TWD167986S - 反應管之部分 - Google Patents

反應管之部分

Info

Publication number
TWD167986S
TWD167986S TW102308331F TW102308331F TWD167986S TW D167986 S TWD167986 S TW D167986S TW 102308331 F TW102308331 F TW 102308331F TW 102308331 F TW102308331 F TW 102308331F TW D167986 S TWD167986 S TW D167986S
Authority
TW
Taiwan
Prior art keywords
opening
design
reaction tube
article
gas
Prior art date
Application number
TW102308331F
Other languages
English (en)
Inventor
Keishin Yamazaki
Masahiro Miyake
Kosuke Takagi
Yasuaki Komae
Shinya Morita
Naonori Akae
Masato Terasaki
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD167986S publication Critical patent/TWD167986S/zh

Links

Abstract

【物品用途】;本設計的物品是反應管，為應用在基板處理裝置的反應管。;【設計說明】;本物品具有用來收容處理基板的開口，在該開口的周緣設有凸緣；本物品，是在側面具備：形成設置有氣體噴嘴之空間的略矩形狀之突出部；和排出從該氣體噴嘴被噴出的氣體的開口部，於本物品的內部，將氣體從上述氣體噴嘴供給到上述處理基板之後，從上述開口部排出，進行上述處理基板的處理。;圖式中以實線所示為「主張設計之部分」，以虛線所示為「不主張設計之部分」。
TW102308331F 2013-06-28 2013-12-24 反應管之部分 TWD167986S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013014831 2013-06-28

Publications (1)

Publication Number Publication Date
TWD167986S true TWD167986S (zh) 2015-05-21

Family

ID=51359017

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102308331F TWD167986S (zh) 2013-06-28 2013-12-24 反應管之部分

Country Status (2)

Country Link
US (1) USD711843S1 (zh)
TW (1) TWD167986S (zh)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120195749A1 (en) 2004-03-15 2012-08-02 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
USD698916S1 (en) * 2012-05-15 2014-02-04 Airius Ip Holdings, Llc Air moving device
US10024531B2 (en) 2013-12-19 2018-07-17 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
US9702576B2 (en) 2013-12-19 2017-07-11 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
AU2015269672B2 (en) 2014-06-06 2019-05-16 Airius Ip Holdings, Llc Columnar air moving devices, systems and methods
JP1534829S (zh) * 2015-02-23 2015-10-13
JP1535455S (zh) * 2015-02-25 2015-10-19
JP1548462S (zh) * 2015-09-04 2016-04-25
JP1546345S (zh) * 2015-09-04 2016-03-22
JP1546512S (zh) * 2015-09-04 2016-03-22
US10487852B2 (en) 2016-06-24 2019-11-26 Airius Ip Holdings, Llc Air moving device
JP1605460S (zh) * 2017-08-09 2021-05-31
JP1605462S (zh) * 2017-08-10 2021-05-31
JP1605461S (zh) * 2017-08-10 2021-05-31
JP1605982S (zh) * 2017-12-27 2021-05-31
USD987054S1 (en) 2019-03-19 2023-05-23 Airius Ip Holdings, Llc Air moving device
JP1644260S (zh) * 2019-03-20 2019-10-28
WO2020214729A1 (en) 2019-04-17 2020-10-22 Airius Ip Holdings, Llc Air moving device with bypass intake
USD931823S1 (en) * 2020-01-29 2021-09-28 Kokusai Electric Corporation Reaction tube
JP1731675S (zh) * 2022-05-30 2022-12-08
JP1731674S (zh) * 2022-05-30 2022-12-08
JP1731673S (zh) * 2022-05-30 2022-12-08

Also Published As

Publication number Publication date
USD711843S1 (en) 2014-08-26

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