JP2017533585A5 - - Google Patents

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Publication number
JP2017533585A5
JP2017533585A5 JP2017520496A JP2017520496A JP2017533585A5 JP 2017533585 A5 JP2017533585 A5 JP 2017533585A5 JP 2017520496 A JP2017520496 A JP 2017520496A JP 2017520496 A JP2017520496 A JP 2017520496A JP 2017533585 A5 JP2017533585 A5 JP 2017533585A5
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polishing
resin precursor
polishing pad
polymeric material
elements
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JP2017520496A
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JP2017533585A (ja
JP6659677B2 (ja
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Priority claimed from US14/695,299 external-priority patent/US9873180B2/en
Priority claimed from US14/885,950 external-priority patent/US10384330B2/en
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Priority claimed from PCT/US2015/056254 external-priority patent/WO2016061585A1/en
Publication of JP2017533585A publication Critical patent/JP2017533585A/ja
Publication of JP2017533585A5 publication Critical patent/JP2017533585A5/ja
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JP2017520496A 2014-10-17 2015-10-19 付加製造プロセスにより製作される研磨パッド Active JP6659677B2 (ja)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US201462065193P 2014-10-17 2014-10-17
US201462065270P 2014-10-17 2014-10-17
US62/065,193 2014-10-17
US62/065,270 2014-10-17
US14/695,299 2015-04-24
US14/695,299 US9873180B2 (en) 2014-10-17 2015-04-24 CMP pad construction with composite material properties using additive manufacturing processes
US14/885,950 2015-10-16
US14/885,950 US10384330B2 (en) 2014-10-17 2015-10-16 Polishing pads produced by an additive manufacturing process
PCT/US2015/056254 WO2016061585A1 (en) 2014-10-17 2015-10-19 Polishing pads produced by an additive manufacturing process

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JP2019232420A Division JP7003104B2 (ja) 2014-10-17 2019-12-24 付加製造プロセスにより製作される研磨パッド

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JP2017533585A JP2017533585A (ja) 2017-11-09
JP2017533585A5 true JP2017533585A5 (enExample) 2018-11-29
JP6659677B2 JP6659677B2 (ja) 2020-03-04

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JP2017520508A Active JP6673912B2 (ja) 2014-10-17 2015-10-16 付加製造プロセスにより製作される研磨パッド
JP2017520496A Active JP6659677B2 (ja) 2014-10-17 2015-10-19 付加製造プロセスにより製作される研磨パッド
JP2019232420A Active JP7003104B2 (ja) 2014-10-17 2019-12-24 付加製造プロセスにより製作される研磨パッド
JP2020020115A Active JP7221234B2 (ja) 2014-10-17 2020-02-07 付加製造プロセスにより製作される研磨パッド
JP2021213633A Active JP7288037B2 (ja) 2014-10-17 2021-12-28 付加製造プロセスにより製作される研磨パッド

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JP2020020115A Active JP7221234B2 (ja) 2014-10-17 2020-02-07 付加製造プロセスにより製作される研磨パッド
JP2021213633A Active JP7288037B2 (ja) 2014-10-17 2021-12-28 付加製造プロセスにより製作される研磨パッド

Country Status (8)

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US (3) US9873180B2 (enExample)
EP (2) EP3712926A1 (enExample)
JP (5) JP6673912B2 (enExample)
KR (4) KR102599583B1 (enExample)
CN (8) CN111633556B (enExample)
SG (4) SG10201903041XA (enExample)
TW (9) TWI688451B (enExample)
WO (1) WO2016061544A1 (enExample)

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