TWD183009S - 基板處理裝置用加熱器之部分 - Google Patents

基板處理裝置用加熱器之部分

Info

Publication number
TWD183009S
TWD183009S TW105304453F TW105304453F TWD183009S TW D183009 S TWD183009 S TW D183009S TW 105304453 F TW105304453 F TW 105304453F TW 105304453 F TW105304453 F TW 105304453F TW D183009 S TWD183009 S TW D183009S
Authority
TW
Taiwan
Prior art keywords
heater
substrate processing
article
processing device
processing equipment
Prior art date
Application number
TW105304453F
Other languages
English (en)
Inventor
Motoya Takewaki
Tetsuya Kosugi
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD183009S publication Critical patent/TWD183009S/zh

Links

Abstract

【物品用途】;本設計的物品是基板處理裝置用加熱器，為一種用於處理基板的基板處理裝置的加熱器。本物品是用來加熱基板處理裝置的處理室的加熱器，在圓筒形狀的加熱元件上部，一體式的設有用來冷卻且排出加熱元件內部的環境氣相的冷卻元件。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分。
TW105304453F 2016-02-12 2016-08-03 基板處理裝置用加熱器之部分 TWD183009S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2016-3049F JP1568553S (zh) 2016-02-12 2016-02-12

Publications (1)

Publication Number Publication Date
TWD183009S true TWD183009S (zh) 2017-05-11

Family

ID=57915359

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105304453F TWD183009S (zh) 2016-02-12 2016-08-03 基板處理裝置用加熱器之部分

Country Status (3)

Country Link
US (1) USD824440S1 (zh)
JP (1) JP1568553S (zh)
TW (1) TWD183009S (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1611565S (zh) * 2018-02-27 2018-08-20
JP1620676S (zh) * 2018-02-27 2018-12-17
USD921723S1 (en) * 2018-10-23 2021-06-08 Atkins Nuclear Secured Holdings Corporation Container for receiving high temperature material
USD1039576S1 (en) * 2022-07-27 2024-08-20 Jianrong Wu Melting furnace

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD310816S (en) * 1987-01-26 1990-09-25 Mitsubishi Denki Kabushiki Kaisha Electric motor with hinged mounting bracket
US5872410A (en) * 1996-10-18 1999-02-16 Reliance Electric Industrial Company Motor terminal and capacitor box
USD414503S (en) * 1997-09-24 1999-09-28 Tokyo Electron Limited Machine for forming a semiconductor wafer film
USD522456S1 (en) * 2002-11-29 2006-06-06 Honda Giken Kogyo Kabushiki Kaisha Capacitor cell
CA112529S (en) * 2005-03-14 2007-01-30 Hoei Shokai Co Ltd Container for storing molten metal
CA112530S (en) * 2005-03-14 2007-01-30 Hoei Shokai Co Ltd Container for storing molten metal
AU305988S (en) * 2005-04-25 2006-03-17 Sew Eurodrive Gmbh & Co Electric motor
USD553569S1 (en) * 2006-02-27 2007-10-23 Lightsources Inc. Ultraviolet lamp base
USD578476S1 (en) * 2007-09-25 2008-10-14 Meidensha Corporation Vacuum capacitor
USD633044S1 (en) * 2009-07-16 2011-02-22 Comet Ag Vacuum capacitor
USD694710S1 (en) * 2012-06-05 2013-12-03 Gigahertz LLC. High voltage variable capacitor

Also Published As

Publication number Publication date
USD824440S1 (en) 2018-07-31
JP1568553S (zh) 2017-02-06

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