JP1639752S - 基板保持リング - Google Patents

基板保持リング

Info

Publication number
JP1639752S
JP1639752S JP2018020948F JP2018020948F JP1639752S JP 1639752 S JP1639752 S JP 1639752S JP 2018020948 F JP2018020948 F JP 2018020948F JP 2018020948 F JP2018020948 F JP 2018020948F JP 1639752 S JP1639752 S JP 1639752S
Authority
JP
Japan
Prior art keywords
retaining ring
substrate retaining
substrate
polishing
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018020948F
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2018020948F priority Critical patent/JP1639752S/ja
Priority to TW108301320F priority patent/TWD202849S/zh
Application granted granted Critical
Publication of JP1639752S publication Critical patent/JP1639752S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

本物品は、ウエハ等の基板の面を研磨するために用いる基板研磨装置に用いられる基板保持リングである。
JP2018020948F 2018-09-26 2018-09-26 基板保持リング Active JP1639752S (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2018020948F JP1639752S (ja) 2018-09-26 2018-09-26 基板保持リング
TW108301320F TWD202849S (zh) 2018-09-26 2019-03-08 基板保持環

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018020948F JP1639752S (ja) 2018-09-26 2018-09-26 基板保持リング

Publications (1)

Publication Number Publication Date
JP1639752S true JP1639752S (ja) 2019-08-26

Family

ID=82750119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018020948F Active JP1639752S (ja) 2018-09-26 2018-09-26 基板保持リング

Country Status (2)

Country Link
JP (1) JP1639752S (ja)
TW (1) TWD202849S (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1717341S (ja) 2020-12-18 2022-06-14 基板保持リング

Also Published As

Publication number Publication date
TWD202849S (zh) 2020-02-21

Similar Documents

Publication Publication Date Title
TWD189313S (zh) 用於半導體製造設備的承載器
TWD179672S (zh) 基板保持環之部分
JP1643942S (ja) 基板保持リング
TWD187175S (zh) 圖案化石英晶圓
TWD183002S (zh) 圖案化石英晶圓
JP1643626S (ja) 基板保持リング
JP1639752S (ja) 基板保持リング
JP1645741S (ja) 基板保持リング
JP1643628S (ja) 基板保持リング
JP1643629S (ja) 基板保持リング
JP1639765S (ja) 基板保持リング
JP1639766S (ja) 基板保持リング
JP1639763S (ja) 基板保持リング
JP1639764S (ja) 基板保持リング
JP1639762S (ja) 基板保持リング
JP1643945S (ja) 基板保持リング
JP1643944S (ja) 基板保持リング
JP1647181S (ja) 基板保持リング
JP1639761S (ja) 基板保持リング
JP1643943S (ja) 基板保持リング
JP1639758S (ja) 基板保持リング
JP1639759S (ja) 基板保持リング
JP1643627S (ja) 基板保持リング
JP1643941S (ja) 基板保持リング
JP1643940S (ja) 基板保持リング