A (ja) 2006-02-06 2007-08-16 Hitachi Ltd 半導体装置
SG135074A1 (en) 2006-02-28 2007-09-28 Micron Technology Inc Microelectronic devices, stacked microelectronic devices, and methods for manufacturing such devices
JP2007234845A (ja) 2006-03-01 2007-09-13 Nec Corp 半導体装置
US7759782B2 (en) 2006-04-07 2010-07-20 Tessera, Inc. Substrate for a microelectronic package and method of fabricating thereof
US7390700B2 (en) 2006-04-07 2008-06-24 Texas Instruments Incorporated Packaged system of semiconductor chips having a semiconductor interposer
JP5598787B2 (ja) 2006-04-17 2014-10-01 マイクロンメモリジャパン株式会社 積層型半導体装置の製造方法
US7659612B2 (en) 2006-04-24 2010-02-09 Micron Technology, Inc. Semiconductor components having encapsulated through wire interconnects (TWI)
US7242081B1 (en) 2006-04-24 2007-07-10 Advanced Semiconductor Engineering Inc. Stacked package structure
US7780064B2 (en) 2006-06-02 2010-08-24 Asm Technology Singapore Pte Ltd Wire bonding method for forming low-loop profiles
JP4961848B2 (ja) 2006-06-12 2012-06-27 日本電気株式会社 金属ポストを有する配線基板、半導体装置及び半導体装置モジュールの製造方法
US20070290325A1 (en) 2006-06-16 2007-12-20 Lite-On Semiconductor Corporation Surface mounting structure and packaging method thereof
US7967062B2 (en) 2006-06-16 2011-06-28 International Business Machines Corporation Thermally conductive composite interface, cooled electronic assemblies employing the same, and methods of fabrication thereof
WO2008014633A1 (en) 2006-06-29 2008-02-07 Intel Corporation Apparatus, system, and method for wireless connection in integrated circuit packages
KR100792352B1 (ko) 2006-07-06 2008-01-08 삼성전기주식회사 패키지 온 패키지의 바텀기판 및 그 제조방법
KR100800478B1 (ko) 2006-07-18 2008-02-04 삼성전자주식회사 적층형 반도체 패키지 및 그의 제조방법
US20080023805A1 (en) 2006-07-26 2008-01-31 Texas Instruments Incorporated Array-Processed Stacked Semiconductor Packages
US8048479B2 (en) 2006-08-01 2011-11-01 Qimonda Ag Method for placing material onto a target board by means of a transfer board
JP2008039502A (ja) 2006-08-03 2008-02-21 Alps Electric Co Ltd 接触子およびその製造方法
US7486525B2 (en) 2006-08-04 2009-02-03 International Business Machines Corporation Temporary chip attach carrier
US7425758B2 (en) 2006-08-28 2008-09-16 Micron Technology, Inc. Metal core foldover package structures
KR20080020069A (ko) 2006-08-30 2008-03-05 삼성전자주식회사 반도체 패키지 및 그 제조방법
KR100891516B1 (ko) 2006-08-31 2009-04-06 주식회사 하이닉스반도체 적층 가능한 에프비지에이 타입 반도체 패키지와 이를이용한 적층 패키지
KR100770934B1 (ko) 2006-09-26 2007-10-26 삼성전자주식회사 반도체 패키지와 그를 이용한 반도체 시스템 패키지
TWI336502B (en) 2006-09-27 2011-01-21 Advanced Semiconductor Eng Semiconductor package and semiconductor device and the method of making the same
US7901989B2 (en) 2006-10-10 2011-03-08 Tessera, Inc. Reconstituted wafer level stacking
TWI312561B (en) 2006-10-27 2009-07-21 Advanced Semiconductor Eng Structure of package on package and method for fabricating the same
KR100817073B1 (ko) 2006-11-03 2008-03-26 삼성전자주식회사 휨방지용 보강부재가 기판에 연결된 반도체 칩 스택 패키지
US8193034B2 (en) 2006-11-10 2012-06-05 Stats Chippac, Ltd. Semiconductor device and method of forming vertical interconnect structure using stud bumps
WO2008065896A1 (fr) 2006-11-28 2008-06-05 Kyushu Institute Of Technology Procédé de fabrication d'un dispositif semi-conducteur ayant une structure d'électrode à double face et dispositif semi-conducteur fabriqué par le procédé
US8598717B2 (en) 2006-12-27 2013-12-03 Spansion Llc Semiconductor device and method for manufacturing the same
JP2008166439A (ja) 2006-12-27 2008-07-17 Spansion Llc 半導体装置およびその製造方法
KR100757345B1 (ko) 2006-12-29 2007-09-10 삼성전자주식회사 플립 칩 패키지 및 그의 제조 방법
US20080156518A1 (en) 2007-01-03 2008-07-03 Tessera, Inc. Alignment and cutting of microelectronic substrates
TWI332702B (en) 2007-01-09 2010-11-01 Advanced Semiconductor Eng Stackable semiconductor package and the method for making the same
JP5347222B2 (ja) 2007-01-10 2013-11-20 富士通株式会社 半導体装置の製造方法
US7719122B2 (en) 2007-01-11 2010-05-18 Taiwan Semiconductor Manufacturing Co., Ltd. System-in-package packaging for minimizing bond wire contamination and yield loss
KR100827667B1 (ko) 2007-01-16 2008-05-07 삼성전자주식회사 기판 내에 반도체 칩을 갖는 반도체 패키지 및 이를제조하는 방법
KR101057368B1 (ko) 2007-01-31 2011-08-18 후지쯔 세미컨덕터 가부시키가이샤 반도체 장치 및 그 제조 방법
JP4823089B2 (ja) 2007-01-31 2011-11-24 株式会社東芝 積層型半導体装置の製造方法
US8685792B2 (en) 2007-03-03 2014-04-01 Stats Chippac Ltd. Integrated circuit package system with interposer
CN101675516B (zh) 2007-03-05 2012-06-20 数字光学欧洲有限公司 具有通过过孔连接到前侧触头的后侧触头的芯片
US7517733B2 (en) 2007-03-22 2009-04-14 Stats Chippac, Ltd. Leadframe design for QFN package with top terminal leads
WO2008117488A1 (ja) 2007-03-23 2008-10-02 Sanyo Electric Co., Ltd 半導体装置およびその製造方法
TWI335070B (en) 2007-03-23 2010-12-21 Advanced Semiconductor Eng Semiconductor package and the method of making the same
JP4926787B2 (ja) 2007-03-30 2012-05-09 アオイ電子株式会社 半導体装置の製造方法
JPWO2008120755A1 (ja) 2007-03-30 2010-07-15 日本電気株式会社 機能素子内蔵回路基板及びその製造方法、並びに電子機器
US7589394B2 (en) 2007-04-10 2009-09-15 Ibiden Co., Ltd. Interposer
JP5003260B2 (ja) 2007-04-13 2012-08-15 日本電気株式会社 半導体装置およびその製造方法
US7994622B2 (en) 2007-04-16 2011-08-09 Tessera, Inc. Microelectronic packages having cavities for receiving microelectric elements
KR20080094251A (ko) 2007-04-19 2008-10-23 삼성전자주식회사 웨이퍼 레벨 패키지 및 그 제조방법
JP5601751B2 (ja) 2007-04-26 2014-10-08 スパンション エルエルシー 半導体装置
US20080284045A1 (en) 2007-05-18 2008-11-20 Texas Instruments Incorporated Method for Fabricating Array-Molded Package-On-Package
JP2008306128A (ja) 2007-06-11 2008-12-18 Shinko Electric Ind Co Ltd 半導体装置およびその製造方法
KR100865125B1 (ko) 2007-06-12 2008-10-24 삼성전기주식회사 반도체 패키지 및 그 제조방법
US20080308305A1 (en) 2007-06-15 2008-12-18 Ngk Spark Plug Co., Ltd. Wiring substrate with reinforcing member
JP5179787B2 (ja) 2007-06-22 2013-04-10 ラピスセミコンダクタ株式会社 半導体装置及びその製造方法
US7944034B2 (en) 2007-06-22 2011-05-17 Texas Instruments Incorporated Array molded package-on-package having redistribution lines
US7911805B2 (en) 2007-06-29 2011-03-22 Tessera, Inc. Multilayer wiring element having pin interface
SG148901A1 (en) 2007-07-09 2009-01-29 Micron Technology Inc Packaged semiconductor assemblies and methods for manufacturing such assemblies
KR20090007120A (ko) 2007-07-13 2009-01-16 삼성전자주식회사 봉지부를 통하여 재배선을 달성하는 웨이퍼 레벨 적층형패키지 및 그 제조방법
US7781877B2 (en) 2007-08-07 2010-08-24 Micron Technology, Inc. Packaged integrated circuit devices with through-body conductive vias, and methods of making same
JP2009044110A (ja) 2007-08-13 2009-02-26 Elpida Memory Inc 半導体装置及びその製造方法
SG150396A1 (en) 2007-08-16 2009-03-30 Micron Technology Inc Microelectronic die packages with leadframes, including leadframe-based interposer for stacked die packages, and associated systems and methods
US8039960B2 (en) 2007-09-21 2011-10-18 Stats Chippac, Ltd. Solder bump with inner core pillar in semiconductor package
JP2009088254A (ja) 2007-09-28 2009-04-23 Toshiba Corp 電子部品パッケージ及び電子部品パッケージの製造方法
EP2206145A4 (en) 2007-09-28 2012-03-28 Tessera Inc FLIP-CHIP CONNECTION WITH DOUBLE POSTS
KR20090033605A (ko) 2007-10-01 2009-04-06 삼성전자주식회사 적층형 반도체 패키지, 그 형성방법 및 이를 구비하는전자장치
US7777351B1 (en) 2007-10-01 2010-08-17 Amkor Technology, Inc. Thin stacked interposer package
US20090091009A1 (en) 2007-10-03 2009-04-09 Corisis David J Stackable integrated circuit package
US8008183B2 (en) 2007-10-04 2011-08-30 Texas Instruments Incorporated Dual capillary IC wirebonding
US7834464B2 (en) 2007-10-09 2010-11-16 Infineon Technologies Ag Semiconductor chip package, semiconductor chip assembly, and method for fabricating a device
TWI360207B (en) 2007-10-22 2012-03-11 Advanced Semiconductor Eng Chip package structure and method of manufacturing
TWI389220B (zh) 2007-10-22 2013-03-11 矽品精密工業股份有限公司 半導體封裝件及其製法
JP2009123863A (ja) 2007-11-14 2009-06-04 Tessera Interconnect Materials Inc バンプ構造形成方法及びバンプ構造
US20090127686A1 (en) 2007-11-21 2009-05-21 Advanced Chip Engineering Technology Inc. Stacking die package structure for semiconductor devices and method of the same
JP2009135398A (ja) 2007-11-29 2009-06-18 Ibiden Co Ltd 組合せ基板
KR100886100B1 (ko) 2007-11-29 2009-02-27 앰코 테크놀로지 코리아 주식회사 반도체 패키지 및 그 제조 방법
US7902644B2 (en) 2007-12-07 2011-03-08 Stats Chippac Ltd. Integrated circuit package system for electromagnetic isolation
US7964956B1 (en) 2007-12-10 2011-06-21 Oracle America, Inc. Circuit packaging and connectivity
US8390117B2 (en) 2007-12-11 2013-03-05 Panasonic Corporation Semiconductor device and method of manufacturing the same
JP2009158593A (ja) 2007-12-25 2009-07-16 Tessera Interconnect Materials Inc バンプ構造およびその製造方法
US20090170241A1 (en) 2007-12-26 2009-07-02 Stats Chippac, Ltd. Semiconductor Device and Method of Forming the Device Using Sacrificial Carrier
WO2009096950A1 (en) 2008-01-30 2009-08-06 Kulicke And Soffa Industries, Inc. Wire loop and method of forming the wire loop
US8120186B2 (en) 2008-02-15 2012-02-21 Qimonda Ag Integrated circuit and method
US8258015B2 (en) 2008-02-22 2012-09-04 Stats Chippac Ltd. Integrated circuit package system with penetrable film adhesive
US7956456B2 (en) 2008-02-27 2011-06-07 Texas Instruments Incorporated Thermal interface material design for enhanced thermal performance and improved package structural integrity
KR101501739B1 (ko) 2008-03-21 2015-03-11 삼성전자주식회사 반도체 패키지 제조 방법
US7919871B2 (en) 2008-03-21 2011-04-05 Stats Chippac Ltd. Integrated circuit package system for stackable devices
US8072079B2 (en) 2008-03-27 2011-12-06 Stats Chippac, Ltd. Through hole vias at saw streets including protrusions or recesses for interconnection
JP5043743B2 (ja) 2008-04-18 2012-10-10 ラピスセミコンダクタ株式会社 半導体装置の製造方法
KR20090123680A (ko) 2008-05-28 2009-12-02 주식회사 하이닉스반도체 적층 반도체 패키지
US8021907B2 (en) 2008-06-09 2011-09-20 Stats Chippac, Ltd. Method and apparatus for thermally enhanced semiconductor package
CN102067310B (zh) 2008-06-16 2013-08-21 泰塞拉公司 带有边缘触头的晶片级芯片规模封装的堆叠及其制造方法
US7932170B1 (en) 2008-06-23 2011-04-26 Amkor Technology, Inc. Flip chip bump structure and fabrication method
TWI473553B (zh) 2008-07-03 2015-02-11 Advanced Semiconductor Eng 晶片封裝結構
US7859033B2 (en) 2008-07-09 2010-12-28 Eastman Kodak Company Wafer level processing for backside illuminated sensors
JP5339800B2 (ja) 2008-07-10 2013-11-13 三菱電機株式会社 半導体装置の製造方法
TWI372453B (en) 2008-09-01 2012-09-11 Advanced Semiconductor Eng Copper bonding wire, wire bonding structure and method for processing and bonding a wire
TWI573201B (zh) 2008-07-18 2017-03-01 聯測總部私人有限公司 封裝結構性元件
US8004093B2 (en) 2008-08-01 2011-08-23 Stats Chippac Ltd. Integrated circuit package stacking system
US20100044860A1 (en) 2008-08-21 2010-02-25 Tessera Interconnect Materials, Inc. Microelectronic substrate or element having conductive pads and metal posts joined thereto using bond layer
KR100997793B1 (ko) 2008-09-01 2010-12-02 주식회사 하이닉스반도체 반도체 패키지 및 이의 제조 방법
KR20100033012A (ko) 2008-09-19 2010-03-29 주식회사 하이닉스반도체 반도체 패키지 및 이를 갖는 적층 반도체 패키지
US7842541B1 (en) 2008-09-24 2010-11-30 Amkor Technology, Inc. Ultra thin package and fabrication method
US8063475B2 (en) 2008-09-26 2011-11-22 Stats Chippac Ltd. Semiconductor package system with through silicon via interposer
WO2010041630A1 (ja) 2008-10-10 2010-04-15 日本電気株式会社 半導体装置及びその製造方法
JP5185062B2 (ja) 2008-10-21 2013-04-17 パナソニック株式会社 積層型半導体装置及び電子機器
MY149251A (en) 2008-10-23 2013-07-31 Carsem M Sdn Bhd Wafer-level package using stud bump coated with solder
KR101461630B1 (ko) 2008-11-06 2014-11-20 삼성전자주식회사 실장 높이는 축소되나, 솔더 접합 신뢰도는 개선되는 웨이퍼 레벨 칩 온 칩 패키지와, 패키지 온 패키지 및 그 제조방법
TW201023308A (en) 2008-12-01 2010-06-16 Advanced Semiconductor Eng Package-on-package device, semiconductor package and method for manufacturing the same
KR101011863B1 (ko) 2008-12-02 2011-01-31 앰코 테크놀로지 코리아 주식회사 반도체 패키지 및 그 제조 방법
US7642128B1 (en) 2008-12-12 2010-01-05 Stats Chippac, Ltd. Semiconductor device and method of forming a vertical interconnect structure for 3-D FO-WLCSP
US7898083B2 (en) 2008-12-17 2011-03-01 Texas Instruments Incorporated Method for low stress flip-chip assembly of fine-pitch semiconductor devices
US8012797B2 (en) 2009-01-07 2011-09-06 Advanced Semiconductor Engineering, Inc. Method for forming stackable semiconductor device packages including openings with conductive bumps of specified geometries
JP2010199528A (ja) 2009-01-27 2010-09-09 Tatsuta System Electronics Kk ボンディングワイヤ
JP2010177597A (ja) 2009-01-30 2010-08-12 Sanyo Electric Co Ltd 半導体モジュールおよび携帯機器
US20100200981A1 (en) 2009-02-09 2010-08-12 Advanced Semiconductor Engineering, Inc. Semiconductor package and method of manufacturing the same
US9142586B2 (en) 2009-02-24 2015-09-22 Taiwan Semiconductor Manufacturing Company, Ltd. Pad design for backside illuminated image sensor
WO2010101163A1 (ja) 2009-03-04 2010-09-10 日本電気株式会社 機能素子内蔵基板及びそれを用いた電子デバイス
JP2010206007A (ja) 2009-03-04 2010-09-16 Nec Corp 半導体装置及びその製造方法
US8106498B2 (en) 2009-03-05 2012-01-31 Stats Chippac Ltd. Integrated circuit packaging system with a dual board-on-chip structure and method of manufacture thereof
US8258010B2 (en) 2009-03-17 2012-09-04 Stats Chippac, Ltd. Making a semiconductor device having conductive through organic vias
US20100244276A1 (en) 2009-03-25 2010-09-30 Lsi Corporation Three-dimensional electronics package
US8194411B2 (en) 2009-03-31 2012-06-05 Hong Kong Applied Science and Technology Research Institute Co. Ltd Electronic package with stacked modules with channels passing through metal layers of the modules
US20100289142A1 (en) 2009-05-15 2010-11-18 Il Kwon Shim Integrated circuit packaging system with coin bonded interconnects and method of manufacture thereof
US8020290B2 (en) 2009-06-14 2011-09-20 Jayna Sheats Processes for IC fabrication
TWI379367B (en) 2009-06-15 2012-12-11 Kun Yuan Technology Co Ltd Chip packaging method and structure thereof
US20100327419A1 (en) 2009-06-26 2010-12-30 Sriram Muthukumar Stacked-chip packages in package-on-package apparatus, methods of assembling same, and systems containing same
JP5214554B2 (ja) 2009-07-30 2013-06-19 ラピスセミコンダクタ株式会社 半導体チップ内蔵パッケージ及びその製造方法、並びに、パッケージ・オン・パッケージ型半導体装置及びその製造方法
US7923304B2 (en) 2009-09-10 2011-04-12 Stats Chippac Ltd. Integrated circuit packaging system with conductive pillars and method of manufacture thereof
US8264091B2 (en) 2009-09-21 2012-09-11 Stats Chippac Ltd. Integrated circuit packaging system with encapsulated via and method of manufacture thereof
US8390108B2 (en) 2009-12-16 2013-03-05 Stats Chippac Ltd. Integrated circuit packaging system with stacking interconnect and method of manufacture thereof
US8169065B2 (en) 2009-12-22 2012-05-01 Epic Technologies, Inc. Stackable circuit structures and methods of fabrication thereof
TWI392066B (zh) 2009-12-28 2013-04-01 矽品精密工業股份有限公司 封裝結構及其製法
US7928552B1 (en) 2010-03-12 2011-04-19 Stats Chippac Ltd. Integrated circuit packaging system with multi-tier conductive interconnects and method of manufacture thereof
US9496152B2 (en) 2010-03-12 2016-11-15 STATS ChipPAC Pte. Ltd. Carrier system with multi-tier conductive posts and method of manufacture thereof
KR101667656B1 (ko) 2010-03-24 2016-10-20 삼성전자주식회사 패키지-온-패키지 형성방법
US8278746B2 (en) 2010-04-02 2012-10-02 Advanced Semiconductor Engineering, Inc. Semiconductor device packages including connecting elements
US8624374B2 (en) 2010-04-02 2014-01-07 Advanced Semiconductor Engineering, Inc. Semiconductor device packages with fan-out and with connecting elements for stacking and manufacturing methods thereof
US8564141B2 (en) 2010-05-06 2013-10-22 SK Hynix Inc. Chip unit and stack package having the same
US8217502B2 (en) 2010-06-08 2012-07-10 Stats Chippac Ltd. Integrated circuit packaging system with multipart conductive pillars and method of manufacture thereof
US8330272B2 (en) 2010-07-08 2012-12-11 Tessera, Inc. Microelectronic packages with dual or multiple-etched flip-chip connectors
KR20120007839A (ko) 2010-07-15 2012-01-25 삼성전자주식회사 적층형 반도체 패키지의 제조방법
US8482111B2 (en) 2010-07-19 2013-07-09 Tessera, Inc. Stackable molded microelectronic packages
US8847376B2 (en) 2010-07-23 2014-09-30 Tessera, Inc. Microelectronic elements with post-assembly planarization
KR101683814B1 (ko) 2010-07-26 2016-12-08 삼성전자주식회사 관통 전극을 구비하는 반도체 장치
US8580607B2 (en) 2010-07-27 2013-11-12 Tessera, Inc. Microelectronic packages with nanoparticle joining
US8304900B2 (en) 2010-08-11 2012-11-06 Stats Chippac Ltd. Integrated circuit packaging system with stacked lead and method of manufacture thereof
US8518746B2 (en) 2010-09-02 2013-08-27 Stats Chippac, Ltd. Semiconductor device and method of forming TSV semiconductor wafer with embedded semiconductor die
US20120063090A1 (en) 2010-09-09 2012-03-15 Taiwan Semiconductor Manufacturing Company, Ltd. Cooling mechanism for stacked die package and method of manufacturing the same
US8409922B2 (en) 2010-09-14 2013-04-02 Stats Chippac, Ltd. Semiconductor device and method of forming leadframe interposer over semiconductor die and TSV substrate for vertical electrical interconnect
US20120080787A1 (en) 2010-10-05 2012-04-05 Qualcomm Incorporated Electronic Package and Method of Making an Electronic Package
JP2012104790A (ja) 2010-10-12 2012-05-31 Elpida Memory Inc 半導体装置
US8618646B2 (en) 2010-10-12 2013-12-31 Headway Technologies, Inc. Layered chip package and method of manufacturing same
US8263435B2 (en) 2010-10-28 2012-09-11 Stats Chippac, Ltd. Semiconductor device and method of stacking semiconductor die in mold laser package interconnected by bumps and conductive vias
US8697492B2 (en) 2010-11-02 2014-04-15 Tessera, Inc. No flow underfill
US8525318B1 (en) 2010-11-10 2013-09-03 Amkor Technology, Inc. Semiconductor device and fabricating method thereof
KR101075241B1 (ko) 2010-11-15 2011-11-01 테세라, 인코포레이티드 유전체 부재에 단자를 구비하는 마이크로전자 패키지
US8502387B2 (en) 2010-12-09 2013-08-06 Stats Chippac Ltd. Integrated circuit packaging system with vertical interconnection and method of manufacture thereof
US8853558B2 (en) 2010-12-10 2014-10-07 Tessera, Inc. Interconnect structure
KR101215271B1 (ko) 2010-12-29 2012-12-26 앰코 테크놀로지 코리아 주식회사 반도체 패키지 구조물 및 반도체 패키지 구조물의 제조 방법
US20120184116A1 (en) 2011-01-18 2012-07-19 Tyco Electronics Corporation Interposer
US8476115B2 (en) 2011-05-03 2013-07-02 Stats Chippac, Ltd. Semiconductor device and method of mounting cover to semiconductor die and interposer with adhesive material
KR101128063B1 (ko) 2011-05-03 2012-04-23 테세라, 인코포레이티드 캡슐화 층의 표면에 와이어 본드를 구비하는 패키지 적층형 어셈블리
US8618659B2 (en) 2011-05-03 2013-12-31 Tessera, Inc. Package-on-package assembly with wire bonds to encapsulation surface
US9006031B2 (en) 2011-06-23 2015-04-14 Stats Chippac, Ltd. Semiconductor device and method of forming EWLB package with standoff conductive layer over encapsulant bumps
US8487421B2 (en) 2011-08-01 2013-07-16 Tessera, Inc. Microelectronic package with stacked microelectronic elements and method for manufacture thereof
US8937309B2 (en) 2011-08-08 2015-01-20 Micron Technology, Inc. Semiconductor die assemblies, semiconductor devices including same, and methods of fabrication
US20130037929A1 (en) 2011-08-09 2013-02-14 Kay S. Essig Stackable wafer level packages and related methods
KR101800440B1 (ko) 2011-08-31 2017-11-23 삼성전자주식회사 다수의 반도체 칩들을 가진 반도체 패키지 및 그 형성 방법
US20130049218A1 (en) 2011-08-31 2013-02-28 Zhiwei Gong Semiconductor device packaging having pre-encapsulation through via formation
US9177832B2 (en) 2011-09-16 2015-11-03 Stats Chippac, Ltd. Semiconductor device and method of forming a reconfigured stackable wafer level package with vertical interconnect
KR101906408B1 (ko) 2011-10-04 2018-10-11 삼성전자주식회사 반도체 패키지 및 그 제조 방법
US8404520B1 (en) 2011-10-17 2013-03-26 Invensas Corporation Package-on-package assembly with wire bond vias
US9105552B2 (en) 2011-10-31 2015-08-11 Taiwan Semiconductor Manufacturing Company, Ltd. Package on package devices and methods of packaging semiconductor dies
KR101297015B1 (ko) 2011-11-03 2013-08-14 주식회사 네패스 리드프레임을 이용한 팬-아웃 반도체 패키지 제조방법, 이에 의한 반도체 패키지 및 패키지 온 패키지
US8912651B2 (en) 2011-11-30 2014-12-16 Taiwan Semiconductor Manufacturing Company, Ltd. Package-on-package (PoP) structure including stud bulbs and method
US8680684B2 (en) 2012-01-09 2014-03-25 Invensas Corporation Stackable microelectronic package structures
US9258922B2 (en) 2012-01-18 2016-02-09 Taiwan Semiconductor Manufacturing Company, Ltd. PoP structures including through-assembly via modules
US9349706B2 (en) 2012-02-24 2016-05-24 Invensas Corporation Method for package-on-package assembly with wire bonds to encapsulation surface
US8372741B1 (en) 2012-02-24 2013-02-12 Invensas Corporation Method for package-on-package assembly with wire bonds to encapsulation surface
US20130234317A1 (en) 2012-03-09 2013-09-12 Taiwan Semiconductor Manufacturing Company, Ltd. Packaging Methods and Packaged Semiconductor Devices
US9082763B2 (en) 2012-03-15 2015-07-14 Taiwan Semiconductor Manufacturing Company, Ltd. Joint structure for substrates and methods of forming
US8835228B2 (en) * 2012-05-22 2014-09-16 Invensas Corporation Substrate-less stackable package with wire-bond interconnect
US9171790B2 (en) 2012-05-30 2015-10-27 Taiwan Semiconductor Manufacturing Company, Ltd. Package on package devices and methods of packaging semiconductor dies
US9502390B2 (en) 2012-08-03 2016-11-22 Invensas Corporation BVA interposer
US8828860B2 (en) 2012-08-30 2014-09-09 International Business Machines Corporation Double solder bumps on substrates for low temperature flip chip bonding
KR101419597B1 (ko) 2012-11-06 2014-07-14 앰코 테크놀로지 코리아 주식회사 반도체 디바이스 및 그 제조 방법
US8878353B2 (en) 2012-12-20 2014-11-04 Invensas Corporation Structure for microelectronic packaging with bond elements to encapsulation surface
US8940630B2 (en) * 2013-02-01 2015-01-27 Invensas Corporation Method of making wire bond vias and microelectronic package having wire bond vias
US9136254B2 (en) * 2013-02-01 2015-09-15 Invensas Corporation Microelectronic package having wire bond vias and stiffening layer
US9299670B2 (en) 2013-03-14 2016-03-29 Freescale Semiconductor, Inc. Stacked microelectronic packages having sidewall conductors and methods for the fabrication thereof
US9685365B2 (en) * 2013-08-08 2017-06-20 Invensas Corporation Method of forming a wire bond having a free end

Also Published As

Publication number Publication date
US20170141020A1 (en) 2017-05-18
WO2017087502A1 (en) 2017-05-26
US9659848B1 (en) 2017-05-23

Similar Documents

Publication Publication Date Title
US8698323B2 (en) Microelectronic assembly tolerant to misplacement of microelectronic elements therein
TWI479630B (zh) 具中心接觸件之增強堆疊微電子總成以及其之系統、模組及配置
TWI505420B (zh) 覆晶、面向上型及面向下型中心接合記憶體導線接合總成
TWI515863B (zh) 載體安裝式電氣互連晶粒組成件
US8883563B1 (en) Fabrication of microelectronic assemblies having stack terminals coupled by connectors extending through encapsulation
US9875955B2 (en) Low cost hybrid high density package
TWI463635B (zh) 具有堆疊的微電子單元之微電子封裝及其製造方法
US10332854B2 (en) Anchoring structure of fine pitch bva
US9034696B2 (en) Microelectronic assemblies having reinforcing collars on connectors extending through encapsulation
KR20140110052A (ko) 적층가능 마이크로전자 패키지 구조
CN103620774A (zh) 倒装芯片、正面和背面线键合相组合的封装
TWI649839B (zh) 電子封裝件及其基板構造
TWI750467B (zh) 半導體封裝
US9324681B2 (en) Pin attachment
JP5394603B2 (ja) 非対称に配置されたダイとモールド体とを具備するスタックされたパッケージを備えるマルチパッケージモジュール。
TW201733062A (zh) 具有多列引線框互連的覆晶堆疊
JP5338572B2 (ja) 半導体装置の製造方法
US11217517B2 (en) Semiconductor package with a trench portion
TW201729369A (zh) 用於偏移接合通孔陣列之經加固的導線
WO2015153296A1 (en) Fabrication of microelectronic assemblies having stack terminals coupled by connectors extending through encapsulation
TWI826896B (zh) 具有阻焊結構的半導體結構
TW202333328A (zh) 半導體封裝組件
CN117393534A (zh) 一种芯片封装结构及电子设备
US7750450B2 (en) Stacked die package with stud spacers
KR20070105613A (ko) 반도체 소자의 플립 칩 본딩 구조