TWD217559S - Base plate for a processing chamber substrate support - Google Patents

Base plate for a processing chamber substrate support Download PDF

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Publication number
TWD217559S
TWD217559S TW109306844F TW109306844F TWD217559S TW D217559 S TWD217559 S TW D217559S TW 109306844 F TW109306844 F TW 109306844F TW 109306844 F TW109306844 F TW 109306844F TW D217559 S TWD217559 S TW D217559S
Authority
TW
Taiwan
Prior art keywords
base plate
processing chamber
substrate support
chamber substrate
design
Prior art date
Application number
TW109306844F
Other languages
Chinese (zh)
Inventor
席夏尤吉許 勞
慕昆德 桑達拉拉珍
振雄 蔡
曼裘那薩Ｐ 高帕
史蒂芬Ｖ 珊索尼
Original Assignee
美商應用材料股份有限公司
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Filing date
Publication date
Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TWD217559S publication Critical patent/TWD217559S/en

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Abstract

【物品用途】;本設計所請求係用於處理腔室基板支撐件的基底板。;【設計說明】;圖式所揭露的虛線部分，為本案不主張設計之部分。【Use of article】;This design requires a base plate used for processing chamber base plate supports. ;[Design Description];The dotted line part disclosed in the drawing is the part of this case that does not require design.

Description

用於處理腔室基板支撐件的基底板 Base plate for processing chamber substrate support

本設計所請求係用於處理腔室基板支撐件的基底板。 This design requires a base plate for a process chamber substrate support.

圖式所揭露的虛線部分，為本案不主張設計之部分。 The dotted line part disclosed in the drawings is the part that does not claim design in this case.

TW109306844F 2020-11-23 2020-12-04 Base plate for a processing chamber substrate support TWD217559S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/759,527 2020-11-23
US29/759,527 USD947914S1 (en) 2020-11-23 2020-11-23 Base plate for a processing chamber substrate support

Publications (1)

Publication Number Publication Date
TWD217559S true TWD217559S (en) 2022-03-11

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
TW109306844F TWD217559S (en) 2020-11-23 2020-12-04 Base plate for a processing chamber substrate support
TW110304221F TWD224469S (en) 2020-11-23 2020-12-04 Base plate for a substrate support

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW110304221F TWD224469S (en) 2020-11-23 2020-12-04 Base plate for a substrate support

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US (2) USD947914S1 (en)
TW (2) TWD217559S (en)

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Also Published As

Publication number Publication date
USD960216S1 (en) 2022-08-09
USD947914S1 (en) 2022-04-05
TWD224469S (en) 2023-04-01

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