TWD177632S - 熱電偶用保護管之部分 - Google Patents

熱電偶用保護管之部分

Info

Publication number
TWD177632S
TWD177632S TW104303924F TW104303924F TWD177632S TW D177632 S TWD177632 S TW D177632S TW 104303924 F TW104303924 F TW 104303924F TW 104303924 F TW104303924 F TW 104303924F TW D177632 S TWD177632 S TW D177632S
Authority
TW
Taiwan
Prior art keywords
design
case
thermocouples
protective tube
advocated
Prior art date
Application number
TW104303924F
Other languages
English (en)
Inventor
Akihiro Osaka
Hideto Yamaguchi
Motoya Takewaki
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD177632S publication Critical patent/TWD177632S/zh

Links

Abstract

【物品用途】;本設計的物品是熱電偶用保護管，使用在用來對基板進行處理的基板處理裝置。;【設計說明】;本物品是配置在基板處理裝置的處理室周邊，利用設在內部的孔來設置熱電偶，而可測定處理室周邊的溫度。;圖式所揭露之實線部分，為本案主張設計之部分，虛線部分為本案不主張設計之部分。;圖式所揭露之一點鏈線，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。;「以斜線表示透明部的參考前視圖」中，斜線部分是表示透明部。
TW104303924F 2015-02-25 2015-07-22 熱電偶用保護管之部分 TWD177632S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-3916F JP1534940S (zh) 2015-02-25 2015-02-25

Publications (1)

Publication Number Publication Date
TWD177632S true TWD177632S (zh) 2016-08-11

Family

ID=54258374

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104303924F TWD177632S (zh) 2015-02-25 2015-07-22 熱電偶用保護管之部分

Country Status (3)

Country Link
US (1) USD778741S1 (zh)
JP (1) JP1534940S (zh)
TW (1) TWD177632S (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1689064S (ja) * 2020-08-31 2021-07-05 温度センサ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4088509A (en) * 1977-03-04 1978-05-09 Mcdanel Refractory Porcelain Company Thermocouple protection tubes
JPS61262625A (ja) * 1985-05-16 1986-11-20 Toyota Motor Corp 熱電対用保護管およびその製造方法
AU612230B2 (en) * 1988-02-16 1991-07-04 Tempra Therm (Pty) Limited Thermocouples
US6776524B2 (en) * 2001-10-02 2004-08-17 Ametek, Inc. Rake thermocouple
US6857776B2 (en) * 2002-12-12 2005-02-22 Ametek, Inc. Connectorized high-temperature thermocouple
USD597423S1 (en) * 2008-07-30 2009-08-04 James Tech Co., Ltd. Temperature detecting apparatus for oven

Also Published As

Publication number Publication date
JP1534940S (zh) 2015-10-13
USD778741S1 (en) 2017-02-14

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