JP6715006B2 - 精密に成形された構造部を有する研磨物品及びその作製方法 - Google Patents

精密に成形された構造部を有する研磨物品及びその作製方法 Download PDF

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Publication number
JP6715006B2
JP6715006B2 JP2015525533A JP2015525533A JP6715006B2 JP 6715006 B2 JP6715006 B2 JP 6715006B2 JP 2015525533 A JP2015525533 A JP 2015525533A JP 2015525533 A JP2015525533 A JP 2015525533A JP 6715006 B2 JP6715006 B2 JP 6715006B2
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Prior art keywords
polishing
abrasive
diamond
pad
elements
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Japanese (ja)
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JP2015524358A (ja
JP2015524358A5 (enExample
Inventor
デュイ ケー． レフー，
デュイ ケー． レフー，
ノア オー． シャンティ，
ノア オー． シャンティ，
ジンチン シエ，
ジンチン シエ，
キャスリン アール． ブレッチャー，
キャスリン アール． ブレッチャー，
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of JP2015524358A5 publication Critical patent/JP2015524358A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B24B37/16—Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/001—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
    • B24D3/002—Flexible supporting members, e.g. paper, woven, plastic materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/18—Wheels of special form

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP2015525533A 2012-08-02 2013-07-31 精密に成形された構造部を有する研磨物品及びその作製方法 Active JP6715006B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261678666P 2012-08-02 2012-08-02
US61/678,666 2012-08-02
PCT/US2013/052834 WO2014022465A1 (en) 2012-08-02 2013-07-31 Abrasive articles with precisely shaped features and method of making thereof

Publications (3)

Publication Number Publication Date
JP2015524358A JP2015524358A (ja) 2015-08-24
JP2015524358A5 JP2015524358A5 (enExample) 2016-09-23
JP6715006B2 true JP6715006B2 (ja) 2020-07-01

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JP2015525533A Active JP6715006B2 (ja) 2012-08-02 2013-07-31 精密に成形された構造部を有する研磨物品及びその作製方法

Country Status (8)

Country Link
US (2) US10710211B2 (enExample)
EP (1) EP2879838B1 (enExample)
JP (1) JP6715006B2 (enExample)
KR (1) KR102089383B1 (enExample)
CN (1) CN104736299A (enExample)
SG (1) SG11201500802TA (enExample)
TW (1) TWI695756B (enExample)
WO (1) WO2014022465A1 (enExample)

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CN104736299A (zh) 2015-06-24
TW201410389A (zh) 2014-03-16
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US10710211B2 (en) 2020-07-14
TWI695756B (zh) 2020-06-11
US20200298370A1 (en) 2020-09-24
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