TWD183002S - 圖案化石英晶圓 - Google Patents

圖案化石英晶圓

Info

Publication number
TWD183002S
TWD183002S TW105303661F TW105303661F TWD183002S TW D183002 S TWD183002 S TW D183002S TW 105303661 F TW105303661 F TW 105303661F TW 105303661 F TW105303661 F TW 105303661F TW D183002 S TWD183002 S TW D183002S
Authority
TW
Taiwan
Prior art keywords
wafer
article
amount
view
symmetrical
Prior art date
Application number
TW105303661F
Other languages
English (en)
Inventor
Hiromi Okada
Masayuki Yamada
Satoshi Aizawa
Shinya Morita
Masayoshi Minami
Kazuhisa Osaka
Original Assignee
日立國際電氣股份有限公司
Hitachi Int Electric Inc
泰谷諾石英股份有限公司
Techno Quartz Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司, Hitachi Int Electric Inc, 泰谷諾石英股份有限公司, Techno Quartz Inc filed Critical 日立國際電氣股份有限公司
Publication of TWD183002S publication Critical patent/TWD183002S/zh

Links

Abstract

【物品用途】;本設計的物品是圖案化石英晶圓，於半導體製造裝置中，載置在用來保持處理對象之半導體基板(晶圓)的基板保持具(晶圓保持具或晶舟)上，進行成膜處理時所使用的適配器。於本物品的表面施以凹凸形狀，以增加在本物品之表面所消耗的處理氣體的量，藉由使其與晶圓所消耗的處理氣體的量接近，以資提高形成在晶圓上的膜的均勻性。;【設計說明】;俯視圖與仰視圖相對稱，俯視圖省略。;左側視圖與右側視圖相對稱，左側視圖省略。
TW105303661F 2015-12-28 2016-06-24 圖案化石英晶圓 TWD183002S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-29187F JP1563719S (zh) 2015-12-28 2015-12-28

Publications (1)

Publication Number Publication Date
TWD183002S true TWD183002S (zh) 2017-05-11

Family

ID=57321914

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105303661F TWD183002S (zh) 2015-12-28 2016-06-24 圖案化石英晶圓

Country Status (3)

Country Link
US (1) USD789311S1 (zh)
JP (1) JP1563719S (zh)
TW (1) TWD183002S (zh)

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USD897974S1 (en) * 2018-03-29 2020-10-06 Hamamatsu Photonics K.K. Semiconductor wafer
USD966276S1 (en) 2019-07-29 2022-10-11 Samsung Display Co., Ltd. Display module for wearable device
USD940131S1 (en) * 2019-07-29 2022-01-04 Samsung Display Co., Ltd. Display panel
USD958094S1 (en) 2019-07-29 2022-07-19 Samsung Display Co., Ltd. Display panel

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JPS6088535U (ja) * 1983-11-24 1985-06-18 住友電気工業株式会社 半導体ウエハ
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JP4913517B2 (ja) * 2006-09-26 2012-04-11 株式会社ディスコ ウエーハの研削加工方法
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JP2011100922A (ja) * 2009-11-09 2011-05-19 Toshiba Corp パターン形成方法、パターン形成システム及び半導体装置の製造方法
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Also Published As

Publication number Publication date
USD789311S1 (en) 2017-06-13
JP1563719S (zh) 2016-11-21

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