JP2019513161A5 - - Google Patents

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Publication number
JP2019513161A5
JP2019513161A5 JP2018543208A JP2018543208A JP2019513161A5 JP 2019513161 A5 JP2019513161 A5 JP 2019513161A5 JP 2018543208 A JP2018543208 A JP 2018543208A JP 2018543208 A JP2018543208 A JP 2018543208A JP 2019513161 A5 JP2019513161 A5 JP 2019513161A5
Authority
JP
Japan
Prior art keywords
polishing
substrate
main surface
base layer
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2018543208A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019513161A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2017/017379 external-priority patent/WO2017142805A1/en
Publication of JP2019513161A publication Critical patent/JP2019513161A/ja
Publication of JP2019513161A5 publication Critical patent/JP2019513161A5/ja
Pending legal-status Critical Current

Links

JP2018543208A 2016-02-16 2017-02-10 研磨システム、並びにその製造方法及び使用方法 Pending JP2019513161A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662295760P 2016-02-16 2016-02-16
US62/295,760 2016-02-16
PCT/US2017/017379 WO2017142805A1 (en) 2016-02-16 2017-02-10 Polishing systems and methods of making and using same

Publications (2)

Publication Number Publication Date
JP2019513161A JP2019513161A (ja) 2019-05-23
JP2019513161A5 true JP2019513161A5 (enExample) 2020-03-19

Family

ID=58057347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018543208A Pending JP2019513161A (ja) 2016-02-16 2017-02-10 研磨システム、並びにその製造方法及び使用方法

Country Status (6)

Country Link
US (1) US20210189175A1 (enExample)
JP (1) JP2019513161A (enExample)
KR (1) KR20180112004A (enExample)
CN (1) CN108603076A (enExample)
TW (1) TW201742136A (enExample)
WO (1) WO2017142805A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018179061A1 (ja) 2017-03-27 2018-10-04 日立化成株式会社 研磨液、研磨液セット及び研磨方法
SG11201908858SA (en) 2017-03-27 2019-10-30 Hitachi Chemical Co Ltd Slurry and polishing method
WO2019181016A1 (ja) * 2018-03-22 2019-09-26 日立化成株式会社 研磨液、研磨液セット及び研磨方法
WO2020021680A1 (ja) 2018-07-26 2020-01-30 日立化成株式会社 スラリ及び研磨方法
JP6888744B2 (ja) 2018-09-25 2021-06-16 昭和電工マテリアルズ株式会社 スラリ及び研磨方法
EP4034605B1 (en) * 2019-09-24 2024-01-17 FUJIFILM Electronic Materials U.S.A., Inc. Polishing compositions and methods of use thereof
EP4045226B1 (en) 2019-10-15 2024-01-03 FUJIFILM Electronic Materials U.S.A., Inc. Polishing compositions and methods of use thereof
CN114703433A (zh) * 2022-04-13 2022-07-05 常熟致圆微管技术有限公司 一种生物可降解的医用金属镁及镁合金板材的制备方法
KR102874526B1 (ko) * 2022-12-19 2025-10-21 한남대학교 산학협력단 Cmp 슬러리의 연마입자 표면에 코팅된 아크릴 폴리머 분산제의 특성연구
CN118271973B (zh) * 2024-05-29 2024-08-20 广东粤港澳大湾区黄埔材料研究院 悬浮抛光液及其制备方法和碳化硅的抛光方法

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US3036003A (en) 1957-08-07 1962-05-22 Sinclair Research Inc Lubricating oil composition
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NL137371C (enExample) 1963-08-02
NL145565B (nl) 1965-01-28 1975-04-15 Shell Int Research Werkwijze ter bereiding van een smeermiddelcompositie.
US3414347A (en) 1965-03-30 1968-12-03 Edroy Products Company Inc Binocular with pivoted lens plate
US3574576A (en) 1965-08-23 1971-04-13 Chevron Res Distillate fuel compositions having a hydrocarbon substituted alkylene polyamine
US3539633A (en) 1965-10-22 1970-11-10 Standard Oil Co Di-hydroxybenzyl polyamines
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US5157088A (en) 1987-11-19 1992-10-20 Dishong Dennis M Nitrogen-containing esters of carboxy-containing interpolymers
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JP2000343411A (ja) * 1999-06-01 2000-12-12 Teijin Ltd 研磨用シート
US6319108B1 (en) 1999-07-09 2001-11-20 3M Innovative Properties Company Metal bond abrasive article comprising porous ceramic abrasive composites and method of using same to abrade a workpiece
US6551366B1 (en) 2000-11-10 2003-04-22 3M Innovative Properties Company Spray drying methods of making agglomerate abrasive grains and abrasive articles
CN100556619C (zh) * 2006-05-31 2009-11-04 天津晶岭微电子材料有限公司 蓝宝石衬底材料表面粗糙度的控制方法
US20130017765A1 (en) * 2011-07-11 2013-01-17 3M Innovative Properties Company Lapping carrier and method of using the same
EP3049215B1 (en) * 2013-09-25 2021-04-14 3M Innovative Properties Company Composite ceramic abrasive polishing solution
WO2015048011A1 (en) * 2013-09-25 2015-04-02 3M Innovative Properties Company Multi-layered polishing pads
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