USD960216S1 - Base plate for a processing chamber substrate support - Google Patents
Base plate for a processing chamber substrate support Download PDFInfo
- Publication number
- USD960216S1 USD960216S1 US29/830,409 US202229830409F USD960216S US D960216 S1 USD960216 S1 US D960216S1 US 202229830409 F US202229830409 F US 202229830409F US D960216 S USD960216 S US D960216S
- Authority
- US
- United States
- Prior art keywords
- base plate
- processing chamber
- substrate support
- chamber substrate
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
The broken lines depict portions of the article that form no part of the claim.
Claims (1)
- The ornamental design for a base plate for a processing chamber substrate support, as shown and described.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/830,409 USD960216S1 (en) | 2020-11-23 | 2022-03-11 | Base plate for a processing chamber substrate support |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/759,527 USD947914S1 (en) | 2020-11-23 | 2020-11-23 | Base plate for a processing chamber substrate support |
US29/830,409 USD960216S1 (en) | 2020-11-23 | 2022-03-11 | Base plate for a processing chamber substrate support |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/759,527 Division USD947914S1 (en) | 2020-11-23 | 2020-11-23 | Base plate for a processing chamber substrate support |
Publications (1)
Publication Number | Publication Date |
---|---|
USD960216S1 true USD960216S1 (en) | 2022-08-09 |
Family
ID=80857170
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/759,527 Active USD947914S1 (en) | 2020-11-23 | 2020-11-23 | Base plate for a processing chamber substrate support |
US29/830,409 Active USD960216S1 (en) | 2020-11-23 | 2022-03-11 | Base plate for a processing chamber substrate support |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/759,527 Active USD947914S1 (en) | 2020-11-23 | 2020-11-23 | Base plate for a processing chamber substrate support |
Country Status (2)
Country | Link |
---|---|
US (2) | USD947914S1 (en) |
TW (2) | TWD224469S (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD980814S1 (en) * | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
USD980813S1 (en) * | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
USD981973S1 (en) * | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
USD990441S1 (en) * | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
USD1012873S1 (en) * | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD943539S1 (en) * | 2020-03-19 | 2022-02-15 | Applied Materials, Inc. | Confinement plate for a substrate processing chamber |
USD991012S1 (en) * | 2020-05-20 | 2023-07-04 | Peak Industries, Inc. | Base plate of a mobile stackable tower |
USD989012S1 (en) * | 2020-09-17 | 2023-06-13 | Ebara Corporation | Elastic membrane |
USD1006768S1 (en) * | 2021-01-07 | 2023-12-05 | Solaero Technologies Corp. | Semiconductor wafer for mosaic solar cell fabrication |
Citations (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD375961S (en) * | 1995-08-03 | 1996-11-26 | American Standard Inc. | Base plate for a refrigeration compressor |
US6046885A (en) * | 1998-04-03 | 2000-04-04 | Intri-Plex Technologies, Inc. | Base plate suspension assembly in a hard disk drive with step in flange |
US6324743B1 (en) * | 1998-11-30 | 2001-12-04 | Societe De Prospection Et D'inventions Techniques Spit | Method for setting a piece fastening base plate |
US6673651B2 (en) * | 1999-07-01 | 2004-01-06 | Oki Electric Industry Co., Ltd. | Method of manufacturing semiconductor device including semiconductor elements mounted on base plate |
US6853533B2 (en) | 2000-06-09 | 2005-02-08 | Applied Materials, Inc. | Full area temperature controlled electrostatic chuck and method of fabricating same |
US20050152089A1 (en) * | 2003-12-26 | 2005-07-14 | Ngk Insulators, Ltd. | Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same |
US20060133907A1 (en) * | 2004-12-20 | 2006-06-22 | A.L. Hansen Manufacturing Co. | Tie-down assembly |
US7324307B2 (en) * | 2002-02-20 | 2008-01-29 | Intri-Plex Technologies, Inc. | Plated base plate for suspension assembly in hard disk drive |
US7589950B2 (en) | 2006-10-13 | 2009-09-15 | Applied Materials, Inc. | Detachable electrostatic chuck having sealing assembly |
US7697260B2 (en) | 2004-03-31 | 2010-04-13 | Applied Materials, Inc. | Detachable electrostatic chuck |
USD616390S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Quartz cover for manufacturing semiconductor wafers |
USD623500S1 (en) * | 2009-04-20 | 2010-09-14 | Armorworks Enterprises, Llc | Tie-down base plate |
US20110309724A1 (en) * | 2010-06-18 | 2011-12-22 | Samhongsa Co., Ltd. | Motor and method of manufacturing the same |
US8476793B2 (en) | 2008-05-03 | 2013-07-02 | Anthony J. Aiello | Stiffener tab for a spindle motor base plate |
TWD159673S (en) | 2012-11-30 | 2014-04-01 | 日立國際電氣股份有限公司 | Rotator for substrate processing device |
USD707257S1 (en) * | 2012-04-30 | 2014-06-17 | Samhongsa Co., Ltd. | Base plate for spindle motor |
TWD175855S (en) | 2015-06-12 | 2016-05-21 | 日立全球先端科技股份有限 | Lower chamber for plasma treatment device |
TWD183006S (en) | 2016-02-10 | 2017-05-11 | 日立國際電氣股份有限公司 | Part of the rotating tool for wafer boats of semiconductor manufacturing equipment |
US9666467B2 (en) | 2014-11-21 | 2017-05-30 | Varian Semiconductor Equipment Associates, Inc. | Detachable high-temperature electrostatic chuck assembly |
US9668873B2 (en) * | 2013-03-08 | 2017-06-06 | Biomet Manufacturing, Llc | Modular glenoid base plate with augments |
USD793816S1 (en) * | 2014-08-19 | 2017-08-08 | Frank J Alteslaben | Saucer base plate |
USD802546S1 (en) * | 2016-01-08 | 2017-11-14 | Asm Ip Holding B.V. | Outer wall of reactor for semiconductor manufacturing apparatus |
US9853579B2 (en) | 2013-12-18 | 2017-12-26 | Applied Materials, Inc. | Rotatable heated electrostatic chuck |
TWD193794S (en) | 2017-11-10 | 2018-11-01 | 日商日立全球先端科技股份有限公司 | Semiconductor manufacturing device uses infrared lamp heater to penetrate window |
US20180350653A1 (en) * | 2017-05-30 | 2018-12-06 | Asm Ip Holding B.V. | Substrate supporting device and substrate processing apparatus including the same |
USD836399S1 (en) * | 2017-03-17 | 2018-12-25 | Huskee Tech Pty Ltd | Saucer |
USD847982S1 (en) | 2016-02-04 | 2019-05-07 | Atos Medical Ab | Heat exchanger base plate |
US10559327B2 (en) | 2018-02-28 | 2020-02-11 | Nidec Corporation | Base plate with electrodeposition coating film and method for producing base plate |
US10609994B2 (en) * | 2018-05-25 | 2020-04-07 | Telescope Casual Furniture, Inc. | Nestable and stackable umbrella bases |
USD893441S1 (en) * | 2019-06-28 | 2020-08-18 | Applied Materials, Inc. | Base plate for a processing chamber substrate support |
USD916037S1 (en) * | 2018-05-18 | 2021-04-13 | Kokusai Electric Corporation | Cover of seal cap for reaction chamber for semiconductor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD880437S1 (en) | 2018-02-01 | 2020-04-07 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
-
2020
- 2020-11-23 US US29/759,527 patent/USD947914S1/en active Active
- 2020-12-04 TW TW110304221F patent/TWD224469S/en unknown
- 2020-12-04 TW TW109306844F patent/TWD217559S/en unknown
-
2022
- 2022-03-11 US US29/830,409 patent/USD960216S1/en active Active
Patent Citations (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD375961S (en) * | 1995-08-03 | 1996-11-26 | American Standard Inc. | Base plate for a refrigeration compressor |
US6046885A (en) * | 1998-04-03 | 2000-04-04 | Intri-Plex Technologies, Inc. | Base plate suspension assembly in a hard disk drive with step in flange |
US6324743B1 (en) * | 1998-11-30 | 2001-12-04 | Societe De Prospection Et D'inventions Techniques Spit | Method for setting a piece fastening base plate |
US6673651B2 (en) * | 1999-07-01 | 2004-01-06 | Oki Electric Industry Co., Ltd. | Method of manufacturing semiconductor device including semiconductor elements mounted on base plate |
US6853533B2 (en) | 2000-06-09 | 2005-02-08 | Applied Materials, Inc. | Full area temperature controlled electrostatic chuck and method of fabricating same |
US7324307B2 (en) * | 2002-02-20 | 2008-01-29 | Intri-Plex Technologies, Inc. | Plated base plate for suspension assembly in hard disk drive |
US20050152089A1 (en) * | 2003-12-26 | 2005-07-14 | Ngk Insulators, Ltd. | Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same |
US7697260B2 (en) | 2004-03-31 | 2010-04-13 | Applied Materials, Inc. | Detachable electrostatic chuck |
US20060133907A1 (en) * | 2004-12-20 | 2006-06-22 | A.L. Hansen Manufacturing Co. | Tie-down assembly |
US7589950B2 (en) | 2006-10-13 | 2009-09-15 | Applied Materials, Inc. | Detachable electrostatic chuck having sealing assembly |
US8476793B2 (en) | 2008-05-03 | 2013-07-02 | Anthony J. Aiello | Stiffener tab for a spindle motor base plate |
USD616390S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Quartz cover for manufacturing semiconductor wafers |
USD623500S1 (en) * | 2009-04-20 | 2010-09-14 | Armorworks Enterprises, Llc | Tie-down base plate |
US20110309724A1 (en) * | 2010-06-18 | 2011-12-22 | Samhongsa Co., Ltd. | Motor and method of manufacturing the same |
USD707257S1 (en) * | 2012-04-30 | 2014-06-17 | Samhongsa Co., Ltd. | Base plate for spindle motor |
TWD159673S (en) | 2012-11-30 | 2014-04-01 | 日立國際電氣股份有限公司 | Rotator for substrate processing device |
US9668873B2 (en) * | 2013-03-08 | 2017-06-06 | Biomet Manufacturing, Llc | Modular glenoid base plate with augments |
US9853579B2 (en) | 2013-12-18 | 2017-12-26 | Applied Materials, Inc. | Rotatable heated electrostatic chuck |
USD793816S1 (en) * | 2014-08-19 | 2017-08-08 | Frank J Alteslaben | Saucer base plate |
US9666467B2 (en) | 2014-11-21 | 2017-05-30 | Varian Semiconductor Equipment Associates, Inc. | Detachable high-temperature electrostatic chuck assembly |
TWD175855S (en) | 2015-06-12 | 2016-05-21 | 日立全球先端科技股份有限 | Lower chamber for plasma treatment device |
USD802546S1 (en) * | 2016-01-08 | 2017-11-14 | Asm Ip Holding B.V. | Outer wall of reactor for semiconductor manufacturing apparatus |
USD847982S1 (en) | 2016-02-04 | 2019-05-07 | Atos Medical Ab | Heat exchanger base plate |
TWD183006S (en) | 2016-02-10 | 2017-05-11 | 日立國際電氣股份有限公司 | Part of the rotating tool for wafer boats of semiconductor manufacturing equipment |
USD836399S1 (en) * | 2017-03-17 | 2018-12-25 | Huskee Tech Pty Ltd | Saucer |
US20180350653A1 (en) * | 2017-05-30 | 2018-12-06 | Asm Ip Holding B.V. | Substrate supporting device and substrate processing apparatus including the same |
TWD193794S (en) | 2017-11-10 | 2018-11-01 | 日商日立全球先端科技股份有限公司 | Semiconductor manufacturing device uses infrared lamp heater to penetrate window |
US10559327B2 (en) | 2018-02-28 | 2020-02-11 | Nidec Corporation | Base plate with electrodeposition coating film and method for producing base plate |
USD916037S1 (en) * | 2018-05-18 | 2021-04-13 | Kokusai Electric Corporation | Cover of seal cap for reaction chamber for semiconductor |
US10609994B2 (en) * | 2018-05-25 | 2020-04-07 | Telescope Casual Furniture, Inc. | Nestable and stackable umbrella bases |
USD893441S1 (en) * | 2019-06-28 | 2020-08-18 | Applied Materials, Inc. | Base plate for a processing chamber substrate support |
Non-Patent Citations (2)
Title |
---|
Search Report for Taiwan Design Application No. 108308059D01, dated Jun. 1, 2021. |
Search Report for Taiwan Design Application No. 109306844, dated May 30, 2021. |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD1012873S1 (en) * | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
USD980814S1 (en) * | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
USD980813S1 (en) * | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
USD981973S1 (en) * | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
USD990441S1 (en) * | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
Also Published As
Publication number | Publication date |
---|---|
TWD224469S (en) | 2023-04-01 |
TWD217559S (en) | 2022-03-11 |
USD947914S1 (en) | 2022-04-05 |
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