JP2015524358A5 - - Google Patents
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- Publication number
- JP2015524358A5 JP2015524358A5 JP2015525533A JP2015525533A JP2015524358A5 JP 2015524358 A5 JP2015524358 A5 JP 2015524358A5 JP 2015525533 A JP2015525533 A JP 2015525533A JP 2015525533 A JP2015525533 A JP 2015525533A JP 2015524358 A5 JP2015524358 A5 JP 2015524358A5
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- main surface
- diamond
- abrasive
- major surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims 16
- 229910003460 diamond Inorganic materials 0.000 claims 7
- 239000010432 diamond Substances 0.000 claims 7
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261678666P | 2012-08-02 | 2012-08-02 | |
| US61/678,666 | 2012-08-02 | ||
| PCT/US2013/052834 WO2014022465A1 (en) | 2012-08-02 | 2013-07-31 | Abrasive articles with precisely shaped features and method of making thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015524358A JP2015524358A (ja) | 2015-08-24 |
| JP2015524358A5 true JP2015524358A5 (enExample) | 2016-09-23 |
| JP6715006B2 JP6715006B2 (ja) | 2020-07-01 |
Family
ID=50028491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015525533A Active JP6715006B2 (ja) | 2012-08-02 | 2013-07-31 | 精密に成形された構造部を有する研磨物品及びその作製方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US10710211B2 (enExample) |
| EP (1) | EP2879838B1 (enExample) |
| JP (1) | JP6715006B2 (enExample) |
| KR (1) | KR102089383B1 (enExample) |
| CN (1) | CN104736299A (enExample) |
| SG (1) | SG11201500802TA (enExample) |
| TW (1) | TWI695756B (enExample) |
| WO (1) | WO2014022465A1 (enExample) |
Families Citing this family (64)
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| PL2797716T3 (pl) | 2011-12-30 | 2021-07-05 | Saint-Gobain Ceramics & Plastics, Inc. | Kompozytowe ukształtowane cząstki ścierne i sposób ich formowania |
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| KR102304965B1 (ko) * | 2019-10-30 | 2021-09-24 | 에스케이씨솔믹스 주식회사 | 연마패드, 이의 제조방법, 및 이를 이용한 반도체 소자의 제조방법 |
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| JP5422262B2 (ja) * | 2009-06-01 | 2014-02-19 | ニッタ・ハース株式会社 | 研磨パッドのコンディショナー |
| EP2438609A4 (en) | 2009-06-02 | 2016-03-09 | Saint Gobain Abrasives Inc | CORROSION-RESISTANT CMP CONDITIONERS AND METHOD FOR THEIR PREPARATION AND USE |
| EP2474025A2 (en) | 2009-09-01 | 2012-07-11 | Saint-Gobain Abrasives, Inc. | Chemical mechanical polishing conditioner |
| JP2011161584A (ja) | 2010-02-12 | 2011-08-25 | Shingijutsu Kaihatsu Kk | 研磨工具 |
| KR101091030B1 (ko) | 2010-04-08 | 2011-12-09 | 이화다이아몬드공업 주식회사 | 감소된 마찰력을 갖는 패드 컨디셔너 제조방법 |
| US20120171935A1 (en) | 2010-12-20 | 2012-07-05 | Diamond Innovations, Inc. | CMP PAD Conditioning Tool |
| CN103688343B (zh) * | 2011-03-07 | 2016-09-07 | 恩特格里公司 | 化学机械抛光垫修整器 |
| US20130065490A1 (en) * | 2011-09-12 | 2013-03-14 | 3M Innovative Properties Company | Method of refurbishing vinyl composition tile |
| EP2802436B1 (en) | 2012-01-10 | 2019-09-25 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having complex shapes |
| TW201350267A (zh) * | 2012-05-04 | 2013-12-16 | 聖高拜磨料有限公司 | 用於同雙側化學機械平坦化墊修整器一起使用之工具 |
| EP2879837B1 (en) | 2012-08-02 | 2018-09-19 | 3M Innovative Properties Company | Abrasive element precursor with precisely shaped features and method of making thereof |
| KR20150039795A (ko) | 2012-08-02 | 2015-04-13 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 정밀하게 형상화된 특징부를 갖는 연마 요소, 그로부터 제작되는 연마 물품, 및 그의 제조 방법 |
| TWI530361B (zh) * | 2012-11-07 | 2016-04-21 | 中國砂輪企業股份有限公司 | 化學機械研磨修整器及其製法 |
| TWI511841B (zh) * | 2013-03-15 | 2015-12-11 | Kinik Co | 貼合式化學機械硏磨修整器及其製法 |
| CN203390712U (zh) * | 2013-04-08 | 2014-01-15 | 宋健民 | 化学机械研磨修整器 |
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| TWI616278B (zh) * | 2015-02-16 | 2018-03-01 | China Grinding Wheel Corp | 化學機械研磨修整器 |
-
2013
- 2013-07-31 US US14/418,959 patent/US10710211B2/en active Active
- 2013-07-31 EP EP13825436.2A patent/EP2879838B1/en active Active
- 2013-07-31 JP JP2015525533A patent/JP6715006B2/ja active Active
- 2013-07-31 WO PCT/US2013/052834 patent/WO2014022465A1/en not_active Ceased
- 2013-07-31 CN CN201380041063.5A patent/CN104736299A/zh active Pending
- 2013-07-31 SG SG11201500802TA patent/SG11201500802TA/en unknown
- 2013-07-31 KR KR1020157004847A patent/KR102089383B1/ko active Active
- 2013-08-01 TW TW102127668A patent/TWI695756B/zh active
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2020
- 2020-06-05 US US16/946,089 patent/US11697185B2/en active Active
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