JP2015530265A5 - - Google Patents
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- Publication number
- JP2015530265A5 JP2015530265A5 JP2015525532A JP2015525532A JP2015530265A5 JP 2015530265 A5 JP2015530265 A5 JP 2015530265A5 JP 2015525532 A JP2015525532 A JP 2015525532A JP 2015525532 A JP2015525532 A JP 2015525532A JP 2015530265 A5 JP2015530265 A5 JP 2015530265A5
- Authority
- JP
- Japan
- Prior art keywords
- major surface
- carbide
- abrasive
- polishing
- precisely shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261678665P | 2012-08-02 | 2012-08-02 | |
| US61/678,665 | 2012-08-02 | ||
| PCT/US2013/052828 WO2014022462A1 (en) | 2012-08-02 | 2013-07-31 | Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018211596A Division JP2019063989A (ja) | 2012-08-02 | 2018-11-09 | 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015530265A JP2015530265A (ja) | 2015-10-15 |
| JP2015530265A5 true JP2015530265A5 (enExample) | 2016-09-15 |
Family
ID=50028490
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015525532A Pending JP2015530265A (ja) | 2012-08-02 | 2013-07-31 | 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法 |
| JP2018211596A Pending JP2019063989A (ja) | 2012-08-02 | 2018-11-09 | 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018211596A Pending JP2019063989A (ja) | 2012-08-02 | 2018-11-09 | 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20150224625A1 (enExample) |
| EP (1) | EP2879836B1 (enExample) |
| JP (2) | JP2015530265A (enExample) |
| KR (1) | KR20150039795A (enExample) |
| CN (2) | CN115625629A (enExample) |
| SG (1) | SG11201500713PA (enExample) |
| TW (1) | TWI660816B (enExample) |
| WO (1) | WO2014022462A1 (enExample) |
Families Citing this family (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2658680B1 (en) | 2010-12-31 | 2020-12-09 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles comprising abrasive particles having particular shapes and methods of forming such articles |
| EP2726248B1 (en) | 2011-06-30 | 2019-06-19 | Saint-Gobain Ceramics & Plastics, Inc. | Liquid phase sintered silicon carbide abrasive particles |
| CN103702800B (zh) | 2011-06-30 | 2017-11-10 | 圣戈本陶瓷及塑料股份有限公司 | 包括氮化硅磨粒的磨料制品 |
| WO2013049239A1 (en) | 2011-09-26 | 2013-04-04 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming |
| PL2797716T3 (pl) | 2011-12-30 | 2021-07-05 | Saint-Gobain Ceramics & Plastics, Inc. | Kompozytowe ukształtowane cząstki ścierne i sposób ich formowania |
| KR20170018102A (ko) | 2011-12-30 | 2017-02-15 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자 및 이의 형성방법 |
| EP3705177A1 (en) | 2012-01-10 | 2020-09-09 | Saint-Gobain Ceramics & Plastics Inc. | Abrasive particles having complex shapes and methods of forming same |
| US8840696B2 (en) | 2012-01-10 | 2014-09-23 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| US9242346B2 (en) | 2012-03-30 | 2016-01-26 | Saint-Gobain Abrasives, Inc. | Abrasive products having fibrillated fibers |
| KR102197361B1 (ko) | 2012-05-23 | 2021-01-05 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자들 및 이의 형성방법 |
| BR112014032152B1 (pt) | 2012-06-29 | 2022-09-20 | Saint-Gobain Ceramics & Plastics, Inc | Partículas abrasivas tendo formatos particulares e artigos abrasivos |
| KR102089382B1 (ko) | 2012-08-02 | 2020-03-16 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 정밀하게 형상화된 특징부를 갖는 연마 요소 전구체 및 그의 제조 방법 |
| CN104736299A (zh) | 2012-08-02 | 2015-06-24 | 3M创新有限公司 | 具有精确成形特征部的研磨制品及其制造方法 |
| FI2906392T3 (fi) | 2012-10-15 | 2025-06-20 | Saint Gobain Abrasives Inc | Hiomahiukkasia, joilla on erityisiä muotoja, ja menetelmiä tällaisten hiukkasten muodostamiseksi |
| US9074119B2 (en) | 2012-12-31 | 2015-07-07 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| JP6670608B2 (ja) * | 2013-03-12 | 2020-03-25 | スリーエム イノベイティブ プロパティズ カンパニー | 結合研磨物品 |
| CN105073343B (zh) | 2013-03-29 | 2017-11-03 | 圣戈班磨料磨具有限公司 | 具有特定形状的磨粒、形成这种粒子的方法及其用途 |
| TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
| RU2643004C2 (ru) | 2013-09-30 | 2018-01-29 | Сен-Гобен Серэмикс Энд Пластикс, Инк. | Формованные абразивные частицы и способы их получения |
| MX380754B (es) | 2013-12-31 | 2025-03-12 | Saint Gobain Abrasives Inc | Artículo abrasivo que incluye partículas abrasivas perfiladas. |
| US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
| US9803119B2 (en) | 2014-04-14 | 2017-10-31 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| BR112016023838A2 (pt) | 2014-04-14 | 2017-08-15 | Saint Gobain Ceramics | artigo abrasivo incluindo partículas abrasivas moldadas |
| US9902045B2 (en) | 2014-05-30 | 2018-02-27 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
| US20160144477A1 (en) * | 2014-11-21 | 2016-05-26 | Diane Scott | Coated compressive subpad for chemical mechanical polishing |
| US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
| US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
| CN107636109A (zh) | 2015-03-31 | 2018-01-26 | 圣戈班磨料磨具有限公司 | 固定磨料制品和其形成方法 |
| TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
| EP3307483B1 (en) | 2015-06-11 | 2020-06-17 | Saint-Gobain Ceramics&Plastics, Inc. | Abrasive article including shaped abrasive particles |
| PL3455321T3 (pl) | 2016-05-10 | 2022-12-12 | Saint-Gobain Ceramics&Plastics, Inc. | Sposób formowania cząstek ściernych |
| WO2017197002A1 (en) | 2016-05-10 | 2017-11-16 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles and methods of forming same |
| TWI621502B (zh) * | 2016-08-18 | 2018-04-21 | 中國砂輪企業股份有限公司 | Double chemical mechanical polishing trimming system and method thereof |
| US11230653B2 (en) | 2016-09-29 | 2022-01-25 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| WO2018236989A1 (en) | 2017-06-21 | 2018-12-27 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| SG11202000246QA (en) * | 2017-07-11 | 2020-02-27 | 3M Innovative Properties Co | Abrasive articles including conformable coatings and polishing system therefrom |
| CN121491923A (zh) | 2017-07-11 | 2026-02-10 | 3M创新有限公司 | 制备磨料制品的方法和由其制成的抛光系统 |
| EP3924146A4 (en) | 2019-02-13 | 2022-11-09 | 3M Innovative Properties Company | ABRASIVES WITH PRECISELY SHAPED FEATURES, ABRASIVES MADE THEREOF AND PROCESSES FOR THEIR MANUFACTURE |
| KR102765343B1 (ko) | 2019-12-27 | 2025-02-13 | 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. | 연마 물품 및 이의 형성 방법 |
| CN114845838B (zh) | 2019-12-27 | 2024-10-25 | 圣戈本陶瓷及塑料股份有限公司 | 磨料制品及其形成方法 |
| US12129422B2 (en) | 2019-12-27 | 2024-10-29 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles and methods of forming same |
| TWI738304B (zh) * | 2020-04-23 | 2021-09-01 | 台灣積體電路製造股份有限公司 | 半導體晶圓加工方法及清潔刷頭 |
| CN111546247B (zh) * | 2020-04-30 | 2022-03-25 | 郑州力弘超硬材料有限公司 | 一种用于光纤插针的金刚石磨具低温陶瓷结合剂及其制备方法 |
| JP7167367B2 (ja) * | 2020-09-07 | 2022-11-08 | 日本碍子株式会社 | 耐火材 |
| US11919115B2 (en) * | 2021-10-13 | 2024-03-05 | Dalian University Of Technology | Flexible dot matrix bonding apparatus and adaptive clamping method for disk-type planar component |
| WO2023130052A1 (en) | 2021-12-30 | 2023-07-06 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods of forming same |
| CA3241421A1 (en) | 2021-12-30 | 2023-07-06 | Anthony MARTONE | Abrasive articles and methods of forming same |
| EP4457054A4 (en) | 2021-12-30 | 2026-01-14 | Saint Gobain Abrasives Inc | ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES |
| TWI856689B (zh) * | 2023-06-07 | 2024-09-21 | 吉而特科技股份有限公司 | 循環再使用的研磨裝置 |
Family Cites Families (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2488276A (en) * | 1943-12-28 | 1949-11-15 | Norton Co | Grinding wheel |
| BE758965A (fr) * | 1969-11-14 | 1971-05-13 | Norton Co | Elements de meulage abrasifs |
| US3966855A (en) * | 1974-02-22 | 1976-06-29 | The United States Of America As Represented By The Secretary Of The Air Force | Method of fabricating silicon carbide articles |
| JPS61230871A (ja) * | 1985-04-05 | 1986-10-15 | Noritake Co Ltd | 可撓性樹脂を用いた砥石 |
| KR910002578B1 (ko) * | 1988-01-19 | 1991-04-27 | 닙폰 가이시 카부시키카이샤 | 고밀도 SiC 소결체의 제조방법 |
| DE4243864C2 (de) * | 1991-12-24 | 1996-04-18 | Schunk Ingenieurkeramik Gmbh | Verfahren zur Herstellung von Formkörpern aus Siliciumcarbid |
| US5366523A (en) * | 1992-07-23 | 1994-11-22 | Minnesota Mining And Manufacturing Company | Abrasive article containing shaped abrasive particles |
| US5453312A (en) * | 1993-10-29 | 1995-09-26 | Minnesota Mining And Manufacturing Company | Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface |
| US5551959A (en) * | 1994-08-24 | 1996-09-03 | Minnesota Mining And Manufacturing Company | Abrasive article having a diamond-like coating layer and method for making same |
| US5692950A (en) * | 1996-08-08 | 1997-12-02 | Minnesota Mining And Manufacturing Company | Abrasive construction for semiconductor wafer modification |
| JPH10138120A (ja) * | 1996-10-31 | 1998-05-26 | Kyocera Corp | ドレッシング用治具 |
| US5840221A (en) * | 1996-12-02 | 1998-11-24 | Saint-Gobain/Norton Industrial Ceramics Corporation | Process for making silicon carbide reinforced silicon carbide composite |
| CN1060424C (zh) * | 1997-08-26 | 2001-01-10 | 汪宁 | 用于化学－机械抛光的抛光盘及其制造方法 |
| US6214078B1 (en) * | 1997-11-25 | 2001-04-10 | Ferro Corporation | High temperature ceramic filter |
| US20050260930A1 (en) * | 1999-06-15 | 2005-11-24 | Yuji Okuda | Table of wafer of polishing apparatus, method for polishing semiconductor wafer, and method for manufacturing semiconductor wafer |
| US6364749B1 (en) * | 1999-09-02 | 2002-04-02 | Micron Technology, Inc. | CMP polishing pad with hydrophilic surfaces for enhanced wetting |
| TW467802B (en) * | 1999-10-12 | 2001-12-11 | Hunatech Co Ltd | Conditioner for polishing pad and method for manufacturing the same |
| JP2001121418A (ja) * | 1999-10-29 | 2001-05-08 | Noritake Diamond Ind Co Ltd | ポリッシング用電着ドレッサ |
| US6451077B1 (en) * | 2000-02-02 | 2002-09-17 | 3M Innovative Properties Company | Fused abrasive particles, abrasive articles, and methods of making and using the same |
| US7384438B1 (en) * | 2000-07-19 | 2008-06-10 | 3M Innovative Properties Company | Fused Al2O3-Y2O3-ZrO2 eutectic abrasive particles, abrasive articles, and methods of making and using the same |
| EP1326940B1 (en) * | 2000-10-16 | 2010-03-31 | 3M Innovative Properties Company | Method of making ceramic aggregate particles |
| JP2004291165A (ja) * | 2003-03-27 | 2004-10-21 | Mitsubishi Materials Corp | 軟質材加工用工具 |
| CN100356516C (zh) * | 2004-05-05 | 2007-12-19 | 智胜科技股份有限公司 | 单层研磨垫及其制造方法 |
| JP4661098B2 (ja) * | 2004-06-18 | 2011-03-30 | 三菱マテリアル株式会社 | 軟質材加工用切削工具 |
| US7309672B2 (en) * | 2005-07-05 | 2007-12-18 | Ceradyne, Inc. | Lightweight boron carbide materials with improved mechanical properties and process for their manufacture |
| JP4624293B2 (ja) * | 2006-03-31 | 2011-02-02 | 株式会社ノリタケスーパーアブレーシブ | Ｃｍｐパッドコンディショナー |
| US7410413B2 (en) * | 2006-04-27 | 2008-08-12 | 3M Innovative Properties Company | Structured abrasive article and method of making and using the same |
| US8323072B1 (en) * | 2007-03-21 | 2012-12-04 | 3M Innovative Properties Company | Method of polishing transparent armor |
| US20080287047A1 (en) * | 2007-05-18 | 2008-11-20 | Sang Fang Chemical Industry Co., Ltd. | Polishing pad, use thereof and method for making the same |
| US8080073B2 (en) * | 2007-12-20 | 2011-12-20 | 3M Innovative Properties Company | Abrasive article having a plurality of precisely-shaped abrasive composites |
| JP2010125567A (ja) * | 2008-11-28 | 2010-06-10 | Mitsubishi Materials Corp | Ｃｍｐパッドコンディショナー |
| JP2010125586A (ja) * | 2008-12-01 | 2010-06-10 | Mitsubishi Materials Corp | 半導体研磨布用コンディショナー及びその製造方法 |
| WO2010063647A1 (en) * | 2008-12-03 | 2010-06-10 | Struers A/S | Abrasive disc |
| KR101413030B1 (ko) * | 2009-03-24 | 2014-07-02 | 생-고벵 아브라시프 | 화학적 기계적 평탄화 패드 컨디셔너로 사용되는 연마 공구 |
| CA2764358A1 (en) * | 2009-06-02 | 2010-12-09 | Saint-Gobain Abrasives, Inc. | Corrosion-resistant cmp conditioning tools and methods for making and using same |
| KR101091030B1 (ko) * | 2010-04-08 | 2011-12-09 | 이화다이아몬드공업 주식회사 | 감소된 마찰력을 갖는 패드 컨디셔너 제조방법 |
| US20120171935A1 (en) * | 2010-12-20 | 2012-07-05 | Diamond Innovations, Inc. | CMP PAD Conditioning Tool |
| US20130065490A1 (en) * | 2011-09-12 | 2013-03-14 | 3M Innovative Properties Company | Method of refurbishing vinyl composition tile |
-
2013
- 2013-07-31 CN CN202211322368.0A patent/CN115625629A/zh active Pending
- 2013-07-31 CN CN201380040394.7A patent/CN104684686A/zh active Pending
- 2013-07-31 JP JP2015525532A patent/JP2015530265A/ja active Pending
- 2013-07-31 WO PCT/US2013/052828 patent/WO2014022462A1/en not_active Ceased
- 2013-07-31 EP EP13826255.5A patent/EP2879836B1/en active Active
- 2013-07-31 KR KR20157004858A patent/KR20150039795A/ko not_active Ceased
- 2013-07-31 US US14/418,453 patent/US20150224625A1/en not_active Abandoned
- 2013-07-31 SG SG11201500713PA patent/SG11201500713PA/en unknown
- 2013-08-01 TW TW102127669A patent/TWI660816B/zh active
-
2018
- 2018-11-09 JP JP2018211596A patent/JP2019063989A/ja active Pending
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