TWD202849S - 基板保持環 - Google Patents

基板保持環 Download PDF

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Publication number
TWD202849S
TWD202849S TW108301320F TW108301320F TWD202849S TW D202849 S TWD202849 S TW D202849S TW 108301320 F TW108301320 F TW 108301320F TW 108301320 F TW108301320 F TW 108301320F TW D202849 S TWD202849 S TW D202849S
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TW
Taiwan
Prior art keywords
retaining ring
substrate retaining
design
case
item
Prior art date
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TW108301320F
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English (en)
Inventor
広田幸史
鈴木基文
永嶌匠
Original Assignee
日商富士紡控股股份有限公司
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Application filed by 日商富士紡控股股份有限公司 filed Critical 日商富士紡控股股份有限公司
Publication of TWD202849S publication Critical patent/TWD202849S/zh

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Abstract

【物品用途】;本案設計之物品係基板保持環。;【設計說明】;圖式所揭露之虛線部分,為本案不主張設計之部分。;本案設計係新穎獨特之樣式,藉由獨特地設計基板保持環,可顯現出先前技藝所未有之視覺效果。

Description

基板保持環
本案設計之物品係基板保持環。
圖式所揭露之虛線部分,為本案不主張設計之部分。
本案設計係新穎獨特之樣式,藉由獨特地設計基板保持環,可顯現出先前技藝所未有之視覺效果。
TW108301320F 2018-09-26 2019-03-08 基板保持環 TWD202849S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018020948F JP1639752S (ja) 2018-09-26 2018-09-26 基板保持リング
JP2018-020948 2018-09-26

Publications (1)

Publication Number Publication Date
TWD202849S true TWD202849S (zh) 2020-02-21

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ID=82750119

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108301320F TWD202849S (zh) 2018-09-26 2019-03-08 基板保持環

Country Status (2)

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JP (1) JP1639752S (zh)
TW (1) TWD202849S (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD215851S (zh) 2020-12-18 2021-12-01 日商荏原製作所股份有限公司 基板保持環

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD215851S (zh) 2020-12-18 2021-12-01 日商荏原製作所股份有限公司 基板保持環

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Publication number Publication date
JP1639752S (ja) 2019-08-26

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