TWD204496S - 基板保持環 - Google Patents

基板保持環 Download PDF

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Publication number
TWD204496S
TWD204496S TW108301321F TW108301321F TWD204496S TW D204496 S TWD204496 S TW D204496S TW 108301321 F TW108301321 F TW 108301321F TW 108301321 F TW108301321 F TW 108301321F TW D204496 S TWD204496 S TW D204496S
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TW
Taiwan
Prior art keywords
retaining ring
substrate retaining
case
item
design
Prior art date
Application number
TW108301321F
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English (en)
Inventor
広田幸史
鈴木基文
永嶌匠
Original Assignee
日商富士紡控股股份有限公司
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Application filed by 日商富士紡控股股份有限公司 filed Critical 日商富士紡控股股份有限公司
Publication of TWD204496S publication Critical patent/TWD204496S/zh

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Abstract

【物品用途】;本案設計之物品係基板保持環。;【設計說明】;本案設計係新穎獨特之樣式,藉由獨特地設計基板保持環,可顯現出先前技藝所未有之視覺效果。

Description

基板保持環
本案設計之物品係基板保持環。
本案設計係新穎獨特之樣式,藉由獨特地設計基板保持環,可顯現出先前技藝所未有之視覺效果。
TW108301321F 2018-12-10 2019-03-08 基板保持環 TWD204496S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-026886 2018-02-19
JP2018026886F JP1643942S (ja) 2018-12-10 2018-12-10 基板保持リング

Publications (1)

Publication Number Publication Date
TWD204496S true TWD204496S (zh) 2020-05-01

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ID=83460084

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108301321F TWD204496S (zh) 2018-12-10 2019-03-08 基板保持環

Country Status (2)

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JP (1) JP1643942S (zh)
TW (1) TWD204496S (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD215851S (zh) 2020-12-18 2021-12-01 日商荏原製作所股份有限公司 基板保持環
TWD220881S (zh) 2021-04-27 2022-09-01 日商東京威力科創股份有限公司 基板洗淨具之部分

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD215851S (zh) 2020-12-18 2021-12-01 日商荏原製作所股份有限公司 基板保持環
TWD220881S (zh) 2021-04-27 2022-09-01 日商東京威力科創股份有限公司 基板洗淨具之部分

Also Published As

Publication number Publication date
JP1643942S (ja) 2019-10-21

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