TWD193794S - Semiconductor manufacturing device uses infrared lamp heater to penetrate window - Google Patents

Semiconductor manufacturing device uses infrared lamp heater to penetrate window

Info

Publication number
TWD193794S
TWD193794S TW107301143F TW107301143F TWD193794S TW D193794 S TWD193794 S TW D193794S TW 107301143 F TW107301143 F TW 107301143F TW 107301143 F TW107301143 F TW 107301143F TW D193794 S TWD193794 S TW D193794S
Authority
TW
Taiwan
Prior art keywords
semiconductor manufacturing
infrared lamp
lamp heater
device uses
manufacturing device
Prior art date
Application number
TW107301143F
Other languages
English (en)
Inventor
知明
廣實一幸
原田秋男
布村暢英
高妻豊
Original Assignee
日商日立全球先端科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日立全球先端科技股份有限公司 filed Critical 日商日立全球先端科技股份有限公司
Publication of TWD193794S publication Critical patent/TWD193794S/zh

Links

Abstract

【物品用途】;本設計的物品是半導體製造裝置用紅外線燈加熱器穿透窗，為一種應用於半導體製造裝置上，於真空中對著所載置的晶圓照射紅外線的紅外線燈加熱器穿透窗。;【設計說明】;本物品整體是透明的。各立體圖中，未表現在六面圖的細線，皆為用來呈現立體表面的形狀。

Description

半導體製造裝置用紅外線燈加熱器穿透窗
本設計的物品是半導體製造裝置用紅外線燈加熱器穿透窗，為一種應用於半導體製造裝置上，於真空中對著所載置的晶圓照射紅外線的紅外線燈加熱器穿透窗。
本物品整體是透明的。各立體圖中，未表現在六面圖的細線，皆為用來呈現立體表面的形狀。
TW107301143F 2017-11-10 2018-02-27 Semiconductor manufacturing device uses infrared lamp heater to penetrate window TWD193794S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2017-25186F JP1605838S (zh) 2017-11-10 2017-11-10
JP2017-025186 2017-11-10

Publications (1)

Publication Number Publication Date
TWD193794S true TWD193794S (zh) 2018-11-01

Family

ID=62239186

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107301143F TWD193794S (zh) 2017-11-10 2018-02-27 Semiconductor manufacturing device uses infrared lamp heater to penetrate window

Country Status (3)

Country Link
US (1) USD864885S1 (zh)
JP (1) JP1605838S (zh)
TW (1) TWD193794S (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD212933S (zh) 2019-06-28 2021-08-01 美商應用材料股份有限公司 用於處理腔室基板支撐件的基底板
USD947914S1 (en) 2020-11-23 2022-04-05 Applied Materials, Inc. Base plate for a processing chamber substrate support
US11887878B2 (en) 2019-06-28 2024-01-30 Applied Materials, Inc. Detachable biasable electrostatic chuck for high temperature applications

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10139059B2 (en) * 2014-02-18 2018-11-27 DMF, Inc. Adjustable compact recessed lighting assembly with hangar bars
CA2931588C (en) 2015-05-29 2021-09-14 DMF, Inc. Lighting module for recessed lighting systems
USD871661S1 (en) * 2016-04-28 2019-12-31 Radiant Opto-Electronics Corporation LED lamp
JP1611626S (zh) * 2017-01-20 2018-08-20
WO2018237294A2 (en) * 2017-06-22 2018-12-27 DMF, Inc. THIN-PROFILE SURFACE MOUNTING LIGHTING DEVICE
US10488000B2 (en) 2017-06-22 2019-11-26 DMF, Inc. Thin profile surface mount lighting apparatus
USD905327S1 (en) * 2018-05-17 2020-12-15 DMF, Inc. Light fixture
USD877957S1 (en) 2018-05-24 2020-03-10 DMF Inc. Light fixture
USD900733S1 (en) * 2018-09-18 2020-11-03 Flashbay Electronics Hong Kong Limited Inductive charger
USD930227S1 (en) * 2019-02-14 2021-09-07 Dongguan Chuan OptoElectronics Limited Table lamp base
USD986397S1 (en) * 2023-01-30 2023-05-16 Cast Masters LLC Topper for a tabletop fire pit
US11713880B1 (en) 2023-01-30 2023-08-01 Cast Masters LLC Firepit topper
USD1006732S1 (en) * 2023-03-29 2023-12-05 Congsheng Lu Wearable power bank for smart watch
USD1006733S1 (en) * 2023-03-29 2023-12-05 Congsheng Lu Wearable power bank for smart watch

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI239558B (en) 2004-12-30 2005-09-11 Metal Ind Res & Dev Ct Device to clean substrate by super-critical fluid
TWI273344B (en) 2002-06-14 2007-02-11 Asml Holding Nv Method and apparatus for managing actinic intensity transients in a lithography mirror

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7824075B2 (en) * 2006-06-08 2010-11-02 Lighting Science Group Corporation Method and apparatus for cooling a lightbulb
CN201078679Y (zh) * 2007-07-02 2008-06-25 深圳市泓亚光电子有限公司 Led直插式多芯大功率光源
USD598873S1 (en) * 2008-11-18 2009-08-25 Xicato, Inc. LED module
US8220971B2 (en) * 2008-11-21 2012-07-17 Xicato, Inc. Light emitting diode module with three part color matching
US20110012161A1 (en) * 2009-07-14 2011-01-20 Hung Mien-Hsia Manufacturing methods and installation procedures which conforming to the international safety codes and regulations for ac led lamp
USD630350S1 (en) * 2010-02-16 2011-01-04 Eddy Lin Ring light
USD632839S1 (en) * 2010-04-10 2011-02-15 Lg Innotek Co., Ltd LED lamp module
USD634885S1 (en) * 2010-04-10 2011-03-22 Lg Innotek Co., Ltd. LED lamp module
WO2011138845A1 (ja) * 2010-05-06 2011-11-10 パナソニック株式会社 ランプ及び照明装置
US9249955B2 (en) * 2011-09-26 2016-02-02 Ideal Industries, Inc. Device for securing a source of LED light to a heat sink surface
USD700737S1 (en) * 2012-10-09 2014-03-04 Command Electronics, Inc. Light fixture base
USD694204S1 (en) * 2012-12-03 2013-11-26 Molex Incorporated LED holder
USD705182S1 (en) * 2012-12-03 2014-05-20 Molex Incorporated LED holder
USD701181S1 (en) * 2012-12-03 2014-03-18 Molex Incorporated LED holder
USD705183S1 (en) * 2012-12-03 2014-05-20 Molex Incorporated LED holder
USD728129S1 (en) * 2013-05-21 2015-04-28 Tridonic Gmbh & Co Kg LED light
US9627599B2 (en) * 2013-07-08 2017-04-18 Lg Electronics Inc. LED lighting apparatus and heat dissipation module
EP3030834A4 (en) * 2013-08-09 2017-08-02 Molex, LLC Holder assembly
TWM472152U (zh) * 2013-09-05 2014-02-11 Molex Taiwan Ltd 安裝座與照明裝置
CA2931588C (en) * 2015-05-29 2021-09-14 DMF, Inc. Lighting module for recessed lighting systems
JP1574655S (zh) * 2016-09-29 2018-10-09

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI273344B (en) 2002-06-14 2007-02-11 Asml Holding Nv Method and apparatus for managing actinic intensity transients in a lithography mirror
TWI239558B (en) 2004-12-30 2005-09-11 Metal Ind Res & Dev Ct Device to clean substrate by super-critical fluid

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD212933S (zh) 2019-06-28 2021-08-01 美商應用材料股份有限公司 用於處理腔室基板支撐件的基底板
TWD214516S (zh) 2019-06-28 2021-10-11 美商應用材料股份有限公司 用於處理腔室基板支撐件的基底板
US11887878B2 (en) 2019-06-28 2024-01-30 Applied Materials, Inc. Detachable biasable electrostatic chuck for high temperature applications
USD947914S1 (en) 2020-11-23 2022-04-05 Applied Materials, Inc. Base plate for a processing chamber substrate support
USD960216S1 (en) 2020-11-23 2022-08-09 Applied Materials, Inc. Base plate for a processing chamber substrate support

Also Published As

Publication number Publication date
JP1605838S (zh) 2018-06-04
USD864885S1 (en) 2019-10-29

Similar Documents

Publication Publication Date Title
TWD193794S (zh) Semiconductor manufacturing device uses infrared lamp heater to penetrate window
TWD175852S (zh) 電漿處理裝置用上腔室
TWD175855S (zh) 電漿處理裝置用下腔室
TWD177177S (zh) 可攜帶的電能儲存器之部分
TWD182981S (zh) 耳機
TWD187164S (zh) 電連接器
TWD173730S (zh) 展示架之部分
TWD186385S (zh) 電連接器
TWD192655S (zh) 電連接器
TWD161478S (zh) 半導體發光元件之部分
TWD185609S (zh) 可攜式顯示裝置
TWD174790S (zh) 齒列矯正用框架
TWD199289S (zh) 可穿戴微電流裝置
TWD188644S (zh) 飾品
TWD194782S (zh) handle
TWD186397S (zh) 電漿處理裝置用放電腔室
TWD189423S (zh) Shank
TWD187000S (zh) 基板處理裝置用加熱機之部分
TWD179190S (zh) 肩包
TWD191013S (zh) Substrate temperature measurement component
TWD168373S (zh) 半導體晶圓硏磨裝置用彈性膜之部分
TWD192701S (zh) Vacuum cleaner
TWD168830S (zh) 真空處理裝置用冷卻板
TWD189004S (zh) Part of the box
CN302512358S (zh) 吸顶灯