JP1546801S - - Google Patents

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Publication number
JP1546801S
JP1546801S JPD2015-13038F JP2015013038F JP1546801S JP 1546801 S JP1546801 S JP 1546801S JP 2015013038 F JP2015013038 F JP 2015013038F JP 1546801 S JP1546801 S JP 1546801S
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JPD2015-13038F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JPD2015-13038F priority Critical patent/JP1546801S/ja
Priority to TW104305551F priority patent/TWD175855S/en
Priority to US29/544,071 priority patent/USD802545S1/en
Application granted granted Critical
Publication of JP1546801S publication Critical patent/JP1546801S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JPD2015-13038F 2015-06-12 2015-06-12 Active JP1546801S (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JPD2015-13038F JP1546801S (en) 2015-06-12 2015-06-12
TW104305551F TWD175855S (en) 2015-06-12 2015-10-06 Lower chamber for plasma treatment device
US29/544,071 USD802545S1 (en) 2015-06-12 2015-10-30 Lower chamber for a plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-13038F JP1546801S (en) 2015-06-12 2015-06-12

Publications (1)

Publication Number Publication Date
JP1546801S true JP1546801S (en) 2016-03-28

Family

ID=55539625

Family Applications (1)

Application Number Title Priority Date Filing Date
JPD2015-13038F Active JP1546801S (en) 2015-06-12 2015-06-12

Country Status (3)

Country Link
US (1) USD802545S1 (en)
JP (1) JP1546801S (en)
TW (1) TWD175855S (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1611626S (en) * 2017-01-20 2018-08-20
JP1584146S (en) * 2017-01-31 2017-08-21
USD838681S1 (en) * 2017-04-28 2019-01-22 Applied Materials, Inc. Plasma chamber liner
USD842259S1 (en) * 2017-04-28 2019-03-05 Applied Materials, Inc. Plasma chamber liner
USD837754S1 (en) * 2017-04-28 2019-01-08 Applied Materials, Inc. Plasma chamber liner
USD858468S1 (en) 2018-03-16 2019-09-03 Applied Materials, Inc. Collimator for a physical vapor deposition chamber
USD859333S1 (en) 2018-03-16 2019-09-10 Applied Materials, Inc. Collimator for a physical vapor deposition chamber
JP1638504S (en) * 2018-12-06 2019-08-05
USD937329S1 (en) 2020-03-23 2021-11-30 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
USD998575S1 (en) 2020-04-07 2023-09-12 Applied Materials, Inc. Collimator for use in a physical vapor deposition (PVD) chamber
USD947914S1 (en) 2020-11-23 2022-04-05 Applied Materials, Inc. Base plate for a processing chamber substrate support
JP1704964S (en) * 2021-04-19 2022-01-14 Suceptoring for plasma processing equipment
JP1700629S (en) * 2021-04-26 2021-11-29
USD1009816S1 (en) 2021-08-29 2024-01-02 Applied Materials, Inc. Collimator for a physical vapor deposition chamber
USD997111S1 (en) 2021-12-15 2023-08-29 Applied Materials, Inc. Collimator for use in a physical vapor deposition (PVD) chamber

Family Cites Families (17)

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Publication number Priority date Publication date Assignee Title
US4319432A (en) * 1980-05-13 1982-03-16 Spitfire Tool And Machine Co. Polishing fixture
USD404369S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Manifold cover for use in a semiconductor wafer heat processing apparatus
US6068548A (en) * 1997-12-17 2000-05-30 Intel Corporation Mechanically stabilized retaining ring for chemical mechanical polishing
US6264540B1 (en) * 2000-03-30 2001-07-24 Speedfam-Ipec Corporation Method and apparatus for disposable bladder carrier assembly
AU2003300375A1 (en) * 2002-10-11 2004-05-04 Semplastics, L.L.C. Retaining ring for use on a carrier of a polishing apparatus
JP5296985B2 (en) * 2003-11-13 2013-09-25 アプライド マテリアルズ インコーポレイテッド Retaining ring with shaping surface
KR20080031870A (en) * 2005-05-24 2008-04-11 엔테그리스, 아이엔씨. Cmp retaining ring
USD703160S1 (en) * 2011-01-27 2014-04-22 Hitachi High-Technologies Corporation Grounded electrode for a plasma processing apparatus
USD658691S1 (en) * 2011-03-30 2012-05-01 Tokyo Electron Limited Liner for plasma processing apparatus
WO2012142408A2 (en) * 2011-04-14 2012-10-18 Veeco Instruments Inc. Substrate holders and methods of substrate mounting
USD693782S1 (en) * 2012-11-19 2013-11-19 Epicrew Corporation Lid for epitaxial growing device
USD734377S1 (en) * 2013-03-28 2015-07-14 Hirata Corporation Top cover of a load lock chamber
TWD169790S (en) * 2013-07-10 2015-08-11 日立國際電氣股份有限公司 Part of the vaporizer for substrate processing equipment
USD722966S1 (en) * 2013-08-23 2015-02-24 Bridgeport Fittings, Inc. Split, non-metallic electrical insulating bushing
USD716240S1 (en) * 2013-11-07 2014-10-28 Applied Materials, Inc. Lower chamber liner
USD775710S1 (en) * 2015-05-19 2017-01-03 Il Han Kim End bushing for fishing reel spool
JP1546800S (en) * 2015-06-12 2016-03-28

Also Published As

Publication number Publication date
TWD175855S (en) 2016-05-21
USD802545S1 (en) 2017-11-14

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