TWD179672S - 基板保持環之部分 - Google Patents

基板保持環之部分

Info

Publication number
TWD179672S
TWD179672S TW105301716F TW105301716F TWD179672S TW D179672 S TWD179672 S TW D179672S TW 105301716 F TW105301716 F TW 105301716F TW 105301716 F TW105301716 F TW 105301716F TW D179672 S TWD179672 S TW D179672S
Authority
TW
Taiwan
Prior art keywords
design
case
substrate
retaining ring
substrate retaining
Prior art date
Application number
TW105301716F
Other languages
English (en)
Inventor
Osamu Nabeya
Hozumi Yasuda
Makoto Fukushima
Keisuke Namiki
Shingo Togashi
Satoru Yamaki
Original Assignee
荏原製作所股份有限公司
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司, Ebara Corp filed Critical 荏原製作所股份有限公司
Publication of TWD179672S publication Critical patent/TWD179672S/zh

Links

Abstract

【物品用途】;本設計的物品是基板保持環，如「使用狀態參考圖」所示，應用於半導體等製造時的基板研磨工程中，將晶圓等基板保持在環內，以便於對基板的單面進行研磨。;【設計說明】;圖式所揭露之實線部分，為本案主張設計之部分，虛線部分為本案不主張設計之部分。;圖式所揭露之一點鏈線，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。
TW105301716F 2015-10-06 2016-03-31 基板保持環之部分 TWD179672S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-21985F JP1556433S (zh) 2015-10-06 2015-10-06

Publications (1)

Publication Number Publication Date
TWD179672S true TWD179672S (zh) 2016-11-21

Family

ID=56612403

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105301716F TWD179672S (zh) 2015-10-06 2016-03-31 基板保持環之部分

Country Status (3)

Country Link
US (1) USD794585S1 (zh)
JP (1) JP1556433S (zh)
TW (1) TWD179672S (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD931241S1 (en) 2019-08-28 2021-09-21 Applied Materials, Inc. Lower shield for a substrate processing chamber

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1544543S (zh) * 2015-05-14 2019-02-18
JP1584784S (zh) * 2017-01-31 2017-08-28
JP1651619S (zh) * 2019-07-11 2020-01-27
JP1651618S (zh) * 2019-07-11 2020-01-27
JP1651623S (zh) * 2019-07-18 2020-01-27
USD940670S1 (en) * 2019-09-26 2022-01-11 Willbe S&T Co., Ltd. Retainer ring for chemical mechanical polishing device
JP1671171S (zh) * 2020-05-22 2020-10-26
USD981459S1 (en) * 2021-06-16 2023-03-21 Ebara Corporation Retaining ring for substrate

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5944593A (en) * 1997-09-01 1999-08-31 United Microelectronics Corp. Retainer ring for polishing head of chemical-mechanical polish machines
US6116992A (en) * 1997-12-30 2000-09-12 Applied Materials, Inc. Substrate retaining ring
US6436228B1 (en) * 1998-05-15 2002-08-20 Applied Materials, Inc. Substrate retainer
US6224472B1 (en) * 1999-06-24 2001-05-01 Samsung Austin Semiconductor, L.P. Retaining ring for chemical mechanical polishing
US6186880B1 (en) * 1999-09-29 2001-02-13 Semiconductor Equipment Technology Recyclable retaining ring assembly for a chemical mechanical polishing apparatus
US6869335B2 (en) * 2002-07-08 2005-03-22 Micron Technology, Inc. Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpieces
JP5296985B2 (ja) * 2003-11-13 2013-09-25 アプライド マテリアルズ インコーポレイテッド 整形面をもつリテーニングリング
US7029386B2 (en) * 2004-06-10 2006-04-18 R & B Plastics, Inc. Retaining ring assembly for use in chemical mechanical polishing
US7029375B2 (en) * 2004-08-31 2006-04-18 Tech Semiconductor Pte. Ltd. Retaining ring structure for edge control during chemical-mechanical polishing
USD559993S1 (en) * 2005-03-30 2008-01-15 Tokyo Electron Limited Cover ring
US7186171B2 (en) * 2005-04-22 2007-03-06 Applied Materials, Inc. Composite retaining ring
USD557226S1 (en) * 2005-08-25 2007-12-11 Hitachi High-Technologies Corporation Electrode cover for a plasma processing apparatus
US7326105B2 (en) * 2005-08-31 2008-02-05 Micron Technology, Inc. Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces
JP2008229790A (ja) * 2007-03-22 2008-10-02 Nec Electronics Corp リテーナリングおよび研磨装置
US8517803B2 (en) * 2009-09-16 2013-08-27 SPM Technology, Inc. Retaining ring for chemical mechanical polishing
US8298046B2 (en) * 2009-10-21 2012-10-30 SPM Technology, Inc. Retaining rings
JP1438745S (zh) * 2011-09-20 2015-04-06
USD699200S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode member for a plasma processing apparatus
USD734377S1 (en) * 2013-03-28 2015-07-14 Hirata Corporation Top cover of a load lock chamber
USD766849S1 (en) * 2013-05-15 2016-09-20 Ebara Corporation Substrate retaining ring
USD729730S1 (en) * 2013-06-06 2015-05-19 Jon Simon Gillespie-Brown Power charging ring

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD931241S1 (en) 2019-08-28 2021-09-21 Applied Materials, Inc. Lower shield for a substrate processing chamber
USD971167S1 (en) 2019-08-28 2022-11-29 Applied Materials, Inc. Lower shield for a substrate processing chamber

Also Published As

Publication number Publication date
JP1556433S (zh) 2016-08-15
USD794585S1 (en) 2017-08-15

Similar Documents

Publication Publication Date Title
TWD179672S (zh) 基板保持環之部分
TWD189313S (zh) 用於半導體製造設備的承載器
TWD179095S (zh) 基板保持環
TWD166332S (zh) 基板處理裝置用晶舟之部分
TWD162133S (zh) 基板洗淨用輥子軸桿之部分
TWD167109S (zh) 基板保持環
TWD162134S (zh) 基板洗淨用輥子軸桿之部分
JP1643942S (ja) 基板保持リング
JP1643626S (ja) 基板保持リング
JP1639752S (ja) 基板保持リング
TWD177006S (zh) 半導體製造裝置用附設研磨部之清洗刷之部分
TWD175120S (zh) 基板保持環
TWD179918S (zh) 基板洗淨用滾子之部分
TWD168373S (zh) 半導體晶圓硏磨裝置用彈性膜之部分
TWD169007S (zh) 半導體製造用晶圓保持具之部分
TWD169006S (zh) 半導體製造用晶圓保持具之部分
JP1645741S (ja) 基板保持リング
JP1643944S (ja) 基板保持リング
JP1643943S (ja) 基板保持リング
JP1647181S (ja) 基板保持リング
JP1643945S (ja) 基板保持リング
JP1639761S (ja) 基板保持リング
JP1639762S (ja) 基板保持リング
JP1639763S (ja) 基板保持リング
JP1639764S (ja) 基板保持リング