TWD186397S - 電漿處理裝置用放電腔室 - Google Patents

電漿處理裝置用放電腔室

Info

Publication number
TWD186397S
TWD186397S TW106301396F TW106301396F TWD186397S TW D186397 S TWD186397 S TW D186397S TW 106301396 F TW106301396 F TW 106301396F TW 106301396 F TW106301396 F TW 106301396F TW D186397 S TWD186397 S TW D186397S
Authority
TW
Taiwan
Prior art keywords
processing equipment
plasma processing
discharge chamber
article
design
Prior art date
Application number
TW106301396F
Other languages
English (en)
Inventor
Nobuhide Nunomura
Keitarou Ogawa
Original Assignee
日立全球先端科技股份有限&#x5
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立全球先端科技股份有限&#x5, Hitachi High Tech Corp filed Critical 日立全球先端科技股份有限&#x5
Publication of TWD186397S publication Critical patent/TWD186397S/zh

Links

Abstract

【物品用途】;本設計的物品是電漿處理裝置用放電腔室，為一種在半導體製造時所使用的電漿處理裝置中，形成進行利用放電來產生電漿之反應的空間之放電腔室。另外，在「使用狀態之參考圖」中，在試料台的上方載置著作為試料的半導體晶圓。;【設計說明】;呈現在「立體圖」及「D-D、E-E部分放大圖」中的細線，皆為用來表現立體表面的形狀。本物品為透明素材。
TW106301396F 2017-01-20 2017-03-17 電漿處理裝置用放電腔室 TWD186397S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2017-807F JP1611626S (zh) 2017-01-20 2017-01-20

Publications (1)

Publication Number Publication Date
TWD186397S true TWD186397S (zh) 2017-11-01

Family

ID=63168682

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106301396F TWD186397S (zh) 2017-01-20 2017-03-17 電漿處理裝置用放電腔室

Country Status (3)

Country Link
US (1) USD907593S1 (zh)
JP (1) JP1611626S (zh)
TW (1) TWD186397S (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1027656S1 (en) * 2023-09-14 2024-05-21 Edible Ip, Llc Customizable container

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD463586S1 (en) * 2001-05-16 2002-09-24 Hosley International Trading Corporation Snowflake candle holder
USD458698S1 (en) * 2001-05-16 2002-06-11 Hosley International Trading Corporation Heart candle holder
USD494551S1 (en) 2002-12-12 2004-08-17 Tokyo Electron Limited Exhaust ring for manufacturing semiconductors
USD559994S1 (en) 2005-03-30 2008-01-15 Tokyo Electron Limited Cover ring
USD557226S1 (en) * 2005-08-25 2007-12-11 Hitachi High-Technologies Corporation Electrode cover for a plasma processing apparatus
USD557425S1 (en) * 2005-08-25 2007-12-11 Hitachi High-Technologies Corporation Cover ring for a plasma processing apparatus
USD556704S1 (en) * 2005-08-25 2007-12-04 Hitachi High-Technologies Corporation Grounded electrode for a plasma processing apparatus
USD703160S1 (en) * 2011-01-27 2014-04-22 Hitachi High-Technologies Corporation Grounded electrode for a plasma processing apparatus
USD682448S1 (en) * 2011-09-09 2013-05-14 Mvp Group International, Inc. Candle holder
USD768510S1 (en) * 2015-05-01 2016-10-11 Milacron Llc Container
JP1551512S (zh) 2015-06-12 2016-06-13
JP1546801S (zh) * 2015-06-12 2016-03-28
JP1546799S (zh) * 2015-06-12 2016-03-28
JP1546800S (zh) * 2015-06-12 2016-03-28
JP1564934S (zh) * 2016-02-26 2016-12-05
USD842109S1 (en) * 2016-12-08 2019-03-05 Orange Products, Inc. Space wall jar
JP1584241S (zh) * 2017-01-31 2017-08-21
USD875054S1 (en) * 2017-04-28 2020-02-11 Applied Materials, Inc. Plasma connector liner
USD875053S1 (en) * 2017-04-28 2020-02-11 Applied Materials, Inc. Plasma connector liner
JP1605838S (zh) * 2017-11-10 2018-06-04
JP1605982S (zh) * 2017-12-27 2021-05-31

Also Published As

Publication number Publication date
JP1611626S (zh) 2018-08-20
USD907593S1 (en) 2021-01-12

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