TWD183003S - 基板處理裝置用氣體供給噴嘴之部分 - Google Patents

基板處理裝置用氣體供給噴嘴之部分

Info

Publication number
TWD183003S
TWD183003S TW105304319F TW105304319F TWD183003S TW D183003 S TWD183003 S TW D183003S TW 105304319 F TW105304319 F TW 105304319F TW 105304319 F TW105304319 F TW 105304319F TW D183003 S TWD183003 S TW D183003S
Authority
TW
Taiwan
Prior art keywords
gas supply
substrate processing
supply nozzle
design
article
Prior art date
Application number
TW105304319F
Other languages
English (en)
Inventor
Toshiki FUJINO
Yuma Fujii
Kazuki NONOMURA
Yoshinori Baba
Yuji Takebayashi
Kenichi Suzaki
Original Assignee
日立國際電氣股份有限公司
Hitachi Int Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司, Hitachi Int Electric Inc filed Critical 日立國際電氣股份有限公司
Publication of TWD183003S publication Critical patent/TWD183003S/zh

Links

Abstract

【物品用途】;本設計的物品是基板處理裝置用氣體供給噴嘴，為一種應用在處理基板的基板處理裝置的氣體供給噴嘴；本物品如使用狀態之參考圖所示，是針對在反應管內部的垂直方向上保持成多段的基板進行處理的基板處理裝置之氣體供給噴嘴。本設計是在圓筒形的噴嘴的側壁設置圓形的氣體供給孔，其會將從彎折成L字形的前端部所供給的氣體因受到噴嘴內的壓力或流速、熱能所造成的影響予以均勻一致之後才供給到反應管內部。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分；圖式中一點鏈線所圍繞者，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。
TW105304319F 2016-01-29 2016-07-27 基板處理裝置用氣體供給噴嘴之部分 TWD183003S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2016-1892F JP1563647S (zh) 2016-01-29 2016-01-29

Publications (1)

Publication Number Publication Date
TWD183003S true TWD183003S (zh) 2017-05-11

Family

ID=57321740

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105304319F TWD183003S (zh) 2016-01-29 2016-07-27 基板處理裝置用氣體供給噴嘴之部分

Country Status (3)

Country Link
US (1) USD828091S1 (zh)
JP (1) JP1563647S (zh)
TW (1) TWD183003S (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD868855S1 (en) * 2018-03-13 2019-12-03 Automation Services, Llc Fixture bar clamp
JP1624354S (zh) 2018-07-19 2019-02-12
JP1644261S (zh) * 2019-03-20 2019-10-28
JP1684258S (zh) * 2020-07-27 2021-04-26

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US45556A (en) * 1864-12-20 Petee oockee
USD317997S (en) * 1986-11-10 1991-07-09 Modern Home Products Corp. Venturi unit for a gas burner
USD342184S (en) * 1991-11-25 1993-12-14 Sanchez Joseph W Grill
USD396379S (en) * 1997-09-24 1998-07-28 Mark Stoetzl Camper's grill
USD468963S1 (en) * 2002-02-11 2003-01-21 Lucas Pai Stove ring
USD613116S1 (en) * 2009-08-10 2010-04-06 W.C. Bradley Co. Universal fit bar burner
USD722466S1 (en) * 2013-08-01 2015-02-17 Rene E. Zamora Barbeque trailer
USD795001S1 (en) * 2014-12-04 2017-08-22 Jin Hee Lee Multi-purpose two-way heating cooker
USD768282S1 (en) * 2015-05-27 2016-10-04 Alva Alta Lda Structural support for solar envelope and solar collector
JP1547057S (zh) * 2015-05-28 2016-04-04

Also Published As

Publication number Publication date
USD828091S1 (en) 2018-09-11
JP1563647S (zh) 2016-11-21

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