JP2015530265A5 - - Google Patents
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- Publication number
- JP2015530265A5 JP2015530265A5 JP2015525532A JP2015525532A JP2015530265A5 JP 2015530265 A5 JP2015530265 A5 JP 2015530265A5 JP 2015525532 A JP2015525532 A JP 2015525532A JP 2015525532 A JP2015525532 A JP 2015525532A JP 2015530265 A5 JP2015530265 A5 JP 2015530265A5
- Authority
- JP
- Japan
- Prior art keywords
- major surface
- carbide
- abrasive
- polishing
- precisely shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261678665P | 2012-08-02 | 2012-08-02 | |
| US61/678,665 | 2012-08-02 | ||
| PCT/US2013/052828 WO2014022462A1 (en) | 2012-08-02 | 2013-07-31 | Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018211596A Division JP2019063989A (ja) | 2012-08-02 | 2018-11-09 | 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015530265A JP2015530265A (ja) | 2015-10-15 |
| JP2015530265A5 true JP2015530265A5 (enExample) | 2016-09-15 |
Family
ID=50028490
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015525532A Pending JP2015530265A (ja) | 2012-08-02 | 2013-07-31 | 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法 |
| JP2018211596A Pending JP2019063989A (ja) | 2012-08-02 | 2018-11-09 | 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018211596A Pending JP2019063989A (ja) | 2012-08-02 | 2018-11-09 | 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20150224625A1 (enExample) |
| EP (1) | EP2879836B1 (enExample) |
| JP (2) | JP2015530265A (enExample) |
| KR (1) | KR20150039795A (enExample) |
| CN (2) | CN104684686A (enExample) |
| SG (1) | SG11201500713PA (enExample) |
| TW (1) | TWI660816B (enExample) |
| WO (1) | WO2014022462A1 (enExample) |
Families Citing this family (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BR112013016734A2 (pt) | 2010-12-31 | 2019-09-24 | Saint Gobain Ceramics | partículas abrasivas com formas particulares e métodos de deformação de tais partículas |
| CN103702800B (zh) | 2011-06-30 | 2017-11-10 | 圣戈本陶瓷及塑料股份有限公司 | 包括氮化硅磨粒的磨料制品 |
| WO2013003831A2 (en) | 2011-06-30 | 2013-01-03 | Saint-Gobain Ceramics & Plastics, Inc. | Liquid phase sintered silicon carbide abrasive particles |
| BR112014007089A2 (pt) | 2011-09-26 | 2017-03-28 | Saint-Gobain Ceram & Plastics Inc | artigos abrasivos incluindo materiais de partículas abrasivas, abrasivos revestidos usando os materiais de partículas abrasivas e os métodos de formação |
| KR20140106713A (ko) | 2011-12-30 | 2014-09-03 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자 및 이의 형성방법 |
| KR101736755B1 (ko) | 2011-12-30 | 2017-05-17 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 복합 형상화 연마입자들 및 이의 형성방법 |
| EP3705177A1 (en) | 2012-01-10 | 2020-09-09 | Saint-Gobain Ceramics & Plastics Inc. | Abrasive particles having complex shapes and methods of forming same |
| US8840696B2 (en) | 2012-01-10 | 2014-09-23 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| EP2830829B1 (en) | 2012-03-30 | 2018-01-10 | Saint-Gobain Abrasives, Inc. | Abrasive products having fibrillated fibers |
| US9200187B2 (en) | 2012-05-23 | 2015-12-01 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and methods of forming same |
| IN2015DN00343A (enExample) | 2012-06-29 | 2015-06-12 | Saint Gobain Ceramics | |
| KR102089382B1 (ko) | 2012-08-02 | 2020-03-16 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 정밀하게 형상화된 특징부를 갖는 연마 요소 전구체 및 그의 제조 방법 |
| EP2879838B1 (en) | 2012-08-02 | 2023-09-13 | 3M Innovative Properties Company | Abrasive articles with precisely shaped features and method of making thereof |
| RU2614488C2 (ru) | 2012-10-15 | 2017-03-28 | Сен-Гобен Абразивс, Инк. | Абразивные частицы, имеющие определенные формы, и способы формирования таких частиц |
| EP2938459B1 (en) | 2012-12-31 | 2021-06-16 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| US10471571B2 (en) * | 2013-03-12 | 2019-11-12 | 3M Innovative Properties Company | Bonded abrasive article |
| WO2014161001A1 (en) | 2013-03-29 | 2014-10-02 | Saint-Gobain Abrasives, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
| AU2014324453B2 (en) | 2013-09-30 | 2017-08-03 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and methods of forming same |
| BR112016015029B1 (pt) | 2013-12-31 | 2021-12-14 | Saint-Gobain Abrasifs | Artigo abrasivo incluindo partículas abrasivas moldadas |
| US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
| CN110055032A (zh) | 2014-04-14 | 2019-07-26 | 圣戈本陶瓷及塑料股份有限公司 | 包括成形磨粒的研磨制品 |
| MX394114B (es) | 2014-04-14 | 2025-03-24 | Saint Gobain Ceramics | Articulo abrasivo que incluye particulas abrasivas conformadas. |
| WO2015184355A1 (en) | 2014-05-30 | 2015-12-03 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
| US20160144477A1 (en) * | 2014-11-21 | 2016-05-26 | Diane Scott | Coated compressive subpad for chemical mechanical polishing |
| US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
| US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
| TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
| CN116967949A (zh) | 2015-03-31 | 2023-10-31 | 圣戈班磨料磨具有限公司 | 固定磨料制品和其形成方法 |
| CA3118239A1 (en) | 2015-06-11 | 2016-12-15 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| CN109415615A (zh) | 2016-05-10 | 2019-03-01 | 圣戈本陶瓷及塑料股份有限公司 | 磨料颗粒及其形成方法 |
| KR102422875B1 (ko) | 2016-05-10 | 2022-07-21 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 연마 입자들 및 그 형성 방법 |
| TWI621502B (zh) * | 2016-08-18 | 2018-04-21 | 中國砂輪企業股份有限公司 | Double chemical mechanical polishing trimming system and method thereof |
| WO2018064642A1 (en) | 2016-09-29 | 2018-04-05 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| CN110719946B (zh) | 2017-06-21 | 2022-07-15 | 圣戈本陶瓷及塑料股份有限公司 | 颗粒材料及其形成方法 |
| US12043785B2 (en) | 2017-07-11 | 2024-07-23 | 3M Innovative Properties Company | Abrasive articles including conformable coatings and polishing system therefrom |
| JP7300441B2 (ja) * | 2017-07-11 | 2023-06-29 | スリーエム イノベイティブ プロパティズ カンパニー | 適合性コーティングを含む研磨物品及びそれらからのポリッシングシステム |
| SG11202108831UA (en) | 2019-02-13 | 2021-09-29 | 3M Innovative Properties Co | Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof |
| WO2021133876A1 (en) | 2019-12-27 | 2021-07-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles and methods of forming same |
| US11926019B2 (en) | 2019-12-27 | 2024-03-12 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles and methods of forming same |
| KR102719159B1 (ko) | 2019-12-27 | 2024-10-21 | 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. | 연마 물품 및 이의 형성 방법 |
| CN111546247B (zh) * | 2020-04-30 | 2022-03-25 | 郑州力弘超硬材料有限公司 | 一种用于光纤插针的金刚石磨具低温陶瓷结合剂及其制备方法 |
| JP7167367B2 (ja) * | 2020-09-07 | 2022-11-08 | 日本碍子株式会社 | 耐火材 |
| US11919115B2 (en) * | 2021-10-13 | 2024-03-05 | Dalian University Of Technology | Flexible dot matrix bonding apparatus and adaptive clamping method for disk-type planar component |
| US20230211468A1 (en) | 2021-12-30 | 2023-07-06 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods of forming same |
| TWI856689B (zh) * | 2023-06-07 | 2024-09-21 | 吉而特科技股份有限公司 | 循環再使用的研磨裝置 |
Family Cites Families (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2488276A (en) * | 1943-12-28 | 1949-11-15 | Norton Co | Grinding wheel |
| BE758965A (fr) * | 1969-11-14 | 1971-05-13 | Norton Co | Elements de meulage abrasifs |
| US3966855A (en) * | 1974-02-22 | 1976-06-29 | The United States Of America As Represented By The Secretary Of The Air Force | Method of fabricating silicon carbide articles |
| JPS61230871A (ja) * | 1985-04-05 | 1986-10-15 | Noritake Co Ltd | 可撓性樹脂を用いた砥石 |
| KR910002578B1 (ko) * | 1988-01-19 | 1991-04-27 | 닙폰 가이시 카부시키카이샤 | 고밀도 SiC 소결체의 제조방법 |
| DE4243864C2 (de) * | 1991-12-24 | 1996-04-18 | Schunk Ingenieurkeramik Gmbh | Verfahren zur Herstellung von Formkörpern aus Siliciumcarbid |
| US5366523A (en) * | 1992-07-23 | 1994-11-22 | Minnesota Mining And Manufacturing Company | Abrasive article containing shaped abrasive particles |
| US5453312A (en) * | 1993-10-29 | 1995-09-26 | Minnesota Mining And Manufacturing Company | Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface |
| US5551959A (en) * | 1994-08-24 | 1996-09-03 | Minnesota Mining And Manufacturing Company | Abrasive article having a diamond-like coating layer and method for making same |
| US5692950A (en) * | 1996-08-08 | 1997-12-02 | Minnesota Mining And Manufacturing Company | Abrasive construction for semiconductor wafer modification |
| JPH10138120A (ja) * | 1996-10-31 | 1998-05-26 | Kyocera Corp | ドレッシング用治具 |
| US5840221A (en) * | 1996-12-02 | 1998-11-24 | Saint-Gobain/Norton Industrial Ceramics Corporation | Process for making silicon carbide reinforced silicon carbide composite |
| CN1060424C (zh) * | 1997-08-26 | 2001-01-10 | 汪宁 | 用于化学－机械抛光的抛光盘及其制造方法 |
| US6214078B1 (en) * | 1997-11-25 | 2001-04-10 | Ferro Corporation | High temperature ceramic filter |
| US20050260930A1 (en) * | 1999-06-15 | 2005-11-24 | Yuji Okuda | Table of wafer of polishing apparatus, method for polishing semiconductor wafer, and method for manufacturing semiconductor wafer |
| US6364749B1 (en) * | 1999-09-02 | 2002-04-02 | Micron Technology, Inc. | CMP polishing pad with hydrophilic surfaces for enhanced wetting |
| TW467802B (en) * | 1999-10-12 | 2001-12-11 | Hunatech Co Ltd | Conditioner for polishing pad and method for manufacturing the same |
| JP2001121418A (ja) * | 1999-10-29 | 2001-05-08 | Noritake Diamond Ind Co Ltd | ポリッシング用電着ドレッサ |
| US6451077B1 (en) * | 2000-02-02 | 2002-09-17 | 3M Innovative Properties Company | Fused abrasive particles, abrasive articles, and methods of making and using the same |
| US7384438B1 (en) * | 2000-07-19 | 2008-06-10 | 3M Innovative Properties Company | Fused Al2O3-Y2O3-ZrO2 eutectic abrasive particles, abrasive articles, and methods of making and using the same |
| DE60141700D1 (de) * | 2000-10-16 | 2010-05-12 | 3M Innovative Properties Co | Atteilchen |
| JP2004291165A (ja) * | 2003-03-27 | 2004-10-21 | Mitsubishi Materials Corp | 軟質材加工用工具 |
| CN100356516C (zh) * | 2004-05-05 | 2007-12-19 | 智胜科技股份有限公司 | 单层研磨垫及其制造方法 |
| JP4661098B2 (ja) * | 2004-06-18 | 2011-03-30 | 三菱マテリアル株式会社 | 軟質材加工用切削工具 |
| US7309672B2 (en) * | 2005-07-05 | 2007-12-18 | Ceradyne, Inc. | Lightweight boron carbide materials with improved mechanical properties and process for their manufacture |
| JP4624293B2 (ja) * | 2006-03-31 | 2011-02-02 | 株式会社ノリタケスーパーアブレーシブ | Ｃｍｐパッドコンディショナー |
| US7410413B2 (en) * | 2006-04-27 | 2008-08-12 | 3M Innovative Properties Company | Structured abrasive article and method of making and using the same |
| US8323072B1 (en) * | 2007-03-21 | 2012-12-04 | 3M Innovative Properties Company | Method of polishing transparent armor |
| US20080287047A1 (en) * | 2007-05-18 | 2008-11-20 | Sang Fang Chemical Industry Co., Ltd. | Polishing pad, use thereof and method for making the same |
| US8080073B2 (en) * | 2007-12-20 | 2011-12-20 | 3M Innovative Properties Company | Abrasive article having a plurality of precisely-shaped abrasive composites |
| JP2010125567A (ja) * | 2008-11-28 | 2010-06-10 | Mitsubishi Materials Corp | Ｃｍｐパッドコンディショナー |
| JP2010125586A (ja) * | 2008-12-01 | 2010-06-10 | Mitsubishi Materials Corp | 半導体研磨布用コンディショナー及びその製造方法 |
| WO2010063647A1 (en) * | 2008-12-03 | 2010-06-10 | Struers A/S | Abrasive disc |
| JP5502987B2 (ja) * | 2009-03-24 | 2014-05-28 | サンーゴバン アブレイシブズ，インコーポレイティド | 化学機械平坦化パッドコンディショナとして使用するための研磨工具 |
| JP5453526B2 (ja) * | 2009-06-02 | 2014-03-26 | サンーゴバン アブレイシブズ，インコーポレイティド | 耐腐食性ｃｍｐコンディショニング工具並びにその作製および使用法 |
| KR101091030B1 (ko) * | 2010-04-08 | 2011-12-09 | 이화다이아몬드공업 주식회사 | 감소된 마찰력을 갖는 패드 컨디셔너 제조방법 |
| US20120171935A1 (en) * | 2010-12-20 | 2012-07-05 | Diamond Innovations, Inc. | CMP PAD Conditioning Tool |
| US20130065490A1 (en) * | 2011-09-12 | 2013-03-14 | 3M Innovative Properties Company | Method of refurbishing vinyl composition tile |
-
2013
- 2013-07-31 SG SG11201500713PA patent/SG11201500713PA/en unknown
- 2013-07-31 US US14/418,453 patent/US20150224625A1/en not_active Abandoned
- 2013-07-31 CN CN201380040394.7A patent/CN104684686A/zh active Pending
- 2013-07-31 KR KR20157004858A patent/KR20150039795A/ko not_active Ceased
- 2013-07-31 JP JP2015525532A patent/JP2015530265A/ja active Pending
- 2013-07-31 CN CN202211322368.0A patent/CN115625629A/zh active Pending
- 2013-07-31 WO PCT/US2013/052828 patent/WO2014022462A1/en not_active Ceased
- 2013-07-31 EP EP13826255.5A patent/EP2879836B1/en active Active
- 2013-08-01 TW TW102127669A patent/TWI660816B/zh active
-
2018
- 2018-11-09 JP JP2018211596A patent/JP2019063989A/ja active Pending
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