TWD171078S - 基板處理裝置用氣體供給噴嘴之部分 - Google Patents

基板處理裝置用氣體供給噴嘴之部分

Info

Publication number
TWD171078S
TWD171078S TW104301091F TW104301091F TWD171078S TW D171078 S TWD171078 S TW D171078S TW 104301091 F TW104301091 F TW 104301091F TW 104301091 F TW104301091 F TW 104301091F TW D171078 S TWD171078 S TW D171078S
Authority
TW
Taiwan
Prior art keywords
gas supply
case
design
substrate processing
gas
Prior art date
Application number
TW104301091F
Other languages
English (en)
Inventor
Shinya Morita
Masahiro Miyake
Masato Terasaki
Naoki Matsumoto
Naonori Akae
Original Assignee
日立國際電氣股份有限公司
Hitachi Int Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司, Hitachi Int Electric Inc filed Critical 日立國際電氣股份有限公司
Publication of TWD171078S publication Critical patent/TWD171078S/zh

Links

Abstract

【物品用途】;本設計的物品是基板處理裝置用氣體供給噴嘴，為一種應用在處理基板的基板處理裝置的氣體供給噴嘴；本物品是配置在基板處理裝置的處理室內，將氣體經由氣體導入管導入到氣體供給噴嘴的氣體導入部之左側視圖所示的圓管部分，並將氣體從仰視圖所示的氣體供給孔供給到處理室內。;【設計說明】;圖式所揭露之實線部分，為本案主張設計之部分；圖式所揭露之虛線部分，為本案不主張設計之部分；圖式中一點鏈線所圍繞者，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。;圖式所揭露之兩點鏈線，是各放大圖及剖面圖的斷裂線，該兩點鏈線本身亦為本案不主張設計之部分。
TW104301091F 2014-09-10 2015-03-03 基板處理裝置用氣體供給噴嘴之部分 TWD171078S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2014-20078F JP1521275S (zh) 2014-09-10 2014-09-10

Publications (1)

Publication Number Publication Date
TWD171078S true TWD171078S (zh) 2015-10-11

Family

ID=53509068

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104301091F TWD171078S (zh) 2014-09-10 2015-03-03 基板處理裝置用氣體供給噴嘴之部分

Country Status (3)

Country Link
US (1) USD773609S1 (zh)
JP (1) JP1521275S (zh)
TW (1) TWD171078S (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1589673S (zh) * 2017-04-14 2017-10-30
JP1644261S (zh) * 2019-03-20 2019-10-28
USD934383S1 (en) * 2019-05-31 2021-10-26 Graco Minnesota Inc. Electrostatic spray gun
JP1684258S (zh) * 2020-07-27 2021-04-26

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD322341S (en) * 1989-05-19 1991-12-10 Zito Richard R Nozzle for a CO2 snow cleaner
JP3076809B2 (ja) * 1990-09-26 2000-08-14 株式会社パウレック 洗浄ノズル
SK282038B6 (sk) * 1995-07-18 2001-10-08 Terence William Bolton Zdokonalené zariadenie na rozprašovanie častíc kvapaliny
GB2337472B (en) * 1998-05-19 2001-07-18 Terence William Bolton Improvements in and relating to liquid dispensing apparatus
DE10063529A1 (de) * 2000-12-20 2002-06-27 Valeo Auto Electric Gmbh Düseneinrichtung
US6832734B2 (en) * 2001-04-25 2004-12-21 Southwest Research Institute Media discharge device
US7100844B2 (en) * 2002-10-16 2006-09-05 Ultrastrip Systems, Inc. High impact waterjet nozzle
US7080888B2 (en) * 2003-03-04 2006-07-25 Ash Equipment Company, Inc. Dual nozzle hydro-demolition system
USD554238S1 (en) * 2003-08-19 2007-10-30 Rehau Ag & Co. Component of a device for transport of liquid
USD617416S1 (en) * 2009-08-24 2010-06-08 Shin Tai Spurt Water Of The Garden Tools Co., Ltd. Water sprayer handle
USD638911S1 (en) * 2010-09-17 2011-05-31 Kmt Robotic Solutions, Inc. Long reach impingement nozzle
USD641830S1 (en) * 2010-11-17 2011-07-19 Fna Ip Holdings, Inc. Spray nozzle
USD693901S1 (en) * 2011-11-30 2013-11-19 Bayer New Zealand Limited Fluid dispenser
USD684662S1 (en) * 2012-08-24 2013-06-18 GelTech Solutions, Inc. Firehose handheld eductor nozzle
USD730487S1 (en) * 2013-04-15 2015-05-26 Cerlic Controls Ab Telescopic fixture with attachment

Also Published As

Publication number Publication date
USD773609S1 (en) 2016-12-06
JP1521275S (zh) 2015-04-13

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