TWD187175S - 圖案化石英晶圓 - Google Patents

圖案化石英晶圓

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Publication number
TWD187175S
TWD187175S TW105303687F TW105303687F TWD187175S TW D187175 S TWD187175 S TW D187175S TW 105303687 F TW105303687 F TW 105303687F TW 105303687 F TW105303687 F TW 105303687F TW D187175 S TWD187175 S TW D187175S
Authority
TW
Taiwan
Prior art keywords
wafer
article
amount
view
symmetrical
Prior art date
Application number
TW105303687F
Other languages
English (en)
Inventor
Hiromi Okada
Shinya Morita
Satoshi Aizawa
Masayoshi Minami
Kazuyuki Okuda
Masayuki Yamada
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD187175S publication Critical patent/TWD187175S/zh

Links

Abstract

【物品用途】;本設計的物品是圖案化石英晶圓，於半導體製造裝置中，載置在用來保持處理對象之半導體基板(晶圓)的基板保持具(晶圓保持具或晶舟)上，進行成膜處理時所使用的適配器。於本物品的表面施以凹凸形狀，以增加在本物品之表面所消耗的處理氣體的量，藉由使其與晶圓所消耗的處理氣體的量接近，以資提高形成在晶圓上的膜的均勻性。;【設計說明】;俯視圖與仰視圖相對稱，俯視圖省略。;左側視圖與右側視圖相對稱，左側視圖省略。
TW105303687F 2015-12-28 2016-06-27 圖案化石英晶圓 TWD187175S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-29186F JP1563718S (zh) 2015-12-28 2015-12-28

Publications (1)

Publication Number Publication Date
TWD187175S true TWD187175S (zh) 2017-12-11

Family

ID=57321959

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105303687F TWD187175S (zh) 2015-12-28 2016-06-27 圖案化石英晶圓

Country Status (3)

Country Link
US (1) USD791091S1 (zh)
JP (1) JP1563718S (zh)
TW (1) TWD187175S (zh)

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TWD174921S (zh) * 2014-12-17 2016-04-11 日本碍子股份有限公司 複合基板之部分
USD897974S1 (en) * 2018-03-29 2020-10-06 Hamamatsu Photonics K.K. Semiconductor wafer
USD958094S1 (en) 2019-07-29 2022-07-19 Samsung Display Co., Ltd. Display panel
USD940131S1 (en) * 2019-07-29 2022-01-04 Samsung Display Co., Ltd. Display panel
USD966276S1 (en) 2019-07-29 2022-10-11 Samsung Display Co., Ltd. Display module for wearable device

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JPS6088535U (ja) * 1983-11-24 1985-06-18 住友電気工業株式会社 半導体ウエハ
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Also Published As

Publication number Publication date
JP1563718S (zh) 2016-11-21
USD791091S1 (en) 2017-07-04

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