TWD183008S - 基板處理裝置用加熱器 - Google Patents
基板處理裝置用加熱器Info
- Publication number
- TWD183008S TWD183008S TW105304452F TW105304452F TWD183008S TW D183008 S TWD183008 S TW D183008S TW 105304452 F TW105304452 F TW 105304452F TW 105304452 F TW105304452 F TW 105304452F TW D183008 S TWD183008 S TW D183008S
- Authority
- TW
- Taiwan
- Prior art keywords
- heater
- substrate processing
- article
- processing equipment
- processing device
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 5
- 238000010438 heat treatment Methods 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Abstract
【物品用途】;本設計的物品是基板處理裝置用加熱器，為一種用於處理基板的基板處理裝置的加熱器。本物品是用來加熱基板處理裝置的處理室的加熱器，在圓筒形狀的加熱組件上部，一體式的設有用來冷卻且排出加熱組件內部的環境氣相的冷卻組件。;【設計說明】;(無)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2016-3042F JP1568552S (zh) | 2016-02-12 | 2016-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD183008S true TWD183008S (zh) | 2017-05-11 |
Family
ID=57915348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW105304452F TWD183008S (zh) | 2016-02-12 | 2016-08-03 | 基板處理裝置用加熱器 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD823363S1 (zh) |
| JP (1) | JP1568552S (zh) |
| TW (1) | TWD183008S (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1620676S (zh) * | 2018-02-27 | 2018-12-17 | ||
| JP1611565S (zh) * | 2018-02-27 | 2018-08-20 | ||
| USD921723S1 (en) * | 2018-10-23 | 2021-06-08 | Atkins Nuclear Secured Holdings Corporation | Container for receiving high temperature material |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD310816S (en) * | 1987-01-26 | 1990-09-25 | Mitsubishi Denki Kabushiki Kaisha | Electric motor with hinged mounting bracket |
| US5872410A (en) * | 1996-10-18 | 1999-02-16 | Reliance Electric Industrial Company | Motor terminal and capacitor box |
| USD414503S (en) * | 1997-09-24 | 1999-09-28 | Tokyo Electron Limited | Machine for forming a semiconductor wafer film |
| USD522456S1 (en) * | 2002-11-29 | 2006-06-06 | Honda Giken Kogyo Kabushiki Kaisha | Capacitor cell |
| CA112529S (en) * | 2005-03-14 | 2007-01-30 | Hoei Shokai Co Ltd | Container for storing molten metal |
| CA112530S (en) * | 2005-03-14 | 2007-01-30 | Hoei Shokai Co Ltd | Container for storing molten metal |
| AU305988S (en) * | 2005-04-25 | 2006-03-17 | Sew Eurodrive Gmbh & Co | Electric motor |
| USD553569S1 (en) * | 2006-02-27 | 2007-10-23 | Lightsources Inc. | Ultraviolet lamp base |
| USD578476S1 (en) * | 2007-09-25 | 2008-10-14 | Meidensha Corporation | Vacuum capacitor |
| USD633044S1 (en) * | 2009-07-16 | 2011-02-22 | Comet Ag | Vacuum capacitor |
| USD694710S1 (en) * | 2012-06-05 | 2013-12-03 | Gigahertz LLC. | High voltage variable capacitor |
-
2016
- 2016-02-12 JP JPD2016-3042F patent/JP1568552S/ja active Active
- 2016-08-03 TW TW105304452F patent/TWD183008S/zh unknown
- 2016-08-10 US US29/573,938 patent/USD823363S1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| USD823363S1 (en) | 2018-07-17 |
| JP1568552S (zh) | 2017-02-06 |
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