TWD195178S - Crystal boat for substrate processing device - Google Patents
Crystal boat for substrate processing deviceInfo
- Publication number
- TWD195178S TWD195178S TW107302070F TW107302070F TWD195178S TW D195178 S TWD195178 S TW D195178S TW 107302070 F TW107302070 F TW 107302070F TW 107302070 F TW107302070 F TW 107302070F TW D195178 S TWD195178 S TW D195178S
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate processing
- processing device
- crystal boat
- article
- wafer boat
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract description 9
- 239000013078 crystal Substances 0.000 title description 2
- 239000010453 quartz Substances 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 2
Abstract
【物品用途】;本設計的物品是基板處理裝置用晶舟，為一種在基板處理裝置的縱型反應室內將複數個基板保持水平的石英製晶舟，基板被載置於形成在左右及後方之柱體的插銷形狀的突起上。;【設計說明】;右側視圖與左側視圖相對稱，右側視圖省略。
Description
本設計的物品是基板處理裝置用晶舟，為一種在基板處理裝置的縱型反應室內將複數個基板保持水平的石英製晶舟，基板被載置於形成在左右及後方之柱體的插銷形狀的突起上。
右側視圖與左側視圖相對稱，右側視圖省略。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-022699 | 2017-02-10 | ||
| JPD2017-22699F JP1605517S (zh) | 2017-10-13 | 2017-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD195178S true TWD195178S (zh) | 2019-01-01 |
Family
ID=62239555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107302070F TWD195178S (zh) | 2017-10-13 | 2018-04-13 | Crystal boat for substrate processing device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP1605517S (zh) |
| TW (1) | TWD195178S (zh) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM311113U (en) | 2006-11-10 | 2007-05-01 | Puu Feng Corp | Quartz crystal boat |
-
2017
- 2017-10-13 JP JPD2017-22699F patent/JP1605517S/ja active Active
-
2018
- 2018-04-13 TW TW107302070F patent/TWD195178S/zh unknown
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM311113U (en) | 2006-11-10 | 2007-05-01 | Puu Feng Corp | Quartz crystal boat |
Also Published As
| Publication number | Publication date |
|---|---|
| JP1605517S (zh) | 2018-06-04 |
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